US5856923A
Expired / Lapsed
US
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Method for continuous, non lot-based integrated circuit manufacturing
Assignee: Micron Technology Inc
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Filing: 1997-03-24
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Granted: 1999-01-05
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Expires: 2017-03-24
Abstract
Abstract An inventive method for continuous, non lot-based manufacturing of integrated circuit (IC) devices of the type to each have a unique fuse identification (ID) includes: reading the fuse ID of each of the IC devices; advancing multiple lots of the IC devices through, for example, a test step in the manufacturing process in a substantially continuous manner; generating data, such as test data, related to the advancement of each of the IC devices through the step in the process; and associating the data generated for each of the IC devices with the fuse ID of its associated IC device. By associating the data with the fuse ID's, the inventive method allows the IC devices to be tracked through the step in the process. Further, because multiple lots of the IC devices can advance through the step in the process continuously, manufacturing resources are used more efficiently. In addition, because the fuse ID's and associated data read and generated using the inventive method need not physically accompany IC devices as they progress through the manufacturing process, the inventive method is more reliable than conventional tracking procedures.
Inventors
- 👤 Mark L. Jones
- 👤 Gregory A. Barnett
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 00:25
CPC Classifications
G; G05; G05B; G05B19/00; G05B19/02; G05B19/04; G05B19/12; G05B19/128; G01; G01R; G01R31/00; G01R31/28; G01R31/317; G01R31/31718; G06; G06F; G06F11/00; G06F11/006; H; H10; H10D; H10D89/00; H10D89/10; G05B2219/00; G05B2219/30; G05B2219/31; G05B2219/31296; G05B2219/45; G05B2219/45026; H10W; H10W46/00; H10W46/401; H10W46/403; Y; Y02; Y02P; Y02P90/00; Y02P90/02
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
128 words
A method in an integrated circuit (IC) device manufacturing process for tracking multiple lots of IC devices through a step in the process, the method comprising: providing each of the IC devices with a substantially unique identification (ID) code; reading the ID code of each of the IC devices in each of the multiple lots; advancing the IC devices in the multiple lots through the step in the manufacturing process in a substantially continuous manner; generating data related to the advancement of each of the IC devices through the step in the process; and associating the data generated for each of the IC devices with the ID code of its associated IC device so the multiple lots of IC devices can tracked through the step in the process.
Claim 2
Independent Claim
128 words
A method in an integrated circuit (IC) device manufacturing process for tracking multiple lots of IC devices through a step in the process, the method comprising: providing each of the IC devices with a substantially unique identification (ID) code; reading the ID code of each of the IC devices in each of the multiple lots; advancing the IC devices in the multiple lots through the step in the manufacturing process in a substantially continuous manner; generating data related to the advancement of each of the IC devices through the step in the process; and associating the data generated for each of the IC devices with the ID code of its associated IC device so the multiple lots of IC devices can tracked through the step in the process.
Claim 3
Dependent Claim
47 words
The method of claim 1 wherein each of the IC devices is programmed with a substantially unique, electrically retrievable ID code, wherein the step of reading the ID code of each of the IC devices comprises electrically retrieving the ID code of each of the IC devices.
Claim 4
Dependent Claim
44 words
The method of claim 1 wherein each of the IC devices is programmed with a unique fuse ID, wherein the step of reading the ID code of each of the IC devices comprises reading the fuse ID programmed into each of the IC devices.
Claim 5
Dependent Claim
48 words
The method of claim 1 wherein the step in the IC device manufacturing process comprises an assembly step, wherein the step of advancing the IC devices in the multiple lots through the step in the IC device manufacturing process comprises advancing the IC devices through the assembly step.
Claim 6
Dependent Claim
48 words
The method of claim 1 wherein the step in the IC device manufacturing process comprises a test step, wherein the step of advancing the IC devices in the multiple lots through the step in the IC device manufacturing process comprises advancing the IC devices through the test step.
Claim 7
Dependent Claim
37 words
The method of claim 1 wherein the step of reading the ID code of each of the IC devices occurs before the step of advancing the IC devices through the step in the IC device manufacturing process.
Claim 8
Dependent Claim
37 words
The method of claim 1 wherein the step of advancing the IC devices through the step in the manufacturing process comprises advancing the IC devices serially through multiple machines associated with the step in the manufacturing process.
Claim 9
Dependent Claim
36 words
The method of claim 1 wherein the step of advancing the IC devices through the step in the manufacturing process comprises advancing the IC devices through parallel machines associated with the step in the manufacturing process.
Claim 10
Dependent Claim
53 words
The method of claim 1 wherein the step of generating data related to the advancement of each of the IC devices through the step in the process comprises generating data selected from a group comprising processing equipment data, processing personnel data, processing set-up data, time and date data, yield data, and test data.
Claim 11
Dependent Claim
66 words
The method of claim 1 further comprising the step of storing the ID code of each of the IC devices, wherein the step of associating the data generated for each of the IC devices with the ID code of its associated IC device comprises storing the data generated for each of the IC devices in association with the stored ID code of its associated IC device.
Claim 12
Dependent Claim
61 words
The method of claim 1 wherein each of the IC devices has an associated lot ID, wherein the step of associating the data generated for each of the IC devices with the ID code of its associated IC device comprises storing the data generated for each of the IC devices in association with the lot ID of its associated IC device.
Claim 13
Independent Claim
136 words
A method in an integrated circuit (IC) device manufacturing process for tracking multiple lots of IC devices through back-end test steps in the process, the method comprising: programming each of the IC devices with a unique fuse identification (ID); for each of the back-end test steps, reading the fuse ID of each of the IC devices in each of the multiple lots; advancing the IC devices in the multiple lots through the back-end test steps in the manufacturing process in a substantially continuous manner; generating data related to the advancement of each of the IC devices through the back-end test steps; and associating the data generated for each of the IC devices with the fuse ID of its associated IC device so the multiple lots of IC devices can be tracked through the back-end test steps.
Claim 14
Independent Claim
136 words
A method in an integrated circuit (IC) device manufacturing process for tracking multiple lots of IC devices through back-end test steps in the process, the method comprising: programming each of the IC devices with a unique fuse identification (ID); for each of the back-end test steps, reading the fuse ID of each of the IC devices in each of the multiple lots; advancing the IC devices in the multiple lots through the back-end test steps in the manufacturing process in a substantially continuous manner; generating data related to the advancement of each of the IC devices through the back-end test steps; and associating the data generated for each of the IC devices with the fuse ID of its associated IC device so the multiple lots of IC devices can be tracked through the back-end test steps.
Claim 15
Independent Claim
184 words
A method of manufacturing integrated circuit (IC) devices from semiconductor wafers, the method comprising: providing a plurality of semiconductor wafers in multiple lots; fabricating a plurality of IC's on each of the wafers; causing each of the IC's on each of the wafers to permanently store a substantially unique identification (ID) code; separating each of the IC's on each of the wafers from its wafer to form one of a plurality of IC dice; assembling each of the IC dice into an IC device; reading the ID code from the IC in each of the IC devices; testing each of the IC devices; while testing the IC devices: advancing the IC devices from the multiple lots of semiconductor wafers through at least one test step in a substantially continuous manner; generating data related to the advancement of each of the IC devices through the test step; and associating the data generated for each of the IC devices with the ID code of the IC in its associated IC device so the IC devices from the multiple lots can be tracked through the test step.
Claim 16
Independent Claim
184 words
A method of manufacturing integrated circuit (IC) devices from semiconductor wafers, the method comprising: providing a plurality of semiconductor wafers in multiple lots; fabricating a plurality of IC's on each of the wafers; causing each of the IC's on each of the wafers to permanently store a substantially unique identification (ID) code; separating each of the IC's on each of the wafers from its wafer to form one of a plurality of IC dice; assembling each of the IC dice into an IC device; reading the ID code from the IC in each of the IC devices; testing each of the IC devices; while testing the IC devices: advancing the IC devices from the multiple lots of semiconductor wafers through at least one test step in a substantially continuous manner; generating data related to the advancement of each of the IC devices through the test step; and associating the data generated for each of the IC devices with the ID code of the IC in its associated IC device so the IC devices from the multiple lots can be tracked through the test step.
Claim 17
Dependent Claim
64 words
The method of claim 13 wherein the step of fabricating a plurality of IC's on each of the wafers comprises fabricating IC's of different types selected from a group comprising Dynamic Random Access Memory (DRAM) IC's, Static Random Access Memory (SRAM) IC's, Synchronous DRAM (SDRAM) IC's, processor IC's, Application Specific IC's (ASIC's), Read Only Memory (ROM) IC's, and Electrically Erasable Programmable ROM (EEPROM) IC's.
Claim 18
Dependent Claim
45 words
The method of claim 13 wherein the step of causing each of the IC's on each of the wafers to permanently store a substantially unique ID code comprises programming each of the IC's on each of the wafers to permanently store a unique fuse ID.
Claim 19
Dependent Claim
67 words
The method of claim 15 wherein the step of programming each of the IC's on each of the wafers to permanently store a unique fuse ID comprises programming at least one of fuses and anti-fuses in each of the IC's on each of the wafers to permanently store a unique fuse ID which indicates a lot ID, work week, wafer ID, die location, and fabrication facility ID.
Claim 20
Dependent Claim
50 words
The method of claim 13 wherein the step of assembling each of the IC dice into an IC device comprises assembling each of the IC dice into an IC device selected from a group comprising a lead frame IC device, a Chip-On-Board (COB) IC device, and a flip-chip IC device.
Claim 21
Dependent Claim
25 words
The method of claim 13 wherein the step of testing each of the IC devices comprises the test steps of speed grading, burn-in, and final.
Claim 22
Dependent Claim
95 words
The method of claim 13 wherein the step of generating data related to the advancement of each of the IC devices through the test step comprises generating data identifying test steps the IC devices have progressed through and pass/fail results for those test steps, wherein the method further comprises the step of affirming that the IC devices have progressed through and passed the identified test steps before advancing the IC devices through at least one test step subsequent to the at least one test step the IC devices progress through in a substantially continuous manner.
Claim 23
Dependent Claim
22 words
The method of claim 13 further comprising the step of holding some of the IC devices in accordance with their ID codes.
Claim 24
Independent Claim
179 words
A method in an integrated circuit (IC) device manufacturing process for correlating variables related to the process with variables related to the performance of IC devices as they advance through the process, the method comprising: providing a plurality of IC devices from multiple lots with permanently stored, substantially unique identification (ID) codes; reading the ID code from each of the IC devices; advancing the IC devices from the multiple lots through at least one step in the manufacturing process in a substantially continuous manner; while the IC devices advance through the step in the manufacturing process, generating data related to process variables associated with the step in the process; generating data related to variables associated with the performance of at least some of the IC devices as they advance through at least one step in the manufacturing process; and associating the process variable-related data and the performance variable-related data generated for each of the IC devices with the ID code of the IC device associated with the data in order to correlate the process variables with the performance variables.
Claim 25
Independent Claim
179 words
A method in an integrated circuit (IC) device manufacturing process for correlating variables related to the process with variables related to the performance of IC devices as they advance through the process, the method comprising: providing a plurality of IC devices from multiple lots with permanently stored, substantially unique identification (ID) codes; reading the ID code from each of the IC devices; advancing the IC devices from the multiple lots through at least one step in the manufacturing process in a substantially continuous manner; while the IC devices advance through the step in the manufacturing process, generating data related to process variables associated with the step in the process; generating data related to variables associated with the performance of at least some of the IC devices as they advance through at least one step in the manufacturing process; and associating the process variable-related data and the performance variable-related data generated for each of the IC devices with the ID code of the IC device associated with the data in order to correlate the process variables with the performance variables.
Claim 26
Dependent Claim
44 words
The method of claim 21 wherein the step of generating data related to process variables associated with the step in the process comprises generating data related to process variables selected from a group comprising processing equipment, processing personnel, processing set-up, and time and date.
Claim 27
Dependent Claim
54 words
The method of claim 21 wherein the step of generating data related to variables associated with the performance of at least some of the IC devices as they advance through at least one step in the manufacturing process comprises generating data related to performance variables selected from a group comprising yield and test results.
Claim 28
Dependent Claim
63 words
The method of claim 21 wherein the step of providing each of the plurality of IC devices from multiple lots with a permanently stored, substantially unique ID code comprises programming each of the plurality of IC devices to permanently store a unique fuse ID which specifies a lot ID, work week, wafer ID, die location, and fabrication facility ID for the IC device.
Claim 29
Independent Claim
183 words
A method of manufacturing Single In-line Memory Modules (SIMM's) from semiconductor wafers, the method comprising: providing a plurality of semiconductor wafers in multiple lots; fabricating a plurality of IC's on each of the wafers; causing each of the IC's on each of the wafers to permanently store a substantially unique identification (ID) code; separating each of the IC's on each of the wafers from its wafer to form one of a plurality of IC dice; assembling a plurality of SIMM's from the IC dice; reading the ID codes from the IC dice in each of the SIMM's; testing each of the IC dice in each of the SIMM's; while testing the IC dice: advancing the IC dice and the SIMM's through at least one test step in a substantially continuous manner; generating data related to the advancement of the IC dice through the test step; and associating the data generated for each of the IC dice with the ID code of the IC in its associated IC die so the IC dice from the multiple lots can be tracked through the test step.
Claim 30
Independent Claim
183 words
A method of manufacturing Single In-line Memory Modules (SIMM's) from semiconductor wafers, the method comprising: providing a plurality of semiconductor wafers in multiple lots; fabricating a plurality of IC's on each of the wafers; causing each of the IC's on each of the wafers to permanently store a substantially unique identification (ID) code; separating each of the IC's on each of the wafers from its wafer to form one of a plurality of IC dice; assembling a plurality of SIMM's from the IC dice; reading the ID codes from the IC dice in each of the SIMM's; testing each of the IC dice in each of the SIMM's; while testing the IC dice: advancing the IC dice and the SIMM's through at least one test step in a substantially continuous manner; generating data related to the advancement of the IC dice through the test step; and associating the data generated for each of the IC dice with the ID code of the IC in its associated IC die so the IC dice from the multiple lots can be tracked through the test step.
Claim 31
Independent Claim
183 words
A method of manufacturing Dual In-line Memory Modules (DIMM's) from semiconductor wafers, the method comprising: providing a plurality of semiconductor wafers in multiple lots; fabricating a plurality of IC's on each of the wafers; causing each of the IC's on each of the wafers to permanently store a substantially unique identification (ID) code; separating each of the IC's on each of the wafers from its wafer to form one of a plurality of IC dice; assembling a plurality of DIMM's from the IC dice; reading the ID codes from the IC dice in each of the DIMM's; testing each of the IC dice in each of the DIMM's; while testing the IC dice: advancing the IC dice and the DIMM's through at least one test step in a substantially continuous manner; generating data related to the advancement of the IC dice through the test step; and associating the data generated for each of the IC dice with the ID code of the IC in its associated IC die so the IC dice from the multiple lots can be tracked through the test step.
Claim 32
Independent Claim
183 words
A method of manufacturing Dual In-line Memory Modules (DIMM's) from semiconductor wafers, the method comprising: providing a plurality of semiconductor wafers in multiple lots; fabricating a plurality of IC's on each of the wafers; causing each of the IC's on each of the wafers to permanently store a substantially unique identification (ID) code; separating each of the IC's on each of the wafers from its wafer to form one of a plurality of IC dice; assembling a plurality of DIMM's from the IC dice; reading the ID codes from the IC dice in each of the DIMM's; testing each of the IC dice in each of the DIMM's; while testing the IC dice: advancing the IC dice and the DIMM's through at least one test step in a substantially continuous manner; generating data related to the advancement of the IC dice through the test step; and associating the data generated for each of the IC dice with the ID code of the IC in its associated IC die so the IC dice from the multiple lots can be tracked through the test step.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-01-04 | 2002-07-06 | 2003-01-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-04 | 2006-07-06 | 2007-01-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-04 | 2010-07-06 | 2011-01-05 | $7700.00 | Window Closed / Lapsed |