Complementary modulation-doped field-effect transistors

Claim 2

A semiconductor heterostructure enabling the fabrication of both n-channel and p-channel modulation doped field effect transistors (MODFET) comprising in sequence: a first undoped or lightly p-doped layer of silicon or silicon alloy; a second heavily n-doped layer of silicon or silicon alloy; a third silicon alloy layer; a fourth heavily n-doped layer of silicon or silicon alloy; a fifth undoped or lightly p-doped layer of silicon or silicon alloy; wherein a conduction band well exists in the third layer and a valence band hetero-offset exists between the third layer and each of the second and fourth layers.

Claim 3

The heterostructure of claim 1 wherein the first, second, fourth and fifth layers are silicon.

Claim 4

The heterostructure of claim 2 wherein the silicon alloy of the third layer is Si 1-x Ge x , with 0<x<1.

Claim 5

The heterostructure of claim 2 wherein the silicon alloy of the third layer is SiC.

Claim 6

The heterostructure of claim 3 wherein the second and fourth layers are 50-150 Å thick.

Claim 7

The heterostructure of claim 3 wherein the third layer is 50-500 Å thick.

Claim 8

The heterostructure of claim 3 wherein 0.01≦x≦0.1.

Claim 9

The heterostructure of claim 3 wherein the doping of the second and fourth layers is in the range 5×10 17 to 5×10 19 dopant atoms/cm 3 .

Claim 10

The heterostructure of claim 1 further comprising: a heavily n-doped source region and a heavily n-doped drain region extending from spaced apart locations on the fifth layer of the heterostructure down through at least a portion of the third layer; a source electrode on a surface of the source region; a drain electrode on a surface of the drain region; and a gate electrode located on the fifth layer of the heterostructure between the source and the drain electrodes; thereby forming an n-channel modulation doped field-effect transistor.

Claim 11

The heterostructure of claim 1 further comprising: a heavily p-doped source region and a heavily p-doped drain region, extending from spaced apart locations on the fifth layer of the heterostructure down through at least a portion of the third layer; a source electrode on the surface of the source region; a drain electrode on the surface of the drain region; and a gate electrode located on the fifth layer of the heterostructure between the source and the drain regions; thereby forming a p-channel modulation doped field-effect transistor.

Claim 12

The heterostructure of claim 1 further comprising: a) at least one n-channel MODFET consisting of: a heavily n-doped source region and a heavily n-doped drain region extending from spaced apart locations on the fifth layer of the heterostructure down through at least a portion of the third layer; and a source electrode on the surface of the source region; a drain electrode on the surface of the drain region; a gate electrode located on the fifth layer of the heterostructure between the heavily n-doped source and the drain regions; and b) at least one p-channel MODFET consisting of: a heavily p-doped source region and a heavily p-doped drain region, extending from spaced apart locations on the fifth layer of the heterostructure down through at least a portion of the third layer; a source electrode on the surface of the source region; a drain electrode on the surface of the drain region; a gate electrode located on the fifth layer of the heterostructure between the heavily p-doped source and the drain regions.

Claim 13

A heterostructure according to claim 9 in which the heavily doped source and drain regions extend at least as far as the second layer.

Claim 14

A heterostructure according to claim 10 in which the heavily doped source and drain regions extend at least as far as the second layer.

Claim 15

A heterostructure according to claim 11 in which the heavily doped source and drain regions extend at least as far as the second layer.

Claim 16

A heterostructure according to claim 14 wherein the first, second, fourth and fifth layers are silicon, and wherein the silicon alloy of the third layer is Si 1-x Ge x , with 0.01<x 0.10.

Claim 17

A semiconductor heterostructure enabling the fabrication of both n-channel and p-channel modulation doped field effect transistors (MODFET) comprising a) a sequence of layers comprising: a first undoped or lightly p-doped layer of silicon or silicon alloy; a second heavily n-doped layer of silicon or silicon alloy; a third silicon alloy layer; b) for each MODFET to be fabricated a heavily doped source region and a heavily doped drain region extending through at least a portion of the third layer, the source region and the drain region being of the same conductivity type; a drain electrode on the drain region and a source electrode on the source region; a first heavily n-doped mesa structure layer of silicon or silicon alloy between the drain electrode and the source electrode; a second undoped or lightly p-doped mesa structure layer of silicon or silicon alloy overlying the first mesa structure layer; and a gate electrode on the second mesa structure layer; wherein a conduction band well exists in the third layer and a valence band hetero-offset exists between the third layer and each of the second layer and the first mesa structure layer.

Claim 18

A semiconductor heterostructure enabling the fabrication of both n-channel and p-channel modulation doped field effect transistors (MODFET) comprising a) a sequence of layers comprising: a first undoped or lightly p-doped layer of silicon or silicon alloy; a second heavily n-doped layer of silicon or silicon alloy; a third silicon alloy layer; b) for each MODFET to be fabricated a heavily doped source region and a heavily doped drain region extending through at least a portion of the third layer, the source region and the drain region being of the same conductivity type; a drain electrode on the drain region and a source electrode on the source region; a first heavily n-doped mesa structure layer of silicon or silicon alloy between the drain electrode and the source electrode; a second undoped or lightly p-doped mesa structure layer of silicon or silicon alloy overlying the first mesa structure layer; and a gate electrode on the second mesa structure layer; wherein a conduction band well exists in the third layer and a valence band hetero-offset exists between the third layer and each of the second layer and the first mesa structure layer.

Claim 19

The heterostructure of claim 16 wherein all layers are silicon with the exception of the third layer.

Claim 20

The heterostructure of claim 16 wherein the silicon alloy of the third layer is Si 1-x Ge x , with 0<x<1.

Claim 21

The heterostructure of claim 18 wherein 0.01≦x≦0.01.

Claim 22

The heterostructure of claim 16 comprising at least one said MODFET in which the heavily doped source and drain regions are heavily n-doped thereby forming an n-channel modulation doped field-effect transistor; and at least one said MODFET in which the heavily doped source and drain regions are heavily p-doped thereby forming a p-channel modulation doped field-effect transistor.