US5777328A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ramped foot support
Assignee: Raytheon Co
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Filing: 1996-07-19
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Granted: 1998-07-07
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Expires: 2016-07-19
Abstract
Abstract A support arm for a bolometer suspended over a substrate contacts the underlying substrate in the form of a triangular wedge. The support arm may be a dielectric coated silicon with a metal conductor on the support arm and extending to a contact pad on the substrate.
Inventors
- 👤 Roland W. Gooch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:43
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/18; H10F39/184; H10F39/1843
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
71 words
A radiation detector, comprising: (a) a substrate containing circuitry; (b) a bolometer suspended over said substate, said bolometer with resistance dependent upon temperature; and (c) a plurality of arms supporting said bolometer on said substrate, said arms including conductors connecting said bolometer to said circuitry, each of said arms extending from said substrate with the contact of said arm with said substrate forming a concave contact area having a V-shaped indentation.
Claim 2
Dependent Claim
71 words
A radiation detector, comprising: (a) a substrate containing circuitry; (b) a bolometer suspended over said substate, said bolometer with resistance dependent upon temperature; and (c) a plurality of arms supporting said bolometer on said substrate, said arms including conductors connecting said bolometer to said circuitry, each of said arms extending from said substrate with the contact of said arm with said substrate forming a concave contact area having a V-shaped indentation.
Claim 3
Dependent Claim
21 words
The radiation detector of claim 1, wherein: (a) each of said arms having a hollow triangular wedge shape at said contact.
Claim 4
Dependent Claim
39 words
The radiation detector of claim 2, wherein: (a) said bolometer is planar and parallel to a surface of said substrate; and (b) each of said arms extends parallel to an edge of said bolometer and spaced from said bolometer.
Claim 5
Dependent Claim
32 words
A micromechanical support structure, comprising: (a) an arm extending from a planar body with the contact of said arm with said planar body forming a concave contact area having a V-shaped indentation.
Claim 6
Dependent Claim
32 words
A micromechanical support structure, comprising: (a) an arm extending from a planar body with the contact of said arm with said planar body forming a concave contact area having a V-shaped indentation.
Claim 7
Dependent Claim
20 words
The support structure of claim 4, wherein; (a) said arm has a hollow triangular wedge shape at said planar body.
Claim 8
Independent Claim
131 words
A method of fabricating a micromechanical support arm, comprising the steps of: (a) forming a first layer on a second layer with said second layer on a substrate, said first layer containing an opening with a V-shaped portion of said first layer extending into said opening; (b) removing portions of said second layer exposed by said opening, said removing simultaneously eroding said V-shaped portion of said first layer thereby expanding said opening and exposing additional portions of said second layer; (c) removing said first layer; (d) depositing a third layer on said second layer, said third layer contacting said substrate where said second layer has been completely removed; (e) removing portions of said third layer to define a support arm; and (f) removing said second layer to leave a support arm.
Claim 9
Independent Claim
131 words
A method of fabricating a micromechanical support arm, comprising the steps of: (a) forming a first layer on a second layer with said second layer on a substrate, said first layer containing an opening with a V-shaped portion of said first layer extending into said opening; (b) removing portions of said second layer exposed by said opening, said removing simultaneously eroding said V-shaped portion of said first layer thereby expanding said opening and exposing additional portions of said second layer; (c) removing said first layer; (d) depositing a third layer on said second layer, said third layer contacting said substrate where said second layer has been completely removed; (e) removing portions of said third layer to define a support arm; and (f) removing said second layer to leave a support arm.
Claim 10
Dependent Claim
19 words
The method of claim 6, wherein (a) said first layer is photoresist; and (b) said second layer is polyimide.
Claim 11
Dependent Claim
23 words
The method of claim 7, wherein: (a) said removing of step (b) of claim 6 includes reactive ion etching with an oxygen plasma.
Claim 12
Dependent Claim
13 words
The method of claim 6, wherein: (a) said third layer is amorphous silicon.
Claim 13
Dependent Claim
18 words
The method of claim 6, wherein: (a) said opening has the shape of a circle missing a wedge.
References Cited (Backward Citations)
US5500761A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-07-06 | 2002-01-05 | 2002-07-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-07-06 | 2006-01-05 | 2006-07-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-07-06 | 2010-01-05 | 2010-07-07 | $7700.00 | Window Closed / Lapsed |