US5773199A
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US
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Method for controlling linewidth by etching bottom anti-reflective coating
Assignee: Vanguard International Semiconductor Corp
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Filing: 1996-09-09
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Granted: 1998-06-30
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Expires: 2016-09-09
Abstract
Abstract A method for forming a patterned layer within an integrated circuit. There is first provided a substrate having formed thereover a blanket target layer. There is then formed upon the blanket target layer a blanket focusing layer formed from an organic anti-reflective coating (ARC) material, where the blanket focusing layer is susceptible to a reproducible negative etch bias within a first etch method employed in forming from the blanket focusing layer a patterned focusing layer. The first etch method is a first plasma etch method employing a reactant gas composition comprising trifluoromethane, carbon tetrafluoride, oxygen and argon. There is then formed upon the blanket focusing layer a blanket photoresist layer which is photoexposed and developed to form a patterned photoresist layer. There is then etched through the first etch method the blanket focusing layer to form the patterned focusing layer while employing the patterned photoresist layer as a first etch mask layer, where the patterned focusing layer has the reproducible negative etch bias with respect to the patterned photoresist layer. Finally, there is etched through a second etch method the blanket target layer to form a patterned target layer while employing the patterned focusing layer as a second etch mask layer. The patterned target layer has a reproducible second etch bias with respect to the patterned focusing layer, where the reproducible second etch bias does not substantially compensate the reproducible negative etch bias. Through the method, there may be formed patterned layers, such as gate electrodes within field effect transistors (FETs), of linewidth at least as narrow as about 0.25 micron while employing near ultra-violet (NUV) (ie: 365 nm) photoexposure radiation.
Inventors
- 👤 Kung Linliu
- 👤 Hsu-Li Cheng
- 👤 Eric S. Jeng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 22:38
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01326; H10P50/71; G03F7/094
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
230 words
A method for forming a patterned layer within an integrated circuit comprising: providing a substrate; forming over the substrate a blanket target layer; forming upon the blanket target layer a blanket focusing layer, the blanket focusing layer being formed from an organic anti-reflective coating (ARC) material, the blanket focusing layer being susceptible to a reproducible negative etch bias within a first etch method employed in forming from the blanket focusing layer a patterned focusing layer, the first etch method being a first plasma etch method employing a reactant gas composition comprising trifluoromethane, carbon tetrafluoride, oxygen and argon; forming upon the blanket focusing layer a blanket photoresist layer; photoexposing and developing the blanket photoresist layer to form a patterned photoresist layer; etching through use of the first etch method the blanket focusing layer to form the patterned focusing layer while employing the patterned photoresist layer as a first etch mask layer, the patterned focusing layer having the reproducible negative etch bias with respect to the patterned photoresist layer; and etching through use of a second etch method the blanket target layer to form a patterned target layer while employing the patterned focusing layer as a second etch mask layer, the patterned target layer having a reproducible second etch bias with respect to the patterned focusing layer, where the reproducible second etch bias does not substantially compensate the reproducible negative etch bias.
Claim 2
Independent Claim
230 words
A method for forming a patterned layer within an integrated circuit comprising: providing a substrate; forming over the substrate a blanket target layer; forming upon the blanket target layer a blanket focusing layer, the blanket focusing layer being formed from an organic anti-reflective coating (ARC) material, the blanket focusing layer being susceptible to a reproducible negative etch bias within a first etch method employed in forming from the blanket focusing layer a patterned focusing layer, the first etch method being a first plasma etch method employing a reactant gas composition comprising trifluoromethane, carbon tetrafluoride, oxygen and argon; forming upon the blanket focusing layer a blanket photoresist layer; photoexposing and developing the blanket photoresist layer to form a patterned photoresist layer; etching through use of the first etch method the blanket focusing layer to form the patterned focusing layer while employing the patterned photoresist layer as a first etch mask layer, the patterned focusing layer having the reproducible negative etch bias with respect to the patterned photoresist layer; and etching through use of a second etch method the blanket target layer to form a patterned target layer while employing the patterned focusing layer as a second etch mask layer, the patterned target layer having a reproducible second etch bias with respect to the patterned focusing layer, where the reproducible second etch bias does not substantially compensate the reproducible negative etch bias.
Claim 3
Dependent Claim
48 words
The method of claim 1 wherein: the blanket target layer is chosen from the group of blanket target layers consisting of blanket conductor layers, blanket insulator layers, blanket semiconductor layers and blanket photoactive layers; and the blanket target layer is from about 1000 to about 5000 angstroms thick.
Claim 4
Dependent Claim
19 words
The method of claim 1 wherein the blanket focusing layer is from about 600 to about 2000 angstroms thick.
Claim 5
Dependent Claim
70 words
The method of claim 1 wherein: the blanket photoresist layer is photoexposed employing a near ultra-violet (NUV) 365 nanometer photoexposure radiation method and developed to yield the patterned photoresist layer of linewidth dimension as low as about 0.35 microns; the first etch method employs an over-etch of from about 50 to about 70 percent; and the second etch method employs an over-etch of from about 50 to about 70 percent.
Claim 6
Independent Claim
302 words
A method for forming a patterned layer within an integrated circuit comprising: providing a substrate; forming over the substrate a blanket target layer; forming upon the blanket target layer a blanket conformal dielectric layer; forming upon the blanket conformal dielectric layer a blanket focusing layer, the blanket focusing layer being formed from an organic anti-reflective coating (ARC) material, the blanket focusing layer being susceptible to a reproducible negative etch bias within a first etch method employed in forming from the blanket focusing layer a patterned focusing layer, the first etch method being a first plasma etch method employing a reactant gas composition comprising trifluoromethane, carbon tetrafluoride, oxygen and argon; forming upon the blanket focusing layer a blanket photoresist layer; photoexposing and developing the blanket photoresist layer to form a patterned photoresist layer; etching through use of the first etch method the blanket focusing layer to form the patterned focusing layer while employing the patterned photoresist layer as a first etch mask layer, the patterned focusing layer having the reproducible negative etch bias with respect to the patterned photoresist layer; etching through use of a second etch method the blanket conformal dielectric layer to form a patterned conformal dielectric layer while employing the patterned focusing layer as a second etch mask layer, the patterned conformal dielectric having a reproducible second etch bias with respect to the patterned focusing layer; and etching through use of a third etch method the blanket target layer to form a patterned target layer while employing the patterned conformal dielectric layer as a third etch mask layer, the patterned target layer having a reproducible third etch bias with respect to the patterned conformal dielectric layer, where the reproducible second etch bias and the reproducible third etch bias do not, in the aggregate, substantially compensate the reproducible negative etch bias.
Claim 7
Independent Claim
302 words
A method for forming a patterned layer within an integrated circuit comprising: providing a substrate; forming over the substrate a blanket target layer; forming upon the blanket target layer a blanket conformal dielectric layer; forming upon the blanket conformal dielectric layer a blanket focusing layer, the blanket focusing layer being formed from an organic anti-reflective coating (ARC) material, the blanket focusing layer being susceptible to a reproducible negative etch bias within a first etch method employed in forming from the blanket focusing layer a patterned focusing layer, the first etch method being a first plasma etch method employing a reactant gas composition comprising trifluoromethane, carbon tetrafluoride, oxygen and argon; forming upon the blanket focusing layer a blanket photoresist layer; photoexposing and developing the blanket photoresist layer to form a patterned photoresist layer; etching through use of the first etch method the blanket focusing layer to form the patterned focusing layer while employing the patterned photoresist layer as a first etch mask layer, the patterned focusing layer having the reproducible negative etch bias with respect to the patterned photoresist layer; etching through use of a second etch method the blanket conformal dielectric layer to form a patterned conformal dielectric layer while employing the patterned focusing layer as a second etch mask layer, the patterned conformal dielectric having a reproducible second etch bias with respect to the patterned focusing layer; and etching through use of a third etch method the blanket target layer to form a patterned target layer while employing the patterned conformal dielectric layer as a third etch mask layer, the patterned target layer having a reproducible third etch bias with respect to the patterned conformal dielectric layer, where the reproducible second etch bias and the reproducible third etch bias do not, in the aggregate, substantially compensate the reproducible negative etch bias.
Claim 8
Dependent Claim
48 words
The method of claim 5 wherein: the blanket target layer is chosen from the group of blanket target layers consisting of blanket conductor layers, blanket insulator layers, blanket semiconductor layers and blanket photoactive layers; and the blanket target layer is from about 1000 to about 5000 angstroms thick.
Claim 9
Dependent Claim
20 words
The method of claim 5 wherein the blanket conformal dielectric layer is from about 1500 to about 3000 angstroms thick.
Claim 10
Dependent Claim
19 words
The method of claim 5 wherein the blanket focusing layer is from about 600 to about 2000 angstroms thick.
Claim 11
Dependent Claim
85 words
The method of claim 5 wherein: the blanket photoresist layer is photoexposed employing a near ultra-violet (NUV) 365 nanometer photoexposure radiation method and developed to yield the patterned photoresist layer of linewidth dimension as low as about 0.35 microns; the first etch method employs an over-etch of from about 50 to about 70 percent; the second etch method employs an over-etch of from about 50 to about 70 percent; and the third etch method employs an over-etch of from about 50 to about 70 percent.
Claim 12
Independent Claim
234 words
A method for forming a gate electrode within an integrated circuit comprising: providing a substrate; forming over the substrate a blanket gate electrode material layer; forming upon the blanket gate electrode material layer a blanket focusing layer, the blanket focusing layer being formed from an organic anti-reflective coating (ARC) material, the blanket focusing layer being susceptible to a reproducible negative etch bias within a first etch method employed in forming from the blanket focusing layer a patterned focusing layer, the first etch method being a first plasma etch method employing a reactant gas composition comprising trifluoromethane, carbon tetrafluoride, oxygen and argon; forming upon the blanket focusing layer a blanket photoresist layer; photoexposing and developing the blanket photoresist layer to form a patterned photoresist layer; etching through use of the first etch method the blanket focusing layer to form the patterned focusing layer while employing the patterned photoresist layer as a first etch mask layer, the patterned focusing layer having the reproducible negative etch bias with respect to the patterned photoresist layer; and etching through use of a second etch method the blanket gate electrode material layer to form a gate electrode while employing the patterned focusing layer as a second etch mask layer, the gate electrode having a reproducible second etch bias with respect to the patterned focusing layer, where the reproducible second etch bias does not substantially compensate the reproducible negative etch bias.
Claim 13
Independent Claim
234 words
A method for forming a gate electrode within an integrated circuit comprising: providing a substrate; forming over the substrate a blanket gate electrode material layer; forming upon the blanket gate electrode material layer a blanket focusing layer, the blanket focusing layer being formed from an organic anti-reflective coating (ARC) material, the blanket focusing layer being susceptible to a reproducible negative etch bias within a first etch method employed in forming from the blanket focusing layer a patterned focusing layer, the first etch method being a first plasma etch method employing a reactant gas composition comprising trifluoromethane, carbon tetrafluoride, oxygen and argon; forming upon the blanket focusing layer a blanket photoresist layer; photoexposing and developing the blanket photoresist layer to form a patterned photoresist layer; etching through use of the first etch method the blanket focusing layer to form the patterned focusing layer while employing the patterned photoresist layer as a first etch mask layer, the patterned focusing layer having the reproducible negative etch bias with respect to the patterned photoresist layer; and etching through use of a second etch method the blanket gate electrode material layer to form a gate electrode while employing the patterned focusing layer as a second etch mask layer, the gate electrode having a reproducible second etch bias with respect to the patterned focusing layer, where the reproducible second etch bias does not substantially compensate the reproducible negative etch bias.
Claim 14
Dependent Claim
50 words
The method of claim 10 wherein: the blanket gate electrode material layer target layer is chosen from the group of blanket gate electrode material layers consisting of blanket polysilicon layers and blanket polycide layers; and the blanket gate electrode material layer is from about 1000 to about 3000 angstroms thick.
Claim 15
Dependent Claim
19 words
The method of claim 10 wherein the blanket focusing layer is from about 600 to about 2000 angstroms thick.
Claim 16
Dependent Claim
70 words
The method of claim 10 wherein: the blanket photoresist layer is photoexposed employing a near ultra-violet (NUV) 365 nanometer photoexposure radiation method and developed to yield the patterned photoresist layer of linewidth dimension as low as about 0.35 microns; the first etch method employs an over-etch of from about 50 to about 70 percent; and the second etch method employs an over-etch of from about 50 to about 70 percent.
Claim 17
Independent Claim
307 words
A method for forming a gate electrode layer within an integrated circuit comprising: providing a substrate; forming over the substrate a blanket gate electrode material layer; forming upon the blanket gate electrode material layer a blanket conformal dielectric layer; forming upon the blanket conformal dielectric layer a blanket focusing layer, the blanket focusing layer being formed from an organic anti-reflective coating (ARC) material, the blanket focusing layer being susceptible to a reproducible negative etch bias within a first etch method employed in forming from the blanket focusing layer a patterned focusing layer, the first etch method being a first plasma etch method employing a reactant gas composition comprising trifluoromethane, carbon tetrafluoride, oxygen and argon; forming upon the blanket focusing layer a blanket photoresist layer; photoexposing and developing the blanket photoresist layer to form a patterned photoresist layer; etching through use of the first etch method the blanket focusing layer to form the patterned focusing layer while employing the patterned photoresist layer as a first etch mask layer, the patterned focusing layer having the reproducible negative etch bias with respect to the patterned photoresist layer; etching through use of a second etch method the blanket conformal dielectric layer to form a patterned conformal dielectric layer while employing the patterned focusing layer as a second etch mask layer, the patterned conformal dielectric having a reproducible second etch bias with respect to the patterned focusing layer; and etching through use of a third etch method the blanket gate electrode material layer to form a gate electrode while employing the patterned conformal dielectric layer as a third etch mask layer, the gate electrode having a reproducible third etch bias with respect to the patterned conformal dielectric layer, where the reproducible second etch bias and the reproducible third etch bias do not, in the aggregate, substantially compensate the reproducible negative etch bias.
Claim 18
Independent Claim
307 words
A method for forming a gate electrode layer within an integrated circuit comprising: providing a substrate; forming over the substrate a blanket gate electrode material layer; forming upon the blanket gate electrode material layer a blanket conformal dielectric layer; forming upon the blanket conformal dielectric layer a blanket focusing layer, the blanket focusing layer being formed from an organic anti-reflective coating (ARC) material, the blanket focusing layer being susceptible to a reproducible negative etch bias within a first etch method employed in forming from the blanket focusing layer a patterned focusing layer, the first etch method being a first plasma etch method employing a reactant gas composition comprising trifluoromethane, carbon tetrafluoride, oxygen and argon; forming upon the blanket focusing layer a blanket photoresist layer; photoexposing and developing the blanket photoresist layer to form a patterned photoresist layer; etching through use of the first etch method the blanket focusing layer to form the patterned focusing layer while employing the patterned photoresist layer as a first etch mask layer, the patterned focusing layer having the reproducible negative etch bias with respect to the patterned photoresist layer; etching through use of a second etch method the blanket conformal dielectric layer to form a patterned conformal dielectric layer while employing the patterned focusing layer as a second etch mask layer, the patterned conformal dielectric having a reproducible second etch bias with respect to the patterned focusing layer; and etching through use of a third etch method the blanket gate electrode material layer to form a gate electrode while employing the patterned conformal dielectric layer as a third etch mask layer, the gate electrode having a reproducible third etch bias with respect to the patterned conformal dielectric layer, where the reproducible second etch bias and the reproducible third etch bias do not, in the aggregate, substantially compensate the reproducible negative etch bias.
Claim 19
Dependent Claim
48 words
The method of claim 14 wherein: the blanket gate electrode material layer is chosen from the group of blanket gate electrode material layers consisting of blanket polysilicon layers and blanket polycide layers; and the blanket gate electrode material layer is from about 1000 to about 3000 angstroms thick.
Claim 20
Dependent Claim
20 words
The method of claim 14 wherein the blanket conformal dielectric layer is from about 1500 to about 3000 angstroms thick.
Claim 21
Dependent Claim
19 words
The method of claim 14 wherein the blanket focusing layer is from about 600 to about 2000 angstroms thick.
Claim 22
Dependent Claim
85 words
The method of claim 14 wherein: the blanket photoresist layer is photoexposed employing a near ultra-violet (NUV) 365 nanometer photoexposure radiation method and developed to yield the patterned photoresist layer of linewidth dimension as low as about 0.35 microns; the first etch method employs an over-etch of from about 50 to about 70 percent; the second etch method employs an over-etch of from about 50 to about 70 percent; and the third etch method employs an over-etch of from about 50 to about 70 percent.
References Cited (Backward Citations)
US5536673A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-29 | 2001-12-29 | 2002-06-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-29 | 2005-12-29 | 2006-06-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-29 | 2009-12-29 | 2010-06-30 | $7700.00 | Window Closed / Lapsed |