US5834162A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for 3D chip stacking
Assignee: University of California
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Filing: 1996-10-28
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Granted: 1998-11-10
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Expires: 2016-10-28
Abstract
Abstract A manufacturable process for fabricating electrical interconnects which extend from a top surface of an integrated circuit chip to a sidewall of the chip using laser pantography to pattern three dimensional interconnects. The electrical interconnects may be of an L-connect or L-shaped type. The process implements three dimensional (3D) stacking by moving the conventional bond or interface pads on a chip to the sidewall of the chip. Implementation of the process includes: 1) holding individual chips for batch processing, 2) depositing a dielectric passivation layer on the top and sidewalls of the chips, 3) opening vias in the dielectric, 4) forming the interconnects by laser pantography, and 5) removing the chips from the holding means. The process enables low cost manufacturing of chips with bond pads on the sidewalls, which enables stacking for increased performance, reduced space, and higher functional per unit volume.
Inventors
- 👤 Vincent Malba
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:07
CPC Classifications
G; G03; G03F; G03F7/00; H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/65; H10W70/657; H10W90/00; H10W72/00; H10W72/834; H10W90/20; Y; Y10; Y10S; Y10S430/00; Y10S430/146
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
104 words
A method for extending bond pads on a top surface of an integrated circuit chip to a sidewall of the chip, comprising: temporarily holding a plurality of chips for processing, forming a dielectric layer on the top surface and at least one sidewall of the chips, opening vias in the dielectric layer on the top surface and the at least one sidewall of each chip, forming patterned metal traces connected to the bond pads on the top surface and extending only onto the at least one sidewall of each chip using laser pantography, and removing the thus processed chips from the temporary holding arrangement.
Claim 2
Independent Claim
104 words
A method for extending bond pads on a top surface of an integrated circuit chip to a sidewall of the chip, comprising: temporarily holding a plurality of chips for processing, forming a dielectric layer on the top surface and at least one sidewall of the chips, opening vias in the dielectric layer on the top surface and the at least one sidewall of each chip, forming patterned metal traces connected to the bond pads on the top surface and extending only onto the at least one sidewall of each chip using laser pantography, and removing the thus processed chips from the temporary holding arrangement.
Claim 3
Dependent Claim
66 words
The method of claim 1, wherein temporarily holding the chips is carried out by placing the bottom surface of the chips on a silicone layer which is supported on a mesh material, and wherein removing the chips is carried out by drawing a vacuum through the mesh material for reducing contact between the chips and the silicone layer, and removing the chips from the silicone layer.
Claim 4
Dependent Claim
48 words
The method of claim 1, wherein temporarily holding the chips is carried out by positioning the chips on a substrate via an adhesive material and wherein removing the chips is carried out by processing the adhesive material to reduce adhesion to the chips, and removing the chip therefrom.
Claim 5
Dependent Claim
23 words
The method of claim 1, wherein forming the dielectric layer is carried out by vapor deposition polymerization of polyimide, and curing the polyimide.
Claim 6
Dependent Claim
21 words
The method of claim 1, wherein forming the dielectric layer is carried out by vapor deposition polymerization, PECVD, or RIE etching.
Claim 7
Dependent Claim
17 words
The method of claim 1, wherein the vias are opened in the dielectric layer by laser ablation.
Claim 8
Dependent Claim
25 words
The method of claim 1, wherein laser pantography is carried out using a laser selected from the group consisting of argon-ion, Nd:YAG, excimer, and nitrogen.
Claim 9
Dependent Claim
15 words
The method of claim 1, wherein laser pantography is carried out using a pulsed laser.
Claim 10
Dependent Claim
25 words
The method of claim 1, wherein the vias are opened using an ultraviolet laser selected from the group consisting of pulsed and continuous wave lasers.
Claim 11
Dependent Claim
29 words
The method of claim 1, wherein the dielectric layer is formed of material selected from the group consisting of polyimide, silicon oxide, silicon nitride, silicon oxy-nitride, polyamide, and parlyene.
Claim 12
Dependent Claim
16 words
The method of claim 1, wherein the patterned metal traces are patterned in an L-shaped configuration.
Claim 13
Dependent Claim
41 words
The method of claim 1, additionally including forming bond pads on the sidewalls of the chips, and interconnecting bond pads on the top surface of the chips with the bond pads of the sidewalls with L-connects composed of the metal traces.
Claim 14
Dependent Claim
105 words
A process for three dimensional chip stacking, including: providing a plurality of chips having bond pads on a surface thereof, and forming L-connects on the surface and one or more sidewalls of the chips which are in electrical contact with the bond pads, forming of the L-connects by providing the chips with a dielectric film on the surface and one or more sidewalls, forming vias in the dielectric film, and directing laser energy onto the dielectric film forming patterned metal traces, and stacking the chips one on top of another whereby the chips can be interconnected via the L-connects on the one or more sidewalls.
Claim 15
Dependent Claim
105 words
A process for three dimensional chip stacking, including: providing a plurality of chips having bond pads on a surface thereof, and forming L-connects on the surface and one or more sidewalls of the chips which are in electrical contact with the bond pads, forming of the L-connects by providing the chips with a dielectric film on the surface and one or more sidewalls, forming vias in the dielectric film, and directing laser energy onto the dielectric film forming patterned metal traces, and stacking the chips one on top of another whereby the chips can be interconnected via the L-connects on the one or more sidewalls.
Claim 16
Dependent Claim
22 words
The process of claim 13, additionally including releasably holding the plurality of chips to enable forming the L-connects in a batch process.
Claim 17
Dependent Claim
30 words
The process of claim 13, wherein releasably holding the plurality of chips involves positioning a surface of the chips on a material selected from the group of silicone and adhesive.
Claim 18
Dependent Claim
19 words
The process of claim 13, additionally including forming bond pads on the chip sidewalls in contact with the L-connects.
Claim 19
Dependent Claim
20 words
The process of claim 13, wherein the laser energy directed onto the dielectric film is carried out using laser pantography.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-09 | 2002-05-11 | 2002-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-09 | 2006-05-11 | 2006-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-09 | 2010-05-11 | 2010-11-10 | $7700.00 | Window Closed / Lapsed |