US5753557A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Bridge-free self aligned silicide process
Assignee: Vanguard International Semiconductor Corp
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Filing: 1996-10-07
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Granted: 1998-05-19
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Expires: 2016-10-07
Abstract
Abstract A method of forming a transistor having silicide contacts to shallow gate, source and drain regions 18 in a substrate 10 is disclosed. The transistor has an extended sidewall spacer that covers an outer top portion of the gate. The extended sidewall spacers of the invention extend the distance (leakage path) between the gate and the source/drain thereby reducing the leakage current. The transistor is provided having a gate electrode 12,14,16 and spaced lightly doped source and drain regions 18. A key part of the invention is that the gate insulating layer 16 is laterally etched forming a gate cap insulating layer 16A which only covers an inner central portion of the gate 14. Next, a dielectric layer 20 is formed over the lightly doped source and drain regions 18 and the gate electrode 12,14,16A . The dielectric layer 20 is then anisotropically etched forming extended sidewall spacers 20A which cover the outer top portion of the gate 14. Next, the gate cap insulating layer 16A is removed thereby exposing the top of the gate 14. A metal layer 22 is deposited over the lightly doped source and drain regions 18, the sidewall spacers 20A, and the gate 14. The substrate 10 is then heated thereby forming a metal silicide layer 22A on the lightly doped source and drain regions 18 and the gate 14. The metal layer 22A is then removed from the sidewall spacers 20A. The substrate 10 is implanted with impurity ions forming highly doped source and drain regions 26 and forming a doped gate region 27.
Inventors
- 👤 Horng-Huei Tseng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 01:11
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D30/0212; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
192 words
A method of forming a transistor having silicide contacts with shallower gate, source and drain regions in a substrate comprising: (a) providing a transistor having a gate electrode and spaced lightly doped source and drain regions, said gate electrode having vertical sidewalls, said gate electrode comprising a gate oxide layer, a gate and a gate insulating layer; (b) removing an outer portion of said gate insulating layer forming a gate cap insulating layer covering a portion of said gate; (c) forming a dielectric layer over said lightly doped source and drain regions and said gate electrode; (d) anisotropically etching said dielectric layer forming sidewall spacers; (e) removing said gate cap insulating layer exposing at least a portion of the top of said gate; (f) depositing a metal layer over said lightly doped source and drain regions, said sidewall spacers, and said gate; (g) heating said substrate forming a metal silicide layer on said lightly doped source and drain regions and said gate; (h) removing said metal layer from said sidewall spacers; and (i) implanting impurity ions into said substrate forming highly doped source and drain regions and forming a doped gate region.
Claim 2
Independent Claim
192 words
A method of forming a transistor having silicide contacts with shallower gate, source and drain regions in a substrate comprising: (a) providing a transistor having a gate electrode and spaced lightly doped source and drain regions, said gate electrode having vertical sidewalls, said gate electrode comprising a gate oxide layer, a gate and a gate insulating layer; (b) removing an outer portion of said gate insulating layer forming a gate cap insulating layer covering a portion of said gate; (c) forming a dielectric layer over said lightly doped source and drain regions and said gate electrode; (d) anisotropically etching said dielectric layer forming sidewall spacers; (e) removing said gate cap insulating layer exposing at least a portion of the top of said gate; (f) depositing a metal layer over said lightly doped source and drain regions, said sidewall spacers, and said gate; (g) heating said substrate forming a metal silicide layer on said lightly doped source and drain regions and said gate; (h) removing said metal layer from said sidewall spacers; and (i) implanting impurity ions into said substrate forming highly doped source and drain regions and forming a doped gate region.
Claim 3
Dependent Claim
12 words
The method of claim 1 wherein said gate is composed of polysilicon.
Claim 4
Dependent Claim
15 words
The method of claim 1 wherein said gate insulating layer is composed of silicon oxide.
Claim 5
Dependent Claim
14 words
The method of claim 1 wherein said sidewall spacers are composed of silicon nitride.
Claim 6
Dependent Claim
63 words
The method of claim 1 wherein said sidewall spacers have a height over said gate in the range of between about 0.1 and 0.2 μm and said sidewall spacers cover an outer width of said gate in a range of between about 0.05 and 0.1 μm, and said sidewall spacers have a width in a range of between about 1000 and 2500 Å.
Claim 7
Dependent Claim
28 words
The method of claim 1 wherein the removing of said gate cap insulating layer is performed by etching said gate cap insulating layer using a diluted HF solution.
Claim 8
Dependent Claim
13 words
The method of claim 1 wherein said metal layer is composed of titanium.
Claim 9
Dependent Claim
28 words
The method of claim 1 wherein the heating of said substrate comprises heating said substrate to a temperature in a range of between about 650° and 750° C.
Claim 10
Dependent Claim
33 words
The method of claim 1 wherein said metal silicide layer is composed of titanium silicide and said metal silicide layer has a thickness in the range of between about 400 and 1000 Å.
Claim 11
Dependent Claim
58 words
The method of claim 1 wherein said highly doped source and drain regions and said doped gate region is formed by ion implanting arsenic ions into said substrate at an energy in the range of between about 30 and 80 keV and a dosage in the range of between about 2×10 15 and 5×10 16 atoms/cm 2 .
Claim 12
Dependent Claim
23 words
The method of claim 1 wherein said lightly doped source and drain regions, highly doped source and drain regions are p-type conductivity regions.
Claim 13
Independent Claim
227 words
A method of forming a transistor having silicide contacts with shallower gate, source and drain regions in a substrate comprising: (a) providing a transistor having a gate electrode and spaced lightly doped source and drain regions, said gate electrode having vertical sidewalls, said gate electrode comprising a gate oxide layer, a gate and a gate insulating layer, said gate insulating layer is composed of silicon oxide; (b) forming a photoresist block over a central portion of said gate insulating layer; (c) etching said gate insulting layer using said photoresist block as a mask forming a gate cap insulting layer covering a portion of said gate; (d) forming a dielectric layer composed of silicon nitride over said lightly doped source and drain regions and said gate electrode; (e) anisotropically etching said dielectric layer forming sidewall spacers; (f) removing portions of said gate cap insulating layer exposing at least a portion of the top of said gate; (g) depositing a metal layer composed of titanium over said lightly doped source and drain regions, said sidewall spacers, and said gate; (h) heating said substrate forming a metal silicide layer on said lightly doped source and drain regions and said gate; (i) removing said metal layer from said sidewall spacers; and (j) implanting impurity ions into said substrate forming highly doped source and drain regions and forming a doped gate region.
Claim 14
Independent Claim
227 words
A method of forming a transistor having silicide contacts with shallower gate, source and drain regions in a substrate comprising: (a) providing a transistor having a gate electrode and spaced lightly doped source and drain regions, said gate electrode having vertical sidewalls, said gate electrode comprising a gate oxide layer, a gate and a gate insulating layer, said gate insulating layer is composed of silicon oxide; (b) forming a photoresist block over a central portion of said gate insulating layer; (c) etching said gate insulting layer using said photoresist block as a mask forming a gate cap insulting layer covering a portion of said gate; (d) forming a dielectric layer composed of silicon nitride over said lightly doped source and drain regions and said gate electrode; (e) anisotropically etching said dielectric layer forming sidewall spacers; (f) removing portions of said gate cap insulating layer exposing at least a portion of the top of said gate; (g) depositing a metal layer composed of titanium over said lightly doped source and drain regions, said sidewall spacers, and said gate; (h) heating said substrate forming a metal silicide layer on said lightly doped source and drain regions and said gate; (i) removing said metal layer from said sidewall spacers; and (j) implanting impurity ions into said substrate forming highly doped source and drain regions and forming a doped gate region.
Claim 15
Dependent Claim
32 words
The method of claim 12 wherein said photoresist block is formed by forming a photoresist layer over said gate cap insulating layer, and laterally etching said photoresist layer with an oxygen plasma.
Claim 16
Dependent Claim
12 words
The method of claim 12 wherein said gate is composed of polysilicon.
Claim 17
Dependent Claim
69 words
The method of claim 12 wherein said sidewall spacers have a height over said gate in the range of between about 0.1 and 0.2 μm and said sidewall spacers cover an outer width of said gate in a range of between about 0.05 and 0.1 μm, and said sidewall spacers have a width at the base of said gate in a range of between about 1000 and 2500 Å.
Claim 18
Dependent Claim
28 words
The method of claim 12 wherein the removing of said gate cap insulating layer is performed by etching said gate cap insulating layer using a diluted HF solution.
Claim 19
Dependent Claim
28 words
The method of claim 12 wherein the heating of said substrate comprises heating said substrate to a temperature in a range of between about 650° and 750° C.
Claim 20
Dependent Claim
33 words
The method of claim 12 wherein said metal silicide layer is composed of titanium silicide and said metal silicide layer has a thickness in a range of between about 400 and 1000 Å.
Claim 21
Dependent Claim
58 words
The method of claim 12 wherein said highly doped source and drain regions and said doped gate region are formed by ion implanting arsenic ions into said substrate at an energy in a range of between about 30 and 80 keV and a dosage in a range of between about 2×10 15 and 5×10 16 atoms/cm 2 .
Claim 22
Dependent Claim
23 words
The method of claim 12 wherein said lightly doped source and drain regions, highly doped source and drain regions are p-type conductivity regions.
References Cited (Backward Citations)
US4818715A
Cited
US4786609A
Cited
US4885259A
Cited
US5352631A
Cited
US5447875A
Cited
US5472895A
Cited
US5661052A
Cited
US5682055A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-05-18 | 2001-11-17 | 2002-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-05-18 | 2005-11-17 | 2006-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-05-18 | 2009-11-17 | 2010-05-19 | $7700.00 | Window Closed / Lapsed |