US5757496A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of surface roughness measurement using a fiber-optic probe
Assignee: Mitutoyo Corp
•
Filing: 1997-03-07
•
Granted: 1998-05-26
•
Expires: 2017-03-07
Abstract
Abstract A method of surface roughness measurement is disclosed which uses a fiber-optic probe having a sensor head constituted of a light-emitting fiber and multiple light-receiving fibers disposed coaxially with the light-emitting fiber. The surface roughness measurement includes the steps of: (a) pre-measuring a first correlation between detected intensity and gap distance for each of reference samples obtained under a plurality of different processing conditions; (b) searching a second correlation between maximum intensity and surface roughness for each of the reference samples, based on the first correlation, and storing the second correlation in memory; (c) adjusting the gap distance so as to set the probe in a position at which the maximum intensity is obtained for the reference sample machined under the processing condition to be monitored; and (d) monitoring the maximum intensity of the machined surface at the gap distance set in step (c), and determining the roughness of the machined surface based on the second correlation.
Inventors
- 👤 Kazuo Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 22:32
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/30; G01B11/303
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
229 words
A method of surface roughness measurement using a fiber-optic probe wherein said probe has at least one sensor head constituted of a light-emitting fiber and multiple light-receiving fibers disposed coaxially with the light-emitting fiber, the method comprising the steps of: (a) directing a light beam from the sensor head onto each of multiple reference samples machined under a plurality of different processing conditions, and pre-measuring a first correlation between detected intensity and gap distance for each of the reference samples, the detected intensity being defined as a sum of outputs of the light-receiving fibers, the gap distance being defined as a distance between the sensor head and a surface of the reference sample; (b) searching a second correlation between maximum intensity defined as a peak of the detected intensity in a predetermined range of the gap distance and surface roughness, based on the first correlation obtained in step (a), and storing the second correlation in a memory; (c) adjusting the gap distance so as to set the probe in a position at which the maximum intensity is obtained, based on the first correlation for the reference sample machined under the processing conditions to be monitored; and (d) monitoring detected intensity obtained at the gap distance set in step (c) for a to-be-measured sample, and determining surface roughness thereof based on the second correlation stored in the memory in advance.
Claim 2
Independent Claim
229 words
A method of surface roughness measurement using a fiber-optic probe wherein said probe has at least one sensor head constituted of a light-emitting fiber and multiple light-receiving fibers disposed coaxially with the light-emitting fiber, the method comprising the steps of: (a) directing a light beam from the sensor head onto each of multiple reference samples machined under a plurality of different processing conditions, and pre-measuring a first correlation between detected intensity and gap distance for each of the reference samples, the detected intensity being defined as a sum of outputs of the light-receiving fibers, the gap distance being defined as a distance between the sensor head and a surface of the reference sample; (b) searching a second correlation between maximum intensity defined as a peak of the detected intensity in a predetermined range of the gap distance and surface roughness, based on the first correlation obtained in step (a), and storing the second correlation in a memory; (c) adjusting the gap distance so as to set the probe in a position at which the maximum intensity is obtained, based on the first correlation for the reference sample machined under the processing conditions to be monitored; and (d) monitoring detected intensity obtained at the gap distance set in step (c) for a to-be-measured sample, and determining surface roughness thereof based on the second correlation stored in the memory in advance.
Claim 3
Dependent Claim
80 words
The method according to claim 1, wherein the sensor head comprises the light-emitting fiber and eight light-receiving fibers disposed coaxially therewith, four of the light-receiving fibers being symmetrically disposed on a first axis passing through a light-emitting surface of the light-emitting fiber to lie on opposite sides of the light-emitting fiber and the remaining four of the light-receiving fibers being symmetrically disposed on a second axis perpendicular to the first axis to lie on opposite sides of the light-emitting fiber.
Claim 4
Dependent Claim
32 words
The method according to claim 1, wherein the fiber optic probe is attached to a machine tool, and the monitoring step (d) is performed during a machining process of the machine tool.
References Cited (Backward Citations)
US4254331A
Cited
US4674882A
Cited
SU1315803A1
Cited
US4692611A
Cited
JPS6371609A
Cited
US5410410A
Cited
US5410413A
Cited
US5453838A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-05-25 | 2001-11-24 | 2002-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-05-25 | 2005-11-24 | 2006-05-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-05-25 | 2009-11-24 | 2010-05-26 | $7700.00 | Window Closed / Lapsed |