US5721074A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for fabricating a light exposure mask comprising the use of a process defect inspection system
Assignee: SK Hynix Inc
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Filing: 1996-03-20
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Granted: 1998-02-24
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Expires: 2016-03-20
Abstract
Abstract A method for fabricating a light exposure mask, including forming a pattern on a wafer by use of a primary light exposure mask formed with a light shield film pattern in accordance with a design rule, transmitting, to a data comparison system, data obtained after measuring the size of the pattern on the wafer by use of a process defect inspection system, comparing the data with the size of the light shield film pattern, thereby detecting a portion of the pattern on the wafer which has a difference from a critical size value of the light shield film pattern, determining, by use of a compensation equation, an amendment value for a portion of the light shield film pattern which corresponds to the detected portion of the pattern on the wafer, and forming a secondary light exposure mask, based on the amendment value.
Inventors
- 👤 Sang Man Bae
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 03:24
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/68; G03F1/72; G03F1/82; G03F1/84; G03F7/00; G03F7/20; G03F7/70; G03F7/70425; G03F7/70433; H; H10; H10P; H10P76/00
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
150 words
A method for fabricating a light exposure mask, comprising the steps of: forming a pattern on a wafer by use of a primary light exposure mask formed with a light shield film pattern in accordance with a design rule; measuring a size of a selected portion of said pattern using a process defect inspection system, and transmitting to a data comparison system, data regarding the size of the selected portion of the pattern; comparing the data with the size of the light shield film pattern, thereby detecting a difference from a critical size value of the light shield film pattern; determining, by use of a compensation equation and said difference, amendment values for a portion of the light shield film pattern which correspond to width and radius values of the selected portion of the pattern on the wafer; and forming a secondary light exposure mask, based on the amendment value.
Claim 2
Independent Claim
150 words
A method for fabricating a light exposure mask, comprising the steps of: forming a pattern on a wafer by use of a primary light exposure mask formed with a light shield film pattern in accordance with a design rule; measuring a size of a selected portion of said pattern using a process defect inspection system, and transmitting to a data comparison system, data regarding the size of the selected portion of the pattern; comparing the data with the size of the light shield film pattern, thereby detecting a difference from a critical size value of the light shield film pattern; determining, by use of a compensation equation and said difference, amendment values for a portion of the light shield film pattern which correspond to width and radius values of the selected portion of the pattern on the wafer; and forming a secondary light exposure mask, based on the amendment value.
Claim 3
Dependent Claim
34 words
The method in accordance with claim 1, wherein the pattern formed on the wafer is a photoresist film pattern or an image pattern formed by etching a photoresist film by use of a mask.
Claim 4
Dependent Claim
44 words
The method in accordance with claim 1, wherein the process defect inspection system carries out its inspection operation by comparing neighboring patterns disposed in a die having no process defect with each other or by comparing each pattern in the die with a database.
Claim 5
Dependent Claim
70 words
The method in accordance with claim 1, wherein the process defect inspection system recognizes a process defect of the pattern on the wafer when the difference in the critical size between the pattern on the wafer and the light shield film pattern on the primary light exposure mask is beyond the range of about ±5%, and obtains data about the position and size of the pattern having the process defect.
Claim 6
Dependent Claim
26 words
The method in accordance with claim 1, wherein the amendment value is determined using a pattern die-to-pattern die comparison method or a database-to-pattern die comparison method.
Claim 7
Dependent Claim
89 words
The method in accordance with claim 5, wherein when the amendment value is determined using the pattern die-to-pattern die comparison method, mean values (δr n and δd n ) of variations in the rounding diameter (r n ) and pattern width (d n ) caused, upon inspecting n patterns, by a rounding effect of each pattern are calculated using the following equations: ##EQU2## and final amendment values (δr' n and δd' n ) are calculated using the following equations: δr'.sub.n =K·δr.sub.n δd'.sub.n =K·δd.sub.n where, K is a magnification factor.
Claim 8
Dependent Claim
16 words
The method in accordance with claim 6, wherein K ranges from about 0.8 to about 1.5.
Claim 9
Dependent Claim
97 words
The method in accordance with claim 5, wherein when the amendment value is determined using the database-to-pattern die comparison method, mean values (δr n and δd n ) of variations in the rounding diameter (r n ) and pattern width (d n ) caused, upon inspecting n patterns, by a rounding effect of each pattern are calculated using the following equations: δr.sub.n =(r.sub.n).sub.database -(r'.sub.n).sub.wafer pattern data δd.sub.n =(d.sub.n).sub.database -(d'.sub.n).sub.wafer pattern data and final amendment values (δr' n and δd' n ) are calculated using the following equations: δr'.sub.n =K·δd.sub.n δd'.sub.n =K·δd.sub.n where, K is a magnification factor.
Claim 10
Dependent Claim
16 words
The method in accordance with claim 8, wherein K ranges from about 0.8 to about 1.5.
Claim 11
Dependent Claim
46 words
The method in accordance with claim 1, wherein the step of forming the pattern on the wafer is carried out using an over or under light exposure method such that a variation in the critical size of the pattern ranges within the range of about ±5%.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-02-23 | 2001-08-25 | 2002-02-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-02-23 | 2005-08-25 | 2006-02-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-02-23 | 2009-08-25 | 2010-02-24 | $7700.00 | Window Closed / Lapsed |