US5744283A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of photolithographically metallizing at least the inside of holes arranged in accordance with a pattern in a plate of an electrically insulating material
Assignee: US Philips Corp
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Filing: 1995-12-04
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Granted: 1998-04-28
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Expires: 2015-12-04
Abstract
Abstract Method of photolithographically metallizing at least the inside of holes arranged in accordance with a pattern in a plate of an electrically insulating material. A method of metallizing an electrically insulating plate, for example, of glass, having a large number of holes. Said holes are internally provided with a metal layer and the plate is provided with metal tracks. The metal used is mainly aluminium. The aluminium is coated with a thin protective layer of chromium, cobalt, nickel, zirconium or titanium. Said protective layer makes it possible to use a photosensitive, electrophoretic lacquer for providing the metal layer with a structure. The method can very suitably be used for the manufacture of selection plates for thin electron displays.
Inventors
- 👤 Gijsbertus A.C.M. Spierings
- 👤 Willem L.C.M. Heijboer
- 👤 Leo O. Remeeus
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 14:51
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0015; H; H01; H01J; H01J9/00; H01J9/02; H01J9/14; H05; H05K; H05K1/00; H05K1/02; H05K1/09; G03F7/16; G03F7/164; H01J2209/00; H01J2209/01; H01J2209/012; H01J2329/00; H05K1/03; H05K1/0306; H05K2201/00; H05K2201/09; H05K2201/09209; H05K2201/095; H05K2201/09581; H05K2203/00; H05K2203/13; H05K2203/1333; H05K2203/135; H05K3/00; H05K3/0094; H05K3/02; H05K3/06; H05K3/061; H05K3/064; H05K3/38; H05K3/388
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
237 words
A method of photolithographically metallizing at least the walls of holes arranged in accordance with a pattern in a plate of an electrically insulating material, said method comprising: (a) providing a chromium layer on at least one surface of the plate and on the walls of the holes, (b) providing an aluminum layer on said chromium layer, (c) providing a metal layer of a metal selected from the group consisting of chromium, cobalt, nickel, zirconium and titanium and alloys of at least two of said metals on said aluminum layer, (d) electrophoretically providing a photosensitive, negative electrophoretic lacquer coating on said metal layer, (e) exposing said lacquer coating to radiation in accordance to a pattern to form exposed and unexposed portions of said lacquer coating, said exposed portions being formed at least in the holes, (f) developing said lacquer coating so as to remove said unexposed portions of said lacquer coating and uncover portions of said metal layer present underneath said unexposed portions of said lacquer coating, (g) removing, by etching, said uncovered portions of said metal layer and underlying portions of said aluminum and chromium layers while preserving said exposed portions of said lacquer coating and portions of said chromium, aluminum and metal layers underlying said exposed portions of said lacquer coating and (h) stripping said exposed portions of said lacquer coating from portions of said metal layer underlying said exposed portions of said lacquer coating.
Claim 2
Independent Claim
237 words
A method of photolithographically metallizing at least the walls of holes arranged in accordance with a pattern in a plate of an electrically insulating material, said method comprising: (a) providing a chromium layer on at least one surface of the plate and on the walls of the holes, (b) providing an aluminum layer on said chromium layer, (c) providing a metal layer of a metal selected from the group consisting of chromium, cobalt, nickel, zirconium and titanium and alloys of at least two of said metals on said aluminum layer, (d) electrophoretically providing a photosensitive, negative electrophoretic lacquer coating on said metal layer, (e) exposing said lacquer coating to radiation in accordance to a pattern to form exposed and unexposed portions of said lacquer coating, said exposed portions being formed at least in the holes, (f) developing said lacquer coating so as to remove said unexposed portions of said lacquer coating and uncover portions of said metal layer present underneath said unexposed portions of said lacquer coating, (g) removing, by etching, said uncovered portions of said metal layer and underlying portions of said aluminum and chromium layers while preserving said exposed portions of said lacquer coating and portions of said chromium, aluminum and metal layers underlying said exposed portions of said lacquer coating and (h) stripping said exposed portions of said lacquer coating from portions of said metal layer underlying said exposed portions of said lacquer coating.
Claim 3
Dependent Claim
22 words
The method as claimed in claim 1, wherein at least one of the chromium and aluminum layers is provided by vacuum evaporation.
Claim 4
Dependent Claim
16 words
The method as claimed in claim 1, wherein the metal layer used is a chromium layer.
Claim 5
Dependent Claim
15 words
The method as claimed in claim 1, wherein a UV-sensitive, electrophoretic lacquer coating is used.
Claim 6
Dependent Claim
18 words
The method as claimed in claim 1, wherein patterned exposure is carried out by means of a mask.
Claim 7
Dependent Claim
14 words
The method of claim 5, wherein the mask is used on the lacquer coating.
Claim 8
Dependent Claim
17 words
The method of claim 5, wherein the mask is used out of contact with the lacquer coating.
Claim 9
Dependent Claim
37 words
The method as claimed in claim 1, wherein a selection plate for a thin electron display is used as the plate, electrodes being formed from the chromium, aluminum and metal layers on the walls of the holes.
Claim 10
Dependent Claim
19 words
The method as claimed in claim 1, wherein glass is used as the electrically insulating material of the plate.
Claim 11
Dependent Claim
33 words
The method as claimed in claim 3, wherein the exposed lacquer coating is stripped by treating it with an aqueous solution of Ce(NH 4 ) 2 (NO 3 ) 6 and perchloric acid.
Claim 12
Dependent Claim
21 words
The method as claimed in claim 1, wherein at least one of the chromium and aluminum layers is provided by sputtering.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-04-27 | 2001-10-27 | 2002-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-04-27 | 2005-10-27 | 2006-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-04-27 | 2009-10-27 | 2010-04-28 | $7700.00 | Window Closed / Lapsed |