Apparatus and method for scanning laser imaging of macroscopic samples

Claim 2

A confocal scanning beam optical imaging system for macroscopic specimens comprising: means for supporting a specimen to be observed and measured; an illumination source producing a light beam directed along an optical path toward said specimen; a scan lens for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane, there being no image plane between said scan lens and said specimen plane; means for scanning the light beam to move the diffraction-limited spot in a predetermined scan pattern on said specimen plane; a first detection arm receiving light reflected, scattered or emitted from said diffraction-limited spot in said specimen plane comprising: a pinhole and a focusing lens for obtaining a focal point for confocal detection of the light returning from said specimen; a first detector placed behind said pinhole; a first beamsplitter directing light returning from said specimen into said first detection arm; and means for producing a signal from said first detector.

Claim 3

An imaging system as claimed in claim 1 wherein said scan lens has a body that is longer in a direction of said beam than in a direction perpendicular to said beam.

Claim 4

An imaging system as claimed in claim 2 wherein said scan lens is a telecentric scan lens.

Claim 5

An imaging system as claimed in claim 3 wherein the detector is a spectrally-resolved detector.

Claim 6

An imaging system as claimed in claim 3 further including: a second detection arm and a second beamsplitter directing light returning from said specimen into said second detection arm; said second beamsplitter being located between a first beamsplitter and said specimen; said second detection arm comprising a condenser lens for collecting the light returning from said specimen and a second detector placed behind said condenser lens whereby a non-confocal image of the specimen is obtained.

Claim 7

An imaging system as claimed in claim 3 further including a condenser lens and a transmission detector placed on the opposite side of said specimen, said condenser lens and said transmission detector being coaxial with said scan lens, whereby light transmitted through said specimen is detected.

Claim 8

An imaging system as claimed in any one of claims 1, 2 or 3 wherein said illumination source is a laser.

Claim 9

An imaging system as claimed in claim 1 wherein said scan lens is a telecentric scan lens.

Claim 10

An imaging system as claimed in claim 8 wherein said scan lens is a laser scan lens.

Claim 11

A confocal scanning beam optical transmission and reflection imaging system for macroscopic specimens comprising means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, an optical subassembly comprising a first telecentric scan lens for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane, a second telecentric scan lens placed on the opposite side of said specimen, and coaxial with said first telecentric scan lens, at such a distance that the focal planes of the two telecentric scan lenses coincide, a beamsplitter to direct portions of said light beam toward each of the two telecentric scan lenses, a plurality of reflecting means and lenses, arranged such that the two telecentric scan lenses always focus their respective portions of the incoming light beam to the same spot on said prescribed specimen plane as the scan proceeds, means for scanning the light beam to move the diffraction-limited spot in a predetermined scan pattern on said specimen plane, a detection arm receiving light reflected, scattered or emitted from said diffraction-limited spot in said specimen plane comprising a pinhole and a focusing lens for obtaining a focal point for confocal detection of the light returning from said specimen, a detector placed behind said pinhole, a second beamsplitter directing light returning from said specimen into said detection arm, whereby the specimen is illuminated from both sides, and the detector receives both reflected and transmitted light resulting from each direction of illumination of said specimen.

Claim 12

A confocal scanning beam optical transmission and reflection imaging system for macroscopic specimens comprising means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, an optical subassembly comprising a first telecentric scan lens for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane, a second telecentric scan lens placed on the opposite side of said specimen, and coaxial with said first telecentric scan lens, at such a distance that the focal planes of the two telecentric scan lenses coincide, a beamsplitter to direct portions of said light beam toward each of the two telecentric scan lenses, a plurality of reflecting means and lenses, arranged such that the two telecentric scan lenses always focus their respective portions of the incoming light beam to the same spot on said prescribed specimen plane as the scan proceeds, means for scanning the light beam to move the diffraction-limited spot in a predetermined scan pattern on said specimen plane, a detection arm receiving light reflected, scattered or emitted from said diffraction-limited spot in said specimen plane comprising a pinhole and a focusing lens for obtaining a focal point for confocal detection of the light returning from said specimen, a detector placed behind said pinhole, a second beamsplitter directing light returning from said specimen into said detection arm, whereby the specimen is illuminated from both sides, and the detector receives both reflected and transmitted light resulting from each direction of illumination of said specimen.

Claim 13

The confocal scanning beam optical transmission and reflection imaging system for macroscopic specimens of claim 10 wherein said optical subassembly further includes a half-wave plate and a polarizer, and said detection further includes an analyzer in front of said focusing lens whereby the different imaging modes of the system can detect separately: reflection from one side of the sample, reflection from the other side, transmission from one side, and transmission from the other side.

Claim 14

The confocal scanning beam optical transmission and reflection imaging system for macroscopic specimens of claim 10 wherein said beamsplitter in said optical subassembly is a polarizing beamsplitter, said optical subassembly further includes a first quarter-wave plate placed between said polarizing beamsplitter and said first telecentric laser scan lens, and a second quarter-wave plate placed between said polarizing beamsplitter and said second telecentric laser scan lens, a half-wave plate is placed between said polarizing beamsplitter and said means for scanning the light beam, whereby a transmission image illuminated from one side of said specimen is detected if said half-wave plate is removed, a transmission image illuminated from the other side of the specimen is detected if said half-wave plate is replaced, a reflection image from one side of the specimen is detected if both quarter-wave plates are removed, and a reflection image of the other side of the specimen is detected if said half-wave plate is also removed.

Claim 15

An imaging system as claimed in any one of claims 10, 11 or 12 wherein said illumination source is a laser.

Claim 18

A method as claimed in claim 14 including the steps of scanning said specimen over a scan angle of +/-8.5°.

Claim 21

A method as claimed in claim 10 including the step of scanning said specimen with said beam over a distance of up to approximately 7.5 cm.