US5704827A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing apparatus including cloth cartridge connected to turntable
Assignee: Ebara Corp
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Filing: 1995-10-18
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Granted: 1998-01-06
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Expires: 2015-10-18
Abstract
Abstract A polishing apparatus includes a detachable light weight cloth cartridge which shows little deformation under uneven loading during a polishing operation. Either mechanical or non-mechanical fixation of the cloth cartridge to a turntable is achieved. Mechanical fixation involves attaching the cloth cartridge to the turntable at peripheral and center sections of the cloth cartridge. Non-mechanical fixation involves attaching the cloth cartridge to the turntable by a vacuum arrangement. The assembly of the cloth cartridge and the turntable not only produces excellent flatness on polished semiconductor wafers by maintaining a level polishing surface, but also improves the production yield by preventing breakage of wafers during the polishing process.
Inventors
- 👤 Toyomi Nishi
- 👤 Manabu Tsujimura
- 👤 Tamami Takahashi
- 👤 Hiromi Yajima
- 👤 Riichiro Aoki
- 👤 Yukio Imoto
- 👤 Shoichi Kodama
- 👤 Kazuaki Himukai
- 👤 Gisuke Kouno
- 👤 Takanobu Nishimura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 10:51
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/11; B24B37/12; H; H10; H10P; H10P52/00
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
108 words
A polishing apparatus for polishing a surface of an object to a flat and mirror finish, said apparatus comprising: a rotatable turntable; a cloth cartridge including a base member and a polishing cloth bonded to said base member; said cloth cartridge having a peripheral section and a central section detachably connected directly at a peripheral section and at a central section, respectively, of said turntable, such that said cloth cartridge is rotatable with said turntable; supply means for delivering a polishing solution to a polishing surface of said polishing cloth; and pressing means for pressing an object to be polished onto said polishing surface of said polishing cloth.
Claim 2
Dependent Claim
108 words
A polishing apparatus for polishing a surface of an object to a flat and mirror finish, said apparatus comprising: a rotatable turntable; a cloth cartridge including a base member and a polishing cloth bonded to said base member; said cloth cartridge having a peripheral section and a central section detachably connected directly at a peripheral section and at a central section, respectively, of said turntable, such that said cloth cartridge is rotatable with said turntable; supply means for delivering a polishing solution to a polishing surface of said polishing cloth; and pressing means for pressing an object to be polished onto said polishing surface of said polishing cloth.
Claim 3
Dependent Claim
29 words
An apparatus as claimed in claim 1, wherein said peripheral section and said central section of said cloth cartridge comprise peripheral and central portions, respectively, of said base member.
Claim 4
Dependent Claim
27 words
An apparatus as claimed in claim 2, further comprising bolts detachably connecting said peripheral and central portions to said peripheral and central sections, respectively, of said turntable.
Claim 5
Dependent Claim
32 words
An apparatus as claimed in claim 1, wherein said cloth cartridge is disc-shaped and has a ratio t/d of thickness t to diameter d in a range of from 0.005 to 0.05.
Claim 6
Dependent Claim
32 words
An apparatus as claimed in claim 1, wherein said cloth cartridge and said turntable have interfitting structure operable to prevent slipping of said cloth cartridge relative to said turntable during rotation thereof.
Claim 7
Dependent Claim
44 words
An apparatus as claimed in claim 5, wherein said interfitting structure comprises a groove formed in one of said base member and said turntable and a protrusion extending from the other of said base member and said turntable, said protrusion fitting into said groove.
Claim 8
Dependent Claim
22 words
An apparatus as claimed in claim 6, wherein said groove and said protrusion extend peripherally of said base member and said turntable.
Claim 9
Dependent Claim
30 words
An apparatus as claimed in claim 1, further comprising a cover member positionable on said base member to entirely cover said polishing cloth when not in use for polishing operation.
Claim 10
Dependent Claim
20 words
An apparatus as claimed in claim 1, wherein said cloth cartridge has a handle to facilitate detachment and transportation thereof.
Claim 11
Dependent Claim
29 words
An apparatus as claimed in claim 1, wherein said base member is made of a material selected from the group consisting of steel alloys, aluminum alloys and plastic materials.
Claim 12
Dependent Claim
84 words
An assembly to be used as part of a polishing apparatus for polishing a surface of an object to a flat and mirror finish, said assembly comprising: a rotatable turntable; a cloth cartridge including a base member and a polishing cloth bonded to said base member; and said cloth cartridge having a peripheral section and a central section detachably connected directly at a peripheral section and at a central section, respectively, of said turntable, such that said cloth cartridge is rotatable with said turntable.
Claim 13
Dependent Claim
84 words
An assembly to be used as part of a polishing apparatus for polishing a surface of an object to a flat and mirror finish, said assembly comprising: a rotatable turntable; a cloth cartridge including a base member and a polishing cloth bonded to said base member; and said cloth cartridge having a peripheral section and a central section detachably connected directly at a peripheral section and at a central section, respectively, of said turntable, such that said cloth cartridge is rotatable with said turntable.
Claim 14
Dependent Claim
29 words
An assembly as claimed in claim 11, wherein said peripheral section and said central section of said cloth cartridge comprise peripheral and central portions, respectively, of said base member.
Claim 15
Dependent Claim
27 words
An assembly as claimed in claim 12, further comprising bolts detachably connecting said peripheral and central portions to said peripheral and central sections, respectively, of said turntable.
Claim 16
Dependent Claim
32 words
An assembly as claimed in claim 11, wherein said cloth cartridge is disc-shaped and has a ratio t/d of thickness t to diameter d in a range of from 0.005 to 0.05.
Claim 17
Dependent Claim
32 words
An assembly as claimed in claim 11, wherein said cloth cartridge and said turntable have interfitting structure operable to prevent slipping of said cloth cartridge relative to said turntable during rotation thereof.
Claim 18
Dependent Claim
44 words
An assembly as claimed in claim 15, wherein said interfitting structure comprises a groove formed in one of said base member and said turntable and a protrusion extending from the other of said base member and said turntable, said protrusion fitting into said groove.
Claim 19
Dependent Claim
22 words
An assembly as claimed in claim 16, wherein said groove and said protrusion extend peripherally of said base member and said turntable.
Claim 20
Dependent Claim
30 words
An assembly as claimed in claim 11, further comprising a cover member positionable on said base member to entirely cover said polishing cloth when not in use for polishing operation.
Claim 21
Dependent Claim
20 words
An assembly as claimed in claim 11, wherein said cloth cartridge has a handle to facilitate detachment and transportation thereof.
Claim 22
Dependent Claim
29 words
An assembly as claimed in claim 11, wherein said base member is made of a material selected from the group consisting of steel alloys, aluminum alloys and plastic materials.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-01-05 | 2001-07-07 | 2002-01-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-01-05 | 2005-07-07 | 2006-01-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-01-05 | 2009-07-07 | 2010-01-06 | $7700.00 | Window Closed / Lapsed |