US5807792A
Expired / Lapsed
US
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Uniform distribution of reactants in a device layer
Assignee: Polaris Innovations Ltd
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Filing: 1996-12-18
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Granted: 1998-09-15
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Expires: 2016-12-18
Abstract
Abstract A method and apparatus for forming a multi-constituent device layer on a wafer surface are disclosed. The multi-constituent device layer is formed by flowing a first chemistry comprising a first constituent and a second chemistry comprising a second constituent via a segmented delivery system into a reaction chamber. The reaction chamber comprises a susceptor for supporting and rotating the wafers. The segmented delivery system comprises alternating first and second segments into which the first and second chemistries, respectively, are flowed. The first segments comprise an area that is greater than an area of the second segments by an amount sufficient to effectively reduce the diffusion path of the first constituent. Reducing the diffusion path of the first constituent results in a more uniform distribution of the first constituent within the device layer.
Inventors
- 👤 Matthias Ilg
- 👤 Markus Kirchhoff
- 👤 Christoph Werner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:24
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C30; C30B; C30B25/00; C30B25/02; C30B25/14; H10P14/68; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6923; H10P95/00; H10P95/90
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
138 words
In device fabrication, a method for forming a multi-constituent device layer on a wafer surface, the device layer comprising first and second constituents is being formed in a reaction chamber comprising a susceptor capable of supporting at least one wafer and alternating first and second segments, the method comprising: providing at least one wafer on the susceptor; rotating the susceptor; flowing a first chemistry comprising the first constituent into the first segments of the reaction chamber; flowing a second chemistry comprising the second constituent into the second segments of the reaction chamber; and wherein the first segments comprise an area that is greater than an area of the second segments by an amount sufficient to effectively reduce a diffusion path of the first constituent to result in a more uniform distribution of the first constituent within the layer.
Claim 2
Dependent Claim
138 words
In device fabrication, a method for forming a multi-constituent device layer on a wafer surface, the device layer comprising first and second constituents is being formed in a reaction chamber comprising a susceptor capable of supporting at least one wafer and alternating first and second segments, the method comprising: providing at least one wafer on the susceptor; rotating the susceptor; flowing a first chemistry comprising the first constituent into the first segments of the reaction chamber; flowing a second chemistry comprising the second constituent into the second segments of the reaction chamber; and wherein the first segments comprise an area that is greater than an area of the second segments by an amount sufficient to effectively reduce a diffusion path of the first constituent to result in a more uniform distribution of the first constituent within the layer.
Claim 3
Dependent Claim
32 words
The method as recited in claim 1 wherein the amount by which the area of the first segments is greater than the area of the second segments is at least about 20%.
Claim 4
Dependent Claim
31 words
The method as recited in claim 1 wherein the amount by which the area of the first segments is greater than the area of the second segments ranges between about 20-400%.
Claim 5
Dependent Claim
31 words
The method as recited in claim 1 wherein the amount by which the area of the first segments is greater than the area of the second segments ranges between about 40-350%.
Claim 6
Dependent Claim
32 words
The method as recited in claim 1 wherein the amount by which the area of the first segments is greater than the area of the second segments by ranges between about 60-300%.
Claim 7
Dependent Claim
31 words
The method as recited in claim 1 wherein the amount by which the area of the first segments is greater than the area of the second segments ranges between about 100-200%.
Claim 8
Dependent Claim
23 words
The method as recited in claim 1 wherein a variance of the first constituent within the layer is ≦ about 0.75 wt %.
Claim 9
Dependent Claim
23 words
The method as recited in claim 1 wherein a variance of the first constituent within the layer is ≦ about 0.6 wt %.
Claim 10
Dependent Claim
23 words
The method as recited in claim 1 wherein a variance of the first constituent within the layer is ≦ about 0.5 wt %.
Claim 11
Dependent Claim
23 words
The method as recited in claim 1 wherein the reaction chamber comprises at least 2 first segments and at least 2 second segments.
Claim 12
Dependent Claim
23 words
The method as recited in claim 1 wherein the reaction chamber comprises at least 3 first segments and at least 3 second segments.
Claim 13
Dependent Claim
19 words
The method as recited in claim 1 wherein the reaction chamber comprises 6 first segments and 6 second segments.
Claim 14
Dependent Claim
18 words
The method as recited in claim 12 wherein the area of the first segments ranges between about 35°-55°.
Claim 15
Dependent Claim
18 words
The method as recited in claim 12 wherein the area of the second segments ranges between about 15°-25°.
Claim 16
Dependent Claim
18 words
The method as recited in claim 12 wherein the area of the first segments ranges between about 40°-50°.
Claim 17
Dependent Claim
18 words
The method as recited in claim 12 wherein the area of the second segments ranges between about 10°-20°.
Claim 18
Dependent Claim
17 words
The method as recited in claim 12 wherein the area of the first segments is about 45°.
Claim 19
Dependent Claim
17 words
The method as recited in claim 12 wherein the area of the second segments is about 15°.
Claim 20
Dependent Claim
12 words
The method as recited in claim 1 wherein the layer comprises BPSG.
Claim 21
Dependent Claim
21 words
The method as recited in claim 19 wherein the first chemistry comprises TEB and the second chemistry comprises PH 3 .
Claim 22
Dependent Claim
14 words
The method as recited in claim 20 wherein the first chemistry further comprises TEOS.
Claim 23
Dependent Claim
16 words
The method as recited in claim 21 wherein the first chemistry further comprises oxygen and nitrogen.
Claim 24
Dependent Claim
16 words
The method as recited in claim 20 wherein the second chemistry further comprises oxygen and nitrogen.
Claim 25
Dependent Claim
32 words
The method as recited in claim 21 wherein the amount by which the area of the first segments is greater than the area of the second segments is at least about 20%.
Claim 26
Dependent Claim
31 words
The method as recited in claim 21 wherein the amount by which the area of the first segments is greater than the area of the second segments ranges between about 20-400%.
Claim 27
Dependent Claim
31 words
The method as recited in claim 21 wherein the amount by which the area of the first segments is greater than the area of the second segments ranges between about 40-350%.
Claim 28
Dependent Claim
31 words
The method as recited in claim 21 wherein the amount by which the area of the first segments is greater than the area of the second segments ranges between about 60-300%.
Claim 29
Dependent Claim
31 words
The method as recited in claim 21 wherein the amount by which the area of the first segments is greater than the area of the second segments ranges between about 100-200%.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-09-14 | 2002-03-16 | 2002-09-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-09-14 | 2006-03-16 | 2006-09-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-09-14 | 2010-03-16 | 2010-09-15 | $7700.00 | Window Closed / Lapsed |