US5722155A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Machining guide method for magnetic recording reproduce heads
Assignee: Seagate Technology LLC
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Filing: 1996-04-10
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Granted: 1998-03-03
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Expires: 2016-04-10
Abstract
Abstract An electrical lap guide (ELG) and a method of using the same to control the machining of a surface of a magnetic transducer to obtain a desired transducer height are disclosed. The transducer and ELG are fabricated in a deposition of layers on a substrate. The ELG includes a first resistor aligned with the transducer such that a machined height of the first resistor is indicative of a machined height of the transducer. Resistances of second and third resistors of the ELG are measured. A sheet resistance of the deposition of layers and a quantity of wafer processing edge movement are determined as functions of the measured resistances of the second and third resistors. An expected non-machined resistance of the first resistor is determined as a function of the determined sheet resistance and as a function of the determined quantity of edge movement. A non-machined resistance of the first resistor is measured. The expected non-machined resistance of the first resistor is compared to the measured non-machined resistance of the first resistor to determine an amount of error.
Inventors
- 👤 Lance E. Stover
- 👤 Beat G. Keel
- 👤 Shanlin X. Hao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:13
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/127; G11B5/33; G11B5/39; B; B24; B24B; B24B37/00; B24B37/04; B24B37/048; B24B49/00; B24B49/10; G11B5/1272; G11B5/187; G11B5/1871; G11B5/31; G11B5/3109; G11B5/3116; G11B5/313; G11B5/3133; G11B5/314; G11B5/3163; G11B5/3166; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/4902; Y10T29/49021; Y10T29/49032; Y10T29/49036; Y10T29/49037; Y10T29/49048
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
216 words
A method of using an electrical lap guide (ELG) associated with a magnetic transducer prior to machining a front surface of the transducer to obtain a desired transducer height, the transducer and ELG being fabricated in a deposition of layers on a substrate, the ELG including a first resistor being aligned with the transducer such that a machined height of the first resistor is indicative of a machined height of the transducer, the ELG also including second and third resistors, the method comprising: measuring resistances of the second and third resistors; determining a sheet resistance of the deposition of layers as a function of the measured resistances of the second and third resistors; determining a quantity of edge movement of edge surfaces of the transducer and of the first, second and third resistors as a function of the measured resistances of the second and third resistors, wherein the edge movement is caused by wafer processing; calculating a predicted non-machined resistance of the first resistor as a function of the determined sheet resistance and as a function of the determined quantity of edge movement; measuring a non-machined resistance of the first resistor; and comparing the predicted non-machined resistance of the first resistor and the measured non-machined resistance of the first resistor to determine an amount of error.
Claim 2
Independent Claim
216 words
A method of using an electrical lap guide (ELG) associated with a magnetic transducer prior to machining a front surface of the transducer to obtain a desired transducer height, the transducer and ELG being fabricated in a deposition of layers on a substrate, the ELG including a first resistor being aligned with the transducer such that a machined height of the first resistor is indicative of a machined height of the transducer, the ELG also including second and third resistors, the method comprising: measuring resistances of the second and third resistors; determining a sheet resistance of the deposition of layers as a function of the measured resistances of the second and third resistors; determining a quantity of edge movement of edge surfaces of the transducer and of the first, second and third resistors as a function of the measured resistances of the second and third resistors, wherein the edge movement is caused by wafer processing; calculating a predicted non-machined resistance of the first resistor as a function of the determined sheet resistance and as a function of the determined quantity of edge movement; measuring a non-machined resistance of the first resistor; and comparing the predicted non-machined resistance of the first resistor and the measured non-machined resistance of the first resistor to determine an amount of error.
Claim 3
Dependent Claim
67 words
The method of claim 1, wherein the step of determining the sheet resistance of the deposition of layers as a function of the measured resistances of the second and third resistors further comprises determining the sheet resistance of the deposition of layers as a function of the measured resistances of the second and third resistors and as a function of lengths of the second and third resistors.
Claim 4
Dependent Claim
91 words
The method of claim 2, wherein the step of determining the sheet resistance of the deposition of layers as a function of the measured resistances of the second and third resistors and as a function of lengths of the second and third resistors further comprises determining the sheet resistance of the deposition of layers as a function of the measured resistances of the second and third resistors, as a function of the lengths of the second and third resistors, and as a function of heights of the second and third resistors.
Claim 5
Dependent Claim
68 words
The method of claim 3, wherein determining the sheet resistance of the deposition of layers as a function of heights of the second and third resistors further comprises determining the sheet resistance of the deposition of layers as a function of mask heights of the second and third resistors, wherein the mask heights of the second and third resistors are intended heights of the second and third resistors.
Claim 6
Dependent Claim
45 words
The method of claim 1, wherein determining the quantity of edge movement further comprises determining the quantity of edge movement as a function of the measured resistances of the second and third resistors and as a function of lengths of the second and third resistors.
Claim 7
Dependent Claim
76 words
The method of claim 5, wherein determining the quantity of edge movement further comprises determining the quantity of edge movement as a function of the measured resistances of the second and third resistors, as a function of lengths of the second and third resistors, and as a function of mask heights of the second and third resistors, wherein the mask heights of the second and third resistors are intended heights of the second and third resistors.
Claim 8
Dependent Claim
82 words
The method of claim 1, wherein calculating the predicted non-machined resistance of the first resistor further comprises calculating the non-machined resistance of the first resistor as a function of the determined sheet resistance, as a function of the determined quantity of edge movement, as a function of a length of the first resistor, and as a function of a mask height of the first resistor, wherein the mask height of the first resistor is an intended non-machined height of the first resistor.
Claim 9
Dependent Claim
54 words
The method of claim 1, wherein comparing the predicted non-machined resistance of the first resistor and the measured non-machined resistance of the first resistor to determine an amount of error further comprises determining a percent difference between the predicted non-machined resistance of the first resistor and the measured non-machined resistance of the first resistor.
Claim 10
Dependent Claim
31 words
The method of claim 1, and further comprising the step of discarding the transducer and the ELG prior to machining if the amount of error exceeds a predetermined amount of error.
Claim 11
Dependent Claim
91 words
The method of claim 9, and if the amount of error does not exceed the predetermined amount of error, further comprising the step of machining the front surface of the transducer and a front surface of the first resistor until the machined height of the first resistor is substantially equal to a predetermined first resistor machined height, wherein the machined height of the first resistor is determined as a function of the measured resistance of the first resistor and as a function of the sheet resistance of the deposition of layers.
Claim 12
Dependent Claim
13 words
The method of claim 1, wherein the magnetic transducer is a magnetoresistive transducer.
Claim 13
Independent Claim
319 words
A method of processing a magnetic sensor, the sensor and an electrical lap guide (ELG) being fabricated in a deposition of layers on a substrate, the ELG including first, second and third resistors, the method comprising: measuring resistances of the second and third resistors; determining a sheet resistance of the deposition of layers as a function of the measured resistances of the second and third resistors; determining a quantity of edge movement of edge surfaces of the sensor and of the first, second and third resistors as a function of the measured resistances of the second and third resistors, wherein the edge movement is movement of the edge surfaces of the sensor and of the first, second and third resistors caused by previous processing steps; calculating an expected non-machined resistance of the first resistor as a function of the determined sheet resistance and as a function of the determined quantity of edge movement; measuring a non-machined resistance of the first resistor; comparing the expected non-machined resistance of the first resistor to the measured non-machined resistance of the first resistor to determine an amount of error; and machining a surface of the deposition of layers if the determined amount of error is less than a predetermined amount of error, wherein one of the first, second and third resistors is aligned with the sensor such that a machined height of the one of the resistors is indicative of a machined height of the sensor, wherein a machined resistance of the one of the resistors is monitored during the machining, the machined height of the one of the resistors being determined as a function of the determined sheet resistance and as a function of the monitored machined resistance of the one of the resistors, wherein the sensor and the one of the resistors are machined until the machined height of the one of the resistors is substantially equal to a predetermined height.
Claim 14
Independent Claim
319 words
A method of processing a magnetic sensor, the sensor and an electrical lap guide (ELG) being fabricated in a deposition of layers on a substrate, the ELG including first, second and third resistors, the method comprising: measuring resistances of the second and third resistors; determining a sheet resistance of the deposition of layers as a function of the measured resistances of the second and third resistors; determining a quantity of edge movement of edge surfaces of the sensor and of the first, second and third resistors as a function of the measured resistances of the second and third resistors, wherein the edge movement is movement of the edge surfaces of the sensor and of the first, second and third resistors caused by previous processing steps; calculating an expected non-machined resistance of the first resistor as a function of the determined sheet resistance and as a function of the determined quantity of edge movement; measuring a non-machined resistance of the first resistor; comparing the expected non-machined resistance of the first resistor to the measured non-machined resistance of the first resistor to determine an amount of error; and machining a surface of the deposition of layers if the determined amount of error is less than a predetermined amount of error, wherein one of the first, second and third resistors is aligned with the sensor such that a machined height of the one of the resistors is indicative of a machined height of the sensor, wherein a machined resistance of the one of the resistors is monitored during the machining, the machined height of the one of the resistors being determined as a function of the determined sheet resistance and as a function of the monitored machined resistance of the one of the resistors, wherein the sensor and the one of the resistors are machined until the machined height of the one of the resistors is substantially equal to a predetermined height.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-03-02 | 2001-09-01 | 2002-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-02 | 2005-09-01 | 2006-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-02 | 2009-09-01 | 2010-03-03 | $7700.00 | Window Closed / Lapsed |