US5780885A
Expired / Lapsed
US
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Accelerometers using silicon on insulator technology
Assignee: Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
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Filing: 1996-08-15
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Granted: 1998-07-14
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Expires: 2016-08-15
Abstract
Abstract Process for the production of accelerometers using the silicon on insulator method. The process comprises the following stages: a) producing a conductive monocrystalline silicon film on a silicon substrate and separated from the latter by an insulating layer; b) etching the silicon film and the insulating layer up to the substrate in order to fix the shape of the mobile elements and the measuring device; c) producing electric contacts for the measuring devices; d) partial elimination of the insulating layer in order to free the mobile elements, the remainder of the insulating layer rendering integral the substrate and the moving elements.
Inventors
- 👤 Bernard Diem
- 👤 Marie-Therese Delaye
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 06:35
CPC Classifications
B; B81; B81C; B81C1/00; B81C1/00015; B81C1/00134; B81C1/0015; B81B; B81B3/00; B81B3/0035; B81B3/0051; G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0802; B81B2201/00; B81B2201/02; B81B2201/0228; B81B2201/0235; B81B2203/00; B81B2203/01; B81B2203/0109; B81B2203/05; B81B2203/053; B81C2201/00; B81C2201/01; B81C2201/0161; B81C2201/0163; B81C2201/0166; B81C2201/0174; B81C2201/0176; B81C2201/0177; G01P2015/0805; G01P2015/0808; G01P2015/0811; G01P2015/0814; G01P2015/0822; G01P2015/0825; G01P2015/0828; Y; Y10; Y10S; Y10S73/00; Y10S73/01; Y10S73/04
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
89 words
An accelerometer comprising: a monocrystalline silicon film; a silicon substrate; an insulating layer; and moving elements etched through said monocrystalline silicon film; said insulating layer separating the monocrystalline silicon film from the silicon substrate, and portions of the insulating film being removed in order to free the moving elements, wherein at least one first moving element of said monocrystalline silicon film has a sensitive axis perpendicular to the substrate and at least one second moving element of said monocrystalline silicon film has a sensitive axis parallel to the substrate.
Claim 2
Dependent Claim
89 words
An accelerometer comprising: a monocrystalline silicon film; a silicon substrate; an insulating layer; and moving elements etched through said monocrystalline silicon film; said insulating layer separating the monocrystalline silicon film from the silicon substrate, and portions of the insulating film being removed in order to free the moving elements, wherein at least one first moving element of said monocrystalline silicon film has a sensitive axis perpendicular to the substrate and at least one second moving element of said monocrystalline silicon film has a sensitive axis parallel to the substrate.
Claim 3
Dependent Claim
14 words
An accelerometer according to claim 1, wherein the moving elements comprise a seismic mass.
Claim 4
Dependent Claim
26 words
An accelerometer according to claim 2, further comprising fixed support elements, insulated from the substrate and beams connecting the seismic mass to the fixed support elements.
Claim 5
Dependent Claim
25 words
An accelerometer according to claim 1, further comprising measuring means for measuring displacements of said moving elements, said measuring means being integrated onto the substrate.
Claim 6
Dependent Claim
16 words
An accelerometer according to claim 1, wherein the monocrystalline slicon film is of an N type.
Claim 7
Dependent Claim
15 words
An accelerometer according to claim 4, wherein the measuring means comprises a comb-shaped electrostatic screen.
Claim 8
Dependent Claim
55 words
An accelerometer comprising: a monocrystalline silicon film on a silicon substrate, said monocrystalline silicon film being separated from the silicon substrate by an insulating layer; and at least one first moving element having a sensitive axis perpendicular to the substrate and at least one second moving element having a sensitive axis parallel to the substrate.
Claim 9
Dependent Claim
55 words
An accelerometer comprising: a monocrystalline silicon film on a silicon substrate, said monocrystalline silicon film being separated from the silicon substrate by an insulating layer; and at least one first moving element having a sensitive axis perpendicular to the substrate and at least one second moving element having a sensitive axis parallel to the substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-07-13 | 2002-01-12 | 2002-07-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-07-13 | 2006-01-12 | 2006-07-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-07-13 | 2010-01-12 | 2010-07-14 | $7700.00 | Window Closed / Lapsed |