US5828226A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe card assembly for high density integrated circuits
Assignee: Nidec SV Probe Pte Ltd
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Filing: 1996-11-06
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Granted: 1998-10-27
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Expires: 2016-11-06
Abstract
Abstract A probe card assembly includes a probe card, an interposer and a probe array. The probe array includes a plurality of closely spaced pins, each pin includes a post and a beam, and each beam has a first end attached to the top of a post and a second end for contacting an integrated circuit. A bead on the second end of the beam assures that the free end of the beam will contact an IC first. For contacts on a grid, the beams extend diagonally relative to the rows and columns of the grid, enabling the beams to be longer. For contacts in a row on centers closer than the pins, two rows of pins straddle the contacts and the beams extend toward the contacts from opposite sides of the contacts. The probe array can be formed on the high density side of the interposer.
Inventors
- 👤 H. Dan Higgins
- 👤 Rajiv Pandey
- 👤 Norman J. Armendariz
- 👤 R. Dennis Bates
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:34
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07364; G01R1/07378
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
79 words
A probe card assembly for providing temporary electrical connections to a high density integrated circuit, said probe comprising: a probe card including a plurality of conductive traces; a plurality of pins in a high density array, wherein each pin includes a post and a cantilever mounted beam, said beam has a first end attached to the post and a second end for contacting said integrated circuit; and an interposer electrically connecting respective ones of said traces and said pins.
Claim 2
Dependent Claim
79 words
A probe card assembly for providing temporary electrical connections to a high density integrated circuit, said probe comprising: a probe card including a plurality of conductive traces; a plurality of pins in a high density array, wherein each pin includes a post and a cantilever mounted beam, said beam has a first end attached to the post and a second end for contacting said integrated circuit; and an interposer electrically connecting respective ones of said traces and said pins.
Claim 3
Dependent Claim
15 words
The probe card assembly as set forth in claim 1 wherein said array is solid.
Claim 4
Dependent Claim
15 words
The probe card assembly as set forth in claim 1 wherein said array is hollow.
Claim 5
Dependent Claim
25 words
The probe card assembly as set forth in claim 1 wherein the second end of each beam includes a bump for contacting said integrated circuit.
Claim 6
Dependent Claim
34 words
The probe card assembly as set forth in claim 1 wherein said array includes pins arranged in rows and columns and the beam of each pin extends diagonally relative to the rows and columns.
Claim 7
Dependent Claim
39 words
The probe card assembly as set forth in claim 1 and further comprising: a flexible interconnect between said probe card and said interposer, said flexible interconnect enabling said interposer and said probe card to be positioned in intersecting planes.
Claim 8
Dependent Claim
36 words
The probe card assembly as set forth in claim 6 wherein said flexible interconnect includes a plurality of slanted pins in an elastomer sheet for providing a yielding connection between said interposer and said probe card.
Claim 9
Dependent Claim
21 words
The probe card assembly as set forth in claim 1 wherein said plurality of pins extends from a rigid, insulating substrate.
Claim 10
Dependent Claim
21 words
The probe card assembly as set forth in claim 1 wherein said plurality of pins extends from a flexible, insulating substrate.
Claim 11
Dependent Claim
40 words
The probe card assembly as set forth in claim 1 wherein said array includes pins arranged in rows and columns and the beams of the pins in one column extend toward the beams of the pins in an adjacent column.
Claim 12
Dependent Claim
18 words
The probe card assembly as set forth in claim 10 wherein the beams in adjacent columns are interleaved.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-10-26 | 2002-04-27 | 2002-10-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-10-26 | 2006-04-27 | 2006-10-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-10-26 | 2010-04-27 | 2010-10-27 | $7700.00 | Window Closed / Lapsed |