US5733816A
Expired / Lapsed
US
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Method for depositing a tungsten layer on silicon
Assignee: Micron Technology Inc
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Filing: 1995-12-13
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Granted: 1998-03-31
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Expires: 2015-12-13
Abstract
Abstract This invention is a process for depositing tungsten metal on a silicon surface with the deposited layer having improved uniformity of thickness over prior art deposition techniques. The process involves the steps of removing any native silicon dioxide present on the silicon surface, forming a barrier layer which overlies the silicon surface which prevents the upward diffusion of silicon atoms from the polycrystalline surface, and depositing a final tungsten metal layer on top of the barrier layer. The barrier layer is preferably a refractory metal nitride. It may be formed directly by chemical vapor deposition, by reactive sputtering, or it may be formed indirectly by depositing a preliminary tungsten metal layer, subjecting the preliminary layer to a plasma formed from NH 3 and N 2 gases. Both preliminary and final tungsten metal layers are deposited preferably via chemical vapor deposition using the WF 6 and SiH 4 as reactants.
Inventors
- 👤 Ravi Iyer
- 👤 Irina Vasilyeva
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:39
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/43; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/01312
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
73 words
A process for forming a tungsten metal layer on a polycrystalline silicon surface, said process comprising the steps of: depositing a preliminary tungsten metal layer on said silicon surface; converting at least a portion of said preliminary tungsten metal layer to a tungsten nitride barrier layer, said barrier layer being impermeable to mobile silicon atoms of said polycrystalline silicon surface; and depositing a final tungsten metal layer which completely covers said barrier layer.
Claim 2
Dependent Claim
73 words
A process for forming a tungsten metal layer on a polycrystalline silicon surface, said process comprising the steps of: depositing a preliminary tungsten metal layer on said silicon surface; converting at least a portion of said preliminary tungsten metal layer to a tungsten nitride barrier layer, said barrier layer being impermeable to mobile silicon atoms of said polycrystalline silicon surface; and depositing a final tungsten metal layer which completely covers said barrier layer.
Claim 3
Dependent Claim
36 words
The process of claim 1, wherein a native silicon dioxide layer has formed on the polycrystalline silicon surface and the native silicon dioxide is removed from said surface prior to the formation of the barrier layer.
Claim 4
Dependent Claim
38 words
The process of claim 1, wherein said preliminary tungsten layer is subjected to a plasma formed from NH 3 and N 2 gases in order to convert at least a portion of preliminary tungsten layer to tungsten nitride.
Claim 5
Dependent Claim
19 words
The process of claim 1, wherein said preliminary tungsten metal layer is thinner than said final tungsten metal layer.
Claim 6
Dependent Claim
22 words
The process of claim 1, wherein said preliminary tungsten metal layer and said final tungsten layer are deposited via chemical vapor deposition.
Claim 7
Dependent Claim
21 words
The process of claim 1, wherein said preliminary tungsten metal layer and said final tungsten layer are deposited via reactive sputtering.
Claim 8
Dependent Claim
81 words
A process for forming a tungsten metal layer on a polycrystalline silicon surface, said process comprising the steps of: depositing a metal nitride barrier layer covering said surface via plasma chemical vapor deposition using, as precursor compounds, WF 6 and a nitrogen-containing compound selected from the group consisting of N 2 and NH 3 , said barrier layer being impermeable to mobile silicon atoms of said polycrystalline silicon surface; and depositing a tungsten metal layer which completely covers said barrier layer.
Claim 9
Dependent Claim
81 words
A process for forming a tungsten metal layer on a polycrystalline silicon surface, said process comprising the steps of: depositing a metal nitride barrier layer covering said surface via plasma chemical vapor deposition using, as precursor compounds, WF 6 and a nitrogen-containing compound selected from the group consisting of N 2 and NH 3 , said barrier layer being impermeable to mobile silicon atoms of said polycrystalline silicon surface; and depositing a tungsten metal layer which completely covers said barrier layer.
Claim 10
Dependent Claim
106 words
A process for forming a tungsten metal layer on a polycrystalline silicon layer, said process comprising the steps of: providing a substrate having a polycrystalline silicon layer deposited thereon, said polycrystalline silicon layer having an exposed surface; longing a tungsten nitride layer via plasma chemical vapor deposition using, as precursor compounds, WF 6 and a nitrogen-containing compound selected from the group consisting of N 2 and NH 3 , said tungsten nitride layer covering said exposed surface, and acting to restrict an upward flow of mobile silicon atoms from said polycrystalline silicon layer; and depositing a tungsten metal layer on top of said tungsten nitride layer.
Claim 11
Dependent Claim
106 words
A process for forming a tungsten metal layer on a polycrystalline silicon layer, said process comprising the steps of: providing a substrate having a polycrystalline silicon layer deposited thereon, said polycrystalline silicon layer having an exposed surface; longing a tungsten nitride layer via plasma chemical vapor deposition using, as precursor compounds, WF 6 and a nitrogen-containing compound selected from the group consisting of N 2 and NH 3 , said tungsten nitride layer covering said exposed surface, and acting to restrict an upward flow of mobile silicon atoms from said polycrystalline silicon layer; and depositing a tungsten metal layer on top of said tungsten nitride layer.
Claim 12
Dependent Claim
117 words
A process for forming a tungsten metal layer on a polycrystalline silicon layer, said process comprising the steps of: providing a substrate having a polycrystalline silicon layer deposited thereon, said polycrystalline silicon layer having an exposed surface; forming a titanium carbonitride barrier layer on said exposed surface by pyrolizing an organometallic compound genetically described as tetrakis-dialkylamido-titanium at a temperature within a range of 200° to 600° C. in a chemical vapor deposition chamber in which pressure has been reduced to less than 100 torr; reducing the carbon content of the deposited barrier film by performing a rapid thermal anneal step in the presence of ammonia; and depositing a tungsten metal layer on top of said barrier layer.
Claim 13
Dependent Claim
117 words
A process for forming a tungsten metal layer on a polycrystalline silicon layer, said process comprising the steps of: providing a substrate having a polycrystalline silicon layer deposited thereon, said polycrystalline silicon layer having an exposed surface; forming a titanium carbonitride barrier layer on said exposed surface by pyrolizing an organometallic compound genetically described as tetrakis-dialkylamido-titanium at a temperature within a range of 200° to 600° C. in a chemical vapor deposition chamber in which pressure has been reduced to less than 100 torr; reducing the carbon content of the deposited barrier film by performing a rapid thermal anneal step in the presence of ammonia; and depositing a tungsten metal layer on top of said barrier layer.
Claim 14
Dependent Claim
132 words
A process for forming a tungsten metal layer on a polycrystalline silicon layer, said process comprising the steps of: providing a substrate having a polycrystalline silicon layer deposited thereon, said polycrystalline silicon layer having an exposed surface; forming a titanium carbonitride barrier layer on said exposed surface by pyrolizing an organometallic compound generically described as tetrakis-dialkylamido-titanium at a temperature within a range of 200° to 600° C. in a chemical vapor deposition chamber in which pressure has been reduced to less than 100 torr; reducing the carbon content of the deposited barrier film by subjecting the barrier film to a plasma generated from one or more of the gases selected from the group consisting of nitrogen gas and ammonia gas; and depositing a tungsten metal layer on top of said barrier layer.
Claim 15
Dependent Claim
132 words
A process for forming a tungsten metal layer on a polycrystalline silicon layer, said process comprising the steps of: providing a substrate having a polycrystalline silicon layer deposited thereon, said polycrystalline silicon layer having an exposed surface; forming a titanium carbonitride barrier layer on said exposed surface by pyrolizing an organometallic compound generically described as tetrakis-dialkylamido-titanium at a temperature within a range of 200° to 600° C. in a chemical vapor deposition chamber in which pressure has been reduced to less than 100 torr; reducing the carbon content of the deposited barrier film by subjecting the barrier film to a plasma generated from one or more of the gases selected from the group consisting of nitrogen gas and ammonia gas; and depositing a tungsten metal layer on top of said barrier layer.
Claim 16
Dependent Claim
142 words
A process for forming on a silicon substrate partially covered by field isolation regions a conductive sandwich structure from which gate electrodes and interconnect lines can be patterned, said process comprising the steps of: forming a gate oxide layer on each portion of the substrate not covered by field isolation regions; depositing a polycrystalline silicon layer which completely covers the field isolation regions and the gate oxide layers, said polycrystalline silicon layer having an upper surface; forming a barrier layer over the entire upper surface of said polycrystalline silicon layer by depositing a preliminary tungsten metal layer on said upper surface and converting at least a portion of said preliminary tungsten metal layer to tungsten nitride, said barrier layer being impermeable to mobile silicon atoms within said polycrystalline layer; and depositing a final tungsten metal layer which completely covers said barrier layer.
Claim 17
Dependent Claim
142 words
A process for forming on a silicon substrate partially covered by field isolation regions a conductive sandwich structure from which gate electrodes and interconnect lines can be patterned, said process comprising the steps of: forming a gate oxide layer on each portion of the substrate not covered by field isolation regions; depositing a polycrystalline silicon layer which completely covers the field isolation regions and the gate oxide layers, said polycrystalline silicon layer having an upper surface; forming a barrier layer over the entire upper surface of said polycrystalline silicon layer by depositing a preliminary tungsten metal layer on said upper surface and converting at least a portion of said preliminary tungsten metal layer to tungsten nitride, said barrier layer being impermeable to mobile silicon atoms within said polycrystalline layer; and depositing a final tungsten metal layer which completely covers said barrier layer.
Claim 18
Dependent Claim
36 words
The process of claim 11, wherein at least a portion of said preliminary tungsten layer is subjected to a plasma formed from NH 3 and N 2 gases in order to convert it to tungsten nitride.
Claim 19
Dependent Claim
19 words
The process of claim 11, wherein said preliminary tungsten metal layer is thinner than said final tungsten metal layer.
Claim 20
Dependent Claim
22 words
The process of claim 11, wherein said preliminary tungsten metal layer and said final tungsten layer are deposited via chemical vapor deposition.
Claim 21
Dependent Claim
153 words
A process for forming on a silicon substrate partially covered by field isolation regions a conductive sandwich structure from which gate electrodes and interconnect lines can be patterned, said process comprising the steps of: forming a gate oxide layer on each portion of the substrate not covered by field isolation regions; depositing a polycrystalline silicon layer which completely covers the field isolation regions and the gate oxide layers, said polycrystalline silicon layer having an upper surface; forming a barrier layer on top of the entire upper surface of said polycrystalline silicon layer via chemical vapor deposition, said barrier layer being selected from the group consisting of tungsten nitride, titanium nitride, titanium carbonitride, platinum nitride, palladium nitride, cobalt nitride, molybdenum nitride, nickel nitride, rhodium nitride and iridium nitride, said metal nitride layer being impermeable to mobile silicon atoms within said polycrystalline layer; and depositing a tungsten metal layer which completely covers said barrier layer.
Claim 22
Dependent Claim
153 words
A process for forming on a silicon substrate partially covered by field isolation regions a conductive sandwich structure from which gate electrodes and interconnect lines can be patterned, said process comprising the steps of: forming a gate oxide layer on each portion of the substrate not covered by field isolation regions; depositing a polycrystalline silicon layer which completely covers the field isolation regions and the gate oxide layers, said polycrystalline silicon layer having an upper surface; forming a barrier layer on top of the entire upper surface of said polycrystalline silicon layer via chemical vapor deposition, said barrier layer being selected from the group consisting of tungsten nitride, titanium nitride, titanium carbonitride, platinum nitride, palladium nitride, cobalt nitride, molybdenum nitride, nickel nitride, rhodium nitride and iridium nitride, said metal nitride layer being impermeable to mobile silicon atoms within said polycrystalline layer; and depositing a tungsten metal layer which completely covers said barrier layer.
Claim 23
Dependent Claim
39 words
The process of claim 15, wherein the chemical vapor deposition step employs WF 6 and a nitrogen-containing compound selected from the group consisting of N 2 and NH 3 as precursor compounds to form a tungsten nitride barrier layer.
Claim 24
Dependent Claim
28 words
The process of claim 15, wherein an organometallic compound generically described as tetrakis-dialkylamido-titanium is pyrolized during the chemical vapor deposition step to form a titanium carbonitride barrier layer.
Claim 25
Dependent Claim
40 words
The process of claim 17, wherein pyrolization of the organometallic compound takes place within a temperature range of 200° to 600° C., and in a chamber in which pressure has been reduced to less than 100 torr prior to deposition.
Claim 26
Dependent Claim
11 words
The process of claim 17, wherein the organometallic compound is tetrakis-dimethylamido-titanium.
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