US5820448A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Carrier head with a layer of conformable material for a chemical mechanical polishing system
Assignee: Applied Materials Inc
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Filing: 1996-10-10
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Granted: 1998-10-13
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Expires: 2016-10-10
Abstract
Abstract A carrier head for a chemical mechanical polishing apparatus. The carrier head includes a housing with a recess. A flexible membrane defines an enclosed volume in the recess. A conformable material is disposed in the enclosed volume. The conformable material ensures that any load applied to the substrate is evenly distributed.
Inventors
- 👤 Sam Shamouilian
- 👤 Norm Shendon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:52
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/04; B24B37/042; B24B37/07; B24B37/10; B24B37/105; B24B37/27; B24B37/30; B24B49/00; B24B49/16
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
52 words
A carrier head for positioning a substrate on a polishing surface of a chemical mechanical polishing apparatus, comprising: a housing forming a recess; a flexible membrane defining an enclosed volume in said recess, said membrane having a mounting surface for said substrate; and a conformable viscoelastic material disposed within said enclosed volume.
Claim 2
Dependent Claim
52 words
A carrier head for positioning a substrate on a polishing surface of a chemical mechanical polishing apparatus, comprising: a housing forming a recess; a flexible membrane defining an enclosed volume in said recess, said membrane having a mounting surface for said substrate; and a conformable viscoelastic material disposed within said enclosed volume.
Claim 3
Dependent Claim
17 words
The carrier head of claim 1 further comprising a backing member to which said membrane is attached.
Claim 4
Dependent Claim
18 words
The carrier head of claim 2 further comprising a flexible connector connecting said backing member to said housing.
Claim 5
Dependent Claim
11 words
The carrier head of claim 1 wherein said membrane is rubber.
Claim 6
Dependent Claim
21 words
The carrier head of claim 1 wherein said conformable viscoelastic material is selected from the group consisting of silicone and gelatin.
Claim 7
Dependent Claim
19 words
The carrier head of claim 1 wherein said membrane encapsulates said conformable viscoelastic material to form said enclosed volume.
Claim 8
Dependent Claim
22 words
The carrier head of claim 1 further comprising a retaining ring, said retaining ring forming at least a portion of said recess.
Claim 9
Dependent Claim
22 words
The carrier head of claim 1 further comprising a source connected to said enclosed volume to supply the conformable viscoelastic material thereto.
Claim 10
Dependent Claim
83 words
A carrier for positioning a substrate on a polishing surface of a chemical mechanical polishing apparatus, comprising: a housing having a recess; a first flexible membrane portion defining a first enclosed volume in said recess; a second flexible membrane portion defining a second enclosed volume in said recess; a first conformable material having a first viscosity disposed in said first enclosed volume; and a second conformable material having a second viscosity different from said first viscosity and disposed in said second enclosed volume.
Claim 11
Dependent Claim
83 words
A carrier for positioning a substrate on a polishing surface of a chemical mechanical polishing apparatus, comprising: a housing having a recess; a first flexible membrane portion defining a first enclosed volume in said recess; a second flexible membrane portion defining a second enclosed volume in said recess; a first conformable material having a first viscosity disposed in said first enclosed volume; and a second conformable material having a second viscosity different from said first viscosity and disposed in said second enclosed volume.
Claim 12
Dependent Claim
79 words
A carrier for positioning a substrate on a polishing surface of a chemical mechanical polishing apparatus, comprising: a housing; a backing member which is vertically movable relative to said housing; a flexible connector connecting said backing member to said housing for controlling the vertical position of said backing member; a flexible membrane defining an enclosed volume beneath said backing member, said membrane having a mounting surface for said substrate; and a conformable viscoelastic material disposed in said enclosed volume.
Claim 13
Dependent Claim
79 words
A carrier for positioning a substrate on a polishing surface of a chemical mechanical polishing apparatus, comprising: a housing; a backing member which is vertically movable relative to said housing; a flexible connector connecting said backing member to said housing for controlling the vertical position of said backing member; a flexible membrane defining an enclosed volume beneath said backing member, said membrane having a mounting surface for said substrate; and a conformable viscoelastic material disposed in said enclosed volume.
Claim 14
Dependent Claim
21 words
The carrier head of claim 10 wherein said flexible connector defines a pressure chamber between said housing and said backing member.
Claim 15
Dependent Claim
23 words
The carrier head of claim 11 further comprising a source connected to said enclosed volume to supply the material to said enclosed volume.
Claim 16
Dependent Claim
24 words
The carrier head of claim 12 further comprising a flexible conduit disposed in said pressure chamber to connect said source to said enclosed volume.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-10-12 | 2002-04-13 | 2002-10-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-10-12 | 2006-04-13 | 2006-10-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-10-12 | 2010-04-13 | 2010-10-13 | $7700.00 | Window Closed / Lapsed |