US5748172A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mirror driving method and apparatus of micro-mirror array
Assignee: Samsung Electro Mechanics Co Ltd
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Filing: 1996-01-25
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Granted: 1998-05-05
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Expires: 2016-01-25
Abstract
Abstract In a mirror driving method of a micro-mirror array and an apparatus thereof, each of a plurality of mirrors is pivotally supported by hinges fixed to a substrate, and a permanent magnet is attached beneath the substrate to form a magnetic field about the mirrors. A coiled conductive layer is formed on the rear surface of each mirror to be selectively applied with current according to a video signal, and the selected mirror pivots in correspondence with the electrostatic force operative between the conductive layer to which the current is applied and the magnetic field. Thus, a light beam irradiating the micro-mirror array can be modulated according to an image, and mass production is made possible due to a simple structure which provides for a stable driving action.
Inventors
- 👤 Ci-moo Song
- 👤 Chul-woo Lee
- 👤 Han-ki Cho
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 20:39
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/085; G02B26/0841; H; H04; H04N; H04N5/00; H04N5/74; H04N5/7416; H04N5/7458
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
111 words
A mirror driving method of a micro-mirror array provided with a plurality of mirror members each of which is pivotally supported, said method comprising the steps of: (a) applying a magnetic field uniformly throughout to said plurality of mirror members; and (b) selecting a mirror member among said plurality of mirror members according to an image signal and allowing an electrical current to flow through the selected mirror member by applying electric current to conductive means attached to one surface of each mirror member, wherein the selected mirror member is pivoted by means of an electromagnetic force between said applied magnetic field and electrical current so as to deflect incident light.
Claim 2
Dependent Claim
111 words
A mirror driving method of a micro-mirror array provided with a plurality of mirror members each of which is pivotally supported, said method comprising the steps of: (a) applying a magnetic field uniformly throughout to said plurality of mirror members; and (b) selecting a mirror member among said plurality of mirror members according to an image signal and allowing an electrical current to flow through the selected mirror member by applying electric current to conductive means attached to one surface of each mirror member, wherein the selected mirror member is pivoted by means of an electromagnetic force between said applied magnetic field and electrical current so as to deflect incident light.
Claim 3
Dependent Claim
42 words
A mirror driving method of a micro-mirror array as claimed in claim 1, wherein said step (a) is performed by arranging a permanent magnet having a magnetic pole surface to form a magnetic field with respect to said plurality of mirror members.
Claim 4
Dependent Claim
41 words
A mirror driving method of a micro-mirror array as claimed in claim 1, wherein said step (a) is performed by arranging an electromagnet having a magnetic pole surface to form a magnetic field with respect to said plurality of mirror members.
Claim 5
Dependent Claim
30 words
A mirror driving method of a micro-mirror array as claimed in claim 1, wherein said conductive means comprises at least one coil attached to one surface of each mirror member.
Claim 6
Dependent Claim
46 words
A mirror driving method of a micro-mirror array as claimed in claim 1, wherein said conductive means comprises a coiled conductive pattern formed on one surface of each mirror member wherein each mirror member is coated with an electrically conductive material patterned into a coil shape.
Claim 7
Dependent Claim
91 words
A mirror driving apparatus of a micro-mirror array provided with a plurality of mirror members each of which is pivotally supported, said apparatus comprising: magnetic-field-forming means for applying a magnetic field to said plurality of mirror members; and conductive means attached to one surface of said mirror for allowing an electric current to flow through each of said plurality of mirror members in order to generate magnetic flux lines linked with the magnetic field, wherein each mirror member is pivoted by an electromagnetic force between said magnetic-field-forming means and conductive means.
Claim 8
Dependent Claim
91 words
A mirror driving apparatus of a micro-mirror array provided with a plurality of mirror members each of which is pivotally supported, said apparatus comprising: magnetic-field-forming means for applying a magnetic field to said plurality of mirror members; and conductive means attached to one surface of said mirror for allowing an electric current to flow through each of said plurality of mirror members in order to generate magnetic flux lines linked with the magnetic field, wherein each mirror member is pivoted by an electromagnetic force between said magnetic-field-forming means and conductive means.
Claim 9
Dependent Claim
34 words
A mirror driving apparatus of a micro-mirror array as claimed in claim 6, wherein said magnetic-field-forming means comprises a permanent magnet having a magnetic pole surface with respect to said plurality of mirror members.
Claim 10
Dependent Claim
33 words
A mirror driving apparatus of a micro-mirror array as claimed in claim 6, wherein said magnetic-field-forming means comprises an electromagnet having a magnetic pole surface with respect to said plurality of mirror members.
Claim 11
Dependent Claim
30 words
A mirror driving apparatus of a micro-mirror array as claimed in claim 6, wherein said conductive means comprises at least one coil attached to one surface of each mirror member.
Claim 12
Dependent Claim
48 words
A mirror driving apparatus of a micro-mirror array as claimed in claim 6, wherein said conductive means comprises at least one coiled conductive pattern formed on one surface of each mirror member wherein said mirror member is coated with an electrically conductive material patterned into a coil shape.
Claim 13
Dependent Claim
34 words
A mirror driving apparatus of a micro-mirror array as claimed in claim 10, wherein said mirror member includes an insulating layer for insulating a jumper pattern over said at least one coiled conductive pattern.
Claim 14
Dependent Claim
108 words
A mirror driving apparatus of a micro-mirror array provided with a plurality of mirror members each of which is pivotally supported, said apparatus comprising: a common substrate; a plurality of hinges for pivotally supporting said plurality of mirror members on said common substrate, respectively; a permanent magnet attached beneath said common substrate and having a magnetic pole surface with respect to said plurality of mirror members; a coiled conductive pattern formed on each one surface of said plurality of mirror members; and means for applying electric current to said coiled conductive pattern of the selected mirror member of said plurality of mirror members according to an image signal.
Claim 15
Dependent Claim
108 words
A mirror driving apparatus of a micro-mirror array provided with a plurality of mirror members each of which is pivotally supported, said apparatus comprising: a common substrate; a plurality of hinges for pivotally supporting said plurality of mirror members on said common substrate, respectively; a permanent magnet attached beneath said common substrate and having a magnetic pole surface with respect to said plurality of mirror members; a coiled conductive pattern formed on each one surface of said plurality of mirror members; and means for applying electric current to said coiled conductive pattern of the selected mirror member of said plurality of mirror members according to an image signal.
Claim 16
Dependent Claim
41 words
A mirror driving apparatus of a micro-mirror array in claim 12, wherein said coiled conductive pattern is formed on one surface of each mirror member wherein said mirror member is coated with an electrically conductive material patterned into a coil shape.
Claim 17
Dependent Claim
90 words
A mirror driving apparatus comprising: a semiconductor substrate; a mirror; a pair of hinges on said substrate for pivotally supporting said mirror; magnetic field forming means disposed beneath said substrate for applying a magnetic field to said mirror; conductive means uniformly dispersed throughout one surface of said mirror for allowing an electric current to flow through said mirror in order to generate magnetic flux lines linked with the magnetic field; and wherein said mirror is pivoted by an electromagnetic force between said magnetic field forming means and said conductive means.
Claim 18
Dependent Claim
90 words
A mirror driving apparatus comprising: a semiconductor substrate; a mirror; a pair of hinges on said substrate for pivotally supporting said mirror; magnetic field forming means disposed beneath said substrate for applying a magnetic field to said mirror; conductive means uniformly dispersed throughout one surface of said mirror for allowing an electric current to flow through said mirror in order to generate magnetic flux lines linked with the magnetic field; and wherein said mirror is pivoted by an electromagnetic force between said magnetic field forming means and said conductive means.
Claim 19
Dependent Claim
29 words
A mirror driving apparatus as claimed in claim 14, wherein said magnetic field forming means comprises a permanent magnet having a magnetic pole surface with respect to said mirror.
Claim 20
Dependent Claim
28 words
A mirror driving apparatus as claimed in claim 14, wherein said magnetic field forming means comprises an electromagnet having a magnetic pole surface with respect to said mirror.
Claim 21
Dependent Claim
25 words
A mirror driving apparatus as claimed in claim 14, wherein said conductive means comprises at least one coil attached to one surface of said mirror.
Claim 22
Dependent Claim
42 words
A mirror driving apparatus as claimed in claim 14, wherein said conductive means comprises at least one coiled conductive pattern formed on one surface of said mirror wherein said mirror is coated with an electrically conductive material patterned into a coil shape.
Claim 23
Dependent Claim
29 words
A mirror driving apparatus as claimed in claim 14, wherein said mirror includes an insulating layer for insulating a jumper pattern over said at least one coiled conductive pattern.
Claim 24
Dependent Claim
20 words
A mirror driving apparatus as claimed in claim 14, wherein said mirror comprises a reflective film disposed on said mirror.
Claim 25
Dependent Claim
21 words
A mirror driving apparatus as claimed in claim 14, wherein said mirror comprises an insulating layer disposed on said conductive means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-05-04 | 2001-11-03 | 2002-05-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-05-04 | 2005-11-03 | 2006-05-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-05-04 | 2009-11-03 | 2010-05-05 | $7700.00 | Window Closed / Lapsed |