US5846893A
Expired / Lapsed
US
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Thin film ferroelectric composites and method of making
Assignee: United States Department of the Army
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Filing: 1995-12-08
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Granted: 1998-12-08
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Expires: 2015-12-08
Abstract
Abstract A thin film composite material comprises barium strontium titanate represented as Ba 1-x Sr x TiO 3 wherein x is greater than 0.0 but less than or equal to 0.75 and a magnesia-based compound such as MgZrO 3 , MgTiO 3 , MgAl 2 O 4 and mixtures thereof. The thin film ferroelectric composite is made using pulsed laser deposition and exhibits high tunability, low loss and a low dielectric constant.
Inventors
- 👤 Somnath Sengupta
- 👤 Louise Sengupta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:17
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C04; C04B; C04B35/00; C04B35/01; C04B35/46; C04B35/462; C04B35/465; C04B35/622; C04B35/62222; C23C14/06; C23C14/08; H; H01; H01Q; H01Q3/00; H01Q3/44
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
85 words
A thin film ferrolectric composite material comprising: barium strontium titanate, said barium strontium titanate represented as Ba 1-x Sr x TiO 3 , wherein x is greater then 0.0 but less than or equal to 0.75; and a magnesia-based compound: wherein the weight ratio of said barium strontium titanate and said magnesia based compound ranges from approximately 99%-40% barium strontium titanate to approximately 1%-60% magnesia based compound in effective amounts to provide a composite having a low dielectric constant, low loss tangent and high tunability.
Claim 2
Dependent Claim
85 words
A thin film ferrolectric composite material comprising: barium strontium titanate, said barium strontium titanate represented as Ba 1-x Sr x TiO 3 , wherein x is greater then 0.0 but less than or equal to 0.75; and a magnesia-based compound: wherein the weight ratio of said barium strontium titanate and said magnesia based compound ranges from approximately 99%-40% barium strontium titanate to approximately 1%-60% magnesia based compound in effective amounts to provide a composite having a low dielectric constant, low loss tangent and high tunability.
Claim 3
Dependent Claim
26 words
The thin film ferroelectric composite material of claim 1, wherein said barium strontium titanate is Ba 1-x Sr x TiO 3 , wherein x=0.35 to 0.40.
Claim 4
Dependent Claim
33 words
The thin film composite material of claim 1, wherein said magnesia based compound is selected from the group consisting of MgZrO 3 , MgTiO 3 , MgAl 2 O 4 , mixtures thereof.
Claim 5
Dependent Claim
13 words
The thin film of claim 3, wherein said compound is MgTiO 3 .
Claim 6
Dependent Claim
13 words
The thin film of claim 3, wherein said compound is MgZrO 3 .
Claim 7
Dependent Claim
15 words
The thin film of claim 3, wherein said compound is MgAl 2 O 4 .
Claim 8
Independent Claim
131 words
A method of making a thin film ferrolectric composite material comprising the steps of: a) providing at least one ceramic disc as an oblation target of a composition comprising barium strontium titanate, said barium strontium titanate represented as Ba 1-x Sr x TiO 3 , wherein x is greater than 0.0 but less than or equal to 0.75; and a magnesia based compound, wherein the weight ratio of said barium strontium titanate and to said magnesia-based compounds ranges from 99-40% barium strontium titanate to approximately 1-60% magnesia based compounds (are present) in an effective amount to provide a composite having a low dielectric constant, low loss tangent and a high tunability b) providing a substrate; and c) depositing a thin film of said composition on said substrate using a pulsed laser.
Claim 9
Independent Claim
131 words
A method of making a thin film ferrolectric composite material comprising the steps of: a) providing at least one ceramic disc as an oblation target of a composition comprising barium strontium titanate, said barium strontium titanate represented as Ba 1-x Sr x TiO 3 , wherein x is greater than 0.0 but less than or equal to 0.75; and a magnesia based compound, wherein the weight ratio of said barium strontium titanate and to said magnesia-based compounds ranges from 99-40% barium strontium titanate to approximately 1-60% magnesia based compounds (are present) in an effective amount to provide a composite having a low dielectric constant, low loss tangent and a high tunability b) providing a substrate; and c) depositing a thin film of said composition on said substrate using a pulsed laser.
Claim 10
Dependent Claim
30 words
The method of claim 7 wherein said magnesia based compound is selected from the group consisting of MgZrO 3 , MgTiO 3 , MgAl 2 O 4 and mixtures thereof.
Claim 11
Dependent Claim
12 words
The method of claim 8, wherein said compound is MgTiO 3 .
Claim 12
Dependent Claim
12 words
The method of claim 8, wherein said compound is MgZrO 3 .
Claim 13
Dependent Claim
14 words
The method of claim 8, wherein said compound is MgAl 2 O 4 .
Claim 14
Dependent Claim
15 words
The method of claim 7 wherein said pulsed laser is a krypton fluoride excimer laser.
Claim 15
Dependent Claim
26 words
The method of claim 8 wherein said substrate is at a temperature of 450° C. and a distance between the substrate and target is 50 mm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-12-07 | 2002-06-08 | 2002-12-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-12-07 | 2006-06-08 | 2006-12-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-12-07 | 2010-06-08 | 2010-12-08 | $7700.00 | Window Closed / Lapsed |