Substrate temperature measurement by infrared spectroscopy

Claim 1

A method of determining the temperature of an infrared radiation scattering medium comprising: a) exposing an infrared scattering medium containing a liquid which contains different hydrogen bonding at different temperatures to infrared radiation, b) measuring reflected infrared radiation scattered by the medium, at different wavelengths, c) comparing the reflected radiation with calibrated values of reflected radiation and temperature, and d) evaluating the temperature of the medium from the comparison, wherein the different wavelengths comprise wavelengths for water between 900 and 1300 nm comprising a wavelength for free OH groups and a wavelength for hydrogen-bonded OH groups.

Claim 2

A method of determining the temperature of an infrared radiation scattering medium comprising: a) exposing an infrared scattering medium containing a liquid which contains different hydrogen bonding at different temperatures to infrared radiation, b) measuring reflected infrared radiation scattered by the medium, at different wavelengths, c) comparing the reflected radiation with calibrated values of reflected radiation and temperature, and d) evaluating the temperature of the medium from the comparison, wherein the different wavelengths comprise wavelengths for water between 900 and 1300 nm comprising a wavelength for free OH groups and a wavelength for hydrogen-bonded OH groups.

Claim 9

An apparatus for determining the temperature of an infrared radiation scattering medium comprising: i) a plurality of optical fibers effective to transmit infrared radiation from a source to a scattering medium and to transmit reflected scattered radiation from said scattering medium, ii) a source of infrared radiation operatively associated with said fibers for transmission of infrared radiation, iii) detector means adapted to receive reflected radiation for multiple wavelengths from said optical fibers and issue signals responsive thereto, iv) evaluating means for receiving said signals and determining the temperature of the scattering medium therefrom, said evaluating means being adapted to compare the received signals with signals corresponding to calibrated values of reflected radiation and temperature, and v) an endoscope, said plurality of optical fibers being associated with said endoscope wherein said detector comprises filters for said multiple wavelengths, said filters being for hydrogen bonding and free OH group wavelengths in the range of 900 to 1300 nm.

Claim 10

An apparatus for determining the temperature of an infrared radiation scattering medium comprising: i) a plurality of optical fibers effective to transmit infrared radiation from a source to a scattering medium and to transmit reflected scattered radiation from said scattering medium, ii) a source of infrared radiation operatively associated with said fibers for transmission of infrared radiation, iii) detector means adapted to receive reflected radiation for multiple wavelengths from said optical fibers and issue signals responsive thereto, iv) evaluating means for receiving said signals and determining the temperature of the scattering medium therefrom, said evaluating means being adapted to compare the received signals with signals corresponding to calibrated values of reflected radiation and temperature, and v) an endoscope, said plurality of optical fibers being associated with said endoscope wherein said detector comprises filters for said multiple wavelengths, said filters being for hydrogen bonding and free OH group wavelengths in the range of 900 to 1300 nm.