Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
63 words
A microvalve having a body having a fluid inlet channel and a fluid outlet channel bonded to a cover plate having a fluid inlet and a fluid outlet, said body including a valve member positioned between said inlet and outlet channels of said body, and means for moving said valve member for allowing fluid flow from said inlet channel to said outlet channel.
Claim 2
Dependent Claim
63 words
A microvalve having a body having a fluid inlet channel and a fluid outlet channel bonded to a cover plate having a fluid inlet and a fluid outlet, said body including a valve member positioned between said inlet and outlet channels of said body, and means for moving said valve member for allowing fluid flow from said inlet channel to said outlet channel.
Claim 3
Dependent Claim
35 words
The microvalve of claim 1, wherein said body is composed of silicon, wherein said cover plate is composed of glass, and wherein said means for moving said valve member is composed of an SMA film.
Claim 4
Dependent Claim
29 words
A microvalve including a body, a valve member, and means for moving said valve member, wherein said means for moving said valve member includes means for electrostatic actuation thereof.
Claim 5
Dependent Claim
29 words
A microvalve including a body, a valve member, and means for moving said valve member, wherein said means for moving said valve member includes means for electrostatic actuation thereof.
Claim 6
Dependent Claim
31 words
The microvalve of claim 3, wherein said means for electrostatic actuation includes a power source connected intermediate the valve member and body, and a switch means for controlling said power source.
Claim 7
Dependent Claim
36 words
The microvalve of claim 3, wherein said means for moving said valve member is composed of a layer of conductive polymer, an electrode adopted to be connected to a power source, and a layer of polyimide.
Claim 8
Dependent Claim
34 words
The microvalve of claim 1, wherein said valve member includes a plurality of movable members, and wherein movement of said movable members may be at least partially assisted by fluid flowing in said body.
Claim 9
Dependent Claim
142 words
A microvalve comprising: a silicon member; a glass member; said silicon member and glass member being bonded together; said glass member being provided with an inlet opening and an outlet opening; said silicon member being provided with an inlet channel and an outlet channel; one end of said inlet channel terminating adjacent said inlet opening of said glass member; one end of said outlet channel terminating adjacent said outlet opening of said glass member; a valve member formed in said silicon member and on which is bonded a valve seat; said inlet channel and said outlet channel being normally closed with respect to one another by said valve seat of said valve member; and means secured to said silicon member for actuating said valve member and moving said valve seat, thereby allowing open communication between said inlet channel and said outlet channel.
Claim 10
Dependent Claim
142 words
A microvalve comprising: a silicon member; a glass member; said silicon member and glass member being bonded together; said glass member being provided with an inlet opening and an outlet opening; said silicon member being provided with an inlet channel and an outlet channel; one end of said inlet channel terminating adjacent said inlet opening of said glass member; one end of said outlet channel terminating adjacent said outlet opening of said glass member; a valve member formed in said silicon member and on which is bonded a valve seat; said inlet channel and said outlet channel being normally closed with respect to one another by said valve seat of said valve member; and means secured to said silicon member for actuating said valve member and moving said valve seat, thereby allowing open communication between said inlet channel and said outlet channel.
Claim 11
Dependent Claim
35 words
The microvalve of claim 7, wherein said valve member actuating means includes a shape memory alloy film selected from the group of films consisting of a two-element alloy, a three-element alloy, and a four-element alloy.
Claim 12
Dependent Claim
17 words
The microvalve of claim 7, wherein said valve member comprises a thinned section of said silicon member.
Claim 13
Dependent Claim
22 words
The microvalve of claim 9, wherein said valve seat is bonded to a frontside of said thinned section of said silicon member.
Claim 14
Dependent Claim
29 words
The microvalve of claim 9, wherein said valve member actuating means comprises a shape memory alloy film secured to a backside of said thinned section of said silicon member.
Claim 15
Dependent Claim
15 words
The microvalve of claim 7, wherein said valve seat is composed of SiO 2 .
Claim 16
Dependent Claim
17 words
The microvalve of claim 7, additionally including means for initiating activation of said valve member actuating means.
Claim 17
Dependent Claim
34 words
The microvalve of claim 7, wherein said means for actuating said valve member is selected from the group consisting of thermally, magnetically, and electrostatically actuated means, a shape memory alloy, and a thermal bimorph.
Claim 18
Dependent Claim
50 words
A microvalve comprising: a body member having at least one opening therein; at least one microcantilever means secured to an outer surface of said body member for controlling fluid passage through said at least one opening in said body member; and means for actuating said at least one microcantilever means.
Claim 19
Dependent Claim
50 words
A microvalve comprising: a body member having at least one opening therein; at least one microcantilever means secured to an outer surface of said body member for controlling fluid passage through said at least one opening in said body member; and means for actuating said at least one microcantilever means.
Claim 20
Dependent Claim
29 words
The microvalve of claim 15, wherein said body member is a hollow member and wherein said at least one opening is located in a wall of said hollow member.
Claim 21
Dependent Claim
23 words
The microvalve of claim 15, wherein said means for actuating said at least one microcantilever means includes fluid flowing through said hollow member.
Claim 22
Dependent Claim
25 words
The microvalve of claim 15, wherein said means for actuating said at least one microcantilever means is selected from means activated thermally, magnetically, and electrostatically.
Claim 23
Dependent Claim
31 words
The microvalve of claim 15, wherein said at least one microcantilever means is constructed when actuated to function as a microrudder for steering the microvalve through a passageway containing a fluid.
Claim 24
Dependent Claim
18 words
The microvalve of claim 15, wherein said at least one microcantilever means comprises a polyimide bimorph electrostatic microactuator.
Claim 25
Dependent Claim
55 words
The microvalve of claim 15, wherein said at least one microcantilever means is constructed to be normally positioned to allow fluid to pass through said at least one opening in said body member, and upon activation said at least one microcantilever means is moved to close said at least one opening in said body member.
Claim 26
Dependent Claim
64 words
The microvalve of claim 15, wherein said at least one microcantilever means comprises an electrode having a conductive polymer layer on one side and a polyimide layer on an opposite side; and wherein said means for actuating said at least one microcantilever means comprises an electrical power supply and a switch operatively connected to said body member and said electrode of said microcantilever means.