US5705441A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion implant silicon nitride mask for a silicide free contact region in a self aligned silicide process
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-03-19
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Granted: 1998-01-06
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Expires: 2016-03-19
Abstract
Abstract A method is described for forming a high contact resistance region within the drain region or source region of an insulated gate field effect transistor as part of a high resistance resistor for electrostatic discharge protection of the field effect transistor. The silicide free contact region is formed as part of a self aligned silicide, or salicide, contact process. Nitrogen ion implantation followed by annealing is used to form a silicon nitride mask at the silicide free contact region. The mask prevents the formation of low contact resistance metal silicide at the silicide free contact region during the salicide process. Low resistance contacts to the gate electrode, source, and drain are formed using metal silicide.
Inventors
- 👤 Jau-Jey Wang
- 👤 Yuan-Lung Liu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 01:10
CPC Classifications
H; H10; H10D; H10D89/00; H10D89/60; H10D89/601; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
386 words
A method of forming a silicide free contact region, comprising the steps of: providing a silicon substrate with a number of devices formed therein wherein each device comprises a source region, a drain region, a silicide free contact region within said drain region, and a channel region; providing field oxide regions formed in said silicon substrate; providing gate oxide patterns formed on said silicon substrate over said channel regions; providing polysilicon gate electrodes having sidewalls formed on said gate oxide patterns; providing oxide spacers formed on said sidewalls of said polysilicon gate electrodes; forming a photoresist layer on said silicon substrate covering said polysilicon gate electrodes, said oxide spacers, said source regions, said drain regions, and said silicide free contact regions; forming contact hole openings in said photoresist layer directly over said silicide free contact regions whereby said contact hole openings expose said silicide free contact regions; implanting nitrogen ions into said silicide free contact regions by means of a beam of nitrogen ions using said photoresist layer with contact hole openings as a mask; removing said photoresist layer after implanting said nitrogen ions into said silicide free contact regions; annealing said silicon substrate using a first anneal after implanting said nitrogen ions and removing said photoresist layer thereby forming a layer of silicon nitride over said silicide free contact regions; forming a metal layer on said silicon substrate covering said polysilicon gate electrodes, said oxide spacers, said source regions, said drain regions, and said silicon nitride layer after annealing said silicon substrate using said first anneal; annealing said silicon substrate and said metal layer using a second anneal thereby forming metal silicide over said polysilicon gate electrodes, said source regions, and said drain regions except said layer of silicon nitride; etching away those parts of said metal layer not changed to metal silicide, after annealing said silicon substrate and said metal layer using said second anneal; forming a passivation layer over said silicon substrate after etching away those parts of said metal layer not changed to metal silicide; forming contact holes in said passivation layer thereby exposing part of said layer of silicon nitride and parts of said metal silicide formed over said polysilicon gate electrodes, said source regions, and said drain regions; and filling said contact holes in said passivation layer with conducting material.
Claim 2
Independent Claim
386 words
A method of forming a silicide free contact region, comprising the steps of: providing a silicon substrate with a number of devices formed therein wherein each device comprises a source region, a drain region, a silicide free contact region within said drain region, and a channel region; providing field oxide regions formed in said silicon substrate; providing gate oxide patterns formed on said silicon substrate over said channel regions; providing polysilicon gate electrodes having sidewalls formed on said gate oxide patterns; providing oxide spacers formed on said sidewalls of said polysilicon gate electrodes; forming a photoresist layer on said silicon substrate covering said polysilicon gate electrodes, said oxide spacers, said source regions, said drain regions, and said silicide free contact regions; forming contact hole openings in said photoresist layer directly over said silicide free contact regions whereby said contact hole openings expose said silicide free contact regions; implanting nitrogen ions into said silicide free contact regions by means of a beam of nitrogen ions using said photoresist layer with contact hole openings as a mask; removing said photoresist layer after implanting said nitrogen ions into said silicide free contact regions; annealing said silicon substrate using a first anneal after implanting said nitrogen ions and removing said photoresist layer thereby forming a layer of silicon nitride over said silicide free contact regions; forming a metal layer on said silicon substrate covering said polysilicon gate electrodes, said oxide spacers, said source regions, said drain regions, and said silicon nitride layer after annealing said silicon substrate using said first anneal; annealing said silicon substrate and said metal layer using a second anneal thereby forming metal silicide over said polysilicon gate electrodes, said source regions, and said drain regions except said layer of silicon nitride; etching away those parts of said metal layer not changed to metal silicide, after annealing said silicon substrate and said metal layer using said second anneal; forming a passivation layer over said silicon substrate after etching away those parts of said metal layer not changed to metal silicide; forming contact holes in said passivation layer thereby exposing part of said layer of silicon nitride and parts of said metal silicide formed over said polysilicon gate electrodes, said source regions, and said drain regions; and filling said contact holes in said passivation layer with conducting material.
Claim 3
Dependent Claim
28 words
The method of claim 1 wherein said metal layer is titanium having a thickness of between about 400 and 800 Angstroms and said metal silicide is titanium silicide.
Claim 4
Dependent Claim
37 words
The method of claim 1 wherein said beam of nitrogen ions has an energy of between about 30 keV and 80 keV and a beam density of between about 5×10 15 and 1×10 16 ions/cm 2 .
Claim 5
Dependent Claim
28 words
The method of claim 1 wherein said first anneal is at a temperature of between about 650° C. and 710° C. for between about 20 and 60 seconds.
Claim 6
Dependent Claim
28 words
The method of claim 1 wherein said second anneal is at a temperature of between about 800° C. and 900° C. for between about 20 and 60 seconds.
Claim 7
Dependent Claim
34 words
The method of claim 1 wherein said etching away those parts of said metal layer not changed to metal silicide uses a 1:1:5 solution of NH 4 OH+H 2 O 2 +H 2 O.
Claim 8
Dependent Claim
25 words
The method of claim 1 wherein said etching away those parts of said metal layer not changed to metal silicide does not require a mask.
Claim 9
Independent Claim
385 words
A method of forming a silicide free contact, comprising the steps of: providing a silicon substrate with a number of devices formed therein wherein each device comprises a source region, a drain region, a silicide free contact region within said source region, and a channel region; providing field oxide regions formed in said silicon substrate; providing gate oxide patterns formed on said silicon substrate over said channel regions; providing polysilicon gate electrodes having sidewalls formed on said gate oxide patterns; providing oxide spacers formed on said sidewalls of said polysilicon gate electrodes; forming a photoresist layer on said silicon substrate covering said polysilicon gate electrodes, said oxide spacers, said drain regions, said source regions, and said silicide free contact regions; forming contact hole openings in said photoresist layer directly over said silicide free contact regions whereby said contact hole openings expose said silicide free contact regions; implanting nitrogen ions into said silicide free contact regions by means of a beam of nitrogen ions using said photoresist layer with contact hole openings as a mask; removing said photoresist layer after implanting said nitrogen ions into said silicide free contact regions; annealing said silicon substrate using a first anneal after implanting said nitrogen ions and removing said photoresist layer thereby forming a layer of silicon nitride over said silicide free contact regions; forming a titanium layer on said silicon substrate covering said polysilicon gate electrodes, said oxide spacers, said source regions, said drain regions, and said silicon nitride layer after annealing said silicon substrate using said first anneal; annealing said silicon substrate and said titanium layer using a second anneal thereby forming titanium silicide over said polysilicon gate electrodes, said drain regions, and said source regions except said layer of silicon nitride; etching away those parts of said titanium layer not changed to titanium silicide, after annealing said silicon substrate and said titanium layer using said second anneal; forming a passivation layer over said silicon substrate after etching away those parts of said titanium layer not changed to titanium silicide; forming contact holes in said passivation layer thereby exposing part of said layer of silicon nitride and parts of said titanium silicide formed over said polysilicon gate electrodes, said source regions, and said drain regions; and filling said contact holes in said passivation layer with conducting material.
Claim 10
Independent Claim
385 words
A method of forming a silicide free contact, comprising the steps of: providing a silicon substrate with a number of devices formed therein wherein each device comprises a source region, a drain region, a silicide free contact region within said source region, and a channel region; providing field oxide regions formed in said silicon substrate; providing gate oxide patterns formed on said silicon substrate over said channel regions; providing polysilicon gate electrodes having sidewalls formed on said gate oxide patterns; providing oxide spacers formed on said sidewalls of said polysilicon gate electrodes; forming a photoresist layer on said silicon substrate covering said polysilicon gate electrodes, said oxide spacers, said drain regions, said source regions, and said silicide free contact regions; forming contact hole openings in said photoresist layer directly over said silicide free contact regions whereby said contact hole openings expose said silicide free contact regions; implanting nitrogen ions into said silicide free contact regions by means of a beam of nitrogen ions using said photoresist layer with contact hole openings as a mask; removing said photoresist layer after implanting said nitrogen ions into said silicide free contact regions; annealing said silicon substrate using a first anneal after implanting said nitrogen ions and removing said photoresist layer thereby forming a layer of silicon nitride over said silicide free contact regions; forming a titanium layer on said silicon substrate covering said polysilicon gate electrodes, said oxide spacers, said source regions, said drain regions, and said silicon nitride layer after annealing said silicon substrate using said first anneal; annealing said silicon substrate and said titanium layer using a second anneal thereby forming titanium silicide over said polysilicon gate electrodes, said drain regions, and said source regions except said layer of silicon nitride; etching away those parts of said titanium layer not changed to titanium silicide, after annealing said silicon substrate and said titanium layer using said second anneal; forming a passivation layer over said silicon substrate after etching away those parts of said titanium layer not changed to titanium silicide; forming contact holes in said passivation layer thereby exposing part of said layer of silicon nitride and parts of said titanium silicide formed over said polysilicon gate electrodes, said source regions, and said drain regions; and filling said contact holes in said passivation layer with conducting material.
Claim 11
Dependent Claim
19 words
The method of claim 8 wherein said titanium layer has a thickness of between about 400 and 800 Angstroms.
Claim 12
Dependent Claim
37 words
The method of claim 8 wherein said beam of nitrogen ions has an energy of between about 30 keV and 80 keV and a beam density of between about 5×10 15 and 1×10 16 ions/cm 2 .
Claim 13
Dependent Claim
28 words
The method of claim 8 wherein said first anneal is at a temperature of between about 650° C. and 710° C. for between about 20 and 60 seconds.
Claim 14
Dependent Claim
28 words
The method of claim 8 wherein said second anneal is at a temperature of between about 800° C. and 900° C. for between about 20 and 60 seconds.
Claim 15
Dependent Claim
34 words
The method of claim 8 wherein said etching away those parts of said titanium layer not changed to titanium silicide uses a 1:1:5 solution of NH 4 OH+H 2 O 2 +H 2 O.
Claim 16
Dependent Claim
25 words
The method of claim 8 wherein said etching away those parts of said titanium layer not changed to titanium silicide does not require a mask.
References Cited (Backward Citations)
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