US5824235A
Expired / Lapsed
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Method of manufacturing semiconductor device
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1996-07-29
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Granted: 1998-10-20
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Expires: 2016-07-29
Abstract
Abstract There is provided a technique which prevents semiconductor devices under fabrication from being destroyed by pulse-like high potentials applied by plasma without adding any special fabrication step. A first line extending to a gate electrode of a thin film transistor is formed. A first insulation film is formed on the first line. A second line connected to a source region of the thin film transistor is formed on the insulation film. A second insulation film is formed on the second line. Then, a conductive pattern is formed on the second insulation film. A discharge pattern is formed the first and/or second line, and the first and/or second line is cut simultaneously with the formation of the conductive pattern.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Jun Koyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 17:22
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; H10D89/00; H10D89/60; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/136204; H10D86/00; H10D86/40; H10D86/441; H10D86/451; H10D86/60
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
128 words
A method of manufacturing a semiconductor device comprising the steps of: forming a first wiring including a gate electrode for a thin film transistor over a substrate; forming an interlayer insulator on said first wiring; forming a second wiring on said interlayer insulator, said second wiring being connected to one of source and drain regions of said thin film transistor; forming a second interlayer insulator on said second wiring; forming a conductive film on said second interlayer insulator; and then patterning said conductive film by etching, wherein said first and second wirings are shorted with each other at least during the formation of said second interlayer insulator and said conductive film; and wherein at least one of said first and second wirings is provided with a discharge pattern.
Claim 2
Independent Claim
128 words
A method of manufacturing a semiconductor device comprising the steps of: forming a first wiring including a gate electrode for a thin film transistor over a substrate; forming an interlayer insulator on said first wiring; forming a second wiring on said interlayer insulator, said second wiring being connected to one of source and drain regions of said thin film transistor; forming a second interlayer insulator on said second wiring; forming a conductive film on said second interlayer insulator; and then patterning said conductive film by etching, wherein said first and second wirings are shorted with each other at least during the formation of said second interlayer insulator and said conductive film; and wherein at least one of said first and second wirings is provided with a discharge pattern.
Claim 3
Dependent Claim
20 words
The method of claim 1 wherein the formation of said second interlayer insulator is carried out by using a plasma.
Claim 4
Dependent Claim
19 words
The method of claim 1 wherein the formation of said conductive layer is carried out by using a plasma.
Claim 5
Dependent Claim
21 words
The method of claim 1 wherein said first and second wirings are electrically separated from each other by said patterning step.
Claim 6
Independent Claim
129 words
A method of manufacturing an active matrix device comprising the steps of: providing a first plurality of wirings extending in a column direction; forming a first interlayer insulator on said first plurality of wirings; providing a second plurality of wirings extending in a row direction orthogonal to said column directions; forming a second interlayer insulator on said second plurality of wirings; forming a conductive film on said second interlayer insulator; and patterning said conductive film by etching, wherein at least one of said first and second plurality of wirings is provided with a discharge pattern, and wherein said first plurality of wirings are shorted with each other via a shorting wiring during the formation of said second interlayer insulator and said shorting wiring is disconnected by said patterning step.
Claim 7
Independent Claim
129 words
A method of manufacturing an active matrix device comprising the steps of: providing a first plurality of wirings extending in a column direction; forming a first interlayer insulator on said first plurality of wirings; providing a second plurality of wirings extending in a row direction orthogonal to said column directions; forming a second interlayer insulator on said second plurality of wirings; forming a conductive film on said second interlayer insulator; and patterning said conductive film by etching, wherein at least one of said first and second plurality of wirings is provided with a discharge pattern, and wherein said first plurality of wirings are shorted with each other via a shorting wiring during the formation of said second interlayer insulator and said shorting wiring is disconnected by said patterning step.
Claim 8
Dependent Claim
32 words
The method of claim 5 wherein said first plurality of wirings are electrically connected with said second plurality of wirings and are separated therefrom by said patterning step of the conductive film.
Claim 9
Independent Claim
69 words
A method of manufacturing an active matrix device comprising the steps of: providing a plurality of wirings for an active matrix circuit over a substrate; forming an insulating film on said plurality of wirings; forming a conductive film on said insulating film; and patterning said conductive film, wherein said wirings are provided with a lead having a discharge pattern, and wherein said lead is disconnected by said patterning step.
Claim 10
Independent Claim
69 words
A method of manufacturing an active matrix device comprising the steps of: providing a plurality of wirings for an active matrix circuit over a substrate; forming an insulating film on said plurality of wirings; forming a conductive film on said insulating film; and patterning said conductive film, wherein said wirings are provided with a lead having a discharge pattern, and wherein said lead is disconnected by said patterning step.
Claim 11
Dependent Claim
40 words
The method of claim 7 wherein said plurality of wirings are electrically connected with each other at least during the formation of said insulating film and said conductive film and are electrically disconnected from each other by said patterning step.
Claim 12
Independent Claim
72 words
A method of manufacturing an active matrix device comprising the steps of: providing a plurality of wirings for an active matrix circuit over a substrate; forming an insulating film on said plurality of wirings; forming a conductive film on said insulating film; and patterning said conductive film, wherein said wirings are provided with a discharge pattern, and wherein said discharge pattern is separated from said plurality of wirings by said patterning step.
Claim 13
Independent Claim
72 words
A method of manufacturing an active matrix device comprising the steps of: providing a plurality of wirings for an active matrix circuit over a substrate; forming an insulating film on said plurality of wirings; forming a conductive film on said insulating film; and patterning said conductive film, wherein said wirings are provided with a discharge pattern, and wherein said discharge pattern is separated from said plurality of wirings by said patterning step.
Claim 14
Dependent Claim
40 words
The method of claim 9 wherein said plurality of wirings are electrically connected with each other at least during the formation of said insulating film and said conductive film and are electrically disconnected from each other by said patterning step.
Claim 15
Independent Claim
103 words
A method of manufacturing an electro-optical device comprising the steps of: preparing a first plurality of column lines including gate electrodes for thin film transistors over a substrate, said column lines being electrically shorted with each other through a first shorting wiring; forming an interlayer insulator on said first plurality of column lines; preparing a second plurality of row lines connected to a source of said thin film transistors and extending orthogonal to said column lines, said row lines being electrically shorted with each other through a second shorting wiring; and then disposing said substrate to a plasma for conducting a plasma processing.
Claim 16
Independent Claim
103 words
A method of manufacturing an electro-optical device comprising the steps of: preparing a first plurality of column lines including gate electrodes for thin film transistors over a substrate, said column lines being electrically shorted with each other through a first shorting wiring; forming an interlayer insulator on said first plurality of column lines; preparing a second plurality of row lines connected to a source of said thin film transistors and extending orthogonal to said column lines, said row lines being electrically shorted with each other through a second shorting wiring; and then disposing said substrate to a plasma for conducting a plasma processing.
Claim 17
Dependent Claim
20 words
The method of claim 11 wherein said plasma processing is at least one of sputtering, plasma CVD, and plasma etching.
Claim 18
Independent Claim
112 words
A method of manufacturing an electro-optical device comprising the steps of: preparing a first plurality of column lines including gate electrodes for thin film transistors over a substrate; forming an interlayer insulator on said first plurality of column lines; preparing a second plurality of row lines connected to a source of said thin film transistors and extending orthogonal to said column lines; and then disposing said substrate to a plasma for conducting a plasma processing, wherein said first plurality of column lines and said second plurality of row lines are electrically connected to a same potential in order to prevent a damage of said thin film transistor caused by said plasma processing.
Claim 19
Independent Claim
112 words
A method of manufacturing an electro-optical device comprising the steps of: preparing a first plurality of column lines including gate electrodes for thin film transistors over a substrate; forming an interlayer insulator on said first plurality of column lines; preparing a second plurality of row lines connected to a source of said thin film transistors and extending orthogonal to said column lines; and then disposing said substrate to a plasma for conducting a plasma processing, wherein said first plurality of column lines and said second plurality of row lines are electrically connected to a same potential in order to prevent a damage of said thin film transistor caused by said plasma processing.
Claim 20
Dependent Claim
20 words
The method of claim 13 wherein said plasma processing is at least one of sputtering, plasma CVD, and plasma etching.
Claim 21
Independent Claim
99 words
A method of manufacturing an electro-optical device comprising the steps of: preparing a first plurality of column lines including gate electrodes for thin film transistors over a substrate; forming an interlayer insulator on said first plurality of column lines; preparing a second plurality of row lines connected to a source of said thin film transistors and extending orthogonal to said column lines; and then disposing said substrate to a plasma for conducting a plasma processing, wherein at least one of said first and second wirings is provided with a lead having a portion at which an impedance locally changes.
Claim 22
Independent Claim
99 words
A method of manufacturing an electro-optical device comprising the steps of: preparing a first plurality of column lines including gate electrodes for thin film transistors over a substrate; forming an interlayer insulator on said first plurality of column lines; preparing a second plurality of row lines connected to a source of said thin film transistors and extending orthogonal to said column lines; and then disposing said substrate to a plasma for conducting a plasma processing, wherein at least one of said first and second wirings is provided with a lead having a portion at which an impedance locally changes.
Claim 23
Dependent Claim
20 words
The method of claim 15 wherein said plasma processing is at least one of sputtering, plasma CVD, and plasma etching.
References Cited (Backward Citations)
US4792210A
Cited
US5234541A
Cited
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