US5713660A — Illumination optical apparatus

Claim 1

Independent Claim 157 words

An illumination optical apparatus comprising: a collector mirror having an ellipsoidal surface of revolution; a light source located at one focal point of said ellipsoidal surface of revolution so that light emitted therefrom is reflected and collected by said collector mirror; a collimator lens for converting light collected by said collector mirror into substantially parallel beams; an optical integrator for producing a plurality of light source images, based on the beams outgoing from said collimator optical system; and a condenser lens for condensing light from said plurality of light source images to illuminate an object to be illuminated in a superimposed manner; wherein said collimator lens satisfies the following relation: R.sub.max <f.sub.col ·sin u.sub.max where f col is a focal length of said collimator lens, u max a maximum angle of incidence of the light incident into said collimator lens, and R max a maximum beam radius of the substantially parallel beams outgoing from said collimator lens.

Claim 2

Dependent Claim 157 words

An illumination optical apparatus comprising: a collector mirror having an ellipsoidal surface of revolution; a light source located at one focal point of said ellipsoidal surface of revolution so that light emitted therefrom is reflected and collected by said collector mirror; a collimator lens for converting light collected by said collector mirror into substantially parallel beams; an optical integrator for producing a plurality of light source images, based on the beams outgoing from said collimator optical system; and a condenser lens for condensing light from said plurality of light source images to illuminate an object to be illuminated in a superimposed manner; wherein said collimator lens satisfies the following relation: R.sub.max <f.sub.col ·sin u.sub.max where f col is a focal length of said collimator lens, u max a maximum angle of incidence of the light incident into said collimator lens, and R max a maximum beam radius of the substantially parallel beams outgoing from said collimator lens.

Claim 3

Dependent Claim 19 words

An illumination optical apparatus according to claim 1, wherein at least one surface of said collimator lens is aspherical.

Claim 4

Dependent Claim 200 words

An illumination optical apparatus comprising: a collector mirror having an ellipsoidal surface of revolution; a light source located at one focal point of said ellipsoidal surface of revolution so that light emitted therefrom is reflected and collected by said collector mirror; a collimator lens for converting light collected by said collector mirror into substantially parallel beams; an optical integrator for producing a plurality of light source images, based on the beams outgoing from said collimator lens; and a condenser optical system for condensing light from said plurality of light source images to illuminate an object to be illuminated in a superimposed manner; wherein said collimator lens satisfies the following projection relation: 0.95T≦R≦1.05T where T=2C/{(β.sup.2 -1) cos u.sub.2 -(β.sup.2 +1)}+C; where C=R.sub.max {(β.sup.2 -1) cos u.sub.max -(β.sup.2 +1)}/{(β.sup.2 -1)(cos u.sub.max -1)}; where β=f.sub.2 /f.sub.1 ; where f 1 and f 2 (f 1 <f 2 ) are distances from the vertex of said ellipsoidal surface of revolution to either of two focal points of said ellipsoidal surface of revolution, R a collimating radius of said collimator lens, R max a maximum collimating radius, u 2 an angle of incidence into said collimator lens, and u max a maximum angle of incidence.

Claim 5

Dependent Claim 200 words

An illumination optical apparatus comprising: a collector mirror having an ellipsoidal surface of revolution; a light source located at one focal point of said ellipsoidal surface of revolution so that light emitted therefrom is reflected and collected by said collector mirror; a collimator lens for converting light collected by said collector mirror into substantially parallel beams; an optical integrator for producing a plurality of light source images, based on the beams outgoing from said collimator lens; and a condenser optical system for condensing light from said plurality of light source images to illuminate an object to be illuminated in a superimposed manner; wherein said collimator lens satisfies the following projection relation: 0.95T≦R≦1.05T where T=2C/{(β.sup.2 -1) cos u.sub.2 -(β.sup.2 +1)}+C; where C=R.sub.max {(β.sup.2 -1) cos u.sub.max -(β.sup.2 +1)}/{(β.sup.2 -1)(cos u.sub.max -1)}; where β=f.sub.2 /f.sub.1 ; where f 1 and f 2 (f 1 <f 2 ) are distances from the vertex of said ellipsoidal surface of revolution to either of two focal points of said ellipsoidal surface of revolution, R a collimating radius of said collimator lens, R max a maximum collimating radius, u 2 an angle of incidence into said collimator lens, and u max a maximum angle of incidence.

Claim 6

Dependent Claim 19 words

An illumination optical apparatus according to claim 3, wherein at least one surface of said collimator lens is aspherical.

Claim 7

Dependent Claim 218 words

An illumination optical apparatus comprising: a collector mirror with an optical axis having an ellipsoidal surface of revolution; a light source located at a first focal point of said ellipsoidal surface of revolution so that light emitted therefrom is reflected and collected by said collector mirror; a correction optical system being set as coaxially with the optical axis of said collector mirror at a position between said collector mirror and a second focal point of said collector mirror, said correction optical system being arranged to form a real image of said light source; and an illumination optical system for receiving light collected by said collector mirror and illuminating an object to be illuminated, wherein said correction optical system comprises an optical element at least one surface of which satisfies the equation: S(y)=(y.sup.2 /R)/{1+(1-k·y.sup.2 /R.sup.2).sup.1/2 }+C.sub.2 ·y.sup.2 +C.sub.4 ·y.sup.4 +C.sub.6 ·y.sup.6 +C.sub.8 ·y.sup.8 +C.sub.10 ·y.sup.10 + . . . , wherein height along the direction perpendicular to the optical axis is y, a displacement amount along the optical axis at the height y and from a tangent plane to said one surface at a vertex of said one surface is S(y), a reference radius of curvature is R, a conical coefficient is k, and aspherical coefficients of the n-th order (n=2, 4, 6, . . . ) are Cn.

Claim 8

Dependent Claim 218 words

An illumination optical apparatus comprising: a collector mirror with an optical axis having an ellipsoidal surface of revolution; a light source located at a first focal point of said ellipsoidal surface of revolution so that light emitted therefrom is reflected and collected by said collector mirror; a correction optical system being set as coaxially with the optical axis of said collector mirror at a position between said collector mirror and a second focal point of said collector mirror, said correction optical system being arranged to form a real image of said light source; and an illumination optical system for receiving light collected by said collector mirror and illuminating an object to be illuminated, wherein said correction optical system comprises an optical element at least one surface of which satisfies the equation: S(y)=(y.sup.2 /R)/{1+(1-k·y.sup.2 /R.sup.2).sup.1/2 }+C.sub.2 ·y.sup.2 +C.sub.4 ·y.sup.4 +C.sub.6 ·y.sup.6 +C.sub.8 ·y.sup.8 +C.sub.10 ·y.sup.10 + . . . , wherein height along the direction perpendicular to the optical axis is y, a displacement amount along the optical axis at the height y and from a tangent plane to said one surface at a vertex of said one surface is S(y), a reference radius of curvature is R, a conical coefficient is k, and aspherical coefficients of the n-th order (n=2, 4, 6, . . . ) are Cn.

Claim 9

Dependent Claim 55 words

An illumination optical apparatus according to claim 5, further comprising: an optical integrator for producing a plurality of light source images, based on light collected by said collector mirror; and a condenser optical system for condensing light from said plurality of light source images to illuminate said object to be illuminated in a superimposed manner.

Claim 10

Dependent Claim 35 words

An illumination optical apparatus according to claim 6, further comprising a collimator lens disposed between said correction optical system and said optical integrator, for converting light collected by said collector mirror into substantially parallel beams.

Claim 11

Dependent Claim 184 words

An illumination optical apparatus comprising: a collector mirror with an optical axis having an ellipsoidal surface of revolution; a light source located at a first focal point of said ellipsoidal surface of revolution os that light emitted therefrom is reflected and collected by said collector mirror; a correction optical system being set as coaxially kith the optical axis of said collector mirror at a position between said collector mirror and a second focal point of said collector mirror, said correction optical system being arranged to form a real image of said light source, wherein said correction optical system satisfies the following relation: 0.95·(C.sub.1 ·cos u.sub.1 +C.sub.2)≦sin u.sub.3 u.sub.2 !≦1.05·(C.sub.1 ·cos u.sub.1 +C.sub.2) where u 1 (u 1 ≠0) is an angle between a direction of light impinging on said ellipsoidal surface of revolution from said light source and the optical axis of said collector mirror, u 3 (u 3 ≠0) an angle between a direction of light outgoing from said correction optical system and the optical axis of said collector mirror, and C 1 (C 1 <0) and C 2 are properly chosen constants.

Claim 12

Dependent Claim 184 words

An illumination optical apparatus comprising: a collector mirror with an optical axis having an ellipsoidal surface of revolution; a light source located at a first focal point of said ellipsoidal surface of revolution os that light emitted therefrom is reflected and collected by said collector mirror; a correction optical system being set as coaxially kith the optical axis of said collector mirror at a position between said collector mirror and a second focal point of said collector mirror, said correction optical system being arranged to form a real image of said light source, wherein said correction optical system satisfies the following relation: 0.95·(C.sub.1 ·cos u.sub.1 +C.sub.2)≦sin u.sub.3 u.sub.2 !≦1.05·(C.sub.1 ·cos u.sub.1 +C.sub.2) where u 1 (u 1 ≠0) is an angle between a direction of light impinging on said ellipsoidal surface of revolution from said light source and the optical axis of said collector mirror, u 3 (u 3 ≠0) an angle between a direction of light outgoing from said correction optical system and the optical axis of said collector mirror, and C 1 (C 1 <0) and C 2 are properly chosen constants.

Claim 13

Dependent Claim 60 words

An illumination optical apparatus according to claim 8, further comprising: an optical integrator for producing a plurality of light source images, based on light source images, based on light collected by said collector mirror; and a condenser optical system for condensing light from said plurality of light source images to illuminate said object to be illuminated in a superimposed manner.

Claim 14

Dependent Claim 35 words

An illumination optical apparatus according to claim 8, further comprising a collimator lens disposed between said correction optical system and said optical integrator, for converting light collected by said collector mirror into substantially parallel beams.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2001-02-02	2001-08-04	2002-02-03	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2005-02-02	2005-08-04	2006-02-03	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2009-02-02	2009-08-04	2010-02-03	$7700.00	Window Closed / Lapsed

Illumination optical apparatus

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