US5728613A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of using an insulator spacer to form a narrow base width lateral bipolar junction transistor
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-03-27
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Granted: 1998-03-17
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Expires: 2016-03-27
Abstract
Abstract A process has been developed in which narrow base width, lateral bipolar junction transistors, and narrow channel length MOSFET devices, can be simultaneously fabricated, in a silicon on insulator layer. The narrow base width is defined by the width of an insulator sidewall spacer, formed on the sides of a polysilicon gate structure. The narrow base width, resulting in increased transistor gain and switching speed, along with reductions in parasitic capacitances, due to placing devices in a silicon on insulator layer, result in enhanced device performance.
Inventors
- 👤 Ching-Hsiang Hsu
- 👤 Steve S. Chung
- 👤 Shyh-Chyi Wong
- 👤 Mong-Song Liang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 02:45
CPC Classifications
H; H10; H10D; H10D10/00; H10D10/01; H10D10/041; H10D10/311; H10D84/00; H10D84/01; H10D84/0107; H10D84/0109; H10D84/02; H10D84/03; H10D84/038; H10D86/00; H10D86/01
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
680 words
A method for fabricating a first type silicon transistor, and a second type silicon transistor, in a layer of silicon on insulator, on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate; providing said silicon on insulator layer, on said semiconductor substrate; growing field oxide regions on specific areas of said silicon on insulator layer; growing a first insulator layer on the surface of said silicon on insulator layer, not covered by said field oxide regions; depositing a polysilicon layer on said first insulator layer, and on said field oxide regions; ion implanting a first conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form first and second polysilicon gate structures; ion implanting a second conductivity imparting dopant into a first region, and into a second region, of said silicon on insulator layer, not covered by said first polysilicon gate structure, and not covered by said field oxide region, to be used for a first type transistor structure; ion implanting said second conductivity imparting dopant into a third region of said silicon on insulator layer, not covered by said second polysilicon gate structure, and not covered by said field oxide region, to be used for a second type transistor structure; forming a first photoresist shape, exposing said first region, of said silicon on insulator layer; ion implanting a third conductivity imparting dopant into exposed said first region, of said silicon on insulator layer, not covered by said first polysilicon gate structure, and not covered by said field oxide region, to be used for said first type transistor structure; removal of said first photoresist shape; deposition of a second insulator layer; anisotropic etching of said second insulator layer to form insulator sidewall spacers on sides of said first and second polysilicon gate structures; forming a second photoresist shape, exposing said first region, and said second region of said silicon on insulator layer, to be used for said first type transistor structure; ion implanting a fourth conductivity imparting dopant into exposed said first region, of said silicon on insulator layer, not covered by said field oxide region, not covered by said first polysilicon gate structure, and not covered by insulator sidewall spacers region; ion implanting said fourth conductivity imparting dopant into exposed said second region, of said silicon on insulator layer, not covered by said second polysilicon gate structure, not covered by said field oxide region, and not covered by said insulator sidewall spacers; removal of said second photoresist shape; forming a third photoresist shape, exposing said third region, of said silicon on insulator layer, to be used for said second type transistor structure, and exposing an area of said second region, of said silicon on insulator layer, not previously subjected to ion implantation of fourth conductivity imparting dopant, to be used for said first type transistor structure; ion implanting a fifth conductivity imparting dopant into said third region, of said silicon on insulator layer, not covered by said field oxide regions, not covered by said second polysilicon gate structure, and not covered by said insulator sidewall spacers; ion implanting said fifth conductivity imparting dopant into said area of said second region, of said silicon on insulator layer, not covered by said third photoresist shape; removal of said third photoresist shape; deposition of a third insulator layer; opening contact holes in said third insulator layer, to said area of said second region, to said first region, and to said second region, of said silicon on insulator layer, to be used for said first type transistor structure, and to said third region of said silicon on insulator layer, to be used for said second type transistor structure; deposition of a metal; and forming metal contact structures to said area of said second region, to said first region, and to said second region, of said silicon on insulator layer, to be used for said first type transistor structure, and forming contacts to said first and second polysilicon gate structures, and to said third region, of silicon on insulator layer, to be used for said second type transistor structure.
Claim 2
Independent Claim
680 words
A method for fabricating a first type silicon transistor, and a second type silicon transistor, in a layer of silicon on insulator, on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate; providing said silicon on insulator layer, on said semiconductor substrate; growing field oxide regions on specific areas of said silicon on insulator layer; growing a first insulator layer on the surface of said silicon on insulator layer, not covered by said field oxide regions; depositing a polysilicon layer on said first insulator layer, and on said field oxide regions; ion implanting a first conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form first and second polysilicon gate structures; ion implanting a second conductivity imparting dopant into a first region, and into a second region, of said silicon on insulator layer, not covered by said first polysilicon gate structure, and not covered by said field oxide region, to be used for a first type transistor structure; ion implanting said second conductivity imparting dopant into a third region of said silicon on insulator layer, not covered by said second polysilicon gate structure, and not covered by said field oxide region, to be used for a second type transistor structure; forming a first photoresist shape, exposing said first region, of said silicon on insulator layer; ion implanting a third conductivity imparting dopant into exposed said first region, of said silicon on insulator layer, not covered by said first polysilicon gate structure, and not covered by said field oxide region, to be used for said first type transistor structure; removal of said first photoresist shape; deposition of a second insulator layer; anisotropic etching of said second insulator layer to form insulator sidewall spacers on sides of said first and second polysilicon gate structures; forming a second photoresist shape, exposing said first region, and said second region of said silicon on insulator layer, to be used for said first type transistor structure; ion implanting a fourth conductivity imparting dopant into exposed said first region, of said silicon on insulator layer, not covered by said field oxide region, not covered by said first polysilicon gate structure, and not covered by insulator sidewall spacers region; ion implanting said fourth conductivity imparting dopant into exposed said second region, of said silicon on insulator layer, not covered by said second polysilicon gate structure, not covered by said field oxide region, and not covered by said insulator sidewall spacers; removal of said second photoresist shape; forming a third photoresist shape, exposing said third region, of said silicon on insulator layer, to be used for said second type transistor structure, and exposing an area of said second region, of said silicon on insulator layer, not previously subjected to ion implantation of fourth conductivity imparting dopant, to be used for said first type transistor structure; ion implanting a fifth conductivity imparting dopant into said third region, of said silicon on insulator layer, not covered by said field oxide regions, not covered by said second polysilicon gate structure, and not covered by said insulator sidewall spacers; ion implanting said fifth conductivity imparting dopant into said area of said second region, of said silicon on insulator layer, not covered by said third photoresist shape; removal of said third photoresist shape; deposition of a third insulator layer; opening contact holes in said third insulator layer, to said area of said second region, to said first region, and to said second region, of said silicon on insulator layer, to be used for said first type transistor structure, and to said third region of said silicon on insulator layer, to be used for said second type transistor structure; deposition of a metal; and forming metal contact structures to said area of said second region, to said first region, and to said second region, of said silicon on insulator layer, to be used for said first type transistor structure, and forming contacts to said first and second polysilicon gate structures, and to said third region, of silicon on insulator layer, to be used for said second type transistor structure.
Claim 3
Dependent Claim
47 words
The method of claim 1, wherein said silicon on insulator layer is produced by the SIMOX process, resulting in a P type silicon layer, having a <100> crystallographic orientation, with a resistivity between about 15 to 25 ohm-cm, and a thickness between about 500 to 2000 Angstroms.
Claim 4
Dependent Claim
37 words
The method of claim 1, wherein said first insulator layer is silicon dioxide, thermally grown, in a oxygen-steam ambient, at a temperature between about 800° to 1000° C., to a thickness between about 40 to 200 Angstroms.
Claim 5
Dependent Claim
33 words
The method of claim 1, wherein said polysilicon layer is deposited intrinsically, using LPCVD processing, at a temperature between about 500° to 650° C., to a thickness between about 1200 to 3000 Angstroms.
Claim 6
Dependent Claim
35 words
The method of claim 1, wherein said first conductivity imparting dopant is phosphorous, ion implanted at an energy between about 50 to 100 Kev., at a dose between about 1E14 to 1E16 atoms/cm 2 .
Claim 7
Dependent Claim
35 words
The method of claim 1, wherein said second conductivity imparting dopant is boron, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E12 to 1E14 atoms/cm 2 .
Claim 8
Dependent Claim
35 words
The method of claim 1, wherein said third conductivity imparting dopant is arsenic, ion implanted at an energy between about 25 to 40 Kev., at a dose between about 5E14 to 5E15 atoms/cm 2 .
Claim 9
Dependent Claim
37 words
The method of claim 1, wherein said second insulator layer is silicon oxide, deposited using either LPCVD or PECVD processing, at a temperature between about 600° to 800° C., to thickness between about 800 to 2500 Angstroms.
Claim 10
Dependent Claim
22 words
The method of claim 1, wherein said insulator sidewall spacer is formed by anisotropic RIE processing, using CHF 3 as an etchant.
Claim 11
Dependent Claim
35 words
The method of claim 1, wherein said fourth conductivity imparting dopant is arsenic, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 5E14 to 5E15 atoms/cm 2 .
Claim 12
Dependent Claim
35 words
The method of claim 1, wherein said fifth conductivity imparting dopant is boron, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E14 to 5E15 atoms/cm 2 .
Claim 13
Independent Claim
688 words
A method for a fabricating lateral, NPN bipolar junction transistor, and a P channel MOSFET device, in a layer of silicon on insulator, on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate; providing said silicon on insulator layer, on said semiconductor substrate; growing field oxide regions on specific areas of said silicon on insulator layer; growing a first insulator layer on surface of said silicon on insulator layer, not covered by said field oxide regions; depositing a polysilicon layer on said first insulator layer and on said field oxide regions; ion implanting a first conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form a polysilicon gate structure; ion implanting a second conductivity imparting dopant into a first region, and into a second region of said silicon on insulator layer, not covered by said polysilicon gate structure, and not covered by said field oxide regions, to create an initial base region of said lateral, NPN bipolar junction transistor; ion implanting said second conductivity imparting dopant into a third region of said silicon on insulator layer, to create a lightly doped source and drain region, for said P channel MOSFET device; forming a first photoresist shape, exposing said first region of said silicon on insulator layer; ion implanting a third conductivity imparting dopant into said first region of said silicon on insulator layer, not covered by said field oxide regions, and not covered by said polysilicon gate structure, to convert said initial base region, of said first region, to a collector region, for said lateral, NPN bipolar junction transistor; removal of said first photoresist shape; deposition of a second insulator layer; anisotropic etching of said second insulator layer to form insulator sidewall spacers on sides of said polysilicon gate structure; forming a second photoresist shape, exposing said first region, and said second region of said silicon on insulator layer; ion implanting a fourth conductivity imparting dopant into said first region of said silicon on insulator layer, not covered by said field oxide regions, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacers, to increase the dopant level of said collector region, of said lateral, NPN bipolar junction transistor; ion implanting said fourth conductivity imparting dopant into said second region of said silicon on insulator layer, not covered by said field oxide region, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacers, to convert said initial base region to an emitter region of said lateral, NPN bipolar junction transistor, and creating a narrow base region, directly under one of said insulator sidewall spacers; removal of said second photoresist shape; forming a third photoresist shape, exposing a third region of said silicon on insulator layer, to be used for said P channel MOSFET device, and exposing regions of said initial base region, of said lateral, NPN bipolar junction transistor; ion implanting a fifth conductivity imparting dopant into said third region of said silicon on insulator layer, not covered by said field oxide regions, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer, to form heavily doped source and drain regions of said P channel MOSFET device; ion implanting said fifth conductivity imparting dopant into regions of said initial base region, of said lateral, NPN bipolar junction transistor, not covered by said third photoresist shape, to form a heavily doped base contact region; removal of said third photoresist shape deposition of a third insulator layer; opening contact holes to said emitter region, to said heavily doped base contact region, and to collector region, of said lateral, NPN bipolar junction transistor, and opening contact holes to said heavily doped source and drain regions, and to said polysilicon gate structure, of said P channel MOSFET device; deposition of a metal; and forming metal contact structures to said emitter region, to said heavily doped base contact region, and to said collector region, of said lateral, NPN bipolar junction transistor, and to said heavily doped source and drain regions, and to said polysilicon gate structure, of said P channel MOSFET device.
Claim 14
Independent Claim
688 words
A method for a fabricating lateral, NPN bipolar junction transistor, and a P channel MOSFET device, in a layer of silicon on insulator, on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate; providing said silicon on insulator layer, on said semiconductor substrate; growing field oxide regions on specific areas of said silicon on insulator layer; growing a first insulator layer on surface of said silicon on insulator layer, not covered by said field oxide regions; depositing a polysilicon layer on said first insulator layer and on said field oxide regions; ion implanting a first conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form a polysilicon gate structure; ion implanting a second conductivity imparting dopant into a first region, and into a second region of said silicon on insulator layer, not covered by said polysilicon gate structure, and not covered by said field oxide regions, to create an initial base region of said lateral, NPN bipolar junction transistor; ion implanting said second conductivity imparting dopant into a third region of said silicon on insulator layer, to create a lightly doped source and drain region, for said P channel MOSFET device; forming a first photoresist shape, exposing said first region of said silicon on insulator layer; ion implanting a third conductivity imparting dopant into said first region of said silicon on insulator layer, not covered by said field oxide regions, and not covered by said polysilicon gate structure, to convert said initial base region, of said first region, to a collector region, for said lateral, NPN bipolar junction transistor; removal of said first photoresist shape; deposition of a second insulator layer; anisotropic etching of said second insulator layer to form insulator sidewall spacers on sides of said polysilicon gate structure; forming a second photoresist shape, exposing said first region, and said second region of said silicon on insulator layer; ion implanting a fourth conductivity imparting dopant into said first region of said silicon on insulator layer, not covered by said field oxide regions, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacers, to increase the dopant level of said collector region, of said lateral, NPN bipolar junction transistor; ion implanting said fourth conductivity imparting dopant into said second region of said silicon on insulator layer, not covered by said field oxide region, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacers, to convert said initial base region to an emitter region of said lateral, NPN bipolar junction transistor, and creating a narrow base region, directly under one of said insulator sidewall spacers; removal of said second photoresist shape; forming a third photoresist shape, exposing a third region of said silicon on insulator layer, to be used for said P channel MOSFET device, and exposing regions of said initial base region, of said lateral, NPN bipolar junction transistor; ion implanting a fifth conductivity imparting dopant into said third region of said silicon on insulator layer, not covered by said field oxide regions, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer, to form heavily doped source and drain regions of said P channel MOSFET device; ion implanting said fifth conductivity imparting dopant into regions of said initial base region, of said lateral, NPN bipolar junction transistor, not covered by said third photoresist shape, to form a heavily doped base contact region; removal of said third photoresist shape deposition of a third insulator layer; opening contact holes to said emitter region, to said heavily doped base contact region, and to collector region, of said lateral, NPN bipolar junction transistor, and opening contact holes to said heavily doped source and drain regions, and to said polysilicon gate structure, of said P channel MOSFET device; deposition of a metal; and forming metal contact structures to said emitter region, to said heavily doped base contact region, and to said collector region, of said lateral, NPN bipolar junction transistor, and to said heavily doped source and drain regions, and to said polysilicon gate structure, of said P channel MOSFET device.
Claim 15
Dependent Claim
47 words
The method of claim 12, wherein said silicon on insulator layer is obtained via the SIMOX process, resulting in a P type silicon layer, having an <100> crystallographic orientation, with a resistivity between about 15 to 25 ohm-cm, and a thickness between about 500 to 2000 Angstroms.
Claim 16
Dependent Claim
37 words
The method of claim 12, wherein said first insulator layer is silicon dioxide, thermally grown in an oxygen-steam ambient, at a temperature between about 800° to 1000° C., to a thickness between about 40 to 200 Angstroms.
Claim 17
Dependent Claim
32 words
The method of claim 12, wherein said polysilicon layer is deposited using LPCVD processing, at a temperature between about 500° to 650° C., to a thickness between about 1200 to 3000 Angstroms.
Claim 18
Dependent Claim
35 words
The method of claim 12, wherein said first conductivity imparting dopant is phosphorous, ion implanted at an energy between about 50 to 100 Kev., at a dose between about 1E14 to 1E16 atoms/cm 2 .
Claim 19
Dependent Claim
62 words
The method of claim 12, wherein said second conductivity imparting dopant, used to form said initial base region of said lateral bipolar junction transistor, and said lightly doped source and drain region for said P channel MOSFET device, is boron, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E12 to 1E14 atoms/cm 2 .
Claim 20
Dependent Claim
48 words
The method of claim 12, wherein said third conductivity imparting dopant, used to form said collector region of said lateral, NPN bipolar junction transistor, is arsenic, ion implanted at an energy between about 25 to 40 Kev., at a dose between about 5E14 to 5E15 atoms/cm 2 .
Claim 21
Dependent Claim
37 words
The method of claim 12, wherein said second insulator layer is silicon oxide, deposited using either LPCVD or PECVD processing, at a temperature between about 600° to 800° C., to thickness between about 800 to 2500 Angstrom.
Claim 22
Dependent Claim
23 words
The method of claim 12, wherein said insulator sidewall spacer is formed via anisotropic, reactive ion etching, using CHF 3 as an etchant.
Claim 23
Dependent Claim
69 words
The method of claim 12, wherein said fourth conductivity imparting dopant, used to form said emitter region, used to form said heavily doped collector region, and used to create said narrow base region, under said insulator sidewall spacer, of said lateral, NPN bipolar junction transistor, is arsenic, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 5E14 to 5E15 atoms/cm 2 .
Claim 24
Dependent Claim
51 words
The method of claim 12, wherein said fifth conductivity imparting dopant, used to form said heavily doped source and drain regions, of said P channel MOSFET device, is boron, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E14 to 5E15 atoms/cm 2 .
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 2001-03-16 | 2001-09-15 | 2002-03-17 | $2000.00 | Window Closed / Lapsed |
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| 11.5 Years (Year 12) | 2009-03-16 | 2009-09-15 | 2010-03-17 | $7700.00 | Window Closed / Lapsed |