US5857882A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Processing of materials for uniform field emission
Assignee: National Technology and Engineering Solutions of Sandia LLC
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Filing: 1996-02-27
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Granted: 1999-01-12
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Expires: 2016-02-27
Abstract
Abstract This method produces a field emitter material having a uniform electron emitting surface and a low turn-on voltage. Field emitter materials having uniform electron emitting surfaces as large as 1 square meter and turn-on voltages as low as 16V/μm can be produced from films of electron emitting materials such as polycrystalline diamond, diamond-like carbon, graphite and amorphous carbon by the method of the present invention. The process involves conditioning the surface of a field emitter material by applying an electric field to the surface, preferably by scanning the surface of the field emitter material with an electrode maintained at a fixed distance of at least 3 μm above the surface of the field emitter material and at a voltage of at least 500V. In order to enhance the uniformity of electron emission the step of conditioning can be preceeded by ion implanting carbon, nitrogen, argon, oxygen or hydrogen into the surface layers of the field emitter material.
Inventors
- 👤 Lawrence S. Pam
- 👤 Thomas E. Felter
- 👤 Alec Talin
- 👤 Douglas Ohlberg
- 👤 Ciaran Fox
- 👤 Sung Han
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:13
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; H01J2201/00; H01J2201/30; H01J2201/304; H01J2201/30446; H01J2201/30453; H01J2201/30457
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
32 words
A method for creating field emitter materials having a substantially uniform electron emitting surface by the step of applying an electric field to the surface of an ion implanted field emitter material.
Claim 2
Independent Claim
32 words
A method for creating field emitter materials having a substantially uniform electron emitting surface by the step of applying an electric field to the surface of an ion implanted field emitter material.
Claim 3
Dependent Claim
20 words
The method of claim 1, wherein said field emitter material produced has a turn-on voltage of at least 16 V/μm.
Claim 4
Independent Claim
44 words
A method for improving the uniformity of electron emission and lowering the turn-on voltage of a field emitter material, comprising the step of conditioning said field emitter material by applying an electric field to a surface of a film of said field emitter material.
Claim 5
Independent Claim
44 words
A method for improving the uniformity of electron emission and lowering the turn-on voltage of a field emitter material, comprising the step of conditioning said field emitter material by applying an electric field to a surface of a film of said field emitter material.
Claim 6
Dependent Claim
28 words
The method of claim 3, wherein the field emitter material is selected from the group consisting of polycrystalline diamond, single crystal diamond, diamond-like carbon, graphite and amorphous carbon.
Claim 7
Dependent Claim
55 words
The method of claim 3, wherein the electric field is applied between an electrode maintained at a fixed distance above said field emitter material surface and wherein a voltage is applied between said electrode and said field emitter material surface wherein said electrode voltage is biased positive with respect to said field emitter material surface.
Claim 8
Dependent Claim
12 words
The method of claim 5, wherein the electrode includes a metal tip.
Claim 9
Dependent Claim
26 words
The method of claim 5, wherein the fixed distance is a distance of at least about 3 μm above the surface of the field emitter material.
Claim 10
Dependent Claim
13 words
The method of claim 5, wherein the voltage is at least 500 volts.
Claim 11
Dependent Claim
27 words
The method of claim 3, further including a step of ion implantion prior to the step of conditioning, whereby ions are implanted into the field emitter material.
Claim 12
Dependent Claim
25 words
The method of claim 9, wherein the implanted ions are selected from a group consisting of carbon, nitrogen, argon, oxygen, and hydrogen and combinations thereof.
Claim 13
Dependent Claim
37 words
The method of claim 10, wherein the ions are implanted into a surface of the field emitter material at a current of at least 40 microamps to a concentration of at least 10 16 /cm 2 .
Claim 14
Dependent Claim
29 words
The method of claim 9 further including the steps of: a) cleaning the implanted surface; and then b) annealing the cleaned implanted surface prior to the step of conditioning.
Claim 15
Dependent Claim
27 words
The method of claim 12, wherein said step of annealing comprises heating the cleaned implanted surface to a temperature of less than 350° C. in a vacuum.
Claim 16
Independent Claim
151 words
A method for preparing a diamond film having uniform electron emitting properties and a low turn-on voltage, comprising the steps of: a) forming a nucleation layer on a substrate, the nucleation layer having a high number density of areas where crystal nucleation can take place; b) depositing a polycrystalline diamond film onto the nucleation layer; c) implanting carbon ions into the surface of the polycrystalline diamond film; d) cleaning the implanted polycrystalline diamond film; e) annealing the cleaned polycrystalline diamond film; f) conditioning the annealed polycrystalline diamond film, by scanning the surface of the annealed polycrystalline diamond film with an electrode, wherein a constant positive voltage of at least about 500 V is applied between the electrode and the annealed, implanted surface of the polycrystalline diamond film and wherein the electrode is maintained at a constant distance of at least about 3 μm above the surface of the polycrystalline diamond film.
Claim 17
Independent Claim
151 words
A method for preparing a diamond film having uniform electron emitting properties and a low turn-on voltage, comprising the steps of: a) forming a nucleation layer on a substrate, the nucleation layer having a high number density of areas where crystal nucleation can take place; b) depositing a polycrystalline diamond film onto the nucleation layer; c) implanting carbon ions into the surface of the polycrystalline diamond film; d) cleaning the implanted polycrystalline diamond film; e) annealing the cleaned polycrystalline diamond film; f) conditioning the annealed polycrystalline diamond film, by scanning the surface of the annealed polycrystalline diamond film with an electrode, wherein a constant positive voltage of at least about 500 V is applied between the electrode and the annealed, implanted surface of the polycrystalline diamond film and wherein the electrode is maintained at a constant distance of at least about 3 μm above the surface of the polycrystalline diamond film.
Claim 18
Dependent Claim
23 words
The method of claim 14, wherein a bias voltage of at least -200 V is applied to the substrate during the nucleation step.
Claim 19
Dependent Claim
12 words
The method of claim 14, wherein the substrate is a silicon wafer.
Claim 20
Dependent Claim
26 words
The method of claim 14, wherein the polycrystalline diamond film is at least 1 μm thick and is composed of diamond crystals about 200 nm wide.
Claim 21
Dependent Claim
29 words
The method of claim 14, wherein the carbon ions are implanted to a concentration of at least 10 16 /cm 2 at a beam current of about 80 μA.
Claim 22
Dependent Claim
22 words
The method of claim 14, wherein scanning comprises moving the electrode in incremental steps across the surface of the polycrystalline diamond film.
Claim 23
Dependent Claim
15 words
The method of claim 19, wherein the incremental steps are steps of about 20 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-01-11 | 2002-07-13 | 2003-01-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-11 | 2006-07-13 | 2007-01-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-11 | 2010-07-13 | 2011-01-12 | $7700.00 | Window Closed / Lapsed |