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US5847631A Expired / Lapsed US ⏱️ 0.0 years remaining

Magnetic relay system and method capable of microfabrication production

Assignee: Georgia Tech Research Corp
•
Filing: 1996-09-30
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Granted: 1998-12-08
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Expires: 2016-09-30
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Abstract

Abstract A magnetic relay system is implemented to act as a relay driven by a magnetic flux yet capable of production through micromachining. The magnetic relay system has an electromagnet, a movable plate, and conductive contacts. The contacts are connected to the circuits of outside electrical systems that are to be controlled by the switching of the relay system. The plate is movable allowing it to engage both contacts and allow current flow between the contacts or to disengage both contacts and prevent current flow between the contacts. The electromagnet provides a sufficient magnetic flux at desired times to move the movable plate and thereby controls whether the movable plate is engaged with the contacts. The electromagnet, movable plate, and the conductive contacts may be formed on a substrate capable of construction using microfabrication techniques.

Inventors

  • 👤 William P. Taylor
  • 👤 Mark G. Allen

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 10:23
CPC Classifications
H; H01; H01H; H01H51/00; H01H51/22; H01H50/00; H01H50/005; H01H1/00; H01H1/0036; H01H2001/0042; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49105

Claims Analysis

Total Claims: 42
Claim 1
Independent Claim 75 words
A micromachined magnetic relay system comprising: an electromagnet formed on a substrate, said electromagnet having a conductive coil; a movable plate positioned within the effects of an electromagnetic flux produced by said electromagnet such that said movable plate moves along a path in a predetermined direction when said electromagnetic flux exists; and a conductive contact positioned within said path of movement of said movable plate, wherein said conductive coil is fully formed through microfabrication techniques.
Claim 2
Dependent Claim 75 words
A micromachined magnetic relay system comprising: an electromagnet formed on a substrate, said electromagnet having a conductive coil; a movable plate positioned within the effects of an electromagnetic flux produced by said electromagnet such that said movable plate moves along a path in a predetermined direction when said electromagnetic flux exists; and a conductive contact positioned within said path of movement of said movable plate, wherein said conductive coil is fully formed through microfabrication techniques.
Claim 3
Dependent Claim 24 words
The system of claim 1, wherein said electromagnet further comprises: a magnetic core having a groove; and a conductive coil passing through said groove.
Claim 4
Dependent Claim 23 words
The system of claim 1, wherein said electromagnet further comprises; a center magnetic core; and a conductive coil spiraling around said magnetic core.
Claim 5
Dependent Claim 14 words
The system of claim 1, wherein said predetermined direction is away from said electromagnet.
Claim 6
Dependent Claim 13 words
The system of claim 1, wherein said predetermined direction is toward said electromagnet.
Claim 7
Dependent Claim 15 words
The system of claim 1, wherein said movable plate is formed on a second substrate.
Claim 8
Dependent Claim 14 words
The system of claim 1, wherein said movable plate is formed on said substrate.
Claim 9
Dependent Claim 30 words
The system of claim 1, further comprising a permanent magnet positioned so that a permanent magnetic flux produced by said permanent magnet counteracts said electromagnetic flux produced by said electromagnet.
Claim 10
Dependent Claim 30 words
The system of claim 1, further comprising a permanent magnet positioned so that a permanent magnetic flux produced by said permanent magnet reinforces said magnetic flux produced by said electromagnet.
Claim 11
Dependent Claim 27 words
The system of claim 1, further comprising an attaching means configured to hold said magnetic plate in a predetermined position when said magnetic flux does not exist.
Claim 12
Dependent Claim 19 words
The system of claim 1, wherein said conductive contact comprises a plurality of conductive contacts separated by an insulator.
Claim 13
Dependent Claim 15 words
The system of claim 1, wherein said movable plate comprises a plurality of movable plates.
Claim 14
Dependent Claim 12 words
The system of claim 1, wherein said movable plate is mechanically deformed.
Claim 15
Dependent Claim 18 words
The system of claim 1, further comprising an insulator coupled to said magnetic core and said conductive contact.
Claim 16
Dependent Claim 24 words
The system of claim 1, wherein at least one of said electromagnet, said movable plate, or said conductive contact is formed via screen printing.
Claim 17
Dependent Claim 18 words
The system of claim 2, further comprising an insulator coupled to said magnetic core and said conductive coil.
Claim 18
Dependent Claim 24 words
The system of claim 3, further comprising a side magnetic core encircling said conductive coil on a side opposite that of said magnetic core.
Claim 19
Independent Claim 94 words
A method for producing a micromachined magnetic relay, comprising the steps of: forming an electromagnet; generating an electromagnetic flux from said electromagnet; positioning a movable plate within an effect of said electromagnetic flux; varying said electromagnetic flux to an amount sufficient for moving said movable plate in a predetermined direction; and positioning a conductive contact within a path of movement of said movable plate, wherein said forming step includes the step of forming a conductive coil via microfabrication techniques and said generating step includes the step of passing electrical current through said conductive coil.
Claim 20
Independent Claim 94 words
A method for producing a micromachined magnetic relay, comprising the steps of: forming an electromagnet; generating an electromagnetic flux from said electromagnet; positioning a movable plate within an effect of said electromagnetic flux; varying said electromagnetic flux to an amount sufficient for moving said movable plate in a predetermined direction; and positioning a conductive contact within a path of movement of said movable plate, wherein said forming step includes the step of forming a conductive coil via microfabrication techniques and said generating step includes the step of passing electrical current through said conductive coil.
Claim 21
Dependent Claim 17 words
The method of claim 18, further comprising the step of forming said electromagnet on a first substrate.
Claim 22
Dependent Claim 24 words
The method of claim 18, further comprising the following steps: coupling an insulator to said electromagnet; and coupling said conductive contact to said insulator.
Claim 23
Dependent Claim 24 words
The method of claim 18, further comprising the step of passing said conductive coil through a groove of magnetic material to form said electromagnet.
Claim 24
Dependent Claim 27 words
The method of claim 19, further comprising the step of forming said movable plate on a second substrate and bonding said first substrate to said second substrate.
Claim 25
Dependent Claim 53 words
The method of claim 18, further comprising the following steps: forming a sacrificial layer on a substrate and connecting said sacrificial layer to said contact and said electromagnet; forming said movable plate on said substrate and detachably connecting said movable plate to said sacrificial layer; and removing said sacrificial layer from said substrate.
Claim 26
Dependent Claim 13 words
The method of claim 19, wherein said substrate is comprised of magnetic material.
Claim 27
Dependent Claim 76 words
A fully integrated magnetic relay system, formed through microfabrication techniques, comprising: an electromagnet for generating an electromagnetic flux; a movable plate positioned within an effect of said electromagnetic flux; and a conductive contact positioned within a path of movement of said movable plate, whereby said movable plate moves along said path of movement in a direction toward said conductive contact and engages said conductive contact in response to a change in strength of said electromagnetic flux.
Claim 28
Dependent Claim 76 words
A fully integrated magnetic relay system, formed through microfabrication techniques, comprising: an electromagnet for generating an electromagnetic flux; a movable plate positioned within an effect of said electromagnetic flux; and a conductive contact positioned within a path of movement of said movable plate, whereby said movable plate moves along said path of movement in a direction toward said conductive contact and engages said conductive contact in response to a change in strength of said electromagnetic flux.
Claim 29
Dependent Claim 24 words
The system of claim 25, wherein said electromagnet further comprises: a magnetic core having a groove; and a conductive coil passing through said groove.
Claim 30
Dependent Claim 26 words
The system of claim 25, wherein said electromagnet further comprises: a magnetic core coupled to a base; and a conductive coil spiraling around said magnetic core.
Claim 31
Dependent Claim 16 words
The system of claim 25, wherein said bottom surface of said conductive contact is an insulator.
Claim 32
Dependent Claim 54 words
A magnetic relay system capable of production by microfabrication techniques, comprising: a permanent magnet; a movable plate detachably connected to a conductive contact; and a means for removing said movable plate from said conductive contact, said removing means including a fully integrated electromagnet configured to produce an electromagnetic flux for moving said movable plate.
Claim 33
Dependent Claim 54 words
A magnetic relay system capable of production by microfabrication techniques, comprising: a permanent magnet; a movable plate detachably connected to a conductive contact; and a means for removing said movable plate from said conductive contact, said removing means including a fully integrated electromagnet configured to produce an electromagnetic flux for moving said movable plate.
Claim 34
Dependent Claim 22 words
The system of claim 1, wherein said electromagnet, said movable plate and said conductive contact are fully integrated with said microfabricated base.
Claim 35
Dependent Claim 13 words
The system of claim 1, wherein said conductive coil is formed through electroforming.
Claim 36
Dependent Claim 13 words
The system of claim 1, wherein said conductive coil is formed through photolithograhy.
Claim 37
Dependent Claim 16 words
The system of claim 1, wherein said conductive coil is formed through electronic packaging fabrication techniques.
Claim 38
Dependent Claim 11 words
The system of claim 1, wherein said conductive coil is planar.
Claim 39
Dependent Claim 13 words
The system of claim 1, wherein said magnetic relay system is fully integrated.
Claim 40
Dependent Claim 18 words
The system of claim 19, further including the step of forming said movable plate on said first substrate.
Claim 41
Dependent Claim 17 words
The system of claim 25, wherein said electromagnet includes a conductive coil fully formed through microfabrication techniques.
Claim 42
Dependent Claim 15 words
The system of claim 25, wherein a conductive coil associated with said electromagnet is planar.

References Cited (Backward Citations)

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US5398011A Cited
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US5454904A Cited
US5479042A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-12-07 2002-06-08 2002-12-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-12-07 2006-06-08 2006-12-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-12-07 2010-06-08 2010-12-08 $7700.00 Window Closed / Lapsed

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