US5686342A
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Method for insulating semiconductor elements
Assignee: MagnaChip Semiconductor Ltd
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Filing: 1995-08-04
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Granted: 1997-11-11
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Expires: 2015-08-04
Abstract
Abstract A method for insulating semiconductor elements is disclosed. The method includes steps of: forming a 3-layer semiconductor substrate consisting of an upper conductive layer, a high concentration impurity layer, and a lower conductive layer; carrying out a photo etching to remove the upper conductive layer, thereby opening the high concentration impurity layer; dipping the semiconductor substrate into an aqueous HF solution of a certain ratio, and carrying out an anodizing reaction to convert the high concentration impurity layer into a porous silicon layer; and carrying out a wet oxidation to convert the porous silicon layer into a buried oxide layer.
Inventors
- 👤 Seoksoo Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:35
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10W; H10W10/00; H10W10/01; H10W10/021; H10W10/061; H10W10/10; H10W10/181; H10W10/20; H10P90/191; H10W10/011; H10W10/012; H10W10/13; Y; Y10; Y10S; Y10S438/00; Y10S438/96
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
210 words
A method for insulating semiconductor elements on a semiconductor substrate having top and bottom faces, comprising the steps of: (1) forming first oxide layers on the top and bottom faces of the semiconductor substrate; (2) protecting the top face of the semiconductor substrate with a photoresist material, and removing the first oxide layer formed on the bottom face of the semiconductor substrate; (3) removing the photoresist material from the top face of the semiconductor substrate, implanting high concentration impurity ions into the semiconductor substrate, and thermally diffusing the high concentration impurity ions, wherein the semiconductor substrate comprises an upper conductive layer, a high concentration impurity layer, and a lower conductive layer, wherein the high concentration impurity layer is positioned between the upper conductive layer and the lower conductive layer, and forming a second oxide layer on the upper conductive layer; (4) defining an element isolating region on the semiconductor substrate; (5) removing the second oxide layer in the element isolating region, and removing the upper conductive layer in the element isolating region; (6) carrying out an anodizing reaction, wherein the high concentration impurity layer is converted into a porous silicon layer; and (7) carrying out a wet oxidation, wherein the porous silicon layer is converted into a buried oxide layer.
Claim 2
Independent Claim
210 words
A method for insulating semiconductor elements on a semiconductor substrate having top and bottom faces, comprising the steps of: (1) forming first oxide layers on the top and bottom faces of the semiconductor substrate; (2) protecting the top face of the semiconductor substrate with a photoresist material, and removing the first oxide layer formed on the bottom face of the semiconductor substrate; (3) removing the photoresist material from the top face of the semiconductor substrate, implanting high concentration impurity ions into the semiconductor substrate, and thermally diffusing the high concentration impurity ions, wherein the semiconductor substrate comprises an upper conductive layer, a high concentration impurity layer, and a lower conductive layer, wherein the high concentration impurity layer is positioned between the upper conductive layer and the lower conductive layer, and forming a second oxide layer on the upper conductive layer; (4) defining an element isolating region on the semiconductor substrate; (5) removing the second oxide layer in the element isolating region, and removing the upper conductive layer in the element isolating region; (6) carrying out an anodizing reaction, wherein the high concentration impurity layer is converted into a porous silicon layer; and (7) carrying out a wet oxidation, wherein the porous silicon layer is converted into a buried oxide layer.
Claim 3
Dependent Claim
112 words
The method of claim 1, wherein: at step (1), the semiconductor substrate is subjected to a wet oxidation at a temperature of about 1000° C. for about 30 minutes to form the first oxide layers to a thickness of about 2500 Angstroms on the top and bottom faces of the semiconductor substrate; at step (2), in order to remove the first oxide layer on the bottom face of the semiconductor substrate, the semiconductor substrate with photoresist material protecting the top face is dipped into an about 10:1 aqueous HF solution for about 10 minutes; and at step (3), the high concentration impurity layer is formed to a thickness of about 3 micrometers.
Claim 4
Dependent Claim
66 words
The method of claim 1, wherein: at step (6), the semiconductor substrate is dipped into an aqueous HF solution of about 30 weight % with a voltage of about 3 volts supplied to carry out an anodizing reaction for about 2 minutes; and at step (7), the semiconductor substrate is subjected to a wet oxidation at a temperature of about 900° C. for about 80 minutes.
Claim 5
Dependent Claim
52 words
The method of claim 1, wherein: at step (1), the semiconductor substrate is subjected to a wet oxidation at a temperature of about 1000° C. for about 30 minutes to form the first oxide layers to a thickness of about 2500 Angstroms on the top and bottom faces of the semiconductor substrate.
Claim 6
Dependent Claim
48 words
The method of claim 1, wherein: at step (2), in order to remove the first oxide layer on the bottom face of the semiconductor substrate, the semiconductor substrate with photoresist material protecting the top face is dipped into an about 10:1 aqueous HF solution for about 10 minutes.
Claim 7
Dependent Claim
23 words
The method of claim 1, wherein: at step (3), the high concentration impurity layer is formed to a thickness of about 3 micrometers.
Claim 8
Dependent Claim
42 words
The method of claim 1, wherein: at step (6), the semiconductor substrate is dipped into an aqueous HF solution of about 30 weight % with a voltage of about 3 volts supplied to carry out an anodizing reaction for about 2 minutes.
Claim 9
Dependent Claim
29 words
The method of claim 1, wherein: at step (7), the semiconductor substrate is subjected to a wet oxidation at a temperature of about 900° C. for about 80 minutes.
References Cited (Backward Citations)
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