Patent FR1316205A successfully refreshed from Google Patents.
US5682240A
Expired / Lapsed
US
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Interferometric measurements with multiple light sources
Assignee: Zygo Corp
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Filing: 1996-09-24
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Granted: 1997-10-28
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Expires: 2016-09-24
Abstract
Abstract A method and apparatus for synchronizing the measurements of at least two interferometers (40,41) using at least two light sources (20,22), respectively. Each light source (20,22) provides a single linearly polarized output beam (21,23). Acousto-optic devices (30,31) transform each input beam (21,23) into two orthogonally polarized beams (70,72) separated by a frequency difference determined by an oscillation source (10). The oscillation source (10) drives both acousto-optic devices (30,31) with separate amplifiers (12,13) synchronizing both light sources. The two orthogonally polarized beam pairs (70,72) transverse the interferometers (40,41). The beams from the interferometers (71,73) return to the optical receivers (50,51). The optical receivers (50,51) mix the two return beam pairs (71,73) and send the resultant beat frequency (51,53) to the measurement electronics (60,62). The measurement electronics (60,62) use the oscillation source signal (11) and the beat frequencies (51,53) to determine and accumulate the phase difference. The measurement electronics (60,62) output the accumulated phase difference (61,63).
Inventors
- 👤 Kurt R. Redlitz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 20:47
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/02001; G01B9/02007; G01B9/02002; G01B9/02003; G01B9/02015; G01B9/02027; G01B9/02055; G01B9/02062; G01B9/02067; G01B9/02069; G01B2290/00; G01B2290/70
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
187 words
A system for providing interferometric measurements using multiple synchronized light sources, said system comprising first and second interferometer means; a first light source associated with said first interferometer means, and a second light source associated with said second interferometers means, each of said first and second light sources comprising means for providing an output beam comprised of a pair of orthogonal polarizations separated by a frequency difference, each of said pair of orthogonal polarizations beams transversing said associated interferometers means; means for establishing a first fixed frequency; means for causing said frequency difference between said pair of orthogonal polarizations from said first light source to be tied to said first fixed frequency; means for transmitting a second fixed frequency tied to said first fixed frequency from said first light source to said second light source; and means for causing said frequency difference between said pair of orthogonal polarizations from said second light source to be tied to said first fixed frequency; whereby the measurement of said interferometers using multiple light sources may be synchronized for enabling said interferometric measurements to be made with reduced data age differences.
Claim 2
Independent Claim
187 words
A system for providing interferometric measurements using multiple synchronized light sources, said system comprising first and second interferometer means; a first light source associated with said first interferometer means, and a second light source associated with said second interferometers means, each of said first and second light sources comprising means for providing an output beam comprised of a pair of orthogonal polarizations separated by a frequency difference, each of said pair of orthogonal polarizations beams transversing said associated interferometers means; means for establishing a first fixed frequency; means for causing said frequency difference between said pair of orthogonal polarizations from said first light source to be tied to said first fixed frequency; means for transmitting a second fixed frequency tied to said first fixed frequency from said first light source to said second light source; and means for causing said frequency difference between said pair of orthogonal polarizations from said second light source to be tied to said first fixed frequency; whereby the measurement of said interferometers using multiple light sources may be synchronized for enabling said interferometric measurements to be made with reduced data age differences.
Claim 3
Dependent Claim
22 words
A system in accordance with claim 1 wherein said means for establishing said first fixed frequency comprises a stabilized electronic oscillator means.
Claim 4
Dependent Claim
29 words
A system in accordance with claim 1 wherein said means for transmitting said second fixed frequency from said first light source to said second light source comprises optical means.
Claim 5
Dependent Claim
47 words
A system in accordance with claim 1 wherein each of said light sources comprise a source of a single linearly polarized output beam and an acousto-optic means for transforming said single linearly polarized output beam into said pair of orthogonally polarized beams separated by said frequency difference.
Claim 6
Dependent Claim
15 words
A system in accordance with claim 4 wherein said frequency difference substantially comprises 20 MHz.
Claim 7
Dependent Claim
29 words
A system in accordance with claim 1 wherein said means for transmitting said second fixed frequency from said first light source to said second light source comprises electrical means.
Claim 8
Dependent Claim
27 words
A system in accordance with claim 4 further comprising an oscillation source operatively connected to said acousto-optic means, said frequency difference being determined by said oscillation source.
Claim 9
Dependent Claim
18 words
A system in accordance with claim 7 wherein said oscillation source frequency substantially comprises twice said frequency difference.
Claim 10
Dependent Claim
15 words
A system in accordance with claim 8 wherein said frequency difference substantially comprises 20 MHz.
Claim 11
Dependent Claim
15 words
A system in accordance with claim 1 wherein said frequency difference substantially comprises 20 MHz.
Claim 12
Dependent Claim
32 words
A system in accordance with claim 1 wherein said interferometer system comprises a heterodyne interferometer system operable for simultaneously measuring relative changes in position and time of measurement for multiple measurement axes.
Claim 13
Dependent Claim
15 words
A system in accordance with claim 3 wherein said optical means comprise fiber optic means.
References Cited (Backward Citations)
US4688940A
Cited
US5249030A
Cited
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