US5763870A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and system for operating a laser device employing an integral power-regulation sensor
Assignee: Agilent Technologies Inc
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Filing: 1996-12-13
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Granted: 1998-06-09
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Expires: 2016-12-13
Abstract
Abstract A method and system of operating a laser device includes utilizing an integral power-regulation sensor of the laser device to detect energy back reflected from an object of interest and then using the detected signal as a basis for determining a characteristic related to the object of interest. In the preferred embodiment, the determined characteristic is the position of the beam focus relative to a surface of the object. Also in the preferred embodiment, the integral power-regulation sensor is disconnected from power-regulation circuitry during the focusing operation. Interaction of the back reflected energy and the outgoing beam can be reduced by introducing beam rotation, such as by providing a quarter-wave plate along the beam path. Focusing sensitivity can be increased by locating reflective targets over the surface and by executing AC measurements to filter DC components from the signal.
Inventors
- 👤 John W. Sadler
- 👤 Andreas N. Dorsel
- 👤 J. Robert Mitchell
- 👤 Mark A. Troll
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:01
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/30; G02B5/3083; H; H01; H01S; H01S5/00; H01S5/06; H01S5/068; H01S5/0683
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
79 words
A method of operating a laser device having an integral power-regulation sensor fixed to said laser device to be responsive to output beam power, said method comprising steps of: directing an output beam from said laser device at an object of interest; using said integral power-regulation sensor to detect energy reflected from said object of interest; forming a signal indicative of said detected reflected energy; and based upon said signal, determining a characteristic related to said object of interest.
Claim 2
Independent Claim
79 words
A method of operating a laser device having an integral power-regulation sensor fixed to said laser device to be responsive to output beam power, said method comprising steps of: directing an output beam from said laser device at an object of interest; using said integral power-regulation sensor to detect energy reflected from said object of interest; forming a signal indicative of said detected reflected energy; and based upon said signal, determining a characteristic related to said object of interest.
Claim 3
Dependent Claim
35 words
The method of claim 1 further comprising a step of changing polarization of said detected reflected energy relative to said output beam such that interaction between said output beam and said reflected energy is reduced.
Claim 4
Dependent Claim
34 words
The method of claim 2 wherein said step of changing polarization of said detected reflected energy includes positioning a quarter-wave plate in a beam path from said laser device to said object of interest.
Claim 5
Dependent Claim
63 words
The method of claim 1 wherein said step of determining a characteristic related to said object of interest is a step of determining focus of said output beam on a surface of said object of interest, said method further comprising defining relative positioning of said focus and said surface based upon said step of determining focus of said output beam on said surface.
Claim 6
Dependent Claim
31 words
The method of claim 4 further comprising locating reflective targets on said surface to increase said level of detected reflected energy when said output beam impinges one of said reflective targets.
Claim 7
Dependent Claim
45 words
The method of claim 4 further comprising a step of scanning said output beam along said surface, said step of defining said relative positioning includes positioning said surface such that said surface is substantially coplanar with a focal plane defined by said scanning output beam.
Claim 8
Dependent Claim
30 words
The method of claim 1 wherein said step of directing said output beam at said object of interest includes positioning a chip having an array of fluorescently tagged biological samples.
Claim 9
Dependent Claim
30 words
The method of claim 7 wherein said step of directing said output beam further includes employing a gas laser device having said integral power-regulation sensor housed within said laser device.
Claim 10
Dependent Claim
39 words
The method of claim 1 further comprising a step of disabling said integral power-regulation sensor with respect to being responsive to said output beam output prior to said step of directing said output beam at said object of interest.
Claim 11
Dependent Claim
37 words
The method of claim 1 wherein said step of determining said characteristic based upon said signal includes filtering DC components from said signal, thereby reducing effects of variations in said output beam generated by said laser device.
Claim 12
Independent Claim
113 words
A method of focusing an output beam emitted from a laser device having a housing that includes an integral power sensor to sample said output beam for dynamically controlling output beam power, said method comprising steps of: disabling said integral power sensor with respect to dynamic control of said output beam power; impinging a surface with said output beam; varying relative positioning between a focus of said output beam and said surface; during said step of varying said relative positioning, detecting a signal responsive to beam energy reflected at said surface and received at said integral power sensor; and selecting a focus of said output beam on said surface based upon said signal.
Claim 13
Independent Claim
113 words
A method of focusing an output beam emitted from a laser device having a housing that includes an integral power sensor to sample said output beam for dynamically controlling output beam power, said method comprising steps of: disabling said integral power sensor with respect to dynamic control of said output beam power; impinging a surface with said output beam; varying relative positioning between a focus of said output beam and said surface; during said step of varying said relative positioning, detecting a signal responsive to beam energy reflected at said surface and received at said integral power sensor; and selecting a focus of said output beam on said surface based upon said signal.
Claim 14
Dependent Claim
15 words
The method of claim 11 further comprising scanning said output beam relative to said surface.
Claim 15
Dependent Claim
39 words
The method of claim 12 further comprising steps of: (a) systematically moving said surface in a direction perpendicular to a scanning direction; and (b) repeating said step of selecting a focus for a plurality of positions of said surface.
Claim 16
Dependent Claim
17 words
The method of claim 12 further comprising forming an array of highly reflective targets on said surface.
Claim 17
Dependent Claim
39 words
The method of claim 11 further comprising a step of providing rotation of beam polarization such that said received reflected beam polarization is rotated 90 degrees relative to beam polarization of said output beam emitted from said laser device.
Claim 18
Independent Claim
120 words
A system for forming an image of a surface comprising: a laser device having an internal power sensor positioned to receive a portion of an output beam prior to emergence from said laser device; a chip mount for securing a substrate within a path of said output beam; means for providing relative movement between said output beam and a substrate secured by said chip mount; circuit means for determining intensity of energy back reflected from said substrate along said path, said circuit means being responsive to back reflected energy received at said internal sensor; and position means for positioning a focus of said output beam at a surface of said substrate, said position means being responsive to said circuit means.
Claim 19
Independent Claim
120 words
A system for forming an image of a surface comprising: a laser device having an internal power sensor positioned to receive a portion of an output beam prior to emergence from said laser device; a chip mount for securing a substrate within a path of said output beam; means for providing relative movement between said output beam and a substrate secured by said chip mount; circuit means for determining intensity of energy back reflected from said substrate along said path, said circuit means being responsive to back reflected energy received at said internal sensor; and position means for positioning a focus of said output beam at a surface of said substrate, said position means being responsive to said circuit means.
Claim 20
Dependent Claim
28 words
The system of claim 16 wherein said position means is connected to vary either a position of said substrate or a focus element for focusing said output beam.
Claim 21
Dependent Claim
23 words
The system of claim 16 wherein said system further comprises a means for scanning said output beam along said surface of said substrate.
Claim 22
Dependent Claim
17 words
The system of claim 16 further comprising a quarter-wave plate along said path of said output beam.
Claim 23
Dependent Claim
15 words
The system of claim 16 further comprising reflective targets on said surface of said substrate.
Claim 24
Dependent Claim
12 words
The system of claim 20 further comprising biological samples on said surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-08 | 2001-12-08 | 2002-06-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-08 | 2005-12-08 | 2006-06-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-08 | 2009-12-08 | 2010-06-09 | $7700.00 | Window Closed / Lapsed |