US5840451A
Expired / Lapsed
US
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Individually controllable radiation sources for providing an image pattern in a photolithographic system
Assignee: GlobalFoundries Inc
•
Filing: 1996-12-04
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Granted: 1998-11-24
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Expires: 2016-12-04
Abstract
Abstract A photolithographic system includes individually controllable radiation sources for forming an image pattern on an image plane without using a reticle or mask during fabrication of an integrated circuit device. The radiation sources are selectively activated as they scan the image plane. The image pattern can consist of parallel lines having identical widths and varying lengths, or alternatively, pixels having identical shapes and sizes. The radiation sources can be arranged as a linear array, or a staggered array, to achieve the desired linear density. Suitable radiation sources include light pipes, light emitting diodes, and laser diodes. Preferably, each of the activated radiation sources provides an exposure field of less than 0.1 microns on the image plane, and at least two of the radiation sources must be activated to provide the minimum line width of the image pattern.
Inventors
- 👤 Bradley T. Moore
- 👤 Robert Dawson
- 👤 H. Jim Fulford, Jr.
- 👤 Mark I. Gardner
- 👤 Frederick N. Hause
- 👤 Mark W. Michael
- 👤 Derick J. Wristers
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:12
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70383; G03F7/70391; G03F7/20; Y; Y10; Y10S; Y10S430/00; Y10S430/146; Y10S430/167; Y10S430/168
Claims Analysis
Total Claims: 55
Claim 1
Independent Claim
39 words
A method of using a photolithographic system, comprising: providing individually controllable radiation sources; and scanning the radiation sources relative to an image plane to form the image pattern on the image plane during fabrication of an integrated circuit device.
Claim 2
Independent Claim
39 words
A method of using a photolithographic system, comprising: providing individually controllable radiation sources; and scanning the radiation sources relative to an image plane to form the image pattern on the image plane during fabrication of an integrated circuit device.
Claim 3
Dependent Claim
19 words
The method of claim 1, wherein the radiation sources are arranged as a linear array with a single row.
Claim 4
Dependent Claim
18 words
The method of claim 1, wherein the radiation sources are arranged as a staggered array with multiple rows.
Claim 5
Dependent Claim
24 words
The method of claim 1, wherein the radiation sources are selected from the group consisting of light pipes, light emitting diodes and laser diodes.
Claim 6
Dependent Claim
24 words
The method of claim 1, wherein the radiation sources that are activated emit radiation selected from the group consisting of ultraviolet light and x-rays.
Claim 7
Dependent Claim
19 words
The method of claim 1, wherein the scanning includes holding the radiation sources stationary while moving the image plane.
Claim 8
Dependent Claim
19 words
The method of claim 1, wherein the scanning includes holding the image plane stationary while moving the radiation sources.
Claim 9
Dependent Claim
23 words
The method of claim 1, wherein at least two of the radiation sources must be activated for each feature in the image pattern.
Claim 10
Dependent Claim
18 words
The method of claim 1, wherein the image plane is provided by a photosensitive material on a wafer.
Claim 11
Dependent Claim
20 words
The method of claim 1, wherein the radiation sources form the image pattern without using a reticle or a mask.
Claim 12
Independent Claim
74 words
A method of using a photolithographic system to form an image pattern without using a reticle or mask during fabrication of an integrated circuit device, comprising: providing individually controllable radiation sources; providing a photosensitive material on a wafer; and scanning the radiation sources relative to the photosensitive material, and selectively activating the radiation sources during the scanning, in order to selectively irradiate the photosensitive material and form the image pattern on the photosensitive material.
Claim 13
Independent Claim
74 words
A method of using a photolithographic system to form an image pattern without using a reticle or mask during fabrication of an integrated circuit device, comprising: providing individually controllable radiation sources; providing a photosensitive material on a wafer; and scanning the radiation sources relative to the photosensitive material, and selectively activating the radiation sources during the scanning, in order to selectively irradiate the photosensitive material and form the image pattern on the photosensitive material.
Claim 14
Dependent Claim
30 words
The method of claim 11, wherein the radiation sources are arranged as a linear array with a single row and the scanning occurs in a direction orthogonal to the row.
Claim 15
Dependent Claim
36 words
The method of claim 11, wherein the radiation sources are arranged as a staggered array with multiple rows that are staggered relative to one another, and the scanning occurs in a direction orthogonal to the rows.
Claim 16
Dependent Claim
23 words
The method of claim 11, wherein the scanning includes forming the image pattern over substantially all of the wafer using a single pass.
Claim 17
Dependent Claim
43 words
The method of claim 11, wherein the scanning includes forming the image pattern over substantially all of the wafer using multiple passes, such that each of the passes forms a separate portion of the image pattern over a separate portion of the wafer.
Claim 18
Dependent Claim
28 words
The method of claim 15, wherein each of the multiple passes occurs in the x-direction, and the multiple passes are offset relative to one another in the y-direction.
Claim 19
Dependent Claim
22 words
The method of claim 11, wherein the scanning includes maintaining a substantially constant displacement between the radiation sources and the photosensitive material.
Claim 20
Dependent Claim
18 words
The method of claim 11, wherein the scanning includes maintaining a substantially constant displacement between the radiation sources.
Claim 21
Dependent Claim
24 words
The method of claim 11, wherein the radiation sources that are activated emit radiation selected from the group consisting of ultraviolet light and x-rays.
Claim 22
Dependent Claim
24 words
The method of claim 11, wherein the radiation sources are selected from the group consisting of light pipes, light emitting diodes and laser diodes.
Claim 23
Dependent Claim
33 words
The method of claim 11, wherein the image pattern includes features having a minimum line width, and at least two of the radiation sources must be activated to provide the minimum line width.
Claim 24
Dependent Claim
22 words
The method of claim 21, wherein at least five of the radiation sources must be activated to provide the minimum line width.
Claim 25
Dependent Claim
27 words
The method of claim 11, wherein each of the radiation sources that is activated provides an exposure field of less than 0.1 microns on the image plane.
Claim 26
Dependent Claim
28 words
The method of claim 11, further including developing the photosensitive material after the scanning, thereby selectively exposing a region of the wafer that corresponds to the image pattern.
Claim 27
Dependent Claim
38 words
The method of claim 11, wherein the image pattern consists of pixels, the pixels have essentially identical sizes and shapes, and each of the pixels is formed by activating then deactivating a selected one of the radiation sources.
Claim 28
Dependent Claim
42 words
The method of claim 11, wherein the image pattern consists of parallel lines, the parallel lines have essentially identical widths and varying lengths, and each of the parallel lines is formed by activating then deactivating a selected one of the radiation sources.
Claim 29
Dependent Claim
24 words
The method of claim 11, wherein the scanning occurs continuously, and the radiation sources are selectively activated as they move relative to the wafer.
Claim 30
Dependent Claim
31 words
The method of claim 11, wherein the scanning occurs in a step and repeat fashion, and the radiation sources are selectively activated as they are held stationary relative to the wafer.
Claim 31
Dependent Claim
15 words
The method of claim 11, wherein the radiation sources are essentially identical to one another.
Claim 32
Independent Claim
131 words
A method of using a photolithographic system to selectively expose a wafer without using a reticle or mask during fabrication of an integrated circuit device, comprising: providing individually controllable radiation sources for selectively emitting radiation selected from the group consisting of ultraviolet light and x-rays, wherein the radiation sources are essentially identical to one another; providing photoresist on a wafer; scanning the radiation sources relative to the photoresist, and selectively activating and deactivating the radiation sources during the scanning in order to selectively irradiate regions of the photoresist with an image pattern, wherein at least two of the radiation sources are activated to form each feature in the image pattern; and developing the photoresist to remove the irradiated regions and selectively expose the wafer at regions corresponding to the image pattern.
Claim 33
Independent Claim
131 words
A method of using a photolithographic system to selectively expose a wafer without using a reticle or mask during fabrication of an integrated circuit device, comprising: providing individually controllable radiation sources for selectively emitting radiation selected from the group consisting of ultraviolet light and x-rays, wherein the radiation sources are essentially identical to one another; providing photoresist on a wafer; scanning the radiation sources relative to the photoresist, and selectively activating and deactivating the radiation sources during the scanning in order to selectively irradiate regions of the photoresist with an image pattern, wherein at least two of the radiation sources are activated to form each feature in the image pattern; and developing the photoresist to remove the irradiated regions and selectively expose the wafer at regions corresponding to the image pattern.
Claim 34
Independent Claim
46 words
A method of fabricating an integrated circuit device, comprising: depositing a photosensitive material over the device; and forming an image pattern on the photosensitive material by scanning individually controllable radiation sources with respect to the photosensitive material and selectively activating the radiation sources during the scanning.
Claim 35
Independent Claim
46 words
A method of fabricating an integrated circuit device, comprising: depositing a photosensitive material over the device; and forming an image pattern on the photosensitive material by scanning individually controllable radiation sources with respect to the photosensitive material and selectively activating the radiation sources during the scanning.
Claim 36
Independent Claim
68 words
A method of using individually controllable radiation sources in a photolithographic system to provide an image pattern for fabricating an integrated circuit device, comprising: providing a photosensitive material on a wafer; and scanning the radiation sources relative to the photosensitive material and selectively activating the radiation sources during the scanning in order to provide an image pattern on the photosensitive material during fabrication of the integrated circuit device.
Claim 37
Independent Claim
68 words
A method of using individually controllable radiation sources in a photolithographic system to provide an image pattern for fabricating an integrated circuit device, comprising: providing a photosensitive material on a wafer; and scanning the radiation sources relative to the photosensitive material and selectively activating the radiation sources during the scanning in order to provide an image pattern on the photosensitive material during fabrication of the integrated circuit device.
Claim 38
Dependent Claim
55 words
In a photolithographic system for fabricating integrated circuit devices, a method of defining device features, comprising: scanning individually controllable radiation sources relative to a photosensitive material on a wafer; and selectively activating the radiation sources during the scanning to form an image pattern on the photosensitive material that is used to define the device features.
Claim 39
Dependent Claim
55 words
In a photolithographic system for fabricating integrated circuit devices, a method of defining device features, comprising: scanning individually controllable radiation sources relative to a photosensitive material on a wafer; and selectively activating the radiation sources during the scanning to form an image pattern on the photosensitive material that is used to define the device features.
Claim 40
Dependent Claim
59 words
In a photolithographic system for fabricating integrated circuit devices, a method of defining device features of an integrated circuit device, comprising: scanning individually controllable radiation sources relative to photoresist on a wafer; and selectively activating and deactivating the radiation sources during the scanning to form an image pattern on the photoresist that is used to define the device features.
Claim 41
Dependent Claim
59 words
In a photolithographic system for fabricating integrated circuit devices, a method of defining device features of an integrated circuit device, comprising: scanning individually controllable radiation sources relative to photoresist on a wafer; and selectively activating and deactivating the radiation sources during the scanning to form an image pattern on the photoresist that is used to define the device features.
Claim 42
Dependent Claim
13 words
The method of claim 34, wherein the radiation sources are individual radiation emitters.
Claim 43
Dependent Claim
12 words
The method of claim 35, wherein the radiation sources are laser diodes.
Claim 44
Dependent Claim
13 words
The method of claim 35, wherein the radiation sources are light emitting diodes.
Claim 45
Dependent Claim
18 words
The method of claim 34, wherein the radiation sources are gated channels coupled to a single radiation emitter.
Claim 46
Dependent Claim
12 words
The method of claim 38, wherein the radiation sources are light pipes.
Claim 47
Dependent Claim
12 words
The method of claim 38, wherein the radiation sources are glass fibers.
Claim 48
Dependent Claim
15 words
The method of claim 38, wherein the single radiation emitter is a bulk x-ray source.
Claim 49
Dependent Claim
11 words
The method of claim 34, wherein the radiation is infrared light.
Claim 50
Dependent Claim
11 words
The method of claim 34, wherein the radiation is visible light.
Claim 51
Dependent Claim
11 words
The method of claim 34, wherein the radiation is ultraviolet light.
Claim 52
Dependent Claim
10 words
The method of claim 34, wherein the radiation is x-rays.
Claim 53
Dependent Claim
46 words
The method of claim 34, wherein the radiation sources that are activated project an amount of radiation that is above a sensitivity of the photoresist, and the radiation sources that are deactivated project a limited amount of radiation that is below the sensitivity of the photoresist.
Claim 54
Dependent Claim
21 words
The method of claim 34, wherein a region between the radiation sources and the image pattern is devoid of optical elements.
Claim 55
Dependent Claim
12 words
The method of claim 34, wherein the scanning occurs without interlaced scanning.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-23 | 2002-05-25 | 2002-11-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-23 | 2006-05-25 | 2006-11-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-23 | 2010-05-25 | 2010-11-24 | $7700.00 | Window Closed / Lapsed |