US5791850A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum compatible fastener and fastening system
Assignee: Lam Research Corp
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Filing: 1996-06-28
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Granted: 1998-08-11
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Expires: 2016-06-28
Abstract
Abstract A vacuum compatible fastener useful for fastening a workpiece. The fastener has a head section at an upper end of the fastener of a first diameter. A shank section extends from the head section and includes a spring or spring-like element which allows the fastener to be stretched and pretensioned. The shank section has a diameter less than the diameter of the head section. A tip section at a lower end of the fastener extends from the shank section. The tip section includes one or more retractable elements having upper ends extending radially outward away from the tip section in the non-retracted state for gripping a sidewall of a workpiece receiving hole. An opening extends along the central axis of the fastener through the head section to the tip section. The fastener minimizes contamination and allows high pumpdown rates in vacuum processing tools such as semiconductor manufacturing process tools.
Inventors
- 👤 Randall S. Mundt
- 👤 Valentine Balter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 11:50
CPC Classifications
F; F16; F16B; F16B19/00; F16B19/04; F16B19/08; F16B19/10; F16B19/1027; F16B19/1036; F16B13/00; F16B13/04; F16B13/08; Y; Y10; Y10S; Y10S411/00; Y10S411/913
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
74 words
A removable threadless fastener comprising: a head portion having at least one opening extending therethrough and at least one bearing surface on a first side thereof; and a shank portion extending from the first side of the head portion, the shank portion having at least one channel extending therethrough and in fluid communication with the opening, the shank portion including a resiliently held clamping element which is retractable by use of an insertion tool.
Claim 2
Dependent Claim
74 words
A removable threadless fastener comprising: a head portion having at least one opening extending therethrough and at least one bearing surface on a first side thereof; and a shank portion extending from the first side of the head portion, the shank portion having at least one channel extending therethrough and in fluid communication with the opening, the shank portion including a resiliently held clamping element which is retractable by use of an insertion tool.
Claim 3
Dependent Claim
32 words
The fastener of claim 1, wherein the bearing surface engages a first object and the clamping element engages a second object so as to attach the first object to the second object.
Claim 4
Dependent Claim
66 words
The fastener of claim 2, further comprising a tool for insertion of the fastener, the tool including a rod sized to pass through the opening and the channel and move the clamping element towards and away from the shank portion by rotation of the rod, the rod being operable to move the clamping element into engagement with a wall of a hole in the second object.
Claim 5
Dependent Claim
27 words
The fastener of claim 1, wherein the first side of the head portion includes a plurality of projections, each of the projections having a bearing surface thereon.
Claim 6
Dependent Claim
45 words
The fastener of claim 1, wherein the shank portion includes a spring portion and a tip portion, the spring portion connecting the tip portion to the head portion and allowing the head portion and tip portion to move axially toward and away from each other.
Claim 7
Dependent Claim
39 words
The fastener of claim 5, wherein the tip portion comprises a tubular member, the clamping member being integral with the tubular member and a deflectable portion of the clamping member being displaceable towards and away from the tubular member.
Claim 8
Dependent Claim
66 words
The fastener of claim 6, wherein the deflectable portion of the clamping member comprises an end of the clamping member facing the first side of the head portion, the deflectable portion being spaced outwardly from an outer periphery of the tubular member, the deflectable member being displaceable into a cut-out in the tubular member when the shank portion is inserted into a hole of an object.
Claim 9
Dependent Claim
50 words
The fastener of claim 5, wherein the spring portion comprises a helical spring and the tip portion includes a tubular member, one end of the helical spring being welded to the head portion and an opposite end of the helical spring being welded to an end of the tubular member.
Claim 10
Dependent Claim
49 words
The fastener of claim 5, wherein the bearing surface engages a first object and the clamping element engages a second object so as to attach the first object to the second object, the spring portion being axially extended and pressing the bearing surface and clamping element towards each other.
Claim 11
Dependent Claim
75 words
A removable fastener comprising: a head portion having a plurality of openings extending therethrough and a plurality of bearing surfaces on a first side thereof; and a shank portion extending from the first side of the head portion, the shank portion having at least one channel extending therethrough and in fluid communication with the opening, the shank portion including a plurality of resiliently held clamping elements which are retractable by use of an insertion tool.
Claim 12
Dependent Claim
75 words
A removable fastener comprising: a head portion having a plurality of openings extending therethrough and a plurality of bearing surfaces on a first side thereof; and a shank portion extending from the first side of the head portion, the shank portion having at least one channel extending therethrough and in fluid communication with the opening, the shank portion including a plurality of resiliently held clamping elements which are retractable by use of an insertion tool.
Claim 13
Dependent Claim
32 words
The fastener of claim 10, wherein the bearing surfaces engage a first object and the clamping elements engage a second object so as to attach the first object to the second object.
Claim 14
Dependent Claim
66 words
The fastener of claim 11, further comprising a tool for insertion of the fastener, the tool including a rod sized to pass through the opening and the channel and move the clamping element towards and away from the shank portion by rotation of the rod, the rod being operable to move the clamping element into engagement with a wall of a hole in the second object.
Claim 15
Dependent Claim
44 words
The fastener of claim 10, wherein the shank portion includes a spring portion and tip portion, the spring portion connecting the tip portion to the head portion and allowing the head portion and tip portion to move axially toward and away from each other.
Claim 16
Dependent Claim
41 words
The fastener of claim 13, wherein the tip portion comprises a tubular member, the clamping members being integral with the tubular member and a deflectable portion of each of the clamping members being displaceable towards and away from the tubular member.
Claim 17
Dependent Claim
68 words
The fastener of claim 14, wherein the deflectable portion of each of the clamping members comprises an end of the clamping member facing the first side of the head portion, the deflectable portion being spaced outwardly from an outer periphery of the tubular member, the deflectable member being displaceable into a cut-out in the tubular member when the shank portion is inserted into a hole of an object.
Claim 18
Dependent Claim
50 words
The fastener of claim 13, wherein the spring portion comprises a helical spring and the tip portion includes a tubular member, one end of the helical spring being welded to the head portion and an opposite end of the helical spring being welded to an end of the tubular member.
Claim 19
Dependent Claim
49 words
The fastener of claim 13, wherein the bearing surfaces engage a first object and the clamping elements engage a second object so as to attach the first object to the second object, the spring portion being axially extended and pressing the bearing surface and clamping element towards each other.
Claim 20
Dependent Claim
102 words
A vacuum compatible removable fastener useful for attachment to a workpiece, comprising: a head section at an upper end of the fastener, the head section having a first diameter; a shank section extending from the head section, the shank section including an elastic element which allows the fastener to be stretched and pretensioned, the shank section having a second diameter smaller than the first diameter; and a tip section extending from the shank section, the tip section including at least one element for gripping a sidewall of a workpiece receiving hole, wherein the element is retractable by use of an insertion tool.
Claim 21
Dependent Claim
102 words
A vacuum compatible removable fastener useful for attachment to a workpiece, comprising: a head section at an upper end of the fastener, the head section having a first diameter; a shank section extending from the head section, the shank section including an elastic element which allows the fastener to be stretched and pretensioned, the shank section having a second diameter smaller than the first diameter; and a tip section extending from the shank section, the tip section including at least one element for gripping a sidewall of a workpiece receiving hole, wherein the element is retractable by use of an insertion tool.
Claim 22
Dependent Claim
17 words
The vacuum compatible fastener of claim 18, wherein a lower surface of the head section is non-planar.
Claim 23
Dependent Claim
28 words
The vacuum compatible fastener of claim 19, wherein the lower surface of the head section is contoured so as to minimize contact with a workpiece to be fastened.
Claim 24
Dependent Claim
31 words
The vacuum compatible fastener of claim 19, wherein the lower surface of the head section includes a plurality of spaced apart projections located on an outer portion of the head section.
Claim 25
Dependent Claim
16 words
The vacuum compatible fastener of claim 18, wherein the elastic element is integral with the fastener.
Claim 26
Dependent Claim
55 words
The vacuum compatible fastener of claim 22, further comprising a tool for insertion of the fastener, the tool including a rod sized to pass through an opening in the head portion, the shank section and the tip section and move the retractable element towards and away from the tip section by rotation of the rod.
Claim 27
Dependent Claim
16 words
The vacuum compatible fastener of claim 18, wherein the elastic element is a prefabricated tension spring.
Claim 28
Dependent Claim
38 words
The vacuum compatible fastener of claim 18, wherein the head portion includes an opening extending therethrough and the shank section comprises a tubular member having a channel extending therethrough, the channel being in fluid communication with the opening.
Claim 29
Dependent Claim
19 words
The vacuum compatible fastener of claim 18, wherein the elastic element is constructed from stainless steel, copper or bronze.
Claim 30
Dependent Claim
19 words
The vacuum compatible fastener of claim 18, wherein the at least one retractable element is constructed from stainless steel.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-10 | 2002-02-09 | 2002-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-10 | 2006-02-09 | 2006-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-10 | 2010-02-09 | 2010-08-11 | $7700.00 | Window Closed / Lapsed |