US5741171A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Precision polishing system
Assignee: Gatan Inc
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Filing: 1996-08-19
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Granted: 1998-04-21
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Expires: 2016-08-19
Abstract
Abstract A precision polishing system able to polish samples to an accuracy within the submicron range is disclosed. The novel polishing system has applications in the semiconductor field for use in polishing silicon wafers during testing and quality control inspections. In the examination of failed wafers during the semiconductor manufacturing process, it is desirable to examine a cross section of the wafer at the point of failure. The polishing system of the present invention enables very accurate polishing of the wafer down to the submicron accuracy range. The sample is held is place by a gripper assembly which is attached to a polishing arm slideably connected to a fixed rail. The polishing arm is raised and lowered to polish the sample using a polishing wheel covered with a suitable abrasive. A video microscope attached to an object lens and a video camera provide images that are processed to control the polishing operation. The video microscope is mounted on a precision X-Y table to facilitate focusing and defect location of the sample in addition to forming part of the closed loop control of the polishing process. Two closed loop feedback control methods are utilized by the invention to achieve high polishing accuracies. The first utilizes electromechanical means to perform rough polishing of the sample. The second method utilizes digital image processing techniques to accurately control the movement of a polishing arm which holds the sample as it is polished.
Inventors
- 👤 Ori Sarfaty
- 👤 Yossi Hay
- 👤 Dan Gunders
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 08:29
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B17/00; B24B17/04; B24B37/04; B24B49/00; B24B49/12
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
184 words
A polishing system, comprising: a base; an X-Y table mounted onto said base; a microscope assembly mounted onto said X-Y table, said microscope assembly for inspecting a sample during polishing; a polishing wheel assembly mounted onto said base, said polishing wheel assembly comprising a polishing wheel; a holding arm assembly mounted onto said base, said holding arm assembly comprising a holding arm for even guidance of the sample during polishing, said holding arm assembly providing movement of the sample in the z-axis direction; a force control unit coupled to said holding arm, said force control able to vary the amount of force applied to said holding arm; a gripper assembly coupled to one end of said holding arm, said gripper assembly for holding a sample to be polished in a fixed position relative to said polishing wheel assembly during polishing and during inspection using said microscope assembly; and a controller for controlling the operation of said polishing system, including said X-Y table, said holding arm assembly, said force control unit, said microscope assembly and said polishing wheel assembly for accurate polishing of the sample.
Claim 2
Dependent Claim
184 words
A polishing system, comprising: a base; an X-Y table mounted onto said base; a microscope assembly mounted onto said X-Y table, said microscope assembly for inspecting a sample during polishing; a polishing wheel assembly mounted onto said base, said polishing wheel assembly comprising a polishing wheel; a holding arm assembly mounted onto said base, said holding arm assembly comprising a holding arm for even guidance of the sample during polishing, said holding arm assembly providing movement of the sample in the z-axis direction; a force control unit coupled to said holding arm, said force control able to vary the amount of force applied to said holding arm; a gripper assembly coupled to one end of said holding arm, said gripper assembly for holding a sample to be polished in a fixed position relative to said polishing wheel assembly during polishing and during inspection using said microscope assembly; and a controller for controlling the operation of said polishing system, including said X-Y table, said holding arm assembly, said force control unit, said microscope assembly and said polishing wheel assembly for accurate polishing of the sample.
Claim 3
Dependent Claim
30 words
The polishing system according to claim 1, further comprising a rail connected to said X-Y table for moving said microscope assembly backwards to facilitate the changing of said polishing wheel.
Claim 4
Dependent Claim
31 words
The polishing system according to claim 1, wherein said microscope assembly comprises: a video camera; a video microscope coupled to said camera; and an objective lens coupled to said video microscope.
Claim 5
Dependent Claim
18 words
The polishing system according to claim 3, wherein said video camera is a high resolution monochrome video camera.
Claim 6
Dependent Claim
16 words
The polishing system according to claim 3, wherein said video camera is a color video camera.
Claim 7
Dependent Claim
36 words
The polishing system according to claim 3, wherein said microscope assembly further comprises a revolving adapter for holding at least one objective lens, said revolving adapter facilitating the changing of said at least one objective lens.
Claim 8
Dependent Claim
22 words
The polishing system according to claim 3, wherein said microscope assembly comprises a zoom lens for facilitating control of the magnification level.
Claim 9
Dependent Claim
55 words
The polishing system according to claim 1, wherein said polishing wheel assembly comprises: a wheel base; a motor coupled to said wheel base; said polishing wheel coupled to said motor; and a sink bath coupled to said wheel base, said sink bath providing a receptacle for liquid applied to said polishing wheel during polishing operations.
Claim 10
Dependent Claim
137 words
The polishing system according to claim 1, wherein said holding arm assembly comprises: a fixed slide rail connected to said base; a moveable slide rail slideably coupled to said fixed slide rail; said holding arm connected to said moveable slide rail; a contact sensor coupled to a lower portion of said moveable slide rail, said contact sensor for sensing the movement of said holding arm in the Z-axis direction; a contact pad fixably coupled to said base; a motor coupled to an upper portion of said holding arm, said motor for raising and lowering said holding arm; and said moveable slide rail slideably connected to said fixed slide rail whereby when said holding arm rests on said sample, said moveable slide rail is elevated and electrical contact between said contact sensor and said contact pad is broken.
Claim 11
Dependent Claim
25 words
The holding arm assembly according to claim 9, further comprising means for tracking variations in surface height of said polishing wheel while it is spinning.
Claim 12
Dependent Claim
23 words
The holding arm assembly according to claim 9, further comprising means for determining a maximum variation in surface height of said polishing wheel.
Claim 13
Dependent Claim
22 words
The holding arm assembly according to claim 9, further comprising means for determining the position of the sample in the Z-axis direction.
Claim 14
Dependent Claim
16 words
The polishing system according to claim 9, wherein said motor comprises a 5 phase stepper motor.
Claim 15
Dependent Claim
54 words
The polishing system according to claim 1, wherein said force control unit comprises: a force generator coupled to said base; and a spring coupled between said force generator and said holding arm assembly, said spring counteracting the weight of said holding arm assembly in accordance with a control signal received by said force generator.
Claim 16
Dependent Claim
14 words
The polishing system according to claim 14, wherein said force generator comprises a motor.
Claim 17
Dependent Claim
83 words
The polishing system according to claim 1, wherein said gripper assembly comprises: a swivel base coupled to said holding arm assembly; a swivelable member swivelably coupled to said swivel base; and a sample holder having a cylindrical gripper pin portion insertable into said swivelable member and held in place therein by a gripper fixing screw, said sample holder for firmly holding said sample to be polished in a fixed position, said sample held within said sample holder using a plurality of holding screws.
Claim 18
Dependent Claim
32 words
The polishing system according to claim 1, wherein said controller comprises digital image processing means forming a portions of a closed feedback control loop for controlling the movement of said holding arm.
Claim 19
Dependent Claim
55 words
The polishing system according to claim 1, further comprising a cleaning system for surface cleansing and drying of said sample, comprising: a container holding a cleaning material; a hose, having a first end and a second end, said first end coupled to said container; and a valve coupled to said second end of said hose.
Claim 20
Dependent Claim
14 words
The polishing system according to claim 18, wherein said cleaning material comprises liquid nitrogen.
Claim 21
Dependent Claim
15 words
The polishing system according to claim 18, wherein said valve comprises an electronically controlled valve.
Claim 22
Dependent Claim
52 words
The polishing system according to claim 1, wherein said controller together with said microscope assembly and said holding arm assembly form a closed loop feedback control system to locate landmarks and blobs on said sample in order to determine the required polishing height and precisely control the movement of said holding arm.
Claim 23
Independent Claim
187 words
A method for accurately controlling the polishing of a sample, said method comprising the steps of: determining the location of a polishing point of interest on the sample in relation to an edge of the sample and to any known discernible landmarks on the surface of the sample; tracing the shape of the polishing point of interest on the sample so as to generate a map of the sample containing a collection of one or more blobs; determining a first distance to be polished and a corresponding first polishing rate that will yield a straight lower edge of the sample; polishing the sample utilizing a low resolution electromechanical mechanism in accordance with said first distance to be polished and said first polishing rate; inspecting the sample and determining a second distance to be polished and a corresponding second polishing rate utilizing high resolution video camera based digital image processing; polishing the sample in accordance with said second distance to be polished and said second polishing rate; and repeating said steps of inspecting and polishing until the lower edge of the sample reaches the polishing point of interest.
Claim 24
Independent Claim
187 words
A method for accurately controlling the polishing of a sample, said method comprising the steps of: determining the location of a polishing point of interest on the sample in relation to an edge of the sample and to any known discernible landmarks on the surface of the sample; tracing the shape of the polishing point of interest on the sample so as to generate a map of the sample containing a collection of one or more blobs; determining a first distance to be polished and a corresponding first polishing rate that will yield a straight lower edge of the sample; polishing the sample utilizing a low resolution electromechanical mechanism in accordance with said first distance to be polished and said first polishing rate; inspecting the sample and determining a second distance to be polished and a corresponding second polishing rate utilizing high resolution video camera based digital image processing; polishing the sample in accordance with said second distance to be polished and said second polishing rate; and repeating said steps of inspecting and polishing until the lower edge of the sample reaches the polishing point of interest.
Claim 25
Dependent Claim
37 words
The method according to claim 22, wherein said step of polishing the sample in accordance with said second distance to be polished and said second polishing rate comprises accurately controlling a motor connected to said holding arm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-04-20 | 2001-10-20 | 2002-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-04-20 | 2005-10-20 | 2006-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-04-20 | 2009-10-20 | 2010-04-21 | $7700.00 | Window Closed / Lapsed |