Abstract The present invention provides a test head cooling system for cooling test heads of a semiconductor IC test apparatus in an enclosed structure. A sealed housing is provided in a test head wherein an air duct is formed in a wall of the sealed box so that cooling air flow effectively. Several thousands of cables are connected to sockets of a plurality of boards. The boards are fixed in board racks by inserting the boards to sockets of the board racks. Gaps between the boards are arranged to provide good ventilation. A cooling pipe is connected to two heat exchangers for circulating cooling medium. A flexible hose for circulating the cooling medium is connected to one of the heat exchangers. The flexible hose is connected to an outside cooling apparatus so as to freely control the temperature of the cooling medium circulating inside the heat exchanger.
A test head cooling system, comprising: a board rack (72) mounted inside said test head; a cable (90) extended from a semiconductor IC test apparatus, said cable (90) being connected to a socket of said board rack (72) mounted inside said test head; a board (83) inserted to said socket of said board rack (72); an air duct (20) provided in a wall inside of a sealed housing (10); a flexible hose (60) connected to an outside cooling apparatus for circulating cooling medium, said flexible hose (60) being connected to a heat exchanger (54); a partition (11) provided between a board rack (72) and said heat exchanger (54); fans (34, 35) for generating cooling air in said sealed housing (10) arranged in parallel position in both sides of said partition (11).
Claim 2
Dependent Claim
131 words
A test head cooling system, comprising: a board rack (72) mounted inside said test head; a cable (90) extended from a semiconductor IC test apparatus, said cable (90) being connected to a socket of said board rack (72) mounted inside said test head; a board (83) inserted to said socket of said board rack (72); an air duct (20) provided in a wall inside of a sealed housing (10); a flexible hose (60) connected to an outside cooling apparatus for circulating cooling medium, said flexible hose (60) being connected to a heat exchanger (54); a partition (11) provided between a board rack (72) and said heat exchanger (54); fans (34, 35) for generating cooling air in said sealed housing (10) arranged in parallel position in both sides of said partition (11).