Patent US4344635A successfully refreshed from Google Patents.
US5731584A
Expired / Lapsed
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Position sensitive particle sensor and manufacturing method therefor
Assignee: Imec
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Filing: 1996-07-12
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Granted: 1998-03-24
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Expires: 2016-07-12
Abstract
Abstract A microgap sensor, and manufacturing method therefor, which includes a cathode and at least one strip anode parallel to the cathode, in which the strip anode is separated and insulated from the cathode by an insulation layer made from a polymeric material. The microgap sensor further includes a cathodic drift electrode substantially parallel to the cathode, the cathode and drift electrode being separated by a gap fillable with an ionizable gas. The gap is considerably greater than the thickness of the insulating layer, and the strip anode is located in the gap between the cathode and the drift electrode.
Inventors
- 👤 Eric Beyne
- 👤 Jordi Nelissen
- 👤 Ronaldo Bellazzini
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 00:54
CPC Classifications
G; G01; G01T; G01T1/00; G01T1/29; G01T1/2914; G01T1/2921; G01T1/2935; H; H01; H01J; H01J47/00; H01J47/02
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
92 words
A microgap sensor comprising: a cathode; at least one strip anode parallel to said cathode, said strip anode being separated and insulated from said cathode by an insulation layer, wherein said insulation layer is made from a polymeric material; and a cathodic drift electrode substantially parallel to said cathode, said cathode and said drift electrode being separated by a gap fillable with an ionizable gas, said gap being considerably greater than the thickness of said insulating layer, said strip anode being located in the gap between said cathode and said drift electrode.
Claim 2
Dependent Claim
92 words
A microgap sensor comprising: a cathode; at least one strip anode parallel to said cathode, said strip anode being separated and insulated from said cathode by an insulation layer, wherein said insulation layer is made from a polymeric material; and a cathodic drift electrode substantially parallel to said cathode, said cathode and said drift electrode being separated by a gap fillable with an ionizable gas, said gap being considerably greater than the thickness of said insulating layer, said strip anode being located in the gap between said cathode and said drift electrode.
Claim 3
Dependent Claim
16 words
The sensor according to claim 1, wherein said polymeric material is planarizable to 20% or greater.
Claim 4
Dependent Claim
16 words
The sensor according to claim 2, wherein said polymeric material is planarizable to 90% or greater.
Claim 5
Dependent Claim
17 words
The sensor according to claim 1, wherein said polymeric material has a dielectric constant less than 5.
Claim 6
Dependent Claim
22 words
The sensor according to claim 1, wherein said polymeric material is selected from the group consisting of benzocyclobutene, polyphenylquinoxaline, fluoropolymers and polyimides.
Claim 7
Dependent Claim
26 words
The sensor according to claim 5, wherein said polyimide is selected from the group consisting of fluorinated polyimide, silicone polyimide, acetylene terminated polyimide, and polyimide iso-indoloquinazdinedione.
Claim 8
Dependent Claim
11 words
The sensor according to claim 5, wherein said fluoropolymer is PTFE.
Claim 9
Dependent Claim
17 words
The sensor according to claim 1, wherein said polymeric material is either a polyimide or a benzocyclobutene.
Claim 10
Dependent Claim
13 words
The sensor according to claim 1, comprising a plurality of said strip anodes.
Claim 11
Dependent Claim
18 words
The sensor according to claim 9, wherein said plurality of strip anodes are arranged parallel to each other.
Claim 12
Dependent Claim
18 words
The sensor according to claim 9, wherein said plurality of strip anodes are arranged in a radial pattern.
Claim 13
Dependent Claim
22 words
The sensor according to claim 9, wherein said plurality of strip anodes are arranged in a plurality of circles with differing diameters.
Claim 14
Dependent Claim
19 words
The sensor according to claim 9, wherein said cathode comprises a plurality of strip cathodes insulated from each other.
Claim 15
Dependent Claim
16 words
The sensor according to claim 12, wherein said polymeric material is planarizable to 20% or greater.
Claim 16
Dependent Claim
16 words
The sensor according to claim 13, wherein said polymeric material is planarizable to 90% or greater.
Claim 17
Dependent Claim
17 words
The sensor according to claim 13, wherein said polymeric material has a dielectric constant less than 5.
Claim 18
Dependent Claim
22 words
The sensor according to claim 13, wherein said polymeric material is selected from the group consisting of benzocyclobutene, polyphenylquinoxaline, fluoropolymers and polyimides.
Claim 19
Dependent Claim
26 words
The sensor according to claim 17, wherein said polyimide is selected from the group consisting of fluorinated polyimide, silicone polyimide, acetylene terminated polyimide, and polyimide iso-indoloquinazdinedione.
Claim 20
Dependent Claim
11 words
The sensor according to claim 17, wherein said fluoropolymer is PTFE.
Claim 21
Dependent Claim
17 words
The sensor according to claim 13, wherein said polymeric material is either a benzocyclobutene or a polyimide.
Claim 22
Dependent Claim
34 words
The sensor according to claim 13, wherein within a detection region of said sensor the widths of said insulation layers are substantially the same as the widths of said plurality of said strip anodes.
Claim 23
Dependent Claim
75 words
The sensor according to claim 1, wherein at least one of said cathodic drift electrodes or said cathode is composed of a material of low atomic number which forms a window for the entrance of electromagnetic radiation into the sensor, and a layer of a material of high atomic number which emits electrons when photons are incident upon it, said layer of high atomic number being in contact with said layer of low atomic number.
Claim 24
Dependent Claim
49 words
The sensor according to claim 22, wherein said material of low atomic number is selected from the group consisting of beryllium, aluminum, quartz, glass and plastic, and wherein said high atomic number material is selected from the group consisting of gold, cesium, yttrium, cesium iodide, chromium, tantalum and tungsten.
Claim 25
Dependent Claim
35 words
The sensor according to claim 1, further comprising means for applying a first electric potential between said cathode and said strip anode and a second potential between said cathodic drift electrode and said strip anode.
Claim 26
Dependent Claim
31 words
The sensor according to claim 1, wherein within a detection region of said sensor the width of said insulation layer is substantially the same as the width of said strip anode.
Claim 27
Dependent Claim
11 words
An X-ray imager including the sensor as recited in claim 1.
Claim 28
Dependent Claim
11 words
An X-ray camera including the sensor as recited in claim 1.
Claim 29
Dependent Claim
12 words
A 2-dimensional X-ray imager including the sensor as recited in claim 1.
Claim 30
Independent Claim
130 words
A method of manufacture of a microgap sensor, comprising the steps of: forming a first conductive cathode layer; depositing a polymeric insulating layer onto said first conductive cathode layer; depositing a second conductive layer onto said polymeric insulating layer; carrying out a first etch on said second conductive layer to form a plurality of anode strip electrodes; removing the polymeric insulating layer except underneath said plurality of anode strip electrodes; and mounting a cathodic drift electrode substantially parallel to said first conductive cathode layer, said first conductive cathode layer and said cathodic drift electrode being separated by a gap, said gap being considerably greater than the thickness of said insulating layer and said plurality of anode strip electrodes lying between said first conductive cathode layer and said cathodic drift electrode.
Claim 31
Independent Claim
130 words
A method of manufacture of a microgap sensor, comprising the steps of: forming a first conductive cathode layer; depositing a polymeric insulating layer onto said first conductive cathode layer; depositing a second conductive layer onto said polymeric insulating layer; carrying out a first etch on said second conductive layer to form a plurality of anode strip electrodes; removing the polymeric insulating layer except underneath said plurality of anode strip electrodes; and mounting a cathodic drift electrode substantially parallel to said first conductive cathode layer, said first conductive cathode layer and said cathodic drift electrode being separated by a gap, said gap being considerably greater than the thickness of said insulating layer and said plurality of anode strip electrodes lying between said first conductive cathode layer and said cathodic drift electrode.
Claim 32
Dependent Claim
19 words
The method of manufacture according to claim 29, wherein the first etching step is carried out by wet etching.
Claim 33
Dependent Claim
24 words
The method of manufacturing according to claim 29, wherein said removal of said polymeric insulation step is carried out by a second anisotropic etch.
Claim 34
Dependent Claim
24 words
The method of manufacture according to claim 31, wherein said anisotropic etch is carried out by either Reactive Ion Etching or Scanning Laser Ablation.
Claim 35
Dependent Claim
26 words
The method of manufacture according to claim 29, wherein said polymeric insulation layer comprises material selected from the group consisting of benzocyclobutene, polyphenylquinoxaline, fluoropolymers and polyimides.
Claim 36
Dependent Claim
28 words
The method of manufacture according to claim 33, wherein said polyimide is selected from the group consisting of fluorinated polyimide, silicone polyimide, acetylene terminated polyimide, and polyimide iso-indoloquinazdinedione.
Claim 37
Dependent Claim
13 words
The method of manufacture according to claim 33, wherein said fluoropolymer is PTFE.
Claim 38
Dependent Claim
22 words
The method of manufacture according to claim 29, wherein the material for said insulating layer comprises either a benzocyclobutene or a polyimide.
References Cited (Backward Citations)
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