US5763633A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Metal carboxylate complexes for formation of metal-containing films on semiconductor devices
Assignee: Micron Technology Inc
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Filing: 1996-12-03
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Granted: 1998-06-09
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Expires: 2016-12-03
Abstract
Abstract A method of forming a metal-containing film on a substrate, such as a semiconductor wafer. The method involves depositing a Group VIII metal carboxylate complex on the substrate, wherein the Group VIII metal is selected from the group consisting of Ru, Os, Rh, Ir, Pd, and Pt, and thermally decomposing the Group VIII metal carboxylate complex to form the metal-containing film.
Inventors
- 👤 Brian A. Vaartstra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:10
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/43; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682; H10D1/692; H10P14/46
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
59 words
A metal carboxylate complex of the formula: (alkene).sub.x M(OC(O)R)!.sub.y wherein (a) alkene refers to a neutral linear or monocyclic hydrocarbon ligand having one or more carbon-carbon double bonds; (b) M is a second or third row Group VII metal in the +1 oxidation state; (c) R is a (C 3 -C 20 )alkyl moiety; (d) x=0-4y; and (e) y=1-5.
Claim 2
Dependent Claim
59 words
A metal carboxylate complex of the formula: (alkene).sub.x M(OC(O)R)!.sub.y wherein (a) alkene refers to a neutral linear or monocyclic hydrocarbon ligand having one or more carbon-carbon double bonds; (b) M is a second or third row Group VII metal in the +1 oxidation state; (c) R is a (C 3 -C 20 )alkyl moiety; (d) x=0-4y; and (e) y=1-5.
Claim 3
Dependent Claim
13 words
The complex of claim 1 wherein the alkene has 1-4 carbon-carbon double bonds.
Claim 4
Dependent Claim
13 words
The complex of claim 2 wherein the alkene has two carbon-carbon double bonds.
Claim 5
Dependent Claim
15 words
The complex of claim 1 wherein R is a (C 3 -C 12 )alkyl moiety.
Claim 6
Dependent Claim
15 words
The complex of claim 4 wherein R is a (C 3 -C 8 )alkyl moiety.
Claim 7
Dependent Claim
7 words
The complex of claim 1 wherein x=0-2y.
Claim 8
Dependent Claim
7 words
The complex of claim 1 wherein y=1-3.
Claim 9
Dependent Claim
8 words
The complex of claim 1 which is Ir(I)(cyclooctadiene)(2-ethylhexanoate).
References Cited (Backward Citations)
US5401535A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-08 | 2001-12-08 | 2002-06-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-08 | 2005-12-08 | 2006-06-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-08 | 2009-12-08 | 2010-06-09 | $7700.00 | Window Closed / Lapsed |