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US5796433A Expired / Lapsed US ⏱️ 0.0 years remaining

Multiple-frame CCD image sensor with overlying photosensitive layer

Assignee: BAE Systems Information and Electronic Systems Integration Inc
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Filing: 1996-03-20
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Granted: 1998-08-18
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Expires: 2016-03-20
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Abstract

Abstract A multiple-frame image sensor comprising a full-frame CCD sensor of two-story construction having an overlying photosensitive layer that converts input radiation to electric charge and an underlying CCD structure which functions to collect and store the charge for read-out of more than one charge packet per pixel, with the pixels being of minimum size. The sensor structure is rendered capable of handling more than one photosignal charge packet per pixel in an area-efficient way through the use of ripple clocking, so that in a preferred embodiment a 4-poly, 7-phase ripple-clocked vertical CCD register is fabricated with 7 gates, one of which is run vertically to create openings, e.g., between the 1 and 6 gates, that pass electrode contacts to N+ sources in the channel stops of the register to form photosignal charge packets in the region between the stops. The ripple-gating controls the movement of the charge packets for storage along the CCD channel until 3 charge packet read-out. In this two-story embodiment, there is no mixing of signal charge from the several exposures. Other embodiments involving 3- and 2-poly designs, MPP barriers, and 5-phase ripple-clocking and 6-electrode non-ripple clocking are described.

Inventors

  • 👤 Rudolph H. Dyck

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 11:04
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/15; H10F39/151; H04; H04N; H04N25/00; H04N25/50; H04N25/53; H04N25/533; H04N25/70; H04N25/71; H10F39/153; H10F39/1536

Claims Analysis

Total Claims: 28
Claim 1
Independent Claim 387 words
Apparatus for generating and storing charge in response to an incidence of electromagnetic energy, comprising: a photosensitive region for generating electrical charge in response to the incidence of electromagnetic energy; a transparent electrode layer overlying the photosensitive region; a charge-carrying region, disposed beneath and along said photosensitive region and arranged in columns and rows, with said columns separated by channel stop columns, said charge-carrying region comprising: a plurality of first storage regions, disposed in spaced rows in said columns, for storing respective charge packets corresponding to the charge generated in adjacent portions of said photosensitive region; a plurality of second storage regions, disposed in rows between said spaced rows in said columns, for receiving charge packets stored in said first storage regions; a plurality of source regions, respectively disposed in said channel stop columns in rows next to the rows containing said first storage regions; a plurality of barrier regions, respectively disposed between said plurality of source regions and said plurality of first storage regions in the next rows, for forming diodes including a source region and a first storage region; a plurality of pixel electrodes, disposed between said photosensitive region and said charge-carrying region and each contacting said photosensitive region and connected to one of said plurality of source regions, for respectively coupling each first storage region to the corresponding adjacent portion of said photosensitive region to produce a charge packet in each first storage region corresponding to the charge in said corresponding adjacent portion of said photosensitive region; a plurality of sets of gate electrodes, disposed between said plurality of pixel electrodes and said charge-carrying region, with each electrode set having one electrode with a portion in a row containing a source region and a portion in a column adjacent said second storage regions, and having the other electrodes respectively in rows adjacent the rows of second storage regions, for coupling a phased voltage to said first and second storage regions; and a source of a plurality of independently controllable clock voltage phases coupled to said gate electrodes for controlling the potential profiles of said first and second storage regions to move a number of charge packets successively formed in said first storage regions along the columns of rows of said second storage regions for storage therein until read-out of said number of charge packets.
Claim 2
Dependent Claim 387 words
Apparatus for generating and storing charge in response to an incidence of electromagnetic energy, comprising: a photosensitive region for generating electrical charge in response to the incidence of electromagnetic energy; a transparent electrode layer overlying the photosensitive region; a charge-carrying region, disposed beneath and along said photosensitive region and arranged in columns and rows, with said columns separated by channel stop columns, said charge-carrying region comprising: a plurality of first storage regions, disposed in spaced rows in said columns, for storing respective charge packets corresponding to the charge generated in adjacent portions of said photosensitive region; a plurality of second storage regions, disposed in rows between said spaced rows in said columns, for receiving charge packets stored in said first storage regions; a plurality of source regions, respectively disposed in said channel stop columns in rows next to the rows containing said first storage regions; a plurality of barrier regions, respectively disposed between said plurality of source regions and said plurality of first storage regions in the next rows, for forming diodes including a source region and a first storage region; a plurality of pixel electrodes, disposed between said photosensitive region and said charge-carrying region and each contacting said photosensitive region and connected to one of said plurality of source regions, for respectively coupling each first storage region to the corresponding adjacent portion of said photosensitive region to produce a charge packet in each first storage region corresponding to the charge in said corresponding adjacent portion of said photosensitive region; a plurality of sets of gate electrodes, disposed between said plurality of pixel electrodes and said charge-carrying region, with each electrode set having one electrode with a portion in a row containing a source region and a portion in a column adjacent said second storage regions, and having the other electrodes respectively in rows adjacent the rows of second storage regions, for coupling a phased voltage to said first and second storage regions; and a source of a plurality of independently controllable clock voltage phases coupled to said gate electrodes for controlling the potential profiles of said first and second storage regions to move a number of charge packets successively formed in said first storage regions along the columns of rows of said second storage regions for storage therein until read-out of said number of charge packets.
Claim 3
Dependent Claim 45 words
Apparatus as in claim 1 wherein each set of gate electrodes comprises seven gate electrodes and wherein said one gate electrode is the seventh electrode of the set and leaves an opening between the first and sixth electrodes in each set above said source regions.
Claim 4
Dependent Claim 18 words
Apparatus as in claim 1 wherein said charge-carrying regions comprise N-type channel regions disposed in a P-type substrate.
Claim 5
Dependent Claim 19 words
Apparatus as in claim 3 wherein said transparent electrode layer is biased near the potential of said P-type substrate.
Claim 6
Dependent Claim 12 words
Apparatus as in claim 3 wherein said source regions comprise N+ regions.
Claim 7
Dependent Claim 39 words
Apparatus as in claim 1 wherein the number of clock voltage phases is seven, the clock voltage phases being coupled to the gate electrodes in a repeating seven phase pattern which is operable to store three separate charge packets.
Claim 8
Dependent Claim 39 words
Apparatus as in claim 1 wherein the number of clock voltage phases is nine, the clock voltage phases being coupled to the gate electrodes in a repeating nine phase pattern which is operable to store four separate charge packets.
Claim 9
Dependent Claim 354 words
Apparatus for generating and storing charge in response to an incidence of electromagnetic energy, comprising: a photosensitive region for generating electrical charge in response to the incidence of electromagnetic energy; a transparent electrode layer overlying the photosensitive region; a charge-carrying region, disposed beneath and along said photosensitive region and arranged in columns and rows, with said columns separated by channel stop columns, said charge-carrying region comprising: a plurality of first storage regions, disposed in spaced rows in said columns, for storing respective charge packets corresponding to the charge generated in adjacent portions of said photosensitive region; a plurality of second storage regions, disposed in rows between said spaced rows in said columns, for receiving charge packets stored in said first storage regions; a plurality of source regions, respectively disposed in said channel stop columns in rows next to the rows containing said first storage regions, each of said source regions having a barrier region disposed between it and the first storage region in the next row for forming diodes including a source region and a first storage region; a plurality of pixel electrodes, disposed between said photosensitive region and said charge-carrying region and each contacting said photosensitive region and connected to one of said plurality of source regions, for respectively coupling each first storage region to the corresponding adjacent portion of said photosensitive region to produce a charge packet in each first storage region corresponding to the charge in said corresponding adjacent portion of said photosensitive region; a plurality of sets of gate electrodes, disposed between said plurality of pixel electrodes and said charge-carrying region, for coupling a phased voltage to said first and second storage regions, each electrode set comprising seven electrodes; and a source of 7-phase ripple-clocked independently controllable voltage phases coupled to said sets of gate electrodes for controlling the potential profiles of said first and second storage regions to move two charge packets successively formed in said first storage regions along the columns of rows of said second storage regions for storage therein until readout of said two charge packets with third charge packets stored in said first storage regions.
Claim 10
Dependent Claim 354 words
Apparatus for generating and storing charge in response to an incidence of electromagnetic energy, comprising: a photosensitive region for generating electrical charge in response to the incidence of electromagnetic energy; a transparent electrode layer overlying the photosensitive region; a charge-carrying region, disposed beneath and along said photosensitive region and arranged in columns and rows, with said columns separated by channel stop columns, said charge-carrying region comprising: a plurality of first storage regions, disposed in spaced rows in said columns, for storing respective charge packets corresponding to the charge generated in adjacent portions of said photosensitive region; a plurality of second storage regions, disposed in rows between said spaced rows in said columns, for receiving charge packets stored in said first storage regions; a plurality of source regions, respectively disposed in said channel stop columns in rows next to the rows containing said first storage regions, each of said source regions having a barrier region disposed between it and the first storage region in the next row for forming diodes including a source region and a first storage region; a plurality of pixel electrodes, disposed between said photosensitive region and said charge-carrying region and each contacting said photosensitive region and connected to one of said plurality of source regions, for respectively coupling each first storage region to the corresponding adjacent portion of said photosensitive region to produce a charge packet in each first storage region corresponding to the charge in said corresponding adjacent portion of said photosensitive region; a plurality of sets of gate electrodes, disposed between said plurality of pixel electrodes and said charge-carrying region, for coupling a phased voltage to said first and second storage regions, each electrode set comprising seven electrodes; and a source of 7-phase ripple-clocked independently controllable voltage phases coupled to said sets of gate electrodes for controlling the potential profiles of said first and second storage regions to move two charge packets successively formed in said first storage regions along the columns of rows of said second storage regions for storage therein until readout of said two charge packets with third charge packets stored in said first storage regions.
Claim 11
Dependent Claim 56 words
Apparatus as in claim 8 wherein each electrode set of said plurality of sets of gate electrodes, has one electrode with a portion in a row containing a source region and a portion in a column adjacent said second storage regions, and has the other electrodes respectively in rows adjacent the rows of second storage regions.
Claim 12
Independent Claim 207 words
A method for fabricating a device for generating and storing charge in response to an incidence of electromagnetic energy, the method comprising the steps of: providing a substrate; forming columns containing first storage regions in the substrate; forming second storage regions in the substrate, in rows between said first storage regions; forming channel stop columns in said substrate, separating said columns containing rows of said first and second storage regions; forming source regions in said channel stop columns in rows next to the rows containing first storage regions; forming barrier regions in the substrate between said source regions and said first storage regions in the next rows to form diodes by which a charge packet may be formed in each first storage region corresponding to a potential in the corresponding first source region; forming gate electrodes over said first and second storage regions, with a dielectric layer in between, for controlling the potential profiles of said first and second storage regions; forming pixel electrodes over said gate electrodes, each pixel electrode being coupled to one of said source regions through openings in said gate electrodes; forming a photosensitive layer over and in contact with said pixel electrodes; and forming a transparent electrode layer over the photosensitive layer.
Claim 13
Independent Claim 207 words
A method for fabricating a device for generating and storing charge in response to an incidence of electromagnetic energy, the method comprising the steps of: providing a substrate; forming columns containing first storage regions in the substrate; forming second storage regions in the substrate, in rows between said first storage regions; forming channel stop columns in said substrate, separating said columns containing rows of said first and second storage regions; forming source regions in said channel stop columns in rows next to the rows containing first storage regions; forming barrier regions in the substrate between said source regions and said first storage regions in the next rows to form diodes by which a charge packet may be formed in each first storage region corresponding to a potential in the corresponding first source region; forming gate electrodes over said first and second storage regions, with a dielectric layer in between, for controlling the potential profiles of said first and second storage regions; forming pixel electrodes over said gate electrodes, each pixel electrode being coupled to one of said source regions through openings in said gate electrodes; forming a photosensitive layer over and in contact with said pixel electrodes; and forming a transparent electrode layer over the photosensitive layer.
Claim 14
Dependent Claim 33 words
The method of claim 10 wherein said gate electrodes comprise sets of seven electrodes and comprising the further step of coupling said gate electrodes to a source of a 7-phase ripple clock voltage.
Claim 15
Dependent Claim 58 words
The method of claim 10 wherein said gate electrodes are formed in sets of electrodes with each electrode set having one electrode with a portion in a row containing a source region and a portion in a column adjacent said second storage regions, and having the other electrodes respectively in rows adjacent the rows of second storage regions.
Claim 16
Dependent Claim 18 words
The method of claim 10 comprising the further step of coupling said transparent electrode layer to said substrate.
Claim 17
Dependent Claim 39 words
The method of claim 10 wherein said substrate is of semiconductor material of a first conductivity type, said columns are formed of buried channel regions and, with said first and second storage regions, comprise CCD registers of unit cells.
Claim 18
Dependent Claim 219 words
A CCD structure for sensing incident electromagnetic image radiation and formed of arrays of unit cells with a capacity of N charge packets, where N is two or greater, each unit cell comprising: a single CCD channel; a photoconductive element overlying said CCD channel and producing image indicative charge therein in response to incident electromagnetic image radiation; a grounded transparent upper electrode contacting said photoconductive element; a lower electrode contacting said photoconductive element and disposed between said photoconductive element and said CCD channel and having a voltage imposed thereon; a source electrode connected to said lower electrode and adjacent said CCD channel, for producing a charge packet in said CCD channel upon the discharge of the voltage on said lower electrode by the image indicative charge in said photoconductive element; and gate means, disposed between said lower electrode and said CCD channel, for defining storage regions for said charge packets in said CCD channel when phased voltages are imposed thereon to control the potential profiles in the storage regions; and wherein, said unit cells are arranged in arrays of columns and rows that can be operated as a rapid-sequence electromagnetic image sensing device by using phased voltages on said gate means to control the storage of charge packets in N storage regions in response to N+1 electromagnetic image exposures.
Claim 19
Dependent Claim 219 words
A CCD structure for sensing incident electromagnetic image radiation and formed of arrays of unit cells with a capacity of N charge packets, where N is two or greater, each unit cell comprising: a single CCD channel; a photoconductive element overlying said CCD channel and producing image indicative charge therein in response to incident electromagnetic image radiation; a grounded transparent upper electrode contacting said photoconductive element; a lower electrode contacting said photoconductive element and disposed between said photoconductive element and said CCD channel and having a voltage imposed thereon; a source electrode connected to said lower electrode and adjacent said CCD channel, for producing a charge packet in said CCD channel upon the discharge of the voltage on said lower electrode by the image indicative charge in said photoconductive element; and gate means, disposed between said lower electrode and said CCD channel, for defining storage regions for said charge packets in said CCD channel when phased voltages are imposed thereon to control the potential profiles in the storage regions; and wherein, said unit cells are arranged in arrays of columns and rows that can be operated as a rapid-sequence electromagnetic image sensing device by using phased voltages on said gate means to control the storage of charge packets in N storage regions in response to N+1 electromagnetic image exposures.
Claim 20
Dependent Claim 8 words
A structure as in claim 15 wherein N=3.
Claim 21
Dependent Claim 18 words
A structure as in claim 15 wherein said photoconductive element is of amorphous silicon and comprises blocking electrodes.
Claim 22
Dependent Claim 18 words
A structure as in claim 15 wherein said photoconductive element is of amorphous selenium and comprises blocking electrodes.
Claim 23
Dependent Claim 30 words
A structure as in claim 15 wherein said said source electrode is an N+ diffusion and further comprising P-type channel stops bounding said source electrode on at least two sides.
Claim 24
Dependent Claim 21 words
A structure as in claim 15 wherein said grounded transparent upper electrode comprises ITO and said lower electrode comprises refractory metal.
Claim 25
Dependent Claim 14 words
A structure as in claim 15 wherein said lower electrode comprises an hexagonal element.
Claim 26
Dependent Claim 21 words
A structure as in claim 15 further comprising ripple-clock means coupled to said gate means for producing said phased voltages thereon.
Claim 27
Dependent Claim 19 words
A structure as in claim 22 further comprising means for dithering said phased voltages produced on said gate means.
Claim 28
Dependent Claim 14 words
A structure as in claim 15 wherein said gate means further comprises MPP barriers.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-08-17 2002-02-16 2002-08-18 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-08-17 2006-02-16 2006-08-18 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-08-17 2010-02-16 2010-08-18 $7700.00 Window Closed / Lapsed

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