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US5724727A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of forming electronic component

Assignee: Motorola Solutions Inc
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Filing: 1996-08-12
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Granted: 1998-03-10
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Expires: 2016-08-12
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Abstract

Abstract An electronic component (15) such as a printed circuit board (PCB) is formed using a sintering process. A layer of dielectric powder (11) is partially converted to a solid layer of dielectric material (14) by exposing selective portions of the powder (11) to a laser (17). A layer of conductive powder (20) is then formed over the solid layer of dielectric material (14) and selectively sintered to form a solid layer of conductive material (19). This process can be used to form an interconnect structure (45), a coaxial structure (60), a cavity (89), a trench structure (90), or a slug (91), conductive traces (19), bond pads (31), or any other circuit board structure.

Inventors

  • 👤 Mona A. Chopra
  • 👤 Everitt W. Mace
  • 👤 Brian D. Young

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 17:59
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/46; H05K3/4644; H05K3/4664; H05K3/10; H05K3/102; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/098; H05K2203/00; H05K2203/10; H05K2203/107; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/4913; Y10T29/49155

Claims Analysis

Total Claims: 23
Claim 1
Independent Claim 150 words
A method of forming an electronic component comprising the steps of: providing a substrate having a surface; forming a first layer of dielectric powder on the surface of the substrate; sintering at least a portion of the first layer of dielectric powder to form a first solid layer of dielectric material on the surface of the substrate; forming a first layer of conductive powder overlying the first solid layer of dielectric material; and sintering at least a portion of the first layer of conductive powder to form a first solid layer of conductive material over the first solid layer of dielectric material, wherein the first solid layer of conductive material has a pattern and the first solid layer of dielectric material provides an underlying insulation layer for the first solid layer of conductive material, whereby the first solid layer of dielectric material underlies the first solid layer of conductive material.
Claim 2
Independent Claim 150 words
A method of forming an electronic component comprising the steps of: providing a substrate having a surface; forming a first layer of dielectric powder on the surface of the substrate; sintering at least a portion of the first layer of dielectric powder to form a first solid layer of dielectric material on the surface of the substrate; forming a first layer of conductive powder overlying the first solid layer of dielectric material; and sintering at least a portion of the first layer of conductive powder to form a first solid layer of conductive material over the first solid layer of dielectric material, wherein the first solid layer of conductive material has a pattern and the first solid layer of dielectric material provides an underlying insulation layer for the first solid layer of conductive material, whereby the first solid layer of dielectric material underlies the first solid layer of conductive material.
Claim 3
Dependent Claim 24 words
The method of claim 1 wherein the first solid layer of conductive material is part of an interconnect line in a printed circuit board.
Claim 4
Dependent Claim 123 words
The method of claim 1 further comprising the steps of: forming a second layer of dielectric powder overlying the first solid layer of conductive material, wherein the second layer of dielectric material is sinterable; sintering at least a portion of the second layer of dielectric powder to form a second solid layer of dielectric material overlying a portion of the first solid layer of conductive material; forming a second layer of conductive powder overlying the second solid layer of dielectric material, wherein the second layer of conductive powder is sinterable; and sintering at least a portion of the second layer of conductive powder to form a second solid layer of conductive material, wherein the second solid layer of conductive material has a pattern.
Claim 5
Dependent Claim 30 words
The method of claim 3 wherein a portion of the first solid layer of conductive material is in contact with a portion of the second solid layer of conductive material.
Claim 6
Dependent Claim 55 words
The method of claim 3 wherein the electronic component has a top surface and a bottom surface, and the pattern of the first solid layer of conductive material and the pattern of the second solid layer of conductive material provide an electrical connection from the top surface of the electronic component to the bottom surface.
Claim 7
Dependent Claim 52 words
The method of claim 5 wherein the pattern of the first solid layer of conductive material and the pattern of the second solid layer of conductive material each comprises a first region and a second region, wherein the second region encircles the first region and is physically isolated from the first region.
Claim 8
Dependent Claim 30 words
The method of claim 1 further comprising the step of removing a remaining portion of the first layer of dielectric powder prior to forming the first layer of conductive powder.
Claim 9
Dependent Claim 76 words
The method of claim 1 further comprising the steps of: forming a plurality of layers of dielectric powder overlying the substrate with each of the plurality of layers of dielectric powder having a first region and a second region: sintering the first region of each of the plurality of layers of dielectric powder; and removing the second region of each of the plurality of layers of dielectric powder to form a cavity in the electronic component.
Claim 10
Dependent Claim 27 words
The method of claim 1 wherein the first layer of dielectric powder and the first layer of conductive powder are both less than about 50 microns thick.
Claim 11
Dependent Claim 25 words
The method of claim 1 wherein the first layer of dielectric powder is selected from the group consisting of polyimide, aluminum dioxide, and aluminum nitride.
Claim 12
Dependent Claim 26 words
The method of claim 1 wherein the first layer of conductive powder is selected from the group consisting of aluminum, tungsten, molybdenum, copper, silver, and gold.
Claim 13
Dependent Claim 27 words
The method of claim 1 wherein the first layer of dielectric powder is sintered using a laser with an energy of about 300 watts to 500 watts.
Claim 14
Independent Claim 100 words
A method of forming a substrate having a cavity, the method comprising the steps of: a) forming a layer of dielectric powder overlying a portion of the substrate, wherein the layer of dielectric powder has a first region and a second region; b) sintering the second region of the layer of dielectric powder to form a solid layer of dielectric material; c) removing the first region of the layer of dielectric powder to provide a portion of the cavity; and repeating steps a, b, and c zero or more times to complete a formation of the cavity in the substrate.
Claim 15
Independent Claim 100 words
A method of forming a substrate having a cavity, the method comprising the steps of: a) forming a layer of dielectric powder overlying a portion of the substrate, wherein the layer of dielectric powder has a first region and a second region; b) sintering the second region of the layer of dielectric powder to form a solid layer of dielectric material; c) removing the first region of the layer of dielectric powder to provide a portion of the cavity; and repeating steps a, b, and c zero or more times to complete a formation of the cavity in the substrate.
Claim 16
Dependent Claim 17 words
The method of claim 13 further comprising the step of placing an electronic component into the cavity.
Claim 17
Dependent Claim 30 words
The method of claim 14 wherein the electronic component is selected from the group consisting of a capacitor, a sensor, an integrated circuit, a transistor, a diode, and a resistor.
Claim 18
Dependent Claim 18 words
The method of claim 13 wherein the cavity provides a trench pattern across a surface of the substrate.
Claim 19
Independent Claim 184 words
A method of forming an electronic component having a contact region on a top surface, a contact region on a bottom surface, and an interconnect structure to couple the contact region on the top surface to the contact region on the bottom surface, the method comprising the steps of: providing a substrate having a surface; forming a first layer of dielectric powder on the surface of the substrate, wherein the first layer of dielectric powder is sinterable and has a first region and a second region; sintering the first region of the first layer of dielectric powder to form a first solid layer of dielectric material; forming a first layer of conductive powder overlying the first solid layer of dielectric material, wherein the first layer of conductive powder is sinterable and has a first region and a second region; and sintering the first region of the first layer of conductive powder to form a first solid layer of conductive material, wherein the first solid layer of conductive material couples the contact region on the top surface to the contact region on the bottom surface.
Claim 20
Independent Claim 184 words
A method of forming an electronic component having a contact region on a top surface, a contact region on a bottom surface, and an interconnect structure to couple the contact region on the top surface to the contact region on the bottom surface, the method comprising the steps of: providing a substrate having a surface; forming a first layer of dielectric powder on the surface of the substrate, wherein the first layer of dielectric powder is sinterable and has a first region and a second region; sintering the first region of the first layer of dielectric powder to form a first solid layer of dielectric material; forming a first layer of conductive powder overlying the first solid layer of dielectric material, wherein the first layer of conductive powder is sinterable and has a first region and a second region; and sintering the first region of the first layer of conductive powder to form a first solid layer of conductive material, wherein the first solid layer of conductive material couples the contact region on the top surface to the contact region on the bottom surface.
Claim 21
Dependent Claim 73 words
The method of claim 17 wherein the first layer of conductive powder further comprises a third region that is sinterable, and the method further comprises the step of sintering the third region of the first layer of conductive powder to form a second solid layer of conductive material, which provides a slug and the first solid layer of conductive material and the second solid layer of conductive material are coupled to each other.
Claim 22
Dependent Claim 76 words
The method of claim 17 wherein the first layer of conductive powder further comprises a third region that is sinterable, and the method further comprises the step of sintering the third region of the first layer of conductive powder to provide a second solid layer of conductive material, and the second solid layer of conductive material encircles the first solid layer of conductive material and is physically separated from the first solid layer of conductive material.
Claim 23
Dependent Claim 92 words
The method of claim 17 further comprising the steps of: forming a second layer of dielectric powder overlying the first solid layer of conductive material, wherein the second layer of dielectric powder is sinterable; sintering at least a portion of the second layer of dielectric powder to form a second solid layer of dielectric material; forming a second layer of conductive powder overlying the second solid layer of dielectric material, wherein the second layer of conductive powder is sinterable; and sintering at least a portion of the second layer of conductive powder.

References Cited (Backward Citations)

US5382308A Cited
JPH02225357A Cited
US5431967A Cited
US5204055A Cited
US5283949A Cited
US5342919A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-03-09 2001-09-08 2002-03-10 $2000.00 Window Closed / Lapsed
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