Exposure apparatus and method that use mark patterns to determine image formation characteristics of the apparatus prior to exposure

Claim 2

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, comprising: a photoelectric detector, including a light-receiving section provided on the substrate stage, for photoelectrically detecting an image of a mark pattern on the mask; and a combining system for combining signals outputted from the photoelectric detector during a period in which the light-receiving section is scanned across the exposure area in synchronization with scanning for the mark pattern across the illumination area; wherein a position of the image of the mark pattern is detected on the basis of an output of the combining system.

Claim 3

The scanning type exposure apparatus according to claim 1, further comprising an alignment system for illuminating an alignment mark on the photosensitive substrate, receiving a reflected light beam from the alignment mark, and detecting a position or a positional discrepancy thereof, wherein a difference between the detected position of the image of the mark pattern and a light-irradiating position of the alignment system is used as a base line of the alignment system.

Claim 4

The scanning type exposure apparatus according to claim 2, further comprising a detector for detecting at least one of a position and an amount of rotation of the image of the pattern on the mask on the basis of positions or positional discrepancies of respective images of a plurality of mark patterns on the mask, wherein a result of detection obtained by the detector is used to perform alignment for the mask and the photosensitive substrate.

Claim 5

The scanning type exposure apparatus according to claim 1, further comprising a computing unit for calculating image formation characteristics of the projection optical system on the basis of positions of respective images of a plurality of mark patterns on the mask.

Claim 6

The scanning type exposure apparatus according to claim 4, further comprising a correcting system for correcting the image formation characteristics of the projection optical system in accordance with a result of calculation by the computing unit.

Claim 7

The scanning type exposure apparatus according to claim 5, wherein the correcting system is a stage controller for controlling scanning velocities or scanning directions of the mask stage and the substrate stage.

Claim 8

The scanning type exposure apparatus according to claim 1, wherein the photoelectric detector comprises an image pickup element having its light-receiving surface arranged in a plane substantially conjugate to the light-receiving section, and a magnifying optical system for magnifying the image of the mark pattern and forming an image on the light-receiving surface.

Claim 9

A method for producing microdevices by utilizing the scanning type exposure apparatus as defined in claim 1 so as to project an image of a pattern on the mask onto the photosensitive substrate.

Claim 10

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, comprising: a photoelectric detector, including a light-receiving section arranged on the substrate stage, for photoelectrically detecting an image of a mark pattern on the mask; a combining system for combining signals outputted from the photoelectric detector during a period in which the light-receiving section is scanned across the exposure area in synchronization with scanning for the mark pattern across the illumination area; and a computing unit for calculating an image formation state of the image of the mark pattern on the basis of an output of the combining system.

Claim 11

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, comprising: a photoelectric detector, including a light-receiving section arranged on the substrate stage, for photoelectrically detecting an image of a mark pattern on the mask; a combining system for combining signals outputted from the photoelectric detector during a period in which the light-receiving section is scanned across the exposure area in synchronization with scanning for the mark pattern across the illumination area; and a computing unit for calculating an image formation state of the image of the mark pattern on the basis of an output of the combining system.

Claim 12

The scanning type exposure apparatus according to claim 9, further comprising a correcting system for correcting image formation characteristics of the projection optical system in accordance with a result of calculation by the computing unit.

Claim 13

The scanning type exposure apparatus according to claim 10, wherein the correcting system is a stage controller for controlling scanning velocities or scanning directions of the mask stage and the substrate stage.

Claim 14

The scanning type exposure apparatus according to claim 9, wherein the photoelectric detector comprises an image pickup element having its light-receiving surface arranged in a plane substantially conjugate to the light-receiving section, and a magnifying optical system for magnifying the image of the mark pattern and forming an image on the light-receiving surface.

Claim 15

A method for producing microdevices by utilizing the scanning type exposure apparatus as defined in claim 9 so as to project an image of a pattern on the mask onto the photosensitive substrate.

Claim 16

A scanning type exposure method, which includes scanning a mask across an illumination area on the mask while illuminating the mask, and scanning a photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, comprising: scanning a light-receiving section of a photoelectric detector in place of the photosensitive substrate in synchronization with scanning for the mask before the photosensitive substrate is exposed with the pattern on the mask, the photoelectric detector being provided for detecting an image of a mark pattern formed on the mask; and combining signals outputted from the photoelectric detector during the scanning to determine a position of the image of the mark pattern on the mask during the scanning.

Claim 17

A scanning type exposure method, which includes scanning a mask across an illumination area on the mask while illuminating the mask, and scanning a photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, comprising: scanning a light-receiving section of a photoelectric detector in place of the photosensitive substrate in synchronization with scanning for the mask before the photosensitive substrate is exposed with the pattern on the mask, the photoelectric detector being provided for detecting an image of a mark pattern formed on the mask; and combining signals outputted from the photoelectric detector during the scanning to determine a position of the image of the mark pattern on the mask during the scanning.

Claim 18

The scanning type exposure method according to claim 14, further comprising detecting an image of the mark pattern in the exposure area while illuminating the mark pattern on the mask in a state in which the mask is fixed with respect to the illumination area, and correcting information on a detected position of the image of the mark pattern by using the determined position of the image of the mark pattern on the mask during the scanning.

Claim 19

The scanning type exposure method according to claim 15, further comprising computing image formation characteristics of the projection optical system on the basis of the corrected information on the position of the image of the mark pattern.

Claim 20

A scanning type exposure method, which includes scanning a mask across an illumination area on the mask while illuminating the mask, and scanning a photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, comprising: scanning a light-receiving section of a photoelectric detector in place of the photosensitive substrate in synchronization with scanning for the mask before the photosensitive substrate is exposed with the pattern on the mask, the photoelectric detector being provided for detecting an image of a mark pattern formed on the mask; combining signals outputted from the photoelectric detector during the scanning to determine the image of the mark pattern on the mask during the scanning; and computing image formation characteristics of the projection optical system on the basis of the obtained image of the mark pattern.

Claim 21

A scanning type exposure method, which includes scanning a mask across an illumination area on the mask while illuminating the mask, and scanning a photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, comprising: scanning a light-receiving section of a photoelectric detector in place of the photosensitive substrate in synchronization with scanning for the mask before the photosensitive substrate is exposed with the pattern on the mask, the photoelectric detector being provided for detecting an image of a mark pattern formed on the mask; combining signals outputted from the photoelectric detector during the scanning to determine the image of the mark pattern on the mask during the scanning; and computing image formation characteristics of the projection optical system on the basis of the obtained image of the mark pattern.

Claim 22

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, comprising: a photosensitive object installed on the substrate stage; a detector for detecting an image of a mark pattern formed on the photosensitive object during a period in which the photosensitive object is scanned across the exposure area in synchronization with scanning for the mark pattern across the illumination area; and an image formation state-computing unit for determining an image formation state of the image of the mark pattern on the basis of a result of detection fed from the detector.

Claim 23

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, comprising: a photosensitive object installed on the substrate stage; a detector for detecting an image of a mark pattern formed on the photosensitive object during a period in which the photosensitive object is scanned across the exposure area in synchronization with scanning for the mark pattern across the illumination area; and an image formation state-computing unit for determining an image formation state of the image of the mark pattern on the basis of a result of detection fed from the detector.

Claim 24

The scanning type exposure apparatus according to claim 18, further comprising a correcting system for correcting the image formation state in accordance with a result of computing operation by the image formation state-computing unit.

Claim 25

The scanning type exposure apparatus according to claim 19, wherein the correcting system is a stage controller for controlling scanning velocities or scanning directions of the mask stage and the substrate stage.

Claim 26

The scanning type exposure apparatus according to claim 18, wherein the detector for detecting the image of the mark pattern formed on the photosensitive object is a positional adjustment mark detector for illuminating a positional adjustment mark formed on the photosensitive substrate, and photoelectrically detecting a light beam coming from the positional adjustment mark.

Claim 27

The scanning type exposure apparatus according to claim 18, further comprising an adjusting system for adjusting one of an intensity of an illuminating light beam and a sensitivity of the photosensitive object so that the photosensitive object is uniformly exposed during the period of synchronous scanning for the mark pattern and the photosensitive object.

Claim 28

The scanning type exposure apparatus according to claim 18, wherein the photosensitive object is a photosensitive object from which a photosensitized image is erasable.

Claim 29

The scanning type exposure apparatus according to claim 23, wherein the photosensitive object is one of a photochromic element and a magneto-optical recording element.

Claim 30

A method for producing microdevices by utilizing the scanning type exposure apparatus as defined in claim 18 so as to project an image of a pattern on the mask onto the photosensitive substrate.

Claim 31

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, comprising: a photosensitive object installed on the substrate stage; a detector for detecting an image of a mark pattern formed on the photosensitive object during a period in which the photosensitive object is scanned across the exposure area in synchronization with scanning for the mark pattern across the illumination area; and a positional adjustment mark detector for illuminating a positional adjustment mark formed on the photosensitive substrate, and photoelectrically detecting a light beam coming from the positional adjustment mark; wherein a base line of the positional adjustment mark detector is determined on the basis of a detected position of the image of the mark pattern and a detecting position of the positional adjustment mark detector.

Claim 32

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, comprising: a photosensitive object installed on the substrate stage; a detector for detecting an image of a mark pattern formed on the photosensitive object during a period in which the photosensitive object is scanned across the exposure area in synchronization with scanning for the mark pattern across the illumination area; and a positional adjustment mark detector for illuminating a positional adjustment mark formed on the photosensitive substrate, and photoelectrically detecting a light beam coming from the positional adjustment mark; wherein a base line of the positional adjustment mark detector is determined on the basis of a detected position of the image of the mark pattern and a detecting position of the positional adjustment mark detector.

Claim 33

The scanning type exposure apparatus according to claim 26, wherein the detector for detecting the image of the mark pattern formed on the photosensitive object is the positional adjustment mark detector for illuminating the positional adjustment mark formed on the photosensitive substrate, and photoelectrically detecting the light beam coming from the positional adjustment mark.

Claim 34

The scanning type exposure apparatus according to claim 26, further comprising an adjusting system for adjusting one of an intensity of an illuminating light beam and a sensitivity of the photosensitive object so that the photosensitive object is uniformly exposed during the period of synchronous scanning for the mark pattern and the photosensitive object.

Claim 35

The scanning type exposure apparatus according to claim 26, wherein the photosensitive object is a photosensitive object from which a photosensitized image is erasable.

Claim 36

The scanning type exposure apparatus according to claim 29, wherein the photosensitive object is one of a photochromic element and a magneto-optical recording element.

Claim 37

A method for producing microdevices by utilizing the scanning type exposure apparatus as defined in claim 26 so as to project an image of a pattern on the mask onto the photosensitive substrate.

Claim 38

A scanning type exposure method comprising scanning a mask across an illumination area on the mask while illuminating the mask, and scanning a photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, the scanning type exposure method comprising: scanning a photosensitive object in synchronization with scanning for the mask before the photosensitive substrate is exposed with the pattern on the mask; detecting an image of a mark pattern formed on the photosensitive object during the scanning; and computing an image formation state of an image of the pattern on the mask on the basis of the detected image of the mark pattern.

Claim 39

A scanning type exposure method comprising scanning a mask across an illumination area on the mask while illuminating the mask, and scanning a photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, the scanning type exposure method comprising: scanning a photosensitive object in synchronization with scanning for the mask before the photosensitive substrate is exposed with the pattern on the mask; detecting an image of a mark pattern formed on the photosensitive object during the scanning; and computing an image formation state of an image of the pattern on the mask on the basis of the detected image of the mark pattern.

Claim 40

The scanning type exposure method according to claim 32, further comprising correcting the computed image formation state.

Claim 41

A scanning type exposure method which includes scanning a mask across an illumination area on the mask while illuminating the mask, and scanning a photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, comprising: scanning a photosensitive object in synchronization with scanning for the mask before the photosensitive substrate is exposed with the pattern on the mask; detecting an image of a mark pattern formed on the photosensitive object during the scanning; and determining a base line of a positional adjustment mark detector for detecting a positional adjustment mark formed on the photosensitive substrate, on the basis of a detected position of the image of the mark pattern and a detecting position of the detector.

Claim 42

A scanning type exposure method which includes scanning a mask across an illumination area on the mask while illuminating the mask, and scanning a photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, comprising: scanning a photosensitive object in synchronization with scanning for the mask before the photosensitive substrate is exposed with the pattern on the mask; detecting an image of a mark pattern formed on the photosensitive object during the scanning; and determining a base line of a positional adjustment mark detector for detecting a positional adjustment mark formed on the photosensitive substrate, on the basis of a detected position of the image of the mark pattern and a detecting position of the detector.

Claim 43

The scanning type exposure method according to claim 34, wherein the photosensitive object is one selected from a photochromic element, a magneto-optical recording element, and a photosensitive substrate.

Claim 44

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, in synchronization with the scanning for the mask, comprising: a photoelectric detector for photoelectrically detecting, on the substrate stage, an image of a mark pattern on the mask; a synchronization error detector for detecting a synchronization error caused by the synchronous scanning for the photosensitive substrate and the mask; and an image formation state-computing unit for computing an image formation state of the image of the mark pattern obtained by the synchronous scanning, on the basis of the synchronization error detected by the synchronization error detector and images of the mark pattern corresponding to various positions in a scanning direction detected by the photoelectric detector respectively when the mark pattern is located at the respective various positions in the scanning direction in the illumination area; wherein an image formation state of the image of the pattern on the mask to be obtained by the synchronous scanning for the photosensitive substrate and the mask is predicted from a result of computing operation by the image formation state-computing unit.

Claim 45

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, in synchronization with the scanning for the mask, comprising: a photoelectric detector for photoelectrically detecting, on the substrate stage, an image of a mark pattern on the mask; a synchronization error detector for detecting a synchronization error caused by the synchronous scanning for the photosensitive substrate and the mask; and an image formation state-computing unit for computing an image formation state of the image of the mark pattern obtained by the synchronous scanning, on the basis of the synchronization error detected by the synchronization error detector and images of the mark pattern corresponding to various positions in a scanning direction detected by the photoelectric detector respectively when the mark pattern is located at the respective various positions in the scanning direction in the illumination area; wherein an image formation state of the image of the pattern on the mask to be obtained by the synchronous scanning for the photosensitive substrate and the mask is predicted from a result of computing operation by the image formation state-computing unit.

Claim 46

The scanning type exposure apparatus according to claim 36, further comprising a correcting system for correcting an image formation state in accordance with the predicted image formation state of the image of the pattern on the mask.

Claim 47

The scanning type exposure apparatus according to claim 37, wherein the photoelectric detector comprises a light-receiving section having a slit formed thereon, and a sensor for photoelectrically detecting a light beam transmitted through the slit, and the image of the mark pattern is photoelectrically detected by relatively moving the light-receiving section and the image of the mark pattern on the mask in a direction parallel to the scanning direction.

Claim 48

The scanning type exposure apparatus according to claim 36, wherein the synchronization error includes a positional discrepancy of each of the stages caused by synchronous movement of the substrate stage and the mask stage, a positional discrepancy of the photosensitive substrate in a Z direction, and a discrepancy in image formation characteristics caused by vibration of the projection optical system.

Claim 49

The scanning type exposure apparatus according to claim 36, wherein the photoelectric detector is a photoelectric conversion element for detecting a spatial image of a mark on the mask, formed through the projection optical system, through an aperture having a width wider than the spatial image in a measuring direction, and the image formation state-computing unit computes the image formation state of the image of the mark pattern obtained by the synchronous scanning, on the basis of the synchronization error detected by the synchronization error detector and images of the mark pattern obtained from detection signals outputted from the photoelectric conversion element by relatively moving the spatial image and the aperture in the measuring direction by the aid of the substrate stage when the mark pattern is located at various positions in the scanning direction in the illumination area.

Claim 50

The scanning type exposure apparatus according to claim 40, further comprising a light amount-adjusting unit for adjusting an amount of incident light coming into the photoelectric conversion element in conformity with an effective measuring range of the photoelectric conversion element.

Claim 51

A method for producing microdevices by utilizing the scanning type exposure apparatus as defined in claim 36 so as to project an image of a pattern on the mask onto the photosensitive substrate.

Claim 52

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, in synchronization with the scanning for the mask, comprising: a photoelectric detector for photoelectrically detecting, on the substrate stage, an image of a mark pattern on the mask; a synchronization error detector for detecting a synchronization error caused by the synchronous scanning for the photosensitive substrate and the mask; an image position-computing unit for computing a position of the image of the mark pattern on the basis of the synchronization error detected by the synchronization error detector and images of the mark pattern corresponding to various positions in a scanning direction detected by the photoelectric detector respectively when the mark pattern is located at the respective various positions in the scanning direction in the illumination area; and a positional adjustment mark detector for illuminating a positional adjustment mark formed on the photosensitive substrate, and photoelectrically detecting a light beam coming from the positional adjustment mark; wherein a base line of the positional adjustment mark detector is determined on the basis of the computed position of the image of the mark pattern and a detecting position of the positional adjustment mark detector.

Claim 53

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, in synchronization with the scanning for the mask, comprising: a photoelectric detector for photoelectrically detecting, on the substrate stage, an image of a mark pattern on the mask; a synchronization error detector for detecting a synchronization error caused by the synchronous scanning for the photosensitive substrate and the mask; an image position-computing unit for computing a position of the image of the mark pattern on the basis of the synchronization error detected by the synchronization error detector and images of the mark pattern corresponding to various positions in a scanning direction detected by the photoelectric detector respectively when the mark pattern is located at the respective various positions in the scanning direction in the illumination area; and a positional adjustment mark detector for illuminating a positional adjustment mark formed on the photosensitive substrate, and photoelectrically detecting a light beam coming from the positional adjustment mark; wherein a base line of the positional adjustment mark detector is determined on the basis of the computed position of the image of the mark pattern and a detecting position of the positional adjustment mark detector.

Claim 54

The scanning type exposure apparatus according to claim 43, wherein the photoelectric detector comprises a light-receiving section having a slit formed thereon, and a sensor for photoelectrically detecting a light beam transmitted through the slit, and the image of the mark pattern is photoelectrically detected by relatively moving the light-receiving section and the image of the mark pattern on the mask in a direction parallel to the scanning direction.

Claim 55

The scanning type exposure apparatus according to claim 43, wherein the photoelectric detector is a photoelectric conversion element for detecting a spatial image of the mark pattern on the mask, formed through the projection optical system, through an aperture having a width wider than the spatial image in a measuring direction, and the image position-computing unit computes the position of the image of the mark pattern obtained by the synchronous scanning, on the basis of the synchronization error detected by the synchronization error detector and images of the mark pattern obtained from detection signals outputted from the photoelectric conversion element by relatively moving the spatial image and the aperture in the measuring direction by the aid of the substrate stage when the mark pattern is located at various positions in the scanning direction in the illumination area.

Claim 56

The scanning type exposure apparatus according to claim 45, further comprising a light amount-adjusting unit for adjusting an amount of incident light coming into the photoelectric conversion element in conformity with an effective measuring range of the photoelectric conversion element.

Claim 57

The scanning type exposure apparatus according to claim 43, wherein the synchronization error includes a positional discrepancy of each of the stages caused by synchronous movement of the substrate stage and the mask stage, a positional discrepancy of the photosensitive substrate in a Z direction, and a discrepancy in image formation characteristics caused by vibration of the projection optical system.

Claim 58

A method for producing microdevices by utilizing the scanning type exposure apparatus as defined in claim 43 so as to project an image of a pattern on the mask onto the photosensitive substrate.

Claim 59

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, in synchronization with the scanning for the mask, comprising: a detecting system for illuminating a mark pattern established on an object plane or an image plane of the projection optical system, and detecting, on the image plane or the object plane, an image of the mark pattern formed by the projection optical system; a synchronization error detector for detecting a synchronization error caused by the synchronous scanning for the photosensitive substrate and the mask; and an image formation state-computing unit for computing an image formation state of the image of the mark pattern obtained by the synchronous scanning, on the basis of the synchronization error detected by the synchronization error detector and images of the mark pattern corresponding to various positions in a scanning direction detected by the detecting system respectively when the mark pattern is located at the respective various positions in the scanning direction; wherein an image formation state of the image of the pattern on the mask to be obtained by the synchronous scanning for the photosensitive substrate and the mask is predicted from a result of computing operation by the image formation state-computing unit.

Claim 60

A scanning type exposure apparatus, provided with a mask stage for scanning a mask across an illumination area on the mask, a projection optical system for projecting an image of a pattern on the mask onto a photosensitive substrate, and a substrate stage for scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to the projection optical system, in synchronization with the scanning for the mask, comprising: a detecting system for illuminating a mark pattern established on an object plane or an image plane of the projection optical system, and detecting, on the image plane or the object plane, an image of the mark pattern formed by the projection optical system; a synchronization error detector for detecting a synchronization error caused by the synchronous scanning for the photosensitive substrate and the mask; and an image formation state-computing unit for computing an image formation state of the image of the mark pattern obtained by the synchronous scanning, on the basis of the synchronization error detected by the synchronization error detector and images of the mark pattern corresponding to various positions in a scanning direction detected by the detecting system respectively when the mark pattern is located at the respective various positions in the scanning direction; wherein an image formation state of the image of the pattern on the mask to be obtained by the synchronous scanning for the photosensitive substrate and the mask is predicted from a result of computing operation by the image formation state-computing unit.

Claim 61

The scanning type exposure apparatus according to claim 49, wherein the synchronization error includes a positional discrepancy of each of the stages caused by synchronous movement of the substrate stage and the mask stage, a positional discrepancy of the photosensitive substrate in a Z direction, and a discrepancy in image formation characteristics caused by vibration of the projection optical system.

Claim 62

The scanning type exposure apparatus according to claim 49, wherein the detecting system is a photoelectric conversion element for detecting a spatial image of the mark pattern established on the object plane or the image plane, formed through the projection optical system, through an aperture having a width wider than the spatial image in a measuring direction, and the image formation state-computing unit computes the image formation state of the image of the mark pattern obtained by the synchronous scanning, on the basis of the synchronization error detected by the synchronization error detector and images of the mark pattern obtained from detection signals outputted from the photoelectric conversion element by relatively moving the spatial image and the aperture of the photoelectric conversion element in the measuring direction when the mark pattern is located at the various positions in the scanning direction.

Claim 63

The scanning type exposure apparatus according to claim 51, further comprising a light amount-adjusting unit for adjusting an amount of incident light coming into the photoelectric conversion element in conformity with an effective measuring range of the photoelectric conversion element.

Claim 64

The scanning type exposure apparatus according to claim 52, wherein the light amount-adjusting unit is a spatial filter having a variable dimming ratio, for adjusting the amount of incident light coming into the photoelectric conversion element in conformity with the effective measuring range of the photoelectric conversion element irrelevant to any change in illumination condition on the mark pattern.

Claim 65

The scanning type exposure apparatus according to claim 52, wherein the light amount-adjusting unit is shielding zones provided in front of and at the back of the mark, for adjusting the amount of incident light coming into the photoelectric conversion element in conformity with the effective measuring range of the photoelectric conversion element irrelevant to any change in illumination condition on the mark pattern.

Claim 66

A method for producing microdevices by utilizing the scanning type exposure apparatus as defined in claim 49 so as to project an image of a pattern on the mask onto the photosensitive substrate.

Claim 67

A scanning type exposure method, which includes scanning a mask across an illumination area on the mask while illuminating the mask, and scanning a photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, comprising: arranging a mark pattern on the mask at various positions in a scanning direction in the illumination area, and photoelectrically detecting an image of the mark pattern formed by the projection optical system at each of the positions respectively before the photosensitive substrate is exposed with the pattern on the mask; synchronously scanning the photosensitive substrate and the mask at the same scanning velocities as those in actual scanning exposure so that a synchronization error caused by the synchronous scanning is detected for each of positions of the mask or the photosensitive substrate; and computing an image formation state of the image of the mark pattern obtained by the synchronous scanning, on the basis of the detected synchronization error and the photoelectrically detected image of the mark pattern corresponding to each of the positions in the scanning direction, thereby predicting image formation characteristics of the image of the pattern on the mask to be obtained by the synchronous scanning for the mask and the photosensitive substrate.

Claim 68

A scanning type exposure method, which includes scanning a mask across an illumination area on the mask while illuminating the mask, and scanning a photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, comprising: arranging a mark pattern on the mask at various positions in a scanning direction in the illumination area, and photoelectrically detecting an image of the mark pattern formed by the projection optical system at each of the positions respectively before the photosensitive substrate is exposed with the pattern on the mask; synchronously scanning the photosensitive substrate and the mask at the same scanning velocities as those in actual scanning exposure so that a synchronization error caused by the synchronous scanning is detected for each of positions of the mask or the photosensitive substrate; and computing an image formation state of the image of the mark pattern obtained by the synchronous scanning, on the basis of the detected synchronization error and the photoelectrically detected image of the mark pattern corresponding to each of the positions in the scanning direction, thereby predicting image formation characteristics of the image of the pattern on the mask to be obtained by the synchronous scanning for the mask and the photosensitive substrate.

Claim 69

The scanning type exposure method according to claim 56, wherein the photoelectrically detected image of the mark pattern corresponding to each of the positions in the scanning direction is corrected with the detected synchronization error corresponding to each of the positions in the scanning direction to determine corrected images of the mark pattern at the respective positions in the scanning direction, and the corrected respective images are overlaid with each other to compute an image formation state of the image of the mark pattern to be obtained by the synchronous scanning.

Claim 70

A scanning type exposure method, which uses a projection exposure apparatus provided with a detector for detecting a positional adjustment mark formed on a photosensitive substrate, and which includes scanning a mask across an illumination area on the mask while illuminating the mask, and scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, comprising: arranging a mark pattern on the mask at various positions in a scanning direction in the illumination area, and photoelectrically detecting an image of the mark pattern formed by the projection optical system at each of the positions respectively before the photosensitive substrate is exposed with the pattern on the mask; synchronously scanning the photosensitive substrate and the mask at the same scanning velocities as those in actual scanning type exposure so that a synchronization error caused by the synchronous scanning is detected for each of positions of the mask or the photosensitive substrate; computing a position of the image of the mark pattern on the mask on the basis of the detected synchronization error and the photoelectrically detected image of the mark pattern at each of the positions in the scanning direction; and determining a base line of the positional adjustment mark detector on the basis of the computed position of the mark pattern and a detecting position of the detector for detecting the positional adjustment mark on the photosensitive substrate.

Claim 71

A scanning type exposure method, which uses a projection exposure apparatus provided with a detector for detecting a positional adjustment mark formed on a photosensitive substrate, and which includes scanning a mask across an illumination area on the mask while illuminating the mask, and scanning the photosensitive substrate across an exposure area which is conjugate to the illumination area in relation to a projection optical system, in synchronization with the scanning for the mask so that the photosensitive substrate is exposed with a pattern on the mask through the projection optical system, comprising: arranging a mark pattern on the mask at various positions in a scanning direction in the illumination area, and photoelectrically detecting an image of the mark pattern formed by the projection optical system at each of the positions respectively before the photosensitive substrate is exposed with the pattern on the mask; synchronously scanning the photosensitive substrate and the mask at the same scanning velocities as those in actual scanning type exposure so that a synchronization error caused by the synchronous scanning is detected for each of positions of the mask or the photosensitive substrate; computing a position of the image of the mark pattern on the mask on the basis of the detected synchronization error and the photoelectrically detected image of the mark pattern at each of the positions in the scanning direction; and determining a base line of the positional adjustment mark detector on the basis of the computed position of the mark pattern and a detecting position of the detector for detecting the positional adjustment mark on the photosensitive substrate.

Claim 72

The scanning type exposure method according to claim 58, wherein the photoelectrically detected image of the mark pattern corresponding to each of the positions in the scanning direction is corrected with the detected synchronization error corresponding to each of the positions in the scanning direction, and corrected images of the mark pattern at the respective positions in the scanning direction are overlaid with each other to obtain an image from which the position of the mark pattern to be obtained by the synchronous scanning is determined.

Claim 73

The scanning type exposure method according to claim 58, wherein the image of the mark pattern formed by the projection optical system is photoelectrically detected by relatively moving the image of the mark pattern and a light-receiving surface of a photoelectric detector in a direction parallel to the scanning direction.

Claim 74

A projection exposure apparatus, provided with a projection optical system for projecting an image of a transferring pattern formed on a mask onto a photosensitive substrate under an illuminating light beam for exposure, and a substrate stage for moving the substrate in a plane perpendicular to an optical axis of the projection optical system, comprising: a photoelectric conversion element for detecting a spatial image of a measuring mark on the mask, formed through the projection optical system, through an aperture having a width wider than the spatial image in a measuring direction, under an illuminating light beam in the same wavelength region as that of the illuminating light beam for exposure; an image formation characteristic-calculating unit for calculating image formation characteristics of the projection optical system on the basis of a detection signal outputted from the photoelectric conversion element when the spatial image and the aperture are relatively moved in the measuring direction by the aid of the substrate stage; and a light amount-adjusting unit for adjusting an amount of incident light coming into the photoelectric conversion element in conformity with an effective measuring range of the photoelectric conversion element.

Claim 75

A projection exposure apparatus, provided with a projection optical system for projecting an image of a transferring pattern formed on a mask onto a photosensitive substrate under an illuminating light beam for exposure, and a substrate stage for moving the substrate in a plane perpendicular to an optical axis of the projection optical system, comprising: a photoelectric conversion element for detecting a spatial image of a measuring mark on the mask, formed through the projection optical system, through an aperture having a width wider than the spatial image in a measuring direction, under an illuminating light beam in the same wavelength region as that of the illuminating light beam for exposure; an image formation characteristic-calculating unit for calculating image formation characteristics of the projection optical system on the basis of a detection signal outputted from the photoelectric conversion element when the spatial image and the aperture are relatively moved in the measuring direction by the aid of the substrate stage; and a light amount-adjusting unit for adjusting an amount of incident light coming into the photoelectric conversion element in conformity with an effective measuring range of the photoelectric conversion element.

Claim 76

The projection exposure apparatus according to claim 61, wherein the light amount-adjusting unit is a spatial filter having a variable dimming ratio, for adjusting the amount of incident light coming into the photoelectric conversion element in conformity with the effective measuring range of the photoelectric conversion element irrelevant to any change in illumination condition on the measuring mark.

Claim 77

The projection exposure apparatus according to claim 61, wherein the light amount-adjusting unit is shielding zones provided in front of and at the back of the measuring mark, for adjusting the amount of incident light coming into the photoelectric conversion element in conformity with the effective measuring range of the photoelectric conversion element irrelevant to any change in illumination condition on the measuring mark.

Claim 78

A projection exposure apparatus, provided with a projection optical system for projecting an image of a transferring pattern formed on a mask onto a photosensitive substrate under an illuminating light beam for exposure, and a substrate stage for moving the substrate in a plane perpendicular to an optical axis of the projection optical system, comprising: a photoelectric conversion element for detecting a spatial image of a measuring mark on the mask, formed through the projection optical system, through an aperture having a width wider than the spatial image in a measuring direction, under an illuminating light beam in the same wavelength region as that of the illuminating light beam for exposure; and a calculating unit for calculating image formation characteristics of the projection optical system on the basis of a detection signal outputted from the photoelectric conversion element when the spatial image and the aperture are relatively moved in the measuring direction by the aid of the substrate stage; wherein the measuring mark comprises one or a plurality of shielding patterns, based on the use of a mask for evaluation having shielding zones provided in front of and at the back of the shielding pattern or patterns in the measuring direction, at a spacing distance d1 as measured for a projected image thereof; and the aperture for restricting an amount of incident light coming into the photoelectric conversion element has a width d2 which is wider than the spacing distance d1 in the measuring direction.

Claim 79

A projection exposure apparatus, provided with a projection optical system for projecting an image of a transferring pattern formed on a mask onto a photosensitive substrate under an illuminating light beam for exposure, and a substrate stage for moving the substrate in a plane perpendicular to an optical axis of the projection optical system, comprising: a photoelectric conversion element for detecting a spatial image of a measuring mark on the mask, formed through the projection optical system, through an aperture having a width wider than the spatial image in a measuring direction, under an illuminating light beam in the same wavelength region as that of the illuminating light beam for exposure; and a calculating unit for calculating image formation characteristics of the projection optical system on the basis of a detection signal outputted from the photoelectric conversion element when the spatial image and the aperture are relatively moved in the measuring direction by the aid of the substrate stage; wherein the measuring mark comprises one or a plurality of shielding patterns, based on the use of a mask for evaluation having shielding zones provided in front of and at the back of the shielding pattern or patterns in the measuring direction, at a spacing distance d1 as measured for a projected image thereof; and the aperture for restricting an amount of incident light coming into the photoelectric conversion element has a width d2 which is wider than the spacing distance d1 in the measuring direction.

Claim 80

The scanning type exposure apparatus according to claim 1, wherein a positional discrepancy of the image of the mark pattern is determined based on the position detected on the basis of the output of the combining system.

Claim 81

The scanning type exposure apparatus according to claim 65, further comprising a computing unit for calculating image formation characteristics of the projection optical system on the basis of positional discrepancies of respective images of a plurality of mark patterns on the mask.

Claim 82

The scanning type exposure method according to claim 14, further comprising determining a positional discrepancy of the image of the mark pattern on the mask during the scanning based on the determined position of the image of the mark pattern of the mask during the scanning.

Claim 83

The scanning type exposure method according to claim 67, further comprising detecting an image of the mark pattern in the exposure area while illuminating the mark pattern on the mask in a state in which the mask is fixed with respect to the illumination area, and correcting information on a detected position of the image of the mark pattern by using the determined positional discrepancy of the image of the mark pattern on the mask during scanning.