US5688365A
Expired / Lapsed
US
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Method of making semiconductor device
Assignee: Seiko Epson Corp
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Filing: 1996-02-21
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Granted: 1997-11-18
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Expires: 2016-02-21
Abstract
Abstract This invention provides a method for making a semiconductor device. The method applies an uniform thickness of an Anti-Reflection Coat (ARC) to improve the dimensional controllability of a resist pattern by sufficiently exposing a resist layer using the ARC without reduction of the throughout. A layer to be etched is formed over a portion of a substrate surface including a step portion. A first resist layer sensitive to a first exposure light is formed on the layer to be etched. The first resist layer has a film thickness equal to or less than 1.5 mu m and reduces a height of the step. The ARC material has a low reflectance relative to a second exposure light and is formed on the first resist layer with a thickness equal to or less than 0.2 mu m. A second resist layer sensitive to a second exposure light is formed on the ARC material. The second resist layer is patterned by the second exposure light. The pattern in the second resist layer is also formed on the ARC material. The first resist layer is exposed to the first exposure light using the pattern as a mask. Thereafter, the first resist layer is developed and used as a mask to etch the layer to be etched.
Inventors
- 👤 Ken Ogoshi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 06:15
CPC Classifications
H; H10; H10P; H10P95/00; H10P50/00; H10P50/73; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2043; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/952
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
365 words
A method for making a semiconductor device, a substrate of the semiconductor device having a first layer and a second layer, the first layer being disposed over a portion of a surface of the substrate forming a first step between a surface level of the substrate and a surface level of the first layer, the second layer being disposed over the first layer and the surface of the substrate covering the first step, the method comprising: forming a first resist layer on the second layer, the first resist layer forming a second step over the first step, a height of the second step being less than a height of the first step by at least about 70%, the first resist layer having a thickness less than about 1.5 μm and being sensitive to a first exposure light; forming a first anti-reflection coat on the first resist layer, the first anti-reflection coat having a thickness less than about 0.2 μm and having a first reflectance value relative to the second exposure light and the first and second layers having a second reflectance value and a third reflectance value, respectively, relative to the second exposure light, the first reflectance value being less than at least one of the second and third reflectance values; forming a second resist layer on the first anti-reflection coat, the second resist layer being sensitive to the second exposure light; forming a first pattern on the second resist layer by exposing the second resist layer to the second exposure light and developing the second resist layer; forming a second pattern on the first anti-reflection coat, the second pattern being substantially the same as the first pattern on the second resist layer; forming a third pattern on the first resist layer by exposing the first resist layer to the first exposure light and developing the first resist layer, the third pattern being formed using the second resist layer and the first anti-reflection coat as a first mask and a second mask, the third pattern being substantially the same pattern as the first pattern on the second resist layer; and etching the second layer using at least the first resist layer as a third mask.
Claim 2
Independent Claim
365 words
A method for making a semiconductor device, a substrate of the semiconductor device having a first layer and a second layer, the first layer being disposed over a portion of a surface of the substrate forming a first step between a surface level of the substrate and a surface level of the first layer, the second layer being disposed over the first layer and the surface of the substrate covering the first step, the method comprising: forming a first resist layer on the second layer, the first resist layer forming a second step over the first step, a height of the second step being less than a height of the first step by at least about 70%, the first resist layer having a thickness less than about 1.5 μm and being sensitive to a first exposure light; forming a first anti-reflection coat on the first resist layer, the first anti-reflection coat having a thickness less than about 0.2 μm and having a first reflectance value relative to the second exposure light and the first and second layers having a second reflectance value and a third reflectance value, respectively, relative to the second exposure light, the first reflectance value being less than at least one of the second and third reflectance values; forming a second resist layer on the first anti-reflection coat, the second resist layer being sensitive to the second exposure light; forming a first pattern on the second resist layer by exposing the second resist layer to the second exposure light and developing the second resist layer; forming a second pattern on the first anti-reflection coat, the second pattern being substantially the same as the first pattern on the second resist layer; forming a third pattern on the first resist layer by exposing the first resist layer to the first exposure light and developing the first resist layer, the third pattern being formed using the second resist layer and the first anti-reflection coat as a first mask and a second mask, the third pattern being substantially the same pattern as the first pattern on the second resist layer; and etching the second layer using at least the first resist layer as a third mask.
Claim 3
Dependent Claim
19 words
The method of claim 1, wherein the second resist layer has a higher resolution than the first resist layer.
Claim 4
Dependent Claim
20 words
The method of claim 1, wherein the first resist layer has a higher light sensitivity than the second resist layer.
Claim 5
Dependent Claim
15 words
The method of claim 1, wherein the first resist layer comprises a light absorbing agent.
Claim 6
Dependent Claim
32 words
The method of claim 1, wherein the step of forming the second pattern on the first anti-reflection coat includes: wet-etching the first anti-reflection coat using the second resist layer as a mask.
Claim 7
Dependent Claim
33 words
The method of claim 1, wherein the step of forming the second pattern on the first anti-reflection coat includes: dry-etching the first anti-reflection coat using the second resist layer as the first mask.
Claim 8
Dependent Claim
44 words
The method of claim 1, further comprising: forming a second anti-reflection coat on the second resist layer for preventing a multiple interference of the second exposure light in the second resist layer when the second resist layer is exposed to the second exposure light.
Claim 9
Dependent Claim
63 words
The method of claim 7, wherein a refractive index N of the second anti-reflection coat relative to the second exposure light is less than a refractive index n of the second resist layer relative to the second exposure light, a film thickness d of the second anti-reflection coat being substantially equal to λ/4N where λ is a wavelength of the second exposure light.
Claim 10
Dependent Claim
77 words
The method of claim 1, further comprising: forming an opaque film over the second resist layer; and exposing a part of the opaque film to the second exposure light to change the part of the opaque film into a transparent portion before forming the first pattern on the second resist layer, wherein the second resist layer is exposed to the second exposure light through the transparent portion when forming the first pattern on the second resist layer.
Claim 11
Dependent Claim
15 words
The method of claim 1, wherein the first exposure light is an excimer laser beam.
Claim 12
Dependent Claim
22 words
The method of claim 1, wherein the second exposure light includes one of an i-ray laser beam and an excimer laser beam.
Claim 13
Independent Claim
370 words
A method for making a semiconductor device, a substrate of the semiconductor device having a first layer and a second layer, the first layer being disposed over a portion of a surface of the substrate forming a first step between a surface level of the substrate and a surface level of the first layer, the second layer being disposed over the first layer and the surface of the substrate covering the first step, the method comprising: forming a first resist layer on the second layer, the first resist layer forming a second step over the first step, a height of the second step being less than a height of the first step by at least about 70%, the first resist layer having a thickness less than about two times the height of the first step and being sensitive to a first exposure light; forming a first anti-reflection coat on the first resist layer having a thickness less than about 0.2 μm, the first anti-reflection coat having a first reflectance value relative to the second exposure light and the first and second layers having a second reflectance value and a third reflectance value, respectively, relative to the second exposure light, the first reflectance value being less than at least one of the second and third reflectance values; forming a second resist layer on the first anti-reflection coat, the second resist layer being sensitive to the second exposure light; forming a first pattern on the second resist layer by exposing the second resist layer to the second exposure light and developing the second resist layer; forming a second pattern on the first anti-reflection coat, the second pattern being substantially the same as the first pattern on the second resist layer; forming a third pattern on the first resist layer by exposing the first resist layer to the first exposure light and developing the first resist layer, the third pattern being formed using the second resist layer and the first anti-reflection coat as a first mask and a second mask, the third pattern being substantially the same pattern as the first pattern on the second resist layer; and etching the second layer using at least the first resist layer as a third mask.
Claim 14
Independent Claim
370 words
A method for making a semiconductor device, a substrate of the semiconductor device having a first layer and a second layer, the first layer being disposed over a portion of a surface of the substrate forming a first step between a surface level of the substrate and a surface level of the first layer, the second layer being disposed over the first layer and the surface of the substrate covering the first step, the method comprising: forming a first resist layer on the second layer, the first resist layer forming a second step over the first step, a height of the second step being less than a height of the first step by at least about 70%, the first resist layer having a thickness less than about two times the height of the first step and being sensitive to a first exposure light; forming a first anti-reflection coat on the first resist layer having a thickness less than about 0.2 μm, the first anti-reflection coat having a first reflectance value relative to the second exposure light and the first and second layers having a second reflectance value and a third reflectance value, respectively, relative to the second exposure light, the first reflectance value being less than at least one of the second and third reflectance values; forming a second resist layer on the first anti-reflection coat, the second resist layer being sensitive to the second exposure light; forming a first pattern on the second resist layer by exposing the second resist layer to the second exposure light and developing the second resist layer; forming a second pattern on the first anti-reflection coat, the second pattern being substantially the same as the first pattern on the second resist layer; forming a third pattern on the first resist layer by exposing the first resist layer to the first exposure light and developing the first resist layer, the third pattern being formed using the second resist layer and the first anti-reflection coat as a first mask and a second mask, the third pattern being substantially the same pattern as the first pattern on the second resist layer; and etching the second layer using at least the first resist layer as a third mask.
Claim 15
Independent Claim
247 words
A method for making a semiconductor device, a substrate of the semiconductor device having a first layer and a second layer, the first layer being disposed over a portion of a surface of the substrate forming a first step between a surface level of the substrate and a surface level of the first layer, the second layer being disposed over the first layer and the surface of the substrate covering the first step, the method comprising: forming a flattening layer on the second layer, the flattening layer forming a second step over the first step, a height of the second step being less than a height of the first step; forming an anti-reflection coat on the flattening layer, the anti-reflection coat having a first reflectance value relative to an exposure light and the first and second layers having a second reflectance value and a third reflectance value, respectively, relative to the exposure light, the first reflectance value being less than at least one of the second and third reflectance values; forming a resist layer on the anti-reflection coat, the resist layer having a thickness greater than the height of the first step and being sensitive to the exposure light; forming a pattern on the resist layer by exposing the resist layer to the exposure light and developing the resist layer; and anisotropically etching the resist layer, the anti-reflection coat, the flattening layer and the second layer using the pattern formed on the resist layer as a mask.
Claim 16
Independent Claim
247 words
A method for making a semiconductor device, a substrate of the semiconductor device having a first layer and a second layer, the first layer being disposed over a portion of a surface of the substrate forming a first step between a surface level of the substrate and a surface level of the first layer, the second layer being disposed over the first layer and the surface of the substrate covering the first step, the method comprising: forming a flattening layer on the second layer, the flattening layer forming a second step over the first step, a height of the second step being less than a height of the first step; forming an anti-reflection coat on the flattening layer, the anti-reflection coat having a first reflectance value relative to an exposure light and the first and second layers having a second reflectance value and a third reflectance value, respectively, relative to the exposure light, the first reflectance value being less than at least one of the second and third reflectance values; forming a resist layer on the anti-reflection coat, the resist layer having a thickness greater than the height of the first step and being sensitive to the exposure light; forming a pattern on the resist layer by exposing the resist layer to the exposure light and developing the resist layer; and anisotropically etching the resist layer, the anti-reflection coat, the flattening layer and the second layer using the pattern formed on the resist layer as a mask.
Claim 17
Dependent Claim
42 words
The method of claim 13, wherein a height of the second step is less than a height of the first step by at least about 70% and a thickness of the flattening layer is equal to or less than about 1.5 μm.
Claim 18
Dependent Claim
44 words
The method of claim 13, wherein a height of the second step is less than a height of the first step by at least about 70% and a thickness of the flattening layer is less than two times the height of the first step.
Claim 19
Dependent Claim
20 words
The method of claim 13, wherein the anti-reflection coat has a thickness equal to or less than about 0.2 μm.
Claim 20
Independent Claim
230 words
A method for making a semiconductor device, a substrate of the semiconductor device having a first layer and a second layer, the first layer being disposed over a portion of a surface of the substrate forming a first step between a surface level of the substrate and a surface level of the first layer, the second layer being disposed over the first layer and the surface of the substrate covering the first step, the method comprising: forming a flattening layer on the second layer, the flattening layer forming a second step over the first step, a height of the second step being less than a height of the first step; forming an anti-reflection coat on the flattening layer, a portion of an exposure light being transmitted through the anti-reflection coat when exposed to the exposure light, the portion of the exposure light transmitted through the anti-reflection coat being confined within the flattening layer; forming a resist layer on the anti-reflection coat, the resist layer having a thickness greater than the height of the first step and being sensitive to the exposure light; forming a pattern on the resist layer by exposing the resist layer to the exposure light and developing the resist layer; and anisotropically etching the resist layer, the anti-reflection coat, the flattening layer and the second layer using the pattern formed on the resist layer as a mask.
Claim 21
Independent Claim
230 words
A method for making a semiconductor device, a substrate of the semiconductor device having a first layer and a second layer, the first layer being disposed over a portion of a surface of the substrate forming a first step between a surface level of the substrate and a surface level of the first layer, the second layer being disposed over the first layer and the surface of the substrate covering the first step, the method comprising: forming a flattening layer on the second layer, the flattening layer forming a second step over the first step, a height of the second step being less than a height of the first step; forming an anti-reflection coat on the flattening layer, a portion of an exposure light being transmitted through the anti-reflection coat when exposed to the exposure light, the portion of the exposure light transmitted through the anti-reflection coat being confined within the flattening layer; forming a resist layer on the anti-reflection coat, the resist layer having a thickness greater than the height of the first step and being sensitive to the exposure light; forming a pattern on the resist layer by exposing the resist layer to the exposure light and developing the resist layer; and anisotropically etching the resist layer, the anti-reflection coat, the flattening layer and the second layer using the pattern formed on the resist layer as a mask.
Claim 22
Dependent Claim
57 words
The method of claim 17, wherein a refractive index N of the anti-reflection coat relative to the exposure light is less than a refractive index n of the resist layer relative to the exposure light, a film thickness d of the anti-reflection coat being substantially equal to λ/2N where λ is a wavelength of the exposure light.
Claim 23
Dependent Claim
16 words
The method of claim 17, wherein the flattening layer is not sensitive to the exposure light.
Claim 24
Dependent Claim
42 words
The method of claim 17, wherein a height of the second step is less than a height of the first step by at least about 70% and a thickness of the flattening layer is equal to or less than about 1.5 μm.
Claim 25
Dependent Claim
44 words
The method of claim 17, wherein a height of the second step is less than a height of the first step by at least about 70% and a thickness of the flattening layer is less than two times the height of the first step.
Claim 26
Dependent Claim
20 words
The method of claim 17, wherein the anti-reflection coat has a thickness equal to or less than about 0.2 μm.
References Cited (Backward Citations)
US4557797A
Cited
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