US5793022A
Expired / Lapsed
US
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Adaptive temperture controller and method of operation
Assignee: Applied Materials Inc
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Filing: 1996-09-12
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Granted: 1998-08-11
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Expires: 2016-09-12
Abstract
Abstract An adaptive controller for controlling the temperature of a body. The adaptive controller of the present invention comprises a temperature measuring device which measures the temperature of the body. A controller which has a controller integral time constant and a controller gain constant is provided for controlling a heating device. An adjustment mechanism is provided which determines the controller integral time constant and the controller gain constant where the controller integral time constant and the controller gain constant are dependent upon the difference between the present temperature of the body and the desired temperature of the body.
Inventors
- 👤 Kimberly E. Klinck
- 👤 Brian M. Cooper
- 👤 Harold J. Mellen, III
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 15:53
CPC Classifications
G; G05; G05D; G05D23/00; G05D23/19; G05D23/1902; G05B; G05B13/00; G05B13/02; G05B13/0205; G05B13/024; G05D23/1904; H; H10; H10P; H10P72/00; H10P72/06; H10P72/0602
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
88 words
A method of controlling the temperature of a body in an apparatus, said method comprising the steps of: setting a desired temperature for said body having a present temperature; providing a controller integral time constant and a controller gain constant where said controller integral time constant and said controller gain constant depend upon said present temperature of said body and said desired temperature of said body; and utilizing said controller integral time constant and said controller gain constant to control the amount of heat provided to said body.
Claim 2
Independent Claim
88 words
A method of controlling the temperature of a body in an apparatus, said method comprising the steps of: setting a desired temperature for said body having a present temperature; providing a controller integral time constant and a controller gain constant where said controller integral time constant and said controller gain constant depend upon said present temperature of said body and said desired temperature of said body; and utilizing said controller integral time constant and said controller gain constant to control the amount of heat provided to said body.
Claim 3
Dependent Claim
25 words
The method of claim 1 wherein the amount of heat provided to said body is controlled by controlling power supplied to a plurality of lamps.
Claim 4
Dependent Claim
38 words
The method of claim 2 wherein a proportional integral derivative algorithm is utilized along with said controller integral time constant and said controller gain constant to determine said amount of power to be applied to said heat source.
Claim 5
Independent Claim
171 words
A method of controlling the temperature of a body in a semiconductor processing apparatus, said method comprising the steps of: (a) providing a desired process temperature for said body; (b) providing a first amount of power to a heat source wherein said first amount of power is dependent upon a first controller integral time constant and a first controller gain constant; (c) measuring a current temperature of said body; (d) determining the difference between said current temperature of said body and said desired process temperature of said body; (e) determining a new controller integral time constant and a new controller gain constant wherein said new controller integral time constant and said new controller gain constant depend upon said desired process temperature of said body and said current temperature of said body; (f) determining a new amount of power to be applied to said heat source based on said new controller integral time constant and said new controller gain constant; and (g) providing said new amount of power to said heat source.
Claim 6
Independent Claim
171 words
A method of controlling the temperature of a body in a semiconductor processing apparatus, said method comprising the steps of: (a) providing a desired process temperature for said body; (b) providing a first amount of power to a heat source wherein said first amount of power is dependent upon a first controller integral time constant and a first controller gain constant; (c) measuring a current temperature of said body; (d) determining the difference between said current temperature of said body and said desired process temperature of said body; (e) determining a new controller integral time constant and a new controller gain constant wherein said new controller integral time constant and said new controller gain constant depend upon said desired process temperature of said body and said current temperature of said body; (f) determining a new amount of power to be applied to said heat source based on said new controller integral time constant and said new controller gain constant; and (g) providing said new amount of power to said heat source.
Claim 7
Dependent Claim
32 words
The method of claim 4 wherein said new controller integral time constant is dependent upon said difference between said current temperature and said desired process temperature and upon said desired process temperature.
Claim 8
Dependent Claim
24 words
The method of claim 4 wherein said determining step of said new amount of power is determined utilizing a proportional integral derivative (PID) algorithm.
Claim 9
Dependent Claim
22 words
The method of claim 4 further comprising the steps of: repeating steps (c), (d), (e), (f), and (g) a plurality of times.
Claim 10
Dependent Claim
17 words
The method of claim 7 wherein said plurality steps are repeated at least once every 1/10 second.
Claim 11
Dependent Claim
93 words
An adaptive temperature controller for controlling the temperature of a body comprising: a temperature measuring device for measuring the temperature of said body; a controller for controlling a heating device which heats said body, said controller having a controller integral time constant and a controller gain constant; and an adjustment mechanism for determining said controller integral time constant and said controller gain constant wherein said controller integral time constant and said controller gain constant are determined utilizing the difference between said present temperature of said body and a desired temperature of said body.
Claim 12
Dependent Claim
93 words
An adaptive temperature controller for controlling the temperature of a body comprising: a temperature measuring device for measuring the temperature of said body; a controller for controlling a heating device which heats said body, said controller having a controller integral time constant and a controller gain constant; and an adjustment mechanism for determining said controller integral time constant and said controller gain constant wherein said controller integral time constant and said controller gain constant are determined utilizing the difference between said present temperature of said body and a desired temperature of said body.
Claim 13
Dependent Claim
142 words
A semiconductor processing apparatus comprising: a plurality of lamps; a pyrometer for measuring a current temperature of a susceptor located within said processing apparatus; a controller for controlling the amount of power supplied to said plurality of lamps wherein said controller performs the steps of: measuring a current temperature of said susceptor; determining the difference between said current temperature of said susceptor and a desired temperature of said susceptor; determining a controller integral time constant and a controller gain constant wherein said controller integral time constant and said controller gain constant depend upon said present temperature of said susceptor and said desired temperature of said susceptor; determining an amount of power to be applied to said plurality of lamps based on said controller integral time constant and said controller gain constant; and providing said amount of power to said plurality of lamps.
Claim 14
Dependent Claim
142 words
A semiconductor processing apparatus comprising: a plurality of lamps; a pyrometer for measuring a current temperature of a susceptor located within said processing apparatus; a controller for controlling the amount of power supplied to said plurality of lamps wherein said controller performs the steps of: measuring a current temperature of said susceptor; determining the difference between said current temperature of said susceptor and a desired temperature of said susceptor; determining a controller integral time constant and a controller gain constant wherein said controller integral time constant and said controller gain constant depend upon said present temperature of said susceptor and said desired temperature of said susceptor; determining an amount of power to be applied to said plurality of lamps based on said controller integral time constant and said controller gain constant; and providing said amount of power to said plurality of lamps.
Claim 15
Dependent Claim
25 words
The semiconductor processing apparatus of claim 10 wherein determining step of said new amount of power is determined utilizing a proportional integral derivative (PID) algorithm.
Claim 16
Dependent Claim
19 words
The semiconductor processing apparatus of claim 11 wherein said controller performs said plurality of steps a plurality of time.
Claim 17
Dependent Claim
19 words
The semiconductor processing apparatus of claim 12 wherein said plurality steps are repeated at least once every tenth second.
References Cited (Backward Citations)
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