US5724121A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mounting member method and apparatus with variable length supports
Assignee: Goodrich Corp
•
Filing: 1995-05-12
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Granted: 1998-03-03
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Expires: 2015-05-12
Abstract
Abstract A deformable substrate chuck includes a deformable mounting plate supported by a plurality of individually controllable variable-length actuators. Each actuator is controllable to vary the height of the portion of the deformable mounting plate which it supports. A chamber within the mounting plate accessible through a vacuum port can be evacuated to hold a substrate such as a semiconductor wafer or a flat panel display to a porous top surface of the mounting plate. An optical sensing system senses the shape of the substrate and generates control signals used to control the lengths of the variable-length actuators to control the shape of the substrate.
Inventors
- 👤 William G. McKinley
- 👤 Bernhard P. Piwczyk
- 👤 John R. Burgess
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 18:54
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70225; G03F7/70283; G03F7/70691; G03F7/707; G03F7/70708
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
125 words
Apparatus comprising: a deformable mounting member on which a substrate can be mounted, the mounting member having a base upon which are mounted a plurality of actuators; a plurality of variable-length members supporting the deformable mounting member on a support, each variable-length member capable of movement to position the mounting member relative to an optical system; a controller generating control signals for the variable-length members to selectively change the lengths of the variable length members to position the mounting member and actuate the actuators to change the shape of the deformable mounting member; and a chamber within the deformable mounting member accessible via a vacuum port such that the chamber can be at least partially evacuated to hold a substrate on the deformable mounting member.
Claim 2
Dependent Claim
125 words
Apparatus comprising: a deformable mounting member on which a substrate can be mounted, the mounting member having a base upon which are mounted a plurality of actuators; a plurality of variable-length members supporting the deformable mounting member on a support, each variable-length member capable of movement to position the mounting member relative to an optical system; a controller generating control signals for the variable-length members to selectively change the lengths of the variable length members to position the mounting member and actuate the actuators to change the shape of the deformable mounting member; and a chamber within the deformable mounting member accessible via a vacuum port such that the chamber can be at least partially evacuated to hold a substrate on the deformable mounting member.
Claim 3
Dependent Claim
15 words
The apparatus of claim 1 wherein the chamber comprises a plurality of concentric annular regions.
Claim 4
Dependent Claim
25 words
The apparatus of claim 1 wherein the deformable mounting member comprises a plurality of internal walls which define a plurality of regions within the chamber.
Claim 5
Dependent Claim
11 words
The apparatus of claim 1 wherein the actuators comprise piezoelectric transducers.
Claim 6
Dependent Claim
11 words
The apparatus of claim 1 wherein the actuators comprise stepper motors.
Claim 7
Independent Claim
106 words
A method of holding and changing the shape of a substrate comprising: mounting a deformable mounting member on a plurality of actuators, each actuator supporting a respective portion of the deformable mounting member; supporting the mounting member on a support member by a plurality of variable length positioning members to position the mounting member and substrate with respect to an optics system; locating the substrate on the deformable mounting member; at least partially evacuating a chamber within the deformable mounting member to hold the substrate to the deformable mounting member; and controlling the actuators to change the shape of the deformable mounting member and the substrate.
Claim 8
Independent Claim
106 words
A method of holding and changing the shape of a substrate comprising: mounting a deformable mounting member on a plurality of actuators, each actuator supporting a respective portion of the deformable mounting member; supporting the mounting member on a support member by a plurality of variable length positioning members to position the mounting member and substrate with respect to an optics system; locating the substrate on the deformable mounting member; at least partially evacuating a chamber within the deformable mounting member to hold the substrate to the deformable mounting member; and controlling the actuators to change the shape of the deformable mounting member and the substrate.
Claim 9
Dependent Claim
13 words
The method of claim 6 further comprising sensing the shape of the substrate.
Claim 10
Dependent Claim
21 words
The method of claim 7 further comprising generating control signals from the sensed shape of the substrate to control the actuators.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-03-02 | 2001-09-01 | 2002-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-02 | 2005-09-01 | 2006-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-02 | 2009-09-01 | 2010-03-03 | $7700.00 | Window Closed / Lapsed |