Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus

Claim 2

An inspection apparatus for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said optical system being provided between a first surface and a second surface and used for projecting an image of a pattern on said first surface onto said second surface, said inspection apparatus comprising: a defocus mechanism for defocusing the image of the pattern on said first surface, which is to be formed on said second surface through said optical system to be inspected, from a best focus condition of the image on said second surface by a predetermined defocus amount; a detector for detecting the image formed on said second surface under a predetermined focus condition; and an inspection unit for calculating a change in image position on said second surface within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said second surface through said optical system to be inspected.

Claim 3

An inspection apparatus according to claim 1, wherein said inspection unit includes a calculator for calculating a measurement line which indicates a relationship between the amount of defocus and an image position corresponding thereto, based on information concerning the respective positions of said images on said second surface under at least three kinds of the focus conditions different from each other.

Claim 4

An inspection apparatus according to claim 1, wherein said inspection unit includes a calculator performing the steps of: calculating, for each of a plurality of patterns on said first surface having forms different from each other, a change in image position on said second surface; and specifying the aberration condition and optical adjustment condition of said optical system to be inspected, based on a difference in the change in image position on said second surface between the respective patterns.

Claim 5

An inspection apparatus according to claim 1, wherein said defocus mechanism includes a control system for moving at least one of the pattern on said first surface, said optical system to be inspected, at least one of optical elements of said optical system to be inspected, and said detector along an optical axis of said optical system to be inspected.

Claim 6

An inspection apparatus according to claim 1, further comprising a sensitivity control mechanism for controlling inspection sensitivity of said inspection apparatus.

Claim 7

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system provided between said mask and a photosensitive substrate, for transferring an image of the pattern on said mask onto said substrate; an inspection apparatus for specifying at least one of an aberration condition of said projection optical system and respective optical adjustment conditions of said projection optical system and said illumination optical system, said inspection apparatus comprising: a defocus mechanism for defocusing the image of the pattern on said mask, which is to be formed on a major surface of said substrate through at least said projection optical system, from a best focus condition of the image on said major surface of said substrate by a predetermined defocus amount; a detector for detecting the image formed on said major surface of said substrate under a predetermined focus condition; and an inspection unit for calculating a chance in image position on said major surface of said substrate within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said major surface of said substrate through at least said projection optical system; an aberration correction mechanism for correcting the aberration of said projection optical system, based on the aberration condition of said projection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said illumination optical system and said projection optical system, based on the respective optical adjustment conditions of said illumination optical system and said projection optical system specified by said inspection apparatus.

Claim 8

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system provided between said mask and a photosensitive substrate, for transferring an image of the pattern on said mask onto said substrate; an inspection apparatus for specifying at least one of an aberration condition of said projection optical system and respective optical adjustment conditions of said projection optical system and said illumination optical system, said inspection apparatus comprising: a defocus mechanism for defocusing the image of the pattern on said mask, which is to be formed on a major surface of said substrate through at least said projection optical system, from a best focus condition of the image on said major surface of said substrate by a predetermined defocus amount; a detector for detecting the image formed on said major surface of said substrate under a predetermined focus condition; and an inspection unit for calculating a chance in image position on said major surface of said substrate within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said major surface of said substrate through at least said projection optical system; an aberration correction mechanism for correcting the aberration of said projection optical system, based on the aberration condition of said projection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said illumination optical system and said projection optical system, based on the respective optical adjustment conditions of said illumination optical system and said projection optical system specified by said inspection apparatus.

Claim 9

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system between said mask and a photosensitive substrate, for transferring an image of the pattern on said mask onto said substrate; an alignment apparatus for positioning said substrate, said alignment apparatus comprising a mark illumination optical system for illuminating an alignment mark formed on said substrate and a mark detection optical system for detecting light from the alignment mark; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said inspection apparatus comprising: a detector for detecting the image of the alignment mark formed on a detection surface thereof under a predetermined focus condition; a defocus mechanism for defocusing the image of the alignment mark, which is to be formed on the detection surface of said detector through at least said mark detection optical system, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a change in image position on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optic system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 10

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system between said mask and a photosensitive substrate, for transferring an image of the pattern on said mask onto said substrate; an alignment apparatus for positioning said substrate, said alignment apparatus comprising a mark illumination optical system for illuminating an alignment mark formed on said substrate and a mark detection optical system for detecting light from the alignment mark; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said inspection apparatus comprising: a detector for detecting the image of the alignment mark formed on a detection surface thereof under a predetermined focus condition; a defocus mechanism for defocusing the image of the alignment mark, which is to be formed on the detection surface of said detector through at least said mark detection optical system, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a change in image position on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optic system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 11

An overlay accuracy measurement apparatus for measuring an overlay accuracy of a pattern formed on a photosensitive substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said inspection apparatus comprising: a detector for detecting the image formed on a detection surface thereof under a predetermined focus condition; a defocus mechanism for defocusing the image of the mark on said substrate, which is to be formed on said detection surface of said detector through at least said mark detection optical system, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a change in image position on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optical system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 12

An overlay accuracy measurement apparatus for measuring an overlay accuracy of a pattern formed on a photosensitive substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said inspection apparatus comprising: a detector for detecting the image formed on a detection surface thereof under a predetermined focus condition; a defocus mechanism for defocusing the image of the mark on said substrate, which is to be formed on said detection surface of said detector through at least said mark detection optical system, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a change in image position on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optical system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 13

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system for transferring an image of the pattern on said mask to a photosensitive substrate; and an overlay accuracy measurement apparatus for measuring an overlay accuracy of a mark formed on said substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus, comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said inspection apparatus comprising: a detector for detecting the image formed on a detection surface thereof under a predetermined condition; a defocus mechanism for defocusing the image of the mark on said substrate, which is to be formed on said detection surface of said detector through at least said mark detection optical system, from a best focus condition of the image an said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a chance in image position on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optical system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 14

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system for transferring an image of the pattern on said mask to a photosensitive substrate; and an overlay accuracy measurement apparatus for measuring an overlay accuracy of a mark formed on said substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus, comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said inspection apparatus comprising: a detector for detecting the image formed on a detection surface thereof under a predetermined condition; a defocus mechanism for defocusing the image of the mark on said substrate, which is to be formed on said detection surface of said detector through at least said mark detection optical system, from a best focus condition of the image an said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a chance in image position on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optical system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 15

An inspection method for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said optical system including a system provided between a first surface and a second surface, for projecting an image of a pattern formed on said first surface onto said second surface, said method comprising the steps of: defocusing the image of the pattern on said first surface, which is to be formed on said second surface through said optical system to be inspected, from a best focus condition on the image on said second surface by a predetermined defocus amount; detecting the image formed on said second surface under a predetermined focus condition; and then calculating a change in image position on said second surface within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected on said second surface under focus conditions different from each other, said plurality of images being formed on said second surface through said optical system to be inspected.

Claim 16

An inspection method for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said optical system including a system provided between a first surface and a second surface, for projecting an image of a pattern formed on said first surface onto said second surface, said method comprising the steps of: defocusing the image of the pattern on said first surface, which is to be formed on said second surface through said optical system to be inspected, from a best focus condition on the image on said second surface by a predetermined defocus amount; detecting the image formed on said second surface under a predetermined focus condition; and then calculating a change in image position on said second surface within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected on said second surface under focus conditions different from each other, said plurality of images being formed on said second surface through said optical system to be inspected.

Claim 17

An inspection method according to claim 10, wherein said method comprises the step of calculating a measurement line which indicates a relationship between the amount of defocus and an image position corresponding thereto, based on information concerning the respective positions of said images on said second surface under at least three kinds of focus conditions different from each other.

Claim 18

An inspection method according to claim 11, wherein said method comprises the steps of: specifying a peak point on said measurement line within the defocus range where curvature of said measurement line is maximized; and calculating the magnitude of adjustment of the optical adjustment condition in said optical system to be inspected, based on gradient of a tangential line passing through the peak point on said measurement line.

Claim 19

An inspection method according to claim 11, wherein said method comprises the steps of: specifying a peak point on said measurement line within the defocus range where curvature of said measurement line is maximized; calculating a maximum clearance between said measurement line and a tangential line passing through the peak point on said measurement line; and calculating an amount of asymmetric aberration of said optical system to be inspected, based on the obtained maximum clearance.

Claim 20

An inspection method according to claim 11, wherein said method comprises the steps of: calculating an approximation line approximating said measurement line; and calculating the magnitude of adjustment of the optical adjustment condition in said optical system to be inspected, based on gradient of said approximation line of said measurement line.

Claim 21

An inspection method according to claim 11, wherein said method comprises the steps of: specifying a peak point on said measurement line within the defocus range where curvature of said measurement line is maximized; calculating an approximation line approximating said measurement line; and calculating an amount of asymmetric aberration of said optical system to be inspected, based on a distance between said approximation line and the peak point on said measurement line.

Claim 22

An inspection method according to claim 11, wherein said method comprises the steps of: specifying a peak point on said measurement line within the defocus range where curvature of said measurement line is maximized; and calculating an amount of symmetric aberration of said optical system to be inspected, based on a defocus amount in the peak point on said measurement line.

Claim 23

An inspection method according to claim 10, wherein said method comprises the step of moving at least one of said first surface, said optical system to be inspected, at least one of optical elements of said optical system to be inspected, and said second surface along an optical axis of said optical system to be inspected, whereby defocusing the image to be formed on said second surface from the best focus condition by the predetermined defocus amount.

Claim 24

An inspection method according to claim 10, wherein said method comprises the steps of: calculating, for each of a plurality of patterns on said first surface having forms different from each other, a change in image position on said second surface; and specifying the aberration condition and optical adjustment condition of said optical system to be inspected, based on a difference in the change in image position on said second surface between the respective patterns.

Claim 25

An inspection apparatus for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said optical system including at least a system for converging a supplied luminous flux on a predetermined surface, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, a converged luminous flux of said luminous flux guided through said optical system to be inspected; a defocus mechanism for defocusing a point of convergence of said converged luminous flux by a predetermined defocus amount with respect to the detection surface of said detector; and an inspection unit for calculating a change in position of the converged luminous flux on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of converged luminous fluxes on said detection surface of said detector under focus conditions different from each other, said plurality of converged luminous fluxes being guided onto said detection surface of said detector through said optical system to be inspected.

Claim 26

An inspection apparatus for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said optical system including at least a system for converging a supplied luminous flux on a predetermined surface, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, a converged luminous flux of said luminous flux guided through said optical system to be inspected; a defocus mechanism for defocusing a point of convergence of said converged luminous flux by a predetermined defocus amount with respect to the detection surface of said detector; and an inspection unit for calculating a change in position of the converged luminous flux on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of converged luminous fluxes on said detection surface of said detector under focus conditions different from each other, said plurality of converged luminous fluxes being guided onto said detection surface of said detector through said optical system to be inspected.

Claim 27

An inspection apparatus according to claim 19, wherein said inspection unit includes a calculator for calculating a measurement line which indicates a relationship between the amount of defocus and a position of said converged luminous flux corresponding thereto, based on information concerning the respective positions of the converged luminous fluxes on said second surface under at least three kinds of focus conditions different from each other.

Claim 28

An inspection method according to claim 19, wherein said inspection unit includes a calculator performing the steps of: calculating, for each of said plurality of luminous fluxes on said detection surface, a change in the position of the converged luminous flux on said detection surface, said plurality of luminous fluxes being supplied to said optical system to be inspected and having cross-sectional formes different from each other; and specifying the aberration condition and optical adjustment condition of said optical system to be inspected, based on a difference in the change in the position of the converged luminous flux on said detection surface between the respective luminous fluxes.

Claim 29

An inspection apparatus according to claim 19, wherein said defocus mechanism includes a control system for moving at least one of a light source for supplying said luminous flux to said optical system to be inspected, said optical system to be inspected, at least one of optical elements of said optical system to be inspected, and said detector along an optical axis of said optical system to be inspected.

Claim 30

An inspection apparatus according to claim 19, further comprising a sensitivity control mechanism for controlling inspection sensitivity of said inspection apparatus.

Claim 31

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system provided between said mask and a photosensitive substrate, for transferring an image of the pattern on said mask onto said substrate; an inspection apparatus for specifying at least one of an aberration condition of said projection optical system and said respective optical adjustment conditions of said projection optical system and illumination optical system, said optical system including at least a system for converging a supplied luminous flux on redetermined surface and comprising: a detector for detecting, on a predetermined detection surface thereof, a converged luminous flux of said luminous flux guided through said projection optical system to be inspected; a defocus mechanism for defocusing a point of convergence of said converged luminous flux by a predetermined defocus amount with respect to the detection surface of said detector; and an inspection unit for calculating a change in position of the converged luminous flux on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of converged luminous fluxes on said detection surface of said detector under focus conditions different from each other, said plurality of converged luminous fluxes being guided onto said detection surface of said detector through said projection optical system to be inspected; an aberration correction mechanism for correcting the aberration of said projection optical system, based on the aberration condition of said projection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said illumination optical system and said projection optical system, based on the respective optical adjustment conditions of said illumination optical system and said projection optical system specified by said inspection apparatus.

Claim 32

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system provided between said mask and a photosensitive substrate, for transferring an image of the pattern on said mask onto said substrate; an inspection apparatus for specifying at least one of an aberration condition of said projection optical system and said respective optical adjustment conditions of said projection optical system and illumination optical system, said optical system including at least a system for converging a supplied luminous flux on redetermined surface and comprising: a detector for detecting, on a predetermined detection surface thereof, a converged luminous flux of said luminous flux guided through said projection optical system to be inspected; a defocus mechanism for defocusing a point of convergence of said converged luminous flux by a predetermined defocus amount with respect to the detection surface of said detector; and an inspection unit for calculating a change in position of the converged luminous flux on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of converged luminous fluxes on said detection surface of said detector under focus conditions different from each other, said plurality of converged luminous fluxes being guided onto said detection surface of said detector through said projection optical system to be inspected; an aberration correction mechanism for correcting the aberration of said projection optical system, based on the aberration condition of said projection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said illumination optical system and said projection optical system, based on the respective optical adjustment conditions of said illumination optical system and said projection optical system specified by said inspection apparatus.

Claim 33

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system provided between said mask and a photosensitive substrate, for transferring an image of the pattern on said mask to a photosensitive substrate; an alignment apparatus for positioning said substrate, said alignment apparatus comprising a mark illumination optical system for illuminating an alignment mark formed on said photosensitive substrate and a mark detection optical system for detecting light from said alignment mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said optical system including at least a system for converging a supplied luminous flux on a redetermined surface and comprising: a detector for detecting, on a predetermined detection surface thereof, a converged luminous flux of said luminous flux guided through at least said mark detection optical system; a defocus mechanism for defocusing a point of convergence of said converged luminous flux by a predetermined defocus amount with respect to the detection surface of said detector; and an inspection unit for calculating a change in position of the converged luminous flux on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of converged luminous fluxes on said detection surface of said detector under focus conditions different from each other, said plurality of converged luminous fluxes being guided onto said detection surface of said detector through at least said mark detection optical system to be inspected; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustment of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 34

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system provided between said mask and a photosensitive substrate, for transferring an image of the pattern on said mask to a photosensitive substrate; an alignment apparatus for positioning said substrate, said alignment apparatus comprising a mark illumination optical system for illuminating an alignment mark formed on said photosensitive substrate and a mark detection optical system for detecting light from said alignment mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said optical system including at least a system for converging a supplied luminous flux on a redetermined surface and comprising: a detector for detecting, on a predetermined detection surface thereof, a converged luminous flux of said luminous flux guided through at least said mark detection optical system; a defocus mechanism for defocusing a point of convergence of said converged luminous flux by a predetermined defocus amount with respect to the detection surface of said detector; and an inspection unit for calculating a change in position of the converged luminous flux on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of converged luminous fluxes on said detection surface of said detector under focus conditions different from each other, said plurality of converged luminous fluxes being guided onto said detection surface of said detector through at least said mark detection optical system to be inspected; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustment of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 35

An overlay accuracy measurement apparatus for measuring an overlay accuracy of a mark formed on a photosensitive substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said optical system including at least a system for converging a supplied luminous flux on a predetermined surface and comprising: a detector for detecting, on a predetermined detection surface thereof, a converged luminous flux of said luminous flux guided through at least said mark detection optical system; a defocus mechanism for defocusing a point of convergence of said converged luminous flux by a predetermined defocus amount with respect to the detection surface of said detector; and an inspection unit for calculating a change in position of the converged luminous flux on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of converged luminous fluxes on said detection surface of said detector under focus conditions different from each other, said plurality of converged luminous fluxes being guided onto said detection surface of said detector through at least said mark detection optical system to be inspected; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 36

An overlay accuracy measurement apparatus for measuring an overlay accuracy of a mark formed on a photosensitive substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said optical system including at least a system for converging a supplied luminous flux on a predetermined surface and comprising: a detector for detecting, on a predetermined detection surface thereof, a converged luminous flux of said luminous flux guided through at least said mark detection optical system; a defocus mechanism for defocusing a point of convergence of said converged luminous flux by a predetermined defocus amount with respect to the detection surface of said detector; and an inspection unit for calculating a change in position of the converged luminous flux on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality of converged luminous fluxes on said detection surface of said detector under focus conditions different from each other, said plurality of converged luminous fluxes being guided onto said detection surface of said detector through at least said mark detection optical system to be inspected; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 37

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system for transferring an image of the pattern on said mask to a photosensitive substrate; and an overlay accuracy measurement apparatus for measuring an overlay accuracy of a mark formed on a photosensitive substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said optical system including at least a system for converging a supplied luminous flux on a predetermined surface and comprising: a detector for detecting, on a predetermined detection surface thereof, a converged luminous flux of said luminous flux guided through at least said mark detection optical system; a defocus mechanism for defocusing a point of convergence of said converged luminous flux by a predetermined defocus amount with respect to the detection surface of said detector; and an inspection unit for calculating a change in position of the converged luminous flux on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality o converged luminous fluxes on said detection surface of said detector under focus conditions different from each other, said plurality of converged luminous fluxes being guided onto said detection surface of said detector through at least said mark detection optical system to be inspected; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system detected by said inspection apparatus.

Claim 38

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system for transferring an image of the pattern on said mask to a photosensitive substrate; and an overlay accuracy measurement apparatus for measuring an overlay accuracy of a mark formed on a photosensitive substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said optical system including at least a system for converging a supplied luminous flux on a predetermined surface and comprising: a detector for detecting, on a predetermined detection surface thereof, a converged luminous flux of said luminous flux guided through at least said mark detection optical system; a defocus mechanism for defocusing a point of convergence of said converged luminous flux by a predetermined defocus amount with respect to the detection surface of said detector; and an inspection unit for calculating a change in position of the converged luminous flux on said detection surface of said detector within a predetermined defocus range, based on information concerning respective positions of a plurality o converged luminous fluxes on said detection surface of said detector under focus conditions different from each other, said plurality of converged luminous fluxes being guided onto said detection surface of said detector through at least said mark detection optical system to be inspected; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system detected by said inspection apparatus.

Claim 39

An inspection method for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said optical system including at least a system for converging a supplied luminous flux on a predetermined surface, said method comprising the steps of: defocusing, with respect to a predetermined detection surface for detecting a converged luminous flux of said luminous flux guided through said optical system to be inspected, a point of convergence of said converged luminous flux by a predetermined defocus amount; detecting, on said detection surface, a converged luminous flux under a predetermined focus condition; and calculating a change in the position of converged luminous flux on said detection surface within a predetermined defocus range, based on information concerning respective positions of a plurality of said converged luminous fluxes on said detection surface under focus conditions different from each other, said plurality of converged luminous fluxes being guided through said optical system to be inspected.

Claim 40

An inspection method for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said optical system including at least a system for converging a supplied luminous flux on a predetermined surface, said method comprising the steps of: defocusing, with respect to a predetermined detection surface for detecting a converged luminous flux of said luminous flux guided through said optical system to be inspected, a point of convergence of said converged luminous flux by a predetermined defocus amount; detecting, on said detection surface, a converged luminous flux under a predetermined focus condition; and calculating a change in the position of converged luminous flux on said detection surface within a predetermined defocus range, based on information concerning respective positions of a plurality of said converged luminous fluxes on said detection surface under focus conditions different from each other, said plurality of converged luminous fluxes being guided through said optical system to be inspected.

Claim 41

An inspection method according to claim 28, wherein said method comprises the step of calculating a measurement line which indicates a relationship between the amount of defocus and a position of the converged luminous flux corresponding thereto, based on information concerning the respective positions of said converged luminous fluxes on said detection surface under at least three kinds of focus conditions different from each other.

Claim 42

An inspection method according to claim 29, wherein said method comprises the steps of: specifying a peak point on said measurement line within the defocus range where curvature of said measurement line is maximized and then calculating a magnitude of adjustment of the optical adjustment condition in said optical system to be inspected, based on gradient of a tangential line passing through the peak point on said measurement line.

Claim 43

An inspection method according to claim 29, wherein said method comprises the steps of: specifying a peak point on said measurement line within the defocus range where curvature of said measurement line is maximized; calculating a maximum clearance between said measurement line and a tangential line passing through the peak point on said measurement line; and calculating an amount of asymmetric aberration of said optical system to be inspected, based on the obtained maximum clearance.

Claim 44

An inspection method according to claim 29, wherein said method comprises the steps of: calculating an approximation line approximating said measurement line; and calculating the magnitude of adjustment of the optical adjustment condition in said optical system to be inspected, based on gradient of said approximation line of said measurement line.

Claim 45

An inspection method according to claim 29, wherein said method comprises the steps of: specifying a peak point on said measurement line within the defocus range where curvature of said measurement line is maximized; calculating an approximation line approximating said measurement line; and calculating an amount of asymmetric aberration of said optical system to be inspected, based on a distance between said approximation line and the peak point on said measurement line.

Claim 46

An inspection method according to claim 29, wherein said method comprises the steps of: specifying a peak point on said measurement line within the defocus range where curvature of said measurement line is maximized; and calculating an amount of symmetric aberration of said optical system to be inspected, based on a defocus amount at the peak point on said measurement line.

Claim 47

An inspection method according to claim 28, wherein said method comprises the step of moving at least one of a light source for supplying the luminous flux to said optical system to be inspected, said optical system to be inspected, at least one of optical elements of said optical system to be inspected, and said detection surface along an optical axis of said optical system to be inspected, whereby defocusing the point of convergence of said converged luminous flux with respect to said detection surface from the best focus condition by the predetermined defocus amount.

Claim 48

An inspection method according to claim 28, wherein said method comprises the steps of: supplying a plurality of luminous fluxes having cross-sectional forms different from each other to said optical system to be inspected; calculating, for each of said plurality of luminous fluxes on said detection surface, a change in the position of the converged luminous flux on said detection surface; and specifying the aberration condition and optical adjustment condition of said optical system to be inspected, based on a difference in the change in the position of the converged luminous flux on said detection surface between the respective luminous fluxes.

Claim 49

An inspection apparatus for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, an image of a phase pattern formed through said optical system to be inspected; a defocus mechanism for defocusing the image to be formed on said detection surface of said detector, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a change in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective asymmetry characteristics of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through said optical system to be inspected.

Claim 50

An inspection apparatus for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, an image of a phase pattern formed through said optical system to be inspected; a defocus mechanism for defocusing the image to be formed on said detection surface of said detector, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a change in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective asymmetry characteristics of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through said optical system to be inspected.

Claim 51

An inspection apparatus according to claim 37, wherein said inspection unit includes a signal processor for detecting, for each of measurement points arranged in a predetermined measurement direction on said detection surface, a signal ΣV which is an integrated signal of individual signals V corresponding to a light intensity of the image of said phase pattern which are measured at respective measurement points arranged in a direction which is different from said measurement direction and a calculator for calculating, based on a relationship between said measurement direction and said integrated signal, asymmetry index β of the image formed on said detection surface according to the following expression: ##EQU4## wherein: n: number of periodicity of said integrated signal with respect to said measurement direction; V iL : first obtained minimum signal value with respect to said measurement direction, which is a minimum signal at i-th period of said integrated signal; V iR : last obtained minimum signal value with respect to said measurement direction, which is a minimum signal at i-th period of said integrated signal; V max : maximum value of said integrated signal, with respect to said measurement direction, in the whole measurement area; and V min : minimum value of said integrated signal, with respect to the measurement direction, in the whole measurement area.

Claim 52

An inspection apparatus according to claim 37, wherein said inspection unit includes a calculation means for calculating, based on information concerning the respective asymmetry characteristics of the images on said detection surface under at least two kinds of focus conditions different from each other, a measurement line which indicates a relationship between the amount of defocus and the asymmetry index of the image corresponding thereto.

Claim 53

An inspection method according to claim 37, wherein said inspection unit includes a calculator performing the steps of: calculating, for each of a plurality of phase patterns having forms different from each other, a change in image asymmetry on said detection surface on the predetermined defocus range; and specifying the aberration condition and optical adjustment condition of said optical system to be inspected, based on a difference in change in image asymmetry on said detection surface between said phase patterns.

Claim 54

An inspection apparatus according to claim 37, wherein said defocus mechanism includes a control system for moving at least one of said phase pattern, said optical system to be inspected, at least one of optical elements of said optical system to be inspected, and said detector along an optical axis of said optical system to be inspected.

Claim 55

An inspection apparatus according to claim 37, further comprising a sensitivity control mechanism for controlling inspection sensitivity of said inspection apparatus.

Claim 56

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system for transferring an image of the pattern on said mask to a photosensitive substrate; an inspection apparatus for specifying at least one of an aberration condition of said projection optical system and respective optical adjustment conditions of said projection optical system and said illumination optical system, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, an image of a phase pattern formed through at least projection optical system, a defocus mechanism for defocusing the image to be formed on said detection surface of said detector, from a best focus condition of the image on said detection surface of said detector by a redetermined defocus amount; and an inspection unit for calculating a chance in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective asymmetry characteristics of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said projection optical system, an aberration correction mechanism for correcting the aberration of said projection optical system, based on the aberration condition of said projection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said illumination optical system and said projection optical system, based on the respective optical adjustment conditions of said illumination optical system and said projection optical system specified by said inspection apparatus.

Claim 57

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system for transferring an image of the pattern on said mask to a photosensitive substrate; an inspection apparatus for specifying at least one of an aberration condition of said projection optical system and respective optical adjustment conditions of said projection optical system and said illumination optical system, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, an image of a phase pattern formed through at least projection optical system, a defocus mechanism for defocusing the image to be formed on said detection surface of said detector, from a best focus condition of the image on said detection surface of said detector by a redetermined defocus amount; and an inspection unit for calculating a chance in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective asymmetry characteristics of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said projection optical system, an aberration correction mechanism for correcting the aberration of said projection optical system, based on the aberration condition of said projection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said illumination optical system and said projection optical system, based on the respective optical adjustment conditions of said illumination optical system and said projection optical system specified by said inspection apparatus.

Claim 58

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system for transferring an image of the pattern on said mask to a photosensitive substrate; an alignment apparatus for positioning said photosensitive substrate, said alignment apparatus comprising a mark illumination optical system for illuminating an alignment mark formed on said photosensitive substrate and a mark detection optical system for detecting light from said alignment mark; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and mark detection optical system, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, an image of a phase pattern formed through at least said mark detection optical system; a defocus mechanism for defocusing the image to be formed on said detection surface of said detector, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a change in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective asymmetry characteristics of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optical system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system arid said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 59

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system for transferring an image of the pattern on said mask to a photosensitive substrate; an alignment apparatus for positioning said photosensitive substrate, said alignment apparatus comprising a mark illumination optical system for illuminating an alignment mark formed on said photosensitive substrate and a mark detection optical system for detecting light from said alignment mark; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and mark detection optical system, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, an image of a phase pattern formed through at least said mark detection optical system; a defocus mechanism for defocusing the image to be formed on said detection surface of said detector, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a change in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective asymmetry characteristics of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optical system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system arid said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 60

An overlay accuracy measurement apparatus for measuring an overlay accuracy of a mark formed on a photosensitive substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, an image of a phase pattern formed through at least said mark detection optical system; a defocus mechanism for defocusing the image to be formed on said detection surface of said detector, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a chance in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective asymmetry characteristics of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optical system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 61

An overlay accuracy measurement apparatus for measuring an overlay accuracy of a mark formed on a photosensitive substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, an image of a phase pattern formed through at least said mark detection optical system; a defocus mechanism for defocusing the image to be formed on said detection surface of said detector, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a chance in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective asymmetry characteristics of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optical system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 62

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system provided between said mask and a photosensitive substrate, for transferring an image of the pattern on said mask onto said substrate; and an overlay accuracy measurement apparatus for measuring an overlay accuracy of a mark formed on said substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection system, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, an image of a phase pattern formed through at least said mark detection optical system; a defocus mechanism for defocusing the image to be formed on said detection surface of said detector, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a change in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective asymmetry characteristics of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optical system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 63

A projection exposure apparatus comprising: an illumination optical system for illuminating a mask on which a predetermined pattern is formed with exposure light having a predetermined wavelength; a projection optical system provided between said mask and a photosensitive substrate, for transferring an image of the pattern on said mask onto said substrate; and an overlay accuracy measurement apparatus for measuring an overlay accuracy of a mark formed on said substrate to be exposed with exposure light having a predetermined wavelength, said measurement apparatus comprising: a mark illumination optical system for illuminating the mark on said substrate; a mark detection optical system for detecting light from the mark on said substrate; an inspection apparatus for specifying at least one of an aberration condition of said mark detection optical system and respective optical adjustment conditions of said mark illumination optical system and said mark detection system, said inspection apparatus comprising: a detector for detecting, on a predetermined detection surface thereof, an image of a phase pattern formed through at least said mark detection optical system; a defocus mechanism for defocusing the image to be formed on said detection surface of said detector, from a best focus condition of the image on said detection surface of said detector by a predetermined defocus amount; and an inspection unit for calculating a change in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective asymmetry characteristics of a plurality of images detected by said detector under focus conditions different from each other, said plurality of images being formed on said detection surface of said detector through at least said mark detection optical system; an aberration correction mechanism for correcting the aberration of said mark detection optical system, based on the aberration condition of said mark detection optical system detected by said inspection apparatus; and an optical adjustment mechanism for performing optical adjustments of said mark illumination optical system and said mark detection optical system, based on the respective optical adjustment conditions of said mark illumination optical system and said mark detection optical system specified by said inspection apparatus.

Claim 64

An inspection method for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said method comprising the steps of: defocusing an image of a phase pattern on a predetermined surface, which is to be formed on a predetermined detection surface through said optical system to be inspected, from a best focus condition of the image on said detection surface by a predetermined defocus amount; detecting the image formed on said detection surface under a predetermined focus condition; and calculating a change in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected on said detection surface under focus conditions different from each other, said plurality of images being formed on said detection surface through said optical system to be inspected.

Claim 65

An inspection method for specifying at least one of an aberration condition and an optical adjustment condition of an optical system to be inspected, said method comprising the steps of: defocusing an image of a phase pattern on a predetermined surface, which is to be formed on a predetermined detection surface through said optical system to be inspected, from a best focus condition of the image on said detection surface by a predetermined defocus amount; detecting the image formed on said detection surface under a predetermined focus condition; and calculating a change in image asymmetry on said detection surface within a predetermined defocus range, based on information concerning respective positions of a plurality of images detected on said detection surface under focus conditions different from each other, said plurality of images being formed on said detection surface through said optical system to be inspected.

Claim 66

An inspection method according to claim 47, wherein said method comprises the steps of: detecting, for each of measurement points arranged in a predetermined measurement direction on said detection surface, a signal ΣV which is an integrated signal of individual signals V corresponding to a light intensity of the image of said phase pattern which are measured at respective measurement points arranged in a direction which is different from said measurement direction; and calculating, based on a relationship between said measurement direction and said integrated signal, asymmetry index β of the image formed on said detection surface according to the following expression: ##EQU5## wherein: n: number of periodicity of said integrated signal with respect to said measurement direction; V iL : first obtained minimum signal value with respect to said measurement direction, which is a minimum signal at i-th period of said integrated signal; V iR : last obtained minimum signal value with respect to said measurement direction, which is a minimum signal at i-th period of said integrated signal; V max : maximum value of said integrated signal, with respect to said measurement direction, in the whole measurement area; and V min : minimum value of said integrated signal, with respect to the measurement direction, in the whole measurement area.

Claim 67

An inspection method according to claim 47, wherein said inspection method comprises the steps of calculating a measurement line which indicates a relationship between the amount of defocus and the asymmetry index of the image corresponding thereto, based on information concerning the respective asymmetry characteristics of the images on said detection surface under at least three kinds of focus conditions different from each other.

Claim 68

An inspection method according to claim 49, wherein said method comprises the steps of: specifying a peak point in a protruded portion of said measurement line within the defocus range; and calculating an amount of asymmetric aberration of said optical system to be inspected, based on gradient of a tangential line passing through the peak point on said measurement line.

Claim 69

An inspection method according to claim 49, wherein said method comprises the steps of: specifying a peak point in a protruded portion of said measurement line within the defocus range; and calculating an amount of symmetric aberration of said optical system to be inspected, based on a difference between an asymmetry index at the peak point on said measurement line and an asymmetry index under the best focus condition.

Claim 70

An inspection method according to claim 49, wherein said method comprises the steps of: calculating an amount of asymmetric aberration of said optical system to be inspected, based on gradient of said measurement line.

Claim 71

An inspection method according to claim 49, wherein said method comprises the steps of: calculating an amount of symmetric aberration of said optical system to be inspected, based on an asymmetry index of said measurement line under the best focus condition.

Claim 72

An inspection method according to claim 49, wherein said method comprises the steps of: specifying a peak point in a protruded portion of said measurement line within the defocus range; and calculating a magnitude of the optical adjustment condition of said optical system to be inspected, based on an angle of a tangential line passing through the peak point on said measurement line with respect to said measurement line.

Claim 73

An inspection method according to claim 47, wherein said method comprises the step of moving at least one of said phase pattern, said optical system to be inspected, at least one of optical elements of said optical system to be inspected, and said detection surface along an optical axis of said optical system to be inspected, whereby defocusing the image to be inspected on said detection surface from the best focus condition by the predetermined defocus amount.

Claim 74

An inspection method according to claim 47, wherein said method comprises the steps of: calculating, for each of a plurality of phase patterns having forms different from each other, a change in image asymmetry on said detection surface on the predetermined defocus range; and specifying the aberration condition and optical adjustment condition of said optical system to be inspected, based on a difference in change in image asymmetry on said detection surface between said phase patterns.