Abstract A method of reducing a registration error is provided in which the registration error can be uniformly distributed even if an amount of displacement is larger than others at only one of a plurality of measuring points. According to the method, amounts of displacement are measured first at a plurality of measuring points, then one half the sum of the maximum value and the minimum value of the measured amounts of displacement is calculated to obtain a correction value. The correction value is fed back to an exposure apparatus as a correction value for an exposure condition setting file within the exposure apparatus used in an exposure step. The registration error can be distributed uniformly even if amounts of displacement at a plurality of measuring points are considerably different from each other.
A method of reducing a registration error in an exposure step during manufacturing a semiconductor device, comprising the steps of: calculating one half the sum of maximum and minimum values of amounts of displacement measured at a plurality of measuring points to obtain a correction value; and using said correction value as a correction value for an exposure condition setting file within an exposure apparatus employed in said exposure step.
Claim 2
Independent Claim
70 words
A method of reducing a registration error in an exposure step during manufacturing a semiconductor device, comprising the steps of: calculating one half the sum of maximum and minimum values of amounts of displacement measured at a plurality of measuring points to obtain a correction value; and using said correction value as a correction value for an exposure condition setting file within an exposure apparatus employed in said exposure step.
Claim 3
Dependent Claim
25 words
The method of reducing a registration error according to claim 1, wherein measuring points of said amounts of displacement is three or more in number.