Abstract The present invention relates to a semiconductor isolation method for high density semiconductor(devices of which the isolation pitch is below 0.5 μm. The present invention provides the semiconductor isolation method to improve the isolating characteristics of the semiconductor device by separately performing the isolation process for the area where the isolation pitch is wide from the area where it is narrow. In accordance with the present invention, there is disclosed a semiconductor isolation method including the steps for forming a pad oxide layer and a nitride layer on a semiconductor substrate having an area of relatively narrow isolation pitch and an area of relatively wide isolation pitch, selectively etching the nitride layer and the pad oxide layer on the area of relatively narrow isolation pitch to expose the semiconductor substrate thereunder and forming a trench into a predetermined area of the exposed semiconductor substrate, forming an insulating layer on the resulting structure, removing the insulating layer, whereby the insulating layer remains in the trench, selectively etching the nitride layer on the area of relatively wide isolation pitch, and forming a field oxide on the area where the nitride layer is removed.
A semiconductor isolation method comprising the steps for: forming a pad oxide layer and a nitride layer on a semiconductor substrate comprising an area of relatively narrow isolation pitch and an area of relatively wide isolation pitch; selectively etching said nitride layer and said pad oxide layer on said area of relatively narrow isolation pitch to expose said semiconductor substrate thereunder and forming a trench into a predetermined area of said exposed semiconductor substrate; forming a chemical vapor deposition oxide layer on the resulting structure; removing said chemical vapor deposition oxide layer using a chemical-mechanical polish process and using said nitride layer as an etch stop layer; selectively etching said nitride layer on said area of relatively wide isolation pitch; and forming a field oxide using thermal oxidation said area where said nitride layer is removed.
Claim 2
Dependent Claim
136 words
A semiconductor isolation method comprising the steps for: forming a pad oxide layer and a nitride layer on a semiconductor substrate comprising an area of relatively narrow isolation pitch and an area of relatively wide isolation pitch; selectively etching said nitride layer and said pad oxide layer on said area of relatively narrow isolation pitch to expose said semiconductor substrate thereunder and forming a trench into a predetermined area of said exposed semiconductor substrate; forming a chemical vapor deposition oxide layer on the resulting structure; removing said chemical vapor deposition oxide layer using a chemical-mechanical polish process and using said nitride layer as an etch stop layer; selectively etching said nitride layer on said area of relatively wide isolation pitch; and forming a field oxide using thermal oxidation said area where said nitride layer is removed.
Claim 3
Dependent Claim
19 words
The method as claimed in claim 1, wherein said area of relatively narrow isolation pitch is a cell area.
Claim 4
Dependent Claim
19 words
The method as claimed in claim 2, wherein said isolation pitch in said cell area is below 0.5 μm.
Claim 5
Dependent Claim
19 words
The method as claimed in claim 1, wherein said area of relatively wide isolation pitch is a peripheral area.
Claim 6
Dependent Claim
25 words
The method as claimed in claim 1, wherein said trench is formed on a predetermined isolation area in said area of relatively narrow isolation pitch.
Claim 7
Dependent Claim
21 words
The method as claimed in claim 1, wherein said insulating layer becomes denser during the step for forming said field oxide.
Claim 8
Dependent Claim
41 words
The method as claimed in claim 1, wherein said method further comprising the step for performing impurity injection process after the steps fox forming a trench and for selectively etching said nitride layer on said area of relatively wide isolation pitch.