US5859274A
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Anhydrous mononuclear tris(β-diketonate) bismuth compositions for deposition of bismuth-containing films, and method of making the same
Assignee: Entegris Inc
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Filing: 1997-10-30
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Granted: 1999-01-12
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Expires: 2017-10-30
Abstract
Abstract Anhydrous mononuclear tris( beta -diketonato)bismuth complexes, useful as precursors for chemical vapor deposition of bismuth, for producing Bi-containing films of significantly improved stoichiometry, morphology and functional character, as compared to films obtained from dinuclear tris( beta -diketonato)bismuth complexes of the prior art.
Inventors
- 👤 Thomas H. Baum
- 👤 Gautam Bhandari
- 👤 Margaret Chappuis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:24
CPC Classifications
C; C07; C07F; C07F9/00; C07F9/94
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
3 words
Anhydrous mononuclear tris(β-diketonato)bismuth.
Claim 2
Dependent Claim
3 words
Anhydrous mononuclear tris(β-diketonato)bismuth.
Claim 3
Dependent Claim
24 words
An anhydrous mononuclear tris(β-diketonato)bismuth complex, wherein the β-diketonato ligand is selected from the group consisting of: 2,2,6,6-tetramethyl-3,5-heptanedionato; 1,1,1-trifluoro-2,4-pentanedionato; 1,1,1,5,5,5-hexafluoro-2,4-pentanedionato; 6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionato; 2,2,7-trimethyl-3,5-octanedionato; 1,1,1,5,5,6,6,7,7,7-decafluoro-2,4-heptanedionato; and 1,1,1-trifluoro-6-methyl-2,4-heptanedionato.
Claim 4
Dependent Claim
24 words
An anhydrous mononuclear tris(β-diketonato)bismuth complex, wherein the β-diketonato ligand is selected from the group consisting of: 2,2,6,6-tetramethyl-3,5-heptanedionato; 1,1,1-trifluoro-2,4-pentanedionato; 1,1,1,5,5,5-hexafluoro-2,4-pentanedionato; 6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionato; 2,2,7-trimethyl-3,5-octanedionato; 1,1,1,5,5,6,6,7,7,7-decafluoro-2,4-heptanedionato; and 1,1,1-trifluoro-6-methyl-2,4-heptanedionato.
Claim 5
Dependent Claim
3 words
Anhydrous mononuclear tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth.
Claim 6
Dependent Claim
3 words
Anhydrous mononuclear tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth.
Claim 7
Dependent Claim
9 words
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth having a melting point of about 139° C.
Claim 8
Dependent Claim
9 words
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth having a melting point of about 139° C.
Claim 9
Dependent Claim
10 words
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth having the x-ray crystallographic structure shown in FIG. 4.
Claim 10
Dependent Claim
10 words
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth having the x-ray crystallographic structure shown in FIG. 4.
Claim 11
Independent Claim
50 words
A method of synthesis of an anhydrous mononuclear tris (β-diketonato)bismuth complex, comprising reacting a corresponding Na(β-diketonato) compound with a Bi trihalide compound in an aprotic solvent medium under anaerobic conditions for sufficient time and at sufficient temperature to yield said anhydrous mononuclear tris (β-diketonato)bismuth complex as a reaction product thereof.
Claim 12
Independent Claim
50 words
A method of synthesis of an anhydrous mononuclear tris (β-diketonato)bismuth complex, comprising reacting a corresponding Na(β-diketonato) compound with a Bi trihalide compound in an aprotic solvent medium under anaerobic conditions for sufficient time and at sufficient temperature to yield said anhydrous mononuclear tris (β-diketonato)bismuth complex as a reaction product thereof.
Claim 13
Dependent Claim
28 words
A method according to claim 6, wherein the aprotic solvent medium comprises a solvent selected from the group consisting of alkanes, aliphatic ethers, cyclic ethers, and aryl compounds.
Claim 14
Dependent Claim
27 words
A method according to claim 6, wherein the aprotic solvent medium comprises a solvent selected from the group consisting of pentane, octane, decane, tetrahydrofuran, benzene and toluene.
Claim 15
Dependent Claim
28 words
A method according to claim 6, wherein the Na(β-diketonato) compound comprises a β-diketonato moiety selected from the group consisting of: 2,2,6,6-tetramethyl-3,5-heptanedionato; 1,1,1-trifluoro-2,4-pentanedionato; 1,1,1,5,5,5-hexafluoro-2,4-pentanedionato; 6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionato; 2,2,7-trimethyl-3,5-octanedionato; 1,1,1,5,5,6,6,7,7,7-decafluoro-2,4-heptanedionato; and 1,1,1-trifluoro-6-methyl-2,4-heptanedionato.
Claim 16
Dependent Claim
15 words
A method according to claim 6, wherein the Bi trihalide compound is BiCl 3 .
Claim 17
Independent Claim
23 words
A method of synthesis of anhydrous mononuclear tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth, comprising reaction of Na(2,2,6,6-tetramethyl-3,5-heptanedionato) and BiCl 3 in an aprotic solvent medium under anaerobic conditions.
Claim 18
Independent Claim
23 words
A method of synthesis of anhydrous mononuclear tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth, comprising reaction of Na(2,2,6,6-tetramethyl-3,5-heptanedionato) and BiCl 3 in an aprotic solvent medium under anaerobic conditions.
Claim 19
Dependent Claim
28 words
A method according to claim 11, wherein the aprotic solvent medium comprises a solvent selected from the group consisting of alkanes, aliphatic ethers, cyclic ethers, and aryl compounds.
Claim 20
Dependent Claim
27 words
A method according to claim 11, wherein the aprotic solvent medium comprises a solvent selected from the group consisting of pentane, octane, decane, tetrahydrofuran, benzene and toluene.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-01-11 | 2002-07-13 | 2003-01-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-11 | 2006-07-13 | 2007-01-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-11 | 2010-07-13 | 2011-01-12 | $7700.00 | Window Closed / Lapsed |