US5817580A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of etching silicon dioxide
Assignee: Micron Technology Inc
•
Filing: 1996-02-08
•
Granted: 1998-10-06
•
Expires: 2016-02-08
Abstract
Abstract A layer of silicon dioxide is formed conformably over a substrate having a surface with non-planar topography. The layer of silicon dioxide is then implanted with a species that affects the etch rate of the silicon dioxide when etched in an HF based etchant. The implant energy, dose, and direction are chosen such that only a selected portion of the layer of silicon dioxide is implanted with the implant species. The layer of silicon dioxide is then etched in an HF based etchant. The HF etchant etches both doped and undoped silicon dioxide, but the implanted silicon dioxide is removed at a faster rate or slower rate, depending on the implant species, than the unimplanted silicon dioxide. This allows the formation of specialized silicon dioxide structures due to the selectivity of the etch as between the implanted and unimplanted portions of the layer of silicon dioxide, without any damage to silicon.
Inventors
- 👤 Michael P. Violette
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 01:33
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
105 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of a first material; forming a layer of silicon dioxide on said surface of said substrate; implanting a dopant into said layer of silicon dioxide to form doped and undoped portions of said layer of silicon dioxide; and etching said layer of silicon dioxide with an etchant that has a faster material removal rate from said doped portion of said layer of silicon dioxide than the material removal rates from either said undoped portion of said layer of silicon dioxide or said first material of said substrate.
Claim 2
Independent Claim
105 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of a first material; forming a layer of silicon dioxide on said surface of said substrate; implanting a dopant into said layer of silicon dioxide to form doped and undoped portions of said layer of silicon dioxide; and etching said layer of silicon dioxide with an etchant that has a faster material removal rate from said doped portion of said layer of silicon dioxide than the material removal rates from either said undoped portion of said layer of silicon dioxide or said first material of said substrate.
Claim 3
Independent Claim
123 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; doping said layer of silicon dioxide by implanting phosphorous therein to form a doped portion of said layer of silicon dioxide that is doped with phosphorous and an undoped portion of said layer of silicon dioxide that is not doped with phosphorous; and etching said layer of silicon dioxide with an etchant that removes the doped portion of the layer of silicon dioxide at a faster rate than either silicon or undoped portion of the layer of silicon dioxide is removed.
Claim 4
Independent Claim
123 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; doping said layer of silicon dioxide by implanting phosphorous therein to form a doped portion of said layer of silicon dioxide that is doped with phosphorous and an undoped portion of said layer of silicon dioxide that is not doped with phosphorous; and etching said layer of silicon dioxide with an etchant that removes the doped portion of the layer of silicon dioxide at a faster rate than either silicon or undoped portion of the layer of silicon dioxide is removed.
Claim 5
Independent Claim
92 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of a first material; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting an implant species into said first portion without implanting said implant species into said second portion; and etching said layer of silicon dioxide with an etchant that is: selective to second portion; selective to said first material of said substrate; and not selective to said first portion.
Claim 6
Independent Claim
92 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of a first material; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting an implant species into said first portion without implanting said implant species into said second portion; and etching said layer of silicon dioxide with an etchant that is: selective to second portion; selective to said first material of said substrate; and not selective to said first portion.
Claim 7
Dependent Claim
12 words
The method as defined in claim 3, wherein the etchant is HF.
Claim 8
Dependent Claim
13 words
The method as defined in claim 3, wherein the implant species is phosphorous.
Claim 9
Dependent Claim
16 words
The method as defined in claim 3, wherein the first material of the substrate is silicon.
Claim 10
Dependent Claim
14 words
The method as defined in claim 3, wherein the surface has a non-planar topography.
Claim 11
Dependent Claim
29 words
The method as defined in claim 3, wherein the implanted species is implanted with: an implant direction with respect to the surface of the substrate; and an implant energy.
Claim 12
Dependent Claim
26 words
The method as defined in claim 3, wherein the implanted species is implanted with an implant direction that is normal to the surface of said substrate.
Claim 13
Dependent Claim
33 words
The method as defined in claim 3, wherein the implanted species is implanted with: a plurality of implant directions with respect to the surface of the substrate; and a plurality of implant energies.
Claim 14
Dependent Claim
28 words
The method as defined in claim 3, wherein etching said layer of silicon dioxide with an etchant comprises the step of dipping the substrate into a liquid HF.
Claim 15
Dependent Claim
31 words
The method as defined in claim 3, wherein etching said layer of silicon dioxide with an etchant comprises the step of exposing said layer of silicon dioxide to an HF vapor.
Claim 16
Dependent Claim
30 words
The method as defined in claim 3, wherein etching said layer of silicon dioxide with an etchant comprises the step of exposing said layer of silicon dioxide to anhydrous HF.
Claim 17
Independent Claim
214 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of a semiconductor material; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; forming a layer of a masking material upon the layer of silicon dioxide, said layer of said masking material having: a first portion upon and the first portion of the layer of silicon dioxide; and a second portion upon and the second portion of the layer of silicon dioxide; patterning said layer of said masking material to: remove the first portion of said layer of said masking material; expose the first portion of the silicon dioxide; and leave the second portion of the layer of the masking material upon the second portion of the layer of silicon dioxide; implanting an implant species into said first portion of said layer of silicon dioxide without implanting said implant species into said second portion of said layer of silicon dioxide; and etching said layer of silicon dioxide with an etchant that is: selective to second portion of said layer of silicon dioxide; selective to said semiconductor material of said substrate; and not selective to said first portion of said layer of silicon dioxide.
Claim 18
Independent Claim
214 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of a semiconductor material; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; forming a layer of a masking material upon the layer of silicon dioxide, said layer of said masking material having: a first portion upon and the first portion of the layer of silicon dioxide; and a second portion upon and the second portion of the layer of silicon dioxide; patterning said layer of said masking material to: remove the first portion of said layer of said masking material; expose the first portion of the silicon dioxide; and leave the second portion of the layer of the masking material upon the second portion of the layer of silicon dioxide; implanting an implant species into said first portion of said layer of silicon dioxide without implanting said implant species into said second portion of said layer of silicon dioxide; and etching said layer of silicon dioxide with an etchant that is: selective to second portion of said layer of silicon dioxide; selective to said semiconductor material of said substrate; and not selective to said first portion of said layer of silicon dioxide.
Claim 19
Dependent Claim
15 words
The method as defined in claim 14, wherein said masking material is a photoresist material.
Claim 20
Independent Claim
92 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon, and said surface having a non-planar topography; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting phosphorous into said first portion without implanting phosphorous into said second portion; and etching said layer of silicon dioxide with an etchant that is: selective to second portion; selective to said silicon of said substrate; and not selective to said first portion.
Claim 21
Independent Claim
92 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon, and said surface having a non-planar topography; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting phosphorous into said first portion without implanting phosphorous into said second portion; and etching said layer of silicon dioxide with an etchant that is: selective to second portion; selective to said silicon of said substrate; and not selective to said first portion.
Claim 22
Independent Claim
79 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon, and said surface having a non-planar topography; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting phosphorous into said first portion without implanting phosphorous into said second portion; annealing said substrate to diffuse said implanted phosphorous; and etching said layer of silicon dioxide with HF.
Claim 23
Independent Claim
79 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon, and said surface having a non-planar topography; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting phosphorous into said first portion without implanting phosphorous into said second portion; annealing said substrate to diffuse said implanted phosphorous; and etching said layer of silicon dioxide with HF.
Claim 24
Independent Claim
97 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of a first material; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting a dopant into said first portion without implanting said dopant into said second portion; and etching said layer of silicon dioxide with an etchant that has a faster material removal rate from said second portion than the material removal rates from either said first portion or said first material of said substrate.
Claim 25
Independent Claim
97 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of a first material; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting a dopant into said first portion without implanting said dopant into said second portion; and etching said layer of silicon dioxide with an etchant that has a faster material removal rate from said second portion than the material removal rates from either said first portion or said first material of said substrate.
Claim 26
Independent Claim
124 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; doping said layer of silicon dioxide by implanting boron therein to form a doped portion of said layer of silicon dioxide that is doped with boron and an undoped portion of said layer of silicon dioxide that is not doped with boron; and etching said layer of silicon dioxide with an etchant that removes the doped portion of the layer of silicon dioxide at a slower rate than either silicon or the undoped portion of the layer of silicon dioxide is removed.
Claim 27
Independent Claim
124 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; doping said layer of silicon dioxide by implanting boron therein to form a doped portion of said layer of silicon dioxide that is doped with boron and an undoped portion of said layer of silicon dioxide that is not doped with boron; and etching said layer of silicon dioxide with an etchant that removes the doped portion of the layer of silicon dioxide at a slower rate than either silicon or the undoped portion of the layer of silicon dioxide is removed.
Claim 28
Independent Claim
99 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of a first material, and said surface having a non-planar topography; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting an implant species into said first portion without implanting said implant species into said second portion; and etching said layer of silicon dioxide with an etchant that is: selective to first portion; selective to said first material of said substrate; and not selective to said second portion.
Claim 29
Independent Claim
99 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of a first material, and said surface having a non-planar topography; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting an implant species into said first portion without implanting said implant species into said second portion; and etching said layer of silicon dioxide with an etchant that is: selective to first portion; selective to said first material of said substrate; and not selective to said second portion.
Claim 30
Dependent Claim
12 words
The method as defined in claim 20, wherein the etchant is HF.
Claim 31
Dependent Claim
13 words
The method as defined in claim 20, wherein the implant species is boron.
Claim 32
Dependent Claim
16 words
The method as defined in claim 20, wherein the first material of the substrate is silicon.
Claim 33
Dependent Claim
14 words
The method as defined in claim 20, wherein the surface has a non-planar topography.
Claim 34
Dependent Claim
29 words
The method as defined in claim 20, wherein the implanted species is implanted with: an implant direction with respect to the surface of the substrate; and an implant energy.
Claim 35
Dependent Claim
26 words
The method as defined in claim 20, wherein the implanted species is implanted with an implant direction that is normal to the surface of said substrate.
Claim 36
Dependent Claim
33 words
The method as defined in claim 20, wherein the implanted species is implanted with: a plurality of implant directions with respect to the surface of the substrate; and a plurality of implant energies.
Claim 37
Independent Claim
92 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon, and said surface having a non-planar topography; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting boron into said first portion without implanting boron into said second portion; and etching said layer of silicon dioxide with an etchant that is: selective to first portion; selective to said silicon of said substrate; and not selective to said second portion.
Claim 38
Independent Claim
92 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon, and said surface having a non-planar topography; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting boron into said first portion without implanting boron into said second portion; and etching said layer of silicon dioxide with an etchant that is: selective to first portion; selective to said silicon of said substrate; and not selective to said second portion.
Claim 39
Independent Claim
79 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon, and said surface having a non-planar topography; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting boron into said first portion without implanting boron into said second portion; annealing said substrate to diffuse said implanted boron; and etching said layer of silicon dioxide with HF.
Claim 40
Independent Claim
79 words
A method of removing silicon dioxide comprising: providing a substrate having a surface thereon, said substrate being composed of silicon, and said surface having a non-planar topography; forming a layer of silicon dioxide on said surface, said layer of silicon dioxide having a first portion and a second portion; implanting boron into said first portion without implanting boron into said second portion; annealing said substrate to diffuse said implanted boron; and etching said layer of silicon dioxide with HF.
Claim 41
Independent Claim
276 words
A method of forming a semiconductor structure, the method comprising: providing a substrate composed of a semiconductor material, the substrate having a surface thereon that is planar; forming a gate stack upon a surface of the surface of the substrate, said gate stack having: a top surface; a first side surface; and a second side surface that is opposite of the first side surface; forming a layer of silicon dioxide upon the gate stack and upon the surface of the substrate, said layer of silicon dioxide having: a top portion upon the top surface of the gate stack; a first side portion upon the first side surface of the gate stack; a second side portion upon the second side surface of the gate stack; and a third portion that is upon the surface of the substrate; implanting a dopant into said layer of silicon dioxide at an implant direction that is normal to the surface of said substrate such said dopant is implanted into: the top portion upon the top surface of the gate stack; and the third portion that is upon the surface of the substrate; wherein said dopant is not implanted into: the first side portion upon the first side surface of the gate stack; and the second side portion upon the second side surface of the gate stack; etching said layer of silicon dioxide with an etchant that has a faster material removal rate from the top and third portions of said layer of silicon dioxide than the material removal rates from either said first and second side portions of said layer of silicon dioxide or from said semiconductor material of said substrate.
Claim 42
Independent Claim
276 words
A method of forming a semiconductor structure, the method comprising: providing a substrate composed of a semiconductor material, the substrate having a surface thereon that is planar; forming a gate stack upon a surface of the surface of the substrate, said gate stack having: a top surface; a first side surface; and a second side surface that is opposite of the first side surface; forming a layer of silicon dioxide upon the gate stack and upon the surface of the substrate, said layer of silicon dioxide having: a top portion upon the top surface of the gate stack; a first side portion upon the first side surface of the gate stack; a second side portion upon the second side surface of the gate stack; and a third portion that is upon the surface of the substrate; implanting a dopant into said layer of silicon dioxide at an implant direction that is normal to the surface of said substrate such said dopant is implanted into: the top portion upon the top surface of the gate stack; and the third portion that is upon the surface of the substrate; wherein said dopant is not implanted into: the first side portion upon the first side surface of the gate stack; and the second side portion upon the second side surface of the gate stack; etching said layer of silicon dioxide with an etchant that has a faster material removal rate from the top and third portions of said layer of silicon dioxide than the material removal rates from either said first and second side portions of said layer of silicon dioxide or from said semiconductor material of said substrate.
Claim 43
Independent Claim
250 words
A method of forming a semiconductor structure comprising: providing a substrate composed of silicon, the substrate having a surface thereon that is planar; forming a gate stack upon a surface of the surface of the substrate, said gate stack having: a top surface; a first side surface; and a second side surface that is opposite of the first side surface; forming a layer of silicon dioxide upon the gate stack and upon the surface of the substrate, said layer of silicon dioxide having: a top portion upon the top surface of the gate stack; a first side portion upon the first side surface of the gate stack; a second side portion upon the second side surface of the gate stack; and a third portion that is upon the surface of the substrate; implanting a phosphorous dopant into said layer of silicon dioxide at an implant direction that is normal to the surface of said substrate such said phosphorous dopant is implanted into: the top portion upon the top surface of the gate stack; and the third portion that is upon the surface of the substrate; wherein said dopant is not implanted into: the first side portion upon the first side surface of the gate stack; and the second side portion upon the second side surface of the gate stack; etching said layer of silicon dioxide with HF, whereby said surface of said substrate is exposed that adjacent to the first and second side portions of the layer of silicon dioxide.
Claim 44
Independent Claim
250 words
A method of forming a semiconductor structure comprising: providing a substrate composed of silicon, the substrate having a surface thereon that is planar; forming a gate stack upon a surface of the surface of the substrate, said gate stack having: a top surface; a first side surface; and a second side surface that is opposite of the first side surface; forming a layer of silicon dioxide upon the gate stack and upon the surface of the substrate, said layer of silicon dioxide having: a top portion upon the top surface of the gate stack; a first side portion upon the first side surface of the gate stack; a second side portion upon the second side surface of the gate stack; and a third portion that is upon the surface of the substrate; implanting a phosphorous dopant into said layer of silicon dioxide at an implant direction that is normal to the surface of said substrate such said phosphorous dopant is implanted into: the top portion upon the top surface of the gate stack; and the third portion that is upon the surface of the substrate; wherein said dopant is not implanted into: the first side portion upon the first side surface of the gate stack; and the second side portion upon the second side surface of the gate stack; etching said layer of silicon dioxide with HF, whereby said surface of said substrate is exposed that adjacent to the first and second side portions of the layer of silicon dioxide.
Claim 45
Independent Claim
274 words
A method of forming a semiconductor structure comprising: providing a substrate composed of a semiconductor material, the substrate having a surface thereon that is planar; forming a gate stack upon a surface of the surface of the substrate, said gate stack having: a top surface; a first side surface; and a second side surface that is opposite of the first side surface; forming a layer of silicon dioxide upon the gate stack and upon the surface of the substrate, said layer of silicon dioxide having: a top portion upon the top surface of the gate stack; a first side portion upon the first side surface of the gate stack; a second side portion upon the second side surface of the gate stack; and a third portion that is upon the surface of the substrate; implanting a dopant into said layer of silicon dioxide at an implant direction that is normal to the surface of said substrate such said dopant is implanted into: the top portion upon the top surface of the gate stack; and the third portion that is upon the surface of the substrate; wherein said dopant is not implanted into: the first side portion upon the first side surface of the gate stack; and the second side portion upon the second side surface of the gate stack; etching said layer of silicon dioxide with an etchant that has a slower material removal rate from the top and third portions of said layer of silicon dioxide than the material removal rates from either said first and second side portions of said layer of silicon dioxide or from said semiconductor material of said substrate.
Claim 46
Independent Claim
274 words
A method of forming a semiconductor structure comprising: providing a substrate composed of a semiconductor material, the substrate having a surface thereon that is planar; forming a gate stack upon a surface of the surface of the substrate, said gate stack having: a top surface; a first side surface; and a second side surface that is opposite of the first side surface; forming a layer of silicon dioxide upon the gate stack and upon the surface of the substrate, said layer of silicon dioxide having: a top portion upon the top surface of the gate stack; a first side portion upon the first side surface of the gate stack; a second side portion upon the second side surface of the gate stack; and a third portion that is upon the surface of the substrate; implanting a dopant into said layer of silicon dioxide at an implant direction that is normal to the surface of said substrate such said dopant is implanted into: the top portion upon the top surface of the gate stack; and the third portion that is upon the surface of the substrate; wherein said dopant is not implanted into: the first side portion upon the first side surface of the gate stack; and the second side portion upon the second side surface of the gate stack; etching said layer of silicon dioxide with an etchant that has a slower material removal rate from the top and third portions of said layer of silicon dioxide than the material removal rates from either said first and second side portions of said layer of silicon dioxide or from said semiconductor material of said substrate.
Claim 47
Independent Claim
213 words
A method of forming a semiconductor structure comprising: providing a substrate composed of silicon, the substrate having a surface thereon that is planar; forming a gate stack upon a surface of the surface of the substrate, said gate stack having: a top surface; a first side surface; and a second side surface that is opposite of the first side surface; forming a layer of silicon dioxide upon the gate stack and upon the surface of the substrate, said layer of silicon dioxide having: a top portion upon the top surface of the gate stack; a first side portion upon the first side surface of the gate stack; a second side portion upon the second side surface of the gate stack; and a third portion that is upon the surface of the substrate; implanting a boron dopant into said layer of silicon dioxide at an implant direction that is normal to the surface of said substrate such said boron dopant is implanted into: the top portion; and the third portion; wherein said dopant is not implanted into: the first side portion; or the second side portion; etching said layer of silicon dioxide with HF, whereby said first side surface of said gate stack and said second side surface of said gate stack are exposed.
Claim 48
Independent Claim
213 words
A method of forming a semiconductor structure comprising: providing a substrate composed of silicon, the substrate having a surface thereon that is planar; forming a gate stack upon a surface of the surface of the substrate, said gate stack having: a top surface; a first side surface; and a second side surface that is opposite of the first side surface; forming a layer of silicon dioxide upon the gate stack and upon the surface of the substrate, said layer of silicon dioxide having: a top portion upon the top surface of the gate stack; a first side portion upon the first side surface of the gate stack; a second side portion upon the second side surface of the gate stack; and a third portion that is upon the surface of the substrate; implanting a boron dopant into said layer of silicon dioxide at an implant direction that is normal to the surface of said substrate such said boron dopant is implanted into: the top portion; and the third portion; wherein said dopant is not implanted into: the first side portion; or the second side portion; etching said layer of silicon dioxide with HF, whereby said first side surface of said gate stack and said second side surface of said gate stack are exposed.
References Cited (Backward Citations)
US5557141A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-10-05 | 2002-04-06 | 2002-10-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-10-05 | 2006-04-06 | 2006-10-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-10-05 | 2010-04-06 | 2010-10-06 | $7700.00 | Window Closed / Lapsed |