US5804834A
Expired / Lapsed
US
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Semiconductor device having contact resistance reducing layer
Assignee: Mitsubishi Chemical Corp
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Filing: 1997-07-07
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Granted: 1998-09-08
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Expires: 2017-07-07
Abstract
Abstract In a wide band cap semiconductor, a GaP x N 1-x (0.1≦x≦0.9) layer is inserted between a layer comprising AlGaInN and an electrode, The potential barrier between the electrode and the surface layer can be reduced. Contact resistance can be decreased, and ohmic contact can be easily taken up.
Inventors
- 👤 Kenji Shimoyama
- 👤 Hideki Gotoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 10:27
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10D; H10D62/00; H10D62/80; H10D62/85; H10D62/852; H10D64/00; H10D64/60; H10D64/62; H10H20/01; H10H20/011; H10H20/013; H10H20/0137; H10H20/822; H10H20/824; H10H20/825; H10H20/814; H10H20/83; H10H20/832
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
21 words
A semiconductor device, comprising a thin film GaP x N 1-x (0.1≦x≦0.9) layer between a layer of AlGaInN and an electrode.
Claim 2
Dependent Claim
21 words
A semiconductor device, comprising a thin film GaP x N 1-x (0.1≦x≦0.9) layer between a layer of AlGaInN and an electrode.
Claim 3
Dependent Claim
15 words
A semiconductor device according to claim 1, wherein said layer of AlGaInN is of p-type.
Claim 4
Dependent Claim
37 words
A semiconductor device according to claim 1 or 2, wherein said GaP x N 1-x (0.1≦x≦0.9) layer is formed by alternately laminating a GaP y N 1-y (y≧0.9) layer and a GaP z N 1-z (z≦0.1) layer.
Claim 5
Dependent Claim
30 words
A semiconductor device according to claim 3, wherein said GaP y N 1-y (y≧0.9) layer and said GaP z N 1-z (Z≦0.1) layer are not thicker than 10 molecular layers.
Claim 6
Dependent Claim
59 words
A semiconductor device, comprising a distributed Bragg reflector comprising an Al x Ga 1-x P (0 ≦x<1) layer and an Al y Ga 1-y P (0<y≦1, x<y) layer alternately grown and an AlGaInN light emitting layer, said distributed Bragg reflector being provided at least one of (1) above said light emitting layer and (2) under said light emitting layer.
Claim 7
Dependent Claim
59 words
A semiconductor device, comprising a distributed Bragg reflector comprising an Al x Ga 1-x P (0 ≦x<1) layer and an Al y Ga 1-y P (0<y≦1, x<y) layer alternately grown and an AlGaInN light emitting layer, said distributed Bragg reflector being provided at least one of (1) above said light emitting layer and (2) under said light emitting layer.
Claim 8
Dependent Claim
26 words
A semiconductor device according to claim 5, further comprising a substrate having a band gap not greater than a band gap of the light emitting layer.
Claim 9
Dependent Claim
22 words
A semiconductor device according to claim 6, wherein said distributed Bragg reflector is provided between the substrate and the light emitting layer.
Claim 10
Dependent Claim
12 words
A semiconductor device according to claim 6, which has a GaP substrate.
Claim 11
Dependent Claim
19 words
A semiconductor device according to claim 8, wherein a surface of the GaP substrate is a {111} B face.
Claim 12
Dependent Claim
22 words
A semiconductor device according to claim 5, wherein said distributed Bragg reflector is provided between the light emitting layer and an electrode.
Claim 13
Dependent Claim
31 words
A semiconductor device according to claim 5, wherein said distributed Bragg reflector is provided as one of either (1) above said light emitting layer or (2) under said light emitting layer.
Claim 14
Dependent Claim
16 words
A semiconductor device according to claim 11, wherein said semiconductor device is a light emitting diode.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-09-07 | 2002-03-09 | 2002-09-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-09-07 | 2006-03-09 | 2006-09-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-09-07 | 2010-03-09 | 2010-09-08 | $7700.00 | Window Closed / Lapsed |