US5835217A
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Phase-shifting point diffraction interferometer
Assignee: University of California
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Filing: 1997-02-28
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Granted: 1998-11-10
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Expires: 2017-02-28
Abstract
Abstract Disclosed is a point diffraction interferometer for evaluating the quality of a test optic. In operation, the point diffraction interferometer includes a source of radiation, the test optic, a beam divider, a reference wave pinhole located at an image plane downstream from the test optic, and a detector for detecting an interference pattern produced between a reference wave emitted by the pinhole and a test wave emitted from the test optic. The beam divider produces separate reference and test beams which focus at different laterally separated positions on the image plane. The reference wave pinhole is placed at a region of high intensity (e.g., the focal point) for the reference beam. This allows reference wave to be produced at a relatively high intensity. Also, the beam divider may include elements for phase shifting one or both of the reference and test beams.
Inventors
- 👤 Hector Medecki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 09:51
CPC Classifications
G; G01; G01M; G01M11/00; G01M11/02; G01M11/0242; G01M11/0271; G01J; G01J9/00; G01J9/02; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70591; G03F7/706
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
207 words
A point diffraction interferometer comprising: a test optic region at which a test optic is capable of being held; a source of electromagnetic radiation located upstream of the test optic region and capable of producing a radiation beam directed toward a test optic region, such that an image is produced downstream from the test optic region at an image plane; a beam divider for dividing said radiation beam into at least a reference beam and a test beam directed at different angles with respect to one another such that, when the test optic is held at the test optic region, the reference beam impinges at a first location on the image plane and the test beam impinges at a second location, laterally separated from the first location, on the image plane; a phase shifting mechanism for adjusting the phase of at least one of the reference beam and the test beam; a pinhole provided at the first location on the image plane such that radiation from the reference beam which passes through the pinhole produces a reference wave; and a detector located downstream from the image plane for detecting an interference pattern produced by combining the reference wave and a test wave provided from said test beam.
Claim 2
Dependent Claim
207 words
A point diffraction interferometer comprising: a test optic region at which a test optic is capable of being held; a source of electromagnetic radiation located upstream of the test optic region and capable of producing a radiation beam directed toward a test optic region, such that an image is produced downstream from the test optic region at an image plane; a beam divider for dividing said radiation beam into at least a reference beam and a test beam directed at different angles with respect to one another such that, when the test optic is held at the test optic region, the reference beam impinges at a first location on the image plane and the test beam impinges at a second location, laterally separated from the first location, on the image plane; a phase shifting mechanism for adjusting the phase of at least one of the reference beam and the test beam; a pinhole provided at the first location on the image plane such that radiation from the reference beam which passes through the pinhole produces a reference wave; and a detector located downstream from the image plane for detecting an interference pattern produced by combining the reference wave and a test wave provided from said test beam.
Claim 3
Dependent Claim
16 words
The point diffraction interferometer of claim 1, wherein the source of electromagnetic radiation is a laser.
Claim 4
Dependent Claim
17 words
The point diffraction interferometer of claim 1, wherein the source of electromagnetic radiation is a polychromatic source.
Claim 5
Dependent Claim
34 words
The point diffraction interferometer of claim 1, further comprising an input pinhole located between the test optic region and the source of electromagnetic radiation whereby radiation passing through said input pinhole is spatially coherent.
Claim 6
Dependent Claim
24 words
The point diffraction interferometer of claim 1, wherein the beam divider is located between the source of electromagnetic radiation and the test optic region.
Claim 7
Dependent Claim
15 words
The point diffraction interferometer of claim 1, wherein the beam divider is a diffraction grating.
Claim 8
Dependent Claim
17 words
The point diffraction interferometer of claim 6, wherein the diffraction grating is a reflection type diffraction grating.
Claim 9
Dependent Claim
17 words
The point diffraction interferometer of claim 6, wherein the diffraction grating is a transmission type diffraction grating.
Claim 10
Dependent Claim
24 words
The point diffraction interferometer of claim 6, wherein the diffraction grating is located between the source of electromagnetic radiation and the test optic region.
Claim 11
Dependent Claim
22 words
The point diffraction interferometer of claim 6, wherein the diffraction grating is located between the test optic region and the image plane.
Claim 12
Dependent Claim
50 words
The point diffraction interferometer of claim 1, wherein the beam divider includes two laterally separated pinholes, such that radiation from the radiation beam passing through one of the pinholes constitutes the reference beam and radiation from the radiation beam passing through the other of the pinholes constitutes the test beam.
Claim 13
Dependent Claim
37 words
The point diffraction interferometer of claim 1, wherein the beam divider includes a mirror which reflects at least a portion of the radiation beam to form at least one of the reference beam and the test beam.
Claim 14
Dependent Claim
46 words
The point diffraction interferometer of claim 12, wherein the beam divider includes a first mirror which reflects a portion of the radiation beam to form the reference beam and a second mirror which reflects a second portion of said radiation beam to form the test beam.
Claim 15
Dependent Claim
52 words
The point diffraction interferometer of claim 12, wherein said mirror reflects a first portion of the radiation beam to form at least one of the reference beam and the test beam, and second portion of the radiation passes directly to the test optic region as the test beam or the reference beam.
Claim 16
Dependent Claim
24 words
The point diffraction interferometer of claim 1, wherein the image plane includes the focal point of the reference beam passing through said test optic.
Claim 17
Dependent Claim
17 words
The point diffraction interferometer of claim 1, wherein the detector is an array of charge coupled devices.
Claim 18
Independent Claim
156 words
A method of generating an interference pattern with a point diffraction interferometer, the method comprising: directing source radiation toward a test optic provided in a test optic region of the point diffraction interferometer, the test optic having an image plane located downstream from the test optic; dividing said source radiation into at least a reference beam and a test beam directed at different angles with respect to one another such that the reference beam impinges at a first location on the image plane and the test beam impinges at a second location, laterally separated from the first location, on the image plane; phase-shifting at least one of the reference beam and the test beam; passing the reference beam through a reference pinhole provided at the first location on the image plane to produce a reference wave; and detecting and interference pattern produced by combining the reference wave and a test wave provided from said test beam.
Claim 19
Independent Claim
156 words
A method of generating an interference pattern with a point diffraction interferometer, the method comprising: directing source radiation toward a test optic provided in a test optic region of the point diffraction interferometer, the test optic having an image plane located downstream from the test optic; dividing said source radiation into at least a reference beam and a test beam directed at different angles with respect to one another such that the reference beam impinges at a first location on the image plane and the test beam impinges at a second location, laterally separated from the first location, on the image plane; phase-shifting at least one of the reference beam and the test beam; passing the reference beam through a reference pinhole provided at the first location on the image plane to produce a reference wave; and detecting and interference pattern produced by combining the reference wave and a test wave provided from said test beam.
Claim 20
Dependent Claim
38 words
The method of claim 17, wherein said dividing is conducted with an optical device selected from the group consisting of a mirror, a double mirror, a reflection diffraction grating, a transmission diffraction grating, and a double pinhole structure.
Claim 21
Dependent Claim
19 words
The method of claim 17, wherein said dividing is conducted before said source radiation impinges on said test optic.
Claim 22
Dependent Claim
28 words
The method of claim 17, wherein said dividing is conducted after said source radiation impinges on said test optic but before said source radiation reaches the image plane.
Claim 23
Dependent Claim
29 words
The method of claim 17, wherein said detecting is performed with a detector selected from the group consisting of a photographic film, and an array of charge coupled device.
References Cited (Backward Citations)
JPS5764139A
Cited
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-11-09 | 2002-05-11 | 2002-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-09 | 2006-05-11 | 2006-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-09 | 2010-05-11 | 2010-11-10 | $7700.00 | Window Closed / Lapsed |