US5817579A
Expired / Lapsed
US
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Two step plasma etch method for forming self aligned contact
Assignee: Vanguard International Semiconductor Corp
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Filing: 1997-04-09
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Granted: 1998-10-06
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Expires: 2017-04-09
Abstract
Abstract A method for forming a via through a silicon oxide layer. There is first provided a substrate. There is then formed over the substrate a patterned silicon nitride layer which defines a contact beneath the patterned silicon nitride layer. There is then formed over the patterned silicon nitride layer a silicon oxide layer. There is then etched the silicon oxide layer through a first reactive ion etch (RIE) method employing a first etchant gas composition comprising a fluorocarbon etchant gas to form: (1) an etched silicon oxide layer which exposes the contact without substantially etching the patterned silicon nitride layer; and (2) a fluorocarbon polymer residue layer formed upon at least one of the etched silicon oxide layer and the patterned silicon nitride layer. Finally, there is stripped from the substrate the fluorocarbon polymer residue layer through a second reactive ion etch (RIE) method employing a second etchant gas composition comprising carbon tetrafluoride and oxygen. The method may also be employed in general for etching silicon oxide layers in the presence of silicon nitride layers. Similarly, the method may also in general be employed in removing fluorocarbon polymer residue layers from integrated circuit layers including but not limited to silicon oxide layers and silicon nitride layers.
Inventors
- 👤 Jun-Cheng Ko
- 👤 Erik S. Jeng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 20:52
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/23; H10P70/234; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P50/286; H10P50/287; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/069
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
75 words
A method for removing a fluorocarbon polymer residue layer from a substrate layer within an integrated circuit comprising: providing a substrate layer; forming over the substrate layer a photoresist layer; forming upon the substrate layer a fluorocarbon polymer residue layer; and stripping simultaneously from the substrate layer the photoresist layer and the fluorocarbon polymer residue layer through a first reactive ion etch (RIE) method employing a first etchant gas composition comprising carbon tetrafluoride and oxygen.
Claim 2
Independent Claim
75 words
A method for removing a fluorocarbon polymer residue layer from a substrate layer within an integrated circuit comprising: providing a substrate layer; forming over the substrate layer a photoresist layer; forming upon the substrate layer a fluorocarbon polymer residue layer; and stripping simultaneously from the substrate layer the photoresist layer and the fluorocarbon polymer residue layer through a first reactive ion etch (RIE) method employing a first etchant gas composition comprising carbon tetrafluoride and oxygen.
Claim 3
Dependent Claim
29 words
The method of claim 1 wherein the substrate layer is selected from the group of substrate layers consisting of conductor substrate layers, semiconductor substrate layers and dielectric substrate layers.
Claim 4
Dependent Claim
53 words
The method of claim 1 wherein the fluorocarbon polymer residue layer is formed through selectively etching a silicon oxide layer in the presence of a silicon nitride layer formed upon the substrate layer through a second reactive ion etch (RIE) method employing a second etchant gas composition comprising octafluorocyclobutane, carbon monoxide and argon.
Claim 5
Dependent Claim
62 words
The method of claim 3 wherein: octafluorocyclobutane is employed at a flow rate of from 12 to 24 standard cubic centimeters per minute (sccm); carbon monoxide is employed at a flow rate of from 150 to 350 standard cubic centimeters per minute (sccm); and argon is employed at a flow rate of from 250 to 500 standard cubic centimeters per minute (sccm).
Claim 6
Dependent Claim
24 words
The method of claim 1 wherein the first reactive ion etch (RIE) method employs a carbon tetrafluoride:oxygen volume ratio of from 1:5 to 1:20.
Claim 7
Independent Claim
99 words
A method for etching a silicon oxide layer comprising: providing a substrate; forming over the substrate a silicon oxide layer; forming over the substrate a photoresist layer; etching the silicon oxide layer through a first reactive ion etch (RIE) method employing a first etchant gas composition comprising a fluorocarbon etchant gas to form an etched silicon oxide layer and a fluorocarbon polymer residue layer thereupon; and stripping simultaneously from the substrate the photoresist layer and the fluorocarbon polymer residue layer through a second reactive ion etch (RIE) method employing a second etchant gas composition comprising carbon tetrafluoride and oxygen.
Claim 8
Independent Claim
99 words
A method for etching a silicon oxide layer comprising: providing a substrate; forming over the substrate a silicon oxide layer; forming over the substrate a photoresist layer; etching the silicon oxide layer through a first reactive ion etch (RIE) method employing a first etchant gas composition comprising a fluorocarbon etchant gas to form an etched silicon oxide layer and a fluorocarbon polymer residue layer thereupon; and stripping simultaneously from the substrate the photoresist layer and the fluorocarbon polymer residue layer through a second reactive ion etch (RIE) method employing a second etchant gas composition comprising carbon tetrafluoride and oxygen.
Claim 9
Dependent Claim
17 words
The method of claim 6 wherein the first etchant gas composition comprises octafluorocyclobutane, carbon monoxide and argon.
Claim 10
Dependent Claim
62 words
The method of claim 7 wherein: octafluorocyclobutane is employed at a flow rate of from 12 to 24 standard cubic centimeters per minute (sccm); carbon monoxide is employed at a flow rate of from 150 to 350 standard cubic centimeters per minute (sccm); and argon is employed at a flow rate of from 250 to 500 standard cubic centimeters per minute (sccm).
Claim 11
Dependent Claim
24 words
The method of claim 6 wherein the second reactive ion etch (RIE) method employs a carbon tetrafluoride:oxygen volume ratio of from 1:5 to 1:20.
Claim 12
Independent Claim
136 words
A method for selectively etching a silicon oxide layer in the presence of a silicon nitride layer comprising: providing a substrate; forming over the substrate a silicon oxide layer in contact with a silicon nitride layer; forming over the substrate a photoresist layer; etching the silicon oxide layer through a first reactive ion etch (RIE) method employing a first etchant gas composition comprising a fluorocarbon etchant gas to form an etched silicon oxide layer without etching the silicon nitride layer and a fluorocarbon polymer residue layer formed upon at least one of the etched silicon oxide layer and the silicon nitride layer; and stripping simultaneously from the substrate the photoresist layer and the fluorocarbon polymer residue layer through a second reactive ion etch (RIE) method employing a second etchant gas composition comprising carbon tetrafluoride and oxygen.
Claim 13
Independent Claim
136 words
A method for selectively etching a silicon oxide layer in the presence of a silicon nitride layer comprising: providing a substrate; forming over the substrate a silicon oxide layer in contact with a silicon nitride layer; forming over the substrate a photoresist layer; etching the silicon oxide layer through a first reactive ion etch (RIE) method employing a first etchant gas composition comprising a fluorocarbon etchant gas to form an etched silicon oxide layer without etching the silicon nitride layer and a fluorocarbon polymer residue layer formed upon at least one of the etched silicon oxide layer and the silicon nitride layer; and stripping simultaneously from the substrate the photoresist layer and the fluorocarbon polymer residue layer through a second reactive ion etch (RIE) method employing a second etchant gas composition comprising carbon tetrafluoride and oxygen.
Claim 14
Dependent Claim
17 words
The method of claim 10 wherein the first etchant gas composition comprises octafluorocyclobutane, carbon monoxide and argon.
Claim 15
Dependent Claim
62 words
The method of claim 11 wherein: octafluorocyclobutane is employed at a flow rate of from 12 to 24 standard cubic centimeters per minute (sccm); carbon monoxide is employed at a flow rate of from 150 to 350 standard cubic centimeters per minute (sccm); and argon is employed at a flow rate of from 250 to 500 standard cubic centimeters per minute (sccm).
Claim 16
Dependent Claim
23 words
The method of claim 10 wherein the second reactive ion etch (RIE) method employs a carbon tetrafluoride:oxygen ratio of from 1:5 to 1:20.
Claim 17
Independent Claim
166 words
A method for forming a via through a silicon oxide layer comprising: providing a substrate; forming over the substrate a patterned silicon nitride layer which defines a contact beneath the patterned silicon nitride layer; forming over the patterned silicon nitride layer a silicon oxide layer; forming over the silicon oxide layer a patterned photoresist layer: etching while employing the patterned photoresist layer as an etch mask layer the silicon oxide layer through a first reactive ion etch (RIE) method employing a first etchant gas composition comprising a fluorocarbon etchant gas to form an etched silicon oxide layer which exposes the contact without etching the patterned silicon nitride layer and a fluorocarbon polymer residue layer formed upon at least one of the etched silicon oxide layer and the patterned silicon nitride layer; and stripping simultaneously from the substrate the patterned photoresist layer and the fluorocarbon polymer residue layer through a second reactive ion etch (RIE) method employing a second etchant gas composition comprising carbon tetrafluoride and oxygen.
Claim 18
Independent Claim
166 words
A method for forming a via through a silicon oxide layer comprising: providing a substrate; forming over the substrate a patterned silicon nitride layer which defines a contact beneath the patterned silicon nitride layer; forming over the patterned silicon nitride layer a silicon oxide layer; forming over the silicon oxide layer a patterned photoresist layer: etching while employing the patterned photoresist layer as an etch mask layer the silicon oxide layer through a first reactive ion etch (RIE) method employing a first etchant gas composition comprising a fluorocarbon etchant gas to form an etched silicon oxide layer which exposes the contact without etching the patterned silicon nitride layer and a fluorocarbon polymer residue layer formed upon at least one of the etched silicon oxide layer and the patterned silicon nitride layer; and stripping simultaneously from the substrate the patterned photoresist layer and the fluorocarbon polymer residue layer through a second reactive ion etch (RIE) method employing a second etchant gas composition comprising carbon tetrafluoride and oxygen.
Claim 19
Dependent Claim
24 words
The method of claim 14 wherein: the substrate is a semiconductor substrate; and the semiconductor substrate has integrated circuit devices formed therein and thereupon.
Claim 20
Dependent Claim
22 words
The method of claim 14 wherein the via is selected from the group of vias consisting of contact vias and interconnection vias.
Claim 21
Dependent Claim
17 words
The method of claim 14 wherein the first etchant gas composition comprises octafluorocyclobutane, carbon monoxide and argon.
Claim 22
Dependent Claim
62 words
The method of claim 17 wherein: octafluorocyclobutane is employed at a flow rate of from 12 to 24 standard cubic centimeters per minute (sccm); carbon monoxide is employed at a flow rate of from 150 to 350 standard cubic centimeters per minute (sccm); and argon is employed at a flow rate of from 250 to 500 standard cubic centimeters per minute (sccm).
Claim 23
Dependent Claim
23 words
The method of claim 14 wherein the second reactive ion etch (RIE) method employs a carbon tetrafluoride:oxygen ratio of from 1:5 to 1:20.
References Cited (Backward Citations)
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